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Catalysis-Induced Highly-Stable Interface on Porous Silicon for High-Rate Lithium-Ion Batteries 被引量:1
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作者 Zhuobin Han Phornphimon Maitarad +11 位作者 Nuttapon Yodsin Baogang Zhao Haoyu Ma Kexin Liu Yongfeng Hu Siriporn Jungsuttiwong Yumei Wang Li Lu Liyi Shi Shuai Yuan Yongyao Xia Yingying Lv 《Nano-Micro Letters》 2025年第8期548-563,共16页
Silicon stands as a key anode material in lithium-ion battery ascribing to its high energy density.Nevertheless,the poor rate performance and limited cycling life remain unresolved through conventional approaches that... Silicon stands as a key anode material in lithium-ion battery ascribing to its high energy density.Nevertheless,the poor rate performance and limited cycling life remain unresolved through conventional approaches that involve carbon composites or nanostructures,primarily due to the un-controllable effects arising from the substantial formation of a solid electrolyte interphase(SEI)during the cycling.Here,an ultra-thin and homogeneous Ti doping alumina oxide catalytic interface is meticulously applied on the porous Si through a synergistic etching and hydrolysis process.This defect-rich oxide interface promotes a selective adsorption of fluoroethylene carbonate,leading to a catalytic reaction that can be aptly described as“molecular concentration-in situ conversion”.The resultant inorganic-rich SEI layer is electrochemical stable and favors ion-transport,particularly at high-rate cycling and high temperature.The robustly shielded porous Si,with a large surface area,achieves a high initial Coulombic efficiency of 84.7%and delivers exceptional high-rate performance at 25 A g^(−1)(692 mAh g^(−1))and a high Coulombic efficiency of 99.7%over 1000 cycles.The robust SEI constructed through a precious catalytic layer promises significant advantages for the fast development of silicon-based anode in fast-charging batteries. 展开更多
关键词 Catalytic interface MESOPOROUS Inorganic-rich SEI silicon anode Lithium-ion batteries
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Enhanced Passivation Effect of Tunnel Oxide Prepared by Ozone-Gas Oxidation(OGO)for n-Type Polysilicon Passivated Contact(TOPCon)Solar Cells
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作者 Lei Yang Yali Ou +7 位作者 Xiang Lv Na Lin Yuheng Zeng Zechen Hu Shuai Yuan Jichun Ye Xuegong Yu Deren Yang 《Energy & Environmental Materials》 2025年第1期191-196,共6页
Nowadays,a stack of heavily doped polysilicon(poly-Si)and tunnel oxide(SiO_(x))is widely employed to improve the passivation performance in n-type tunnel oxide passivated contact(TOPCon)silicon solar cells.In this cas... Nowadays,a stack of heavily doped polysilicon(poly-Si)and tunnel oxide(SiO_(x))is widely employed to improve the passivation performance in n-type tunnel oxide passivated contact(TOPCon)silicon solar cells.In this case,it is critical to develop an in-line advanced fabrication process capable of producing high-quality tunnel SiO_(x).Herein,an in-line ozone-gas oxidation(OGO)process to prepare the tunnel SiO_(x) is proposed to be applied in n-type TOPCon solar cell fabrication,which has obtained better performance compared with previously reported in-line plasma-assisted N2O oxidation(PANO)process.In order to explore the underlying mechanism,the electrical properties of the OGO and PANO tunnel SiO_(x) are analyzed by deep-level transient spectroscopy technology.Notably,continuous interface states in the band gap are detected for OGO tunnel SiO_(x),with the interface state densities(D_(it))of 1.2×10^(12)–3.6×10^(12) cm^(-2) eV^(-1) distributed in Ev+(0.15–0.40)eV,which is significantly lower than PANO tunnel SiO_(x).Furthermore,X-ray photoelectron spectroscopy analysis indicate that the percentage of SiO_(2)(Si^(4+))in OGO tunnel SiO_(x) is higher than which in PANO tunnel SiO_(x).Therefore,we ascribe the lower D_(it) to the good inhibitory effects on the formation of low-valent silicon oxides during the OGO process.In a nutshell,OGO tunnel SiO_(x) has a great potential to be applied in n-type TOPCon silicon solar cell,which may be available for global photovoltaics industry. 展开更多
关键词 interface states ozone-gas oxidation silicon solar cells tunnel oxide passivation contact(TOPCon)
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Interface and mechanical degradation mechanisms of the silicon anode in sulfide-based solid-state batteries at high temperatures
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作者 王秋辰 黄昱力 +3 位作者 许晶 禹习谦 李泓 陈立泉 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第8期117-126,共10页
Silicon(Si)is a competitive anode material owing to its high theoretical capacity and low electrochemical potential.Recently,the prospect of Si anodes in solid-state batteries(SSBs)has been proposed due to less solid ... Silicon(Si)is a competitive anode material owing to its high theoretical capacity and low electrochemical potential.Recently,the prospect of Si anodes in solid-state batteries(SSBs)has been proposed due to less solid electrolyte interphase(SEI)formation and particle pulverization.However,major challenges arise for Si anodes in SSBs at elevated temperatures.In this work,the failure mechanisms of Si-Li_(6)PS_(5)Cl(LPSC)composite anodes above 80℃are thoroughly investigated from the perspectives of interface stability and(electro)chemo-mechanical effect.The chemistry and growth kinetics of Lix Si|LPSC interphase are demonstrated by combining electrochemical,chemical and computational characterizations.Si and/or Si–P compound formed at Lix Si|LPSC interface prove to be detrimental to interface stability at high temperatures.On the other hand,excessive volume expansion and local stress caused by Si lithiation at high temperatures damage the mechanical structure of Si-LPSC composite anodes.This work elucidates the behavior and failure mechanisms of Si-based anodes in SSBs at high temperatures and provides insights into upgrading Si-based anodes for application in SSBs. 展开更多
关键词 sulfide electrolytes silicon anodes interface stability degradation kinetics all-solid-state batteries
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Improvement in IBC-silicon solar cell performance by insertion of highly doped crystalline layer at heterojunction interfaces 被引量:3
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作者 Hadi Bashiri Mohammad Azim Karami Shahramm Mohammadnejad 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第10期508-514,共7页
By inserting a thin highly doped crystalline silicon layer between the base region and amorphous silicon layer in an interdigitated back-contact (IBC) silicon solar cell, a new passivation layer is investigated. The... By inserting a thin highly doped crystalline silicon layer between the base region and amorphous silicon layer in an interdigitated back-contact (IBC) silicon solar cell, a new passivation layer is investigated. The passivation layer performance is characterized by numerical simulations. Moreover, the dependence of the output parameters of the solar cell on the additional layer parameters (doping concentration and thickness) is studied. By optimizing the additional passivation layer in terms of doping concentration and thickness, the power conversion efficiency could be improved by a factor of 2.5%, open circuit voltage is increased by 30 mV and the fill factor of the solar cell by 7.4%. The performance enhancement is achieved due to the decrease of recombination rate, a decrease in solar cell resistivity and improvement of field effect passivation at heterojunction interface. The above-mentioned results are compared with reported results of the same conventional interdigitated back-contact silicon solar cell structure. Furthermore, the effect of a-Si:H/c-Si interface defect density on IBC silicon solar cell parameters with a new passivation layer is studied. The additional passivation layer also reduces the sensitivity of output parameter of solar cell to interface defect density. 展开更多
关键词 IBC silicon solar cells interface layer recombination interface defect density
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Effects of dispersion, absorption and interface fluctuation on the reflection spectra of porous silicon microcavity devices 被引量:2
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作者 LI Chun-cai JIA Zhen-hong +1 位作者 HE Lei HUANG Xiao-hui 《Optoelectronics Letters》 EI 2019年第2期89-92,共4页
One problem associated with microcavity devices is the significant difference between the reflection spectra of fabricated porous silicon microcavity(PSM) devices and those obtained by theoretical calculation of ideal... One problem associated with microcavity devices is the significant difference between the reflection spectra of fabricated porous silicon microcavity(PSM) devices and those obtained by theoretical calculation of ideal microcavity devices.To address this problem, studies were carried out to determine the effects of the refractive index dispersion, the absorption of the porous silicon layer and the fluctuation of the dielectric interface on the reflection spectra of PSM devices.The results are in good agreement with those obtained experimentally from the fabricated PSM devices, which provides a theoretical basis for the design of PSM sensors. 展开更多
关键词 interface fluctuatio silicon
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Interface states study of intrinsic amorphous silicon for crystalline silicon surface passivation in HIT solar cell
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作者 肖友鹏 魏秀琴 周浪 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第4期489-493,共5页
Intrinsic hydrogenated amorphous silicon(a-Si:H) film is deposited on n-type crystalline silicon(c-Si) wafer by hotwire chemical vapor deposition(HWCVD) to analyze the amorphous/crystalline heterointerface pass... Intrinsic hydrogenated amorphous silicon(a-Si:H) film is deposited on n-type crystalline silicon(c-Si) wafer by hotwire chemical vapor deposition(HWCVD) to analyze the amorphous/crystalline heterointerface passivation properties.The minority carrier lifetime of symmetric heterostructure is measured by using Sinton Consulting WCT-120 lifetime tester system,and a simple method of determining the interface state density(D_(it)) from lifetime measurement is proposed.The interface state density(D_(it)) measurement is also performed by using deep-level transient spectroscopy(DLTS) to prove the validity of the simple method.The microstructures and hydrogen bonding configurations of a-Si:H films with different hydrogen dilutions are investigated by using spectroscopic ellipsometry(SE) and Fourier transform infrared spectroscopy(FTIR) respectively.Lower values of interface state density(D_(it)) are obtained by using a-Si:H film with more uniform,compact microstructures and fewer bulk defects on crystalline silicon deposited by HWCVD. 展开更多
关键词 amorphous silicon MICROSTRUCTURE hydrogen bonding configurations interface state density
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Hydrolysis-Engineered Robust Porous Micron Silicon Anode for High-Energy Lithium-Ion Batteries
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作者 Mili Liu Jiangwen Liu +7 位作者 Yunqi Jia Chen Li Anwei Zhang Renzong Hu Jun Liu Chengyun Wang Longtao Ma Liuzhang Ouyang 《Nano-Micro Letters》 2025年第12期18-32,共15页
Micro-silicon(Si)anode that features high theoretical capacity and fine tap density is ideal for energy-dense lithiumion batteries.However,the substantial localized mechanical strain caused by the large volume expansi... Micro-silicon(Si)anode that features high theoretical capacity and fine tap density is ideal for energy-dense lithiumion batteries.However,the substantial localized mechanical strain caused by the large volume expansion often results in electrode disintegration and capacity loss.Herein,a microporous Si anode with the SiO_(x)/C layer functionalized all-surface and high tap density(~0.65 g cm^(-3))is developed by the hydrolysis-driven strategy that avoids the common use of corrosive etchants and toxic siloxane reagents.The functionalized inner pore with superior structural stability can effectively alleviate the volume change and enhance the electrolyte contact.Simultaneously,the outer particle surface forms a continuous network that prevents electrolyte parasitic decomposition,disperses the interface stress of Si matrix and facilitates electron/ion transport.As a result,the micron-sized Si anode shows only~9.94 GPa average stress at full lithiation state and delivers an impressive capacity of 901.1 mAh g^(-1)after 500 cycles at 1 A g^(-1).It also performs excellent rate performance of 1123.0 mAh g^(-1)at 5 A g^(-1)and 850.4 at 8 A g^(-1),far exceeding most of reported literatures.Furthermore,when paired with a commercial LiNi_(0.8)Co_(0.1)Mn_(0.1)O_(2),the pouch cell demonstrates high capacity and desirable cyclic performance. 展开更多
关键词 Micro-sized silicon anode Pore structure Functionalized SiO_(x)/C interface Long-term lithium-ion batteries
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Thermal Conductivity of Carbon/Carbon Composites with the Fiber/Matrix Interface Modified by Silicon Carbide Nanofibers
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作者 Jie Chen Xiang Xiong Peng Xiao 《Advances in Chemical Engineering and Science》 2016年第4期515-524,共10页
Silicon carbide nanofibers grew on the surface of carbon fibers of a unidirectional carbon preform by CCVD and then chemical vapor infiltration was used to densify the preform to get the SiCNF-C/C composite. The effec... Silicon carbide nanofibers grew on the surface of carbon fibers of a unidirectional carbon preform by CCVD and then chemical vapor infiltration was used to densify the preform to get the SiCNF-C/C composite. The effects of silicon carbide nanofibers on the microstructure of the pyrolytic carbon and the thermal conductivity of the SiCNF-C/C composite were investigated. Results show that silicon carbide nanofibers on the surface of carbon fibers induce the deposition of high texture pyrolytic carbon around them. The interface bonding between carbon fibers and pyrolytic carbon is well adjusted. So the efficiency of heat transfer in the interface of the composite is well enhanced. The thermal conductivity of the SiCNF-C/C composite is greater than that of the C/C composite, especially the thermal conductivity perpendicular to the fiber axis. 展开更多
关键词 silicon Carbide Nanofiber Chemical Vapor Infiltration interface Bonding Thermal Property
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Fabrication of n^+ Polysilicon Ohmic Contacts with a Heterojunction Structure to n-Type 4H-Silicon Carbide
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作者 郭辉 冯倩 +2 位作者 汤晓燕 张义门 张玉明 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第4期637-640,共4页
Polysilicon ohmic contacts to n-type 4H-SiC have been fabricated. TLM (transfer length method) test patterns with polysilicon structure are formed on n-wells created by phosphorus ion (P^+) implantation into a Si... Polysilicon ohmic contacts to n-type 4H-SiC have been fabricated. TLM (transfer length method) test patterns with polysilicon structure are formed on n-wells created by phosphorus ion (P^+) implantation into a Si-faced p-type 4H-SiC epilayer. The polysilicon is deposited using low-pressure chemical vapor deposition (LPCVD) and doped by phosphorous ions implantation followed by diffusion to obtain a sheet resistance of 22Ω/□. The specific contact resistance pc of n^+ polysilicon contact to n-type 4H-SiC as low as 3.82 × 10^-5Ω· cm^2 is achieved. The result for sheet resistance Rsh of the phosphorous ion implanted layers in SiC is about 4.9kΩ/□. The mechanisms for n^+ polysilicon ohmic contact to n-type SiC are discussed. 展开更多
关键词 ohmic contact silicon carbide polysilicon specific contact resistance P^+ ion implantation
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Interfacial design of silicon/carbon anodes for rechargeable batteries:A review 被引量:10
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作者 Quanyan Man Yongling An +3 位作者 Chengkai Liu Hengtao Shen Shenglin Xiong Jinkui Feng 《Journal of Energy Chemistry》 SCIE EI CAS CSCD 2023年第1期576-600,I0014,共26页
Silicon(Si)has been studied as a promising alloying type anode for lithium-ion batteries due to its high specific capacity,low operating potential and abundant resources.Nevertheless,huge volume expansion during alloy... Silicon(Si)has been studied as a promising alloying type anode for lithium-ion batteries due to its high specific capacity,low operating potential and abundant resources.Nevertheless,huge volume expansion during alloying/dealloying processes and low electronic conductivity of Si anodes restrict their electrochemical performance.Thus,carbon(C)materials with special physical and chemical properties are applied in Si anodes to effectively solve these problems.This review focuses on current status in the exploration of Si/C anodes,including the lithiation mechanism and solid electrolyte interface formation,various carbon sources in Si/C anodes,such as traditional carbon sources(graphite,pitch,biomass),and novel carbon sources(MXene,graphene,MOFs-derived carbon,graphdiyne,etc.),as well as interfacial bonding modes of Si and C in the Si/C anodes.Finally,we summarize and prospect the selection of carbonaceous materials,structural design and interface control of Si/C anodes,and application of Si/C anodes in all-solid-state lithium-ion batteries and sodium-ion batteries et al.This review will help researchers in the design of novel Si/C anodes for rechargeable batteries. 展开更多
关键词 silicon/carbon anodes Lithium-ion batteries interfacial reaction Carbon sources interface bonding
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Stimulated photoluminescence emission and trap states in Si/SiO_2 interface formed by irradiation of laser 被引量:2
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作者 黄伟其 许丽 +5 位作者 王海旭 金峰 吴克跃 刘世荣 秦朝建 秦水介 《Chinese Physics B》 SCIE EI CAS CSCD 2008年第5期1817-1820,共4页
Stimulated photoluminescence (PL) emission has been observed from an oxide structure of silicon when optically excited by a radiation of 514nm laser. Sharp twin peaks at 694 and 692nm are dominated by stimulated emi... Stimulated photoluminescence (PL) emission has been observed from an oxide structure of silicon when optically excited by a radiation of 514nm laser. Sharp twin peaks at 694 and 692nm are dominated by stimulated emission, which can be demonstrated by its threshold behaviour and linear transition of emission intensity as a function of pump power. The oxide structure is formed by laser irradiation on silicon and its annealing treatment. A model for explaining the stimulated emission is proposed, in which the trap states of the interface between an oxide of silicon and porous nanocrystal play an important role. 展开更多
关键词 interface states stimulated emission oxide structure of silicon laser irradiation
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Numerical simulation of chemical vapor deposition reaction in polysilicon reduction furnace 被引量:1
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作者 夏小霞 王志奇 刘斌 《Journal of Central South University》 SCIE EI CAS CSCD 2016年第1期44-51,共8页
Three-dimensional model of chemical vapor deposition reaction in polysilicon reduction furnace was established by considering mass, momentum and energy transfer simultaneously. Then, CFD software was used to simulate ... Three-dimensional model of chemical vapor deposition reaction in polysilicon reduction furnace was established by considering mass, momentum and energy transfer simultaneously. Then, CFD software was used to simulate the flow, heat transfer and chemical reaction process in reduction furnace and to analyze the change law of deposition characteristic along with the H_2 mole fraction, silicon rod height and silicon rod diameter. The results show that with the increase of H_2 mole fraction, silicon growth rate increases firstly and then decreases. On the contrary, SiHCl_3 conversion rate and unit energy consumption decrease firstly and then increase. Silicon production rate increases constantly. The optimal H_2 mole fraction is 0.8-0.85. With the growth of silicon rod height, Si HCl3 conversion rate, silicon production rate and silicon growth rate increase, while unit energy consumption decreases. In terms of chemical reaction, the higher the silicon rod is, the better the performance is. In the view of the top-heavy situation, the actual silicon rod height is limited to be below 3 m. With the increase of silicon rod diameter, silicon growth rate decreases firstly and then increases. Besides, SiHCl_3 conversion rate and silicon production rate increase, while unit energy consumption first decreases sharply, then becomes steady. In practice, the bigger silicon rod diameter is more suitable. The optimal silicon rod diameter must be over 120 mm. 展开更多
关键词 polysilicon reduction furnace chemical vapor deposition silicon growth rate
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Forward and reverse electron transport properties across a CdS/Si multi-interface nanoheterojunction 被引量:2
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作者 李勇 王伶俐 +4 位作者 王小波 闫玲玲 苏丽霞 田永涛 李新建 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第8期502-507,共6页
The electron transport behavior across the interface plays an important role in determining the performance of op- toelectronic devices based on heterojunctions. Here through growing CdS thin film on silicon nanoporou... The electron transport behavior across the interface plays an important role in determining the performance of op- toelectronic devices based on heterojunctions. Here through growing CdS thin film on silicon nanoporous pillar array, an untraditional, nonplanar, and multi-interface CdS/Si nanoheterojunction is prepared. The current density versus voltage curve is measured and an obvious rectification effect is observed. Based on the fitting results and model analyses on the forward and reverse conduction characteristics, the electron transport mechanism under low forward bias, high forward bias, and reverse bias are attributed to the Ohmic regime, space-charge-limited current regime, and modified Poole-Frenkel regime respectively. The forward and reverse electrical behaviors are found to be highly related to the distribution of inter- facial trap states and the existence of localized electric field respectively. These results might be helpful for optimizing the preparing procedures to realize high-performance silicon-based CdS optoelectronic devices. 展开更多
关键词 HETEROJUNCTION multi-interface nanoheterojunction electron transport silicon nanoporous pillararray (Si-NPA) CdS/Si-NPA
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Development of Some Fundamental Research of SiC_W/Al Composites in HIT PartⅠ Microstructure and SiC/Al Interface of SiC_W/Al Composites
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作者 Lin GENG Congkai YAO Dept.of Metals and Technology,Harbin Institute of Technology (HIT),Harbin,150006,China 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 1993年第6期431-436,共6页
The microstructure of SiC whisker reinforced aluminium alloy (SiC_w/Al) composite is reviewed,and the SiC-Al interface in SiC_w/Al composite is especially discussed,The main contents are morphology of the aluminium ma... The microstructure of SiC whisker reinforced aluminium alloy (SiC_w/Al) composite is reviewed,and the SiC-Al interface in SiC_w/Al composite is especially discussed,The main contents are morphology of the aluminium matrix in SiC_w/Al composite;microstructures and defects of SiC whiskers in SiC_w/Al composite and bonding mechanisms of the SiC-Al interface in SiC_w/Al com- posite. 展开更多
关键词 silicon carbide aluminium WHISKER composite interface
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Influence of interface states, conduction band offset, and front contact on the performance of a-SiC:H(n)/c-Si(p)heterojunction solar cells
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作者 乔治 冀建利 +2 位作者 张彦立 刘虎 李同锴 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第6期534-540,共7页
P-type silicon heterojunction(SHJ) solar cells with a-SiC:H(n) emitters were studied by numerical computer simulation in this paper. The influence of interface states, conduction band offset, and front contact on... P-type silicon heterojunction(SHJ) solar cells with a-SiC:H(n) emitters were studied by numerical computer simulation in this paper. The influence of interface states, conduction band offset, and front contact on the performance of a-SiC:H(n)/c-Si(p) SHJ solar cells was investigated systematically. It is shown that the open circuit voltage(Voc) and fill factor(F F) are very sensitive to these parameters. In addition, by analyzing equilibrium energy band diagram and electric field distribution, the influence mechanisms that interface states, conduction band offset, and front contact impact on the carrier transport, interface recombination and cell performance were studied in detail. Finally, the optimum parameters for the a-SiC:H(n)/c-Si(p) SHJ solar cells were provided. By employing these optimum parameters, the efficiency of SHJ solar cell based on p-type c-Si was significantly improved. 展开更多
关键词 silicon heterojunction solar cells interface states band offset front contact
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Investigating the failure mechanism of solid electrolyte interphase in silicon particles from an electrochemical-mechanical coupling perspective
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作者 Junjie Ding Xueyan Li +1 位作者 Lili Gong Peng Tan 《Advanced Powder Materials》 2024年第4期27-35,共9页
Silicon is considered one of the most promising anode materials owing to its high theoretical energy density,however,the volume expansion/contraction during electrochemical lithiation/delithiation cycles leads to inst... Silicon is considered one of the most promising anode materials owing to its high theoretical energy density,however,the volume expansion/contraction during electrochemical lithiation/delithiation cycles leads to instability of the solid electrolyte interphase(SEI),which ultimately results in capacity degradation.Herein,the local stress and deformation evolution status of an SEI layer on an anode particle are investigated through a quantitative electrochemical-mechanical model.The impacts of structural uniformity,mechanical strength,and operating conditions on the stability of the SEI layer are investigated in detail.The simulation results demonstrate that when the silicon particle radius decreases from 800 nm to 600 and 400 nm,the failure time increases by 29%and 65%,respectively,of the original failure time;When the structural defect depth ratio is reduced from 0.6 to 0.4 and 0.2,the failure time increases by 72%and 132%,respectively;For the discharge rate,the condition at 0.1 C has 34%and 139%longer time to failure than that at 0.2 C and 0.3 C,respectively.This work provides insight into the rational design of stable SEI layers and sheds light on possible methods for constructing silicon-based lithium-ion batteries with longer cycling lives. 展开更多
关键词 Solid electrolyte interface silicon electrode Structural failure Lithium-ion battery Modeling and simulation
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多晶硅/硅界面处理工艺对硅光敏晶体管性能影响的比较研究
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作者 黄绍春 黄烈云 +2 位作者 彭金萍 郭培 向勇军 《半导体光电》 北大核心 2025年第1期70-74,共5页
研究了多晶硅/硅发射极结构光敏晶体管的制备工艺。为分析多晶硅/硅界面质量对芯片性能的影响,通过对比低压化学气相淀积(LPCVD)多晶硅前不同表面预处理方案(RCA清洗和稀释氢氟酸漂洗)以及多晶硅淀积后不同温度退火工艺,系统研究了光敏... 研究了多晶硅/硅发射极结构光敏晶体管的制备工艺。为分析多晶硅/硅界面质量对芯片性能的影响,通过对比低压化学气相淀积(LPCVD)多晶硅前不同表面预处理方案(RCA清洗和稀释氢氟酸漂洗)以及多晶硅淀积后不同温度退火工艺,系统研究了光敏晶体管直流增益(hFE)和发射极接触电阻(re)的变化情况。实验结果表明,采用稀释氢氟酸漂洗工艺可有效降低增益对偏置电压的敏感性;适当提高退火温度(900~1100℃)能够使发射极接触电阻率降低,同时显著改善芯片关键性能参数的一致性,但会导致峰值电流增益降低。该研究为优化光敏晶体管界面工程提供了重要工艺参考。 展开更多
关键词 硅光敏晶体管 多晶硅/硅界面 RCA清洗 电流增益 发射极接触电阻
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高精度MEMS硅陀螺仪接口ASIC设计
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作者 张欢 陈伟平 +3 位作者 张文博 王一行 付强 尹亮 《遥测遥控》 2025年第3期42-50,共9页
为满足惯性导航、自动驾驶等领域的应用需求,实现微电子机械系统(MEMS)硅陀螺仪向高精度、数字化和微小型化的方向发展,本文基于0.35μm BCD工艺(双极型-互补金属氧化物半导体-双扩散金属氧化物半导体工艺),采用单芯片集成方式,设计并... 为满足惯性导航、自动驾驶等领域的应用需求,实现微电子机械系统(MEMS)硅陀螺仪向高精度、数字化和微小型化的方向发展,本文基于0.35μm BCD工艺(双极型-互补金属氧化物半导体-双扩散金属氧化物半导体工艺),采用单芯片集成方式,设计并实现了一款具有数字化输出的MEMS硅陀螺仪接口电路。采用基于噪声自激的闭环驱动方案,使陀螺仪在驱动方向上实现简谐振动。检测电路使用低噪声电容-电压(C/V)转换电路,将检测模态位移信号转换为电压信号。信号处理通过开关相敏解调技术进行精确解调,并结合低通滤波处理,有效抑制系统噪声,从而获得低噪声的模拟角速度输出信号。为了实现硅陀螺角速度的数字化输出,设计了集成的四阶全前馈Sigma-Delta(ΣΔ)模数转换器(ADC),将模拟角速度信号转换为数字信号。芯片测试结果表明:ΣΔ调制器的动态范围达到110 dB,低频噪底约为-120 dB。陀螺整机的量程为±200(°)/s,标度因数为21310 LSB/((°)/s)(最低有效位每度每秒),非线性误差为178×10^(-6),零偏不稳定性为0.259(°)/h,角度随机游走为0.0287(°)/√h(度每平方根小时)。该芯片面积为4.3 mm×4.3 mm。通过采用单片集成的接口ASIC(专用集成电路)替代传统的PCB(印制电路板)板级系统,显著提高了系统集成度,成功满足了MEMS硅陀螺微小型化的需求,推动了其在高精度数字化应用中的发展。 展开更多
关键词 MEMS 硅陀螺仪 接口ASIC ΣΔADC 数字输出
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高比能硅基负极结构调控及界面设计
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作者 施利毅 许跃峰 《上海大学学报(自然科学版)》 北大核心 2025年第5期797-812,共16页
硅基负材料作为极具潜力的下一代负极候选材料,其理论比容量高达4200 mAh·g^(−1),远超当前商用石墨负极材料(比容量仅为372 mAh·g^(−1)).然而,硅基负极本征导电性差、巨大的体积膨胀效应以及表面副反应严重等问题,导致硅基负... 硅基负材料作为极具潜力的下一代负极候选材料,其理论比容量高达4200 mAh·g^(−1),远超当前商用石墨负极材料(比容量仅为372 mAh·g^(−1)).然而,硅基负极本征导电性差、巨大的体积膨胀效应以及表面副反应严重等问题,导致硅基负极循环稳定性差,且在高倍率等条件下性能不佳.在电池循环过程中,硅界面不稳定固体电解质界面(solid electrolyte interphase,SEI)膜的形成会严重导致电池内部极化增强、容量快速衰减以及循环寿命显著缩短,成为制约其应用的关键瓶颈.本文围绕硅材料现存问题,从结构调控与界面设计两方面介绍高比能硅基负极材料的构建,总结阐述了高比能硅基负极的设计思路与构建方法.通过深入研究硅负极材料和结构的设计原理,开发新材料、新技术和新工艺,解决上述问题,推动硅基负极向高倍率、长寿命、高安全性、宽温域的方向发展. 展开更多
关键词 硅基负极 结构调控 界面设计
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椰油酰胺丙基甜菜碱对多晶硅栅极化学机械平坦化的影响
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作者 刘德正 周建伟 +5 位作者 罗翀 王辰伟 王雪洁 张国林 田雨暄 孙纪元 《润滑与密封》 北大核心 2025年第5期150-157,共8页
为提高多晶硅化学机械抛光(CMP)过程中对SiO_(2)和Si_(3)N_(4)的去除速率选择比,通过抛光实验、接触角分析、XPS光电子能谱分析和AFM测试等手段,分析了椰油酰胺丙基甜菜碱(CAB)对多晶硅CMP的影响。结果表明:CAB的加入降低了抛光过程中... 为提高多晶硅化学机械抛光(CMP)过程中对SiO_(2)和Si_(3)N_(4)的去除速率选择比,通过抛光实验、接触角分析、XPS光电子能谱分析和AFM测试等手段,分析了椰油酰胺丙基甜菜碱(CAB)对多晶硅CMP的影响。结果表明:CAB的加入降低了抛光过程中的温度和摩擦力;当CAB质量分数为0.03%时,多晶硅去除速率降低至151.5 nm/min,降幅约为15.8%,但CAB提高了抛光液的润湿性,使多晶硅CMP后的表面粗糙度降至0.93 nm;在碱性条件下,由于多晶硅、二氧化硅、氮化硅表面ζ电位的差异,CAB通过氢键优先吸附在SiO_(2)和Si_(3)N_(4)表面,从而将二者的去除速率抑制至1 nm/min左右,此时多晶硅对SiO_(2)和Si_(3)N_(4)的去除速率选择比均达到120∶1以上,满足了实际生产要求。 展开更多
关键词 椰油酰胺丙基甜菜碱 多晶硅 二氧化硅 氮化硅 化学机械抛光 选择比
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