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Recent process of plasma effect in organic solar cells
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作者 Mei Wang Shuo Han +6 位作者 Wei Wu Zhuowei Li Guanhua Ren Chunyu Liu Wenbin Han Liang Shen Wenbin Guo 《Journal of Energy Chemistry》 SCIE EI CAS CSCD 2021年第1期181-190,I0006,共11页
Due to the compromise between exciton diffusion length and light absorption, the active layer thickness of organic solar cells(OSCs) is limited. As we all know, embedding metal nanostructures into OSCs can improve the... Due to the compromise between exciton diffusion length and light absorption, the active layer thickness of organic solar cells(OSCs) is limited. As we all know, embedding metal nanostructures into OSCs can improve the performance of OSCs by triggering surface plasma resonance, scattering, and other effect without increasing the physical thickness of light trapping layer. Besides, the plasma response and other roles will distinguish when metal nanostructures are embedded into different position of OSCs, which are equally important to the performance of OSCs. In this paper, the enhancement mechanisms of various metal nanostructures in different layers of OSCs are summarized from the electricity and optics aspects.This review also further highlights the progress of plasma effect and their working mechanism in OSCs,and it is expected to provide more perspective of plasma effect for performance enhancement of OSCs. 展开更多
关键词 plasma effect Organic solar cells Metal nanostructures Scattering effect Light absorption
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Diagnostic and modelling investigation on the ion acceleration and plasma throttling effects in a dualemitter hollow cathode micro-thruster 被引量:5
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作者 Zhongxi NING Chenguang LIU +3 位作者 Ximing ZHU Yanfei WANG Bingjian AN Daren YU 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2021年第12期85-98,共14页
Hollow cathode discharges are widely used as neutralizers for the electric propulsion systems and recently developed into micro-thrusters for the small satellites.In this work,a dualemitter hollow cathode thruster is ... Hollow cathode discharges are widely used as neutralizers for the electric propulsion systems and recently developed into micro-thrusters for the small satellites.In this work,a dualemitter hollow cathode thruster is developed,which can be operated in two different modes—the neutralizer mode and the micro-thruster mode.For characterizing this kind of new device,the Langmuir probe,Faraday probe,and retarding potential analyzer are used to determine the electron temperature,electron density,ion flux,and ion energy distribution function.The operating parameters,including the thrust,and specific impulse,are also measured.A two-dimensional self-consistent extended fluid model is employed to calculate the spatial distribution of plasma parameters and the fluid field of electrons in the region around the emitters.By comparing the diagnostic and modelling results,it is found that the change in the electric field and ionization zone is the essential reason for the different performances of the device in the neutralizer and micro-thruster modes.Variation in the electric field leads to an ion acceleration effect in the micro-thruster mode;moving of the ionization zone raises the plasma pressure in the orifice region of the hollow cathode,and thus leads to enhanced plasma throttling and gas expanding effects.By analyzing the above mechanisms,the possible methods for improving this kind of hollow cathode micro-thruster are discussed. 展开更多
关键词 Extended fluid model Hollow cathodes MICRO-THRUSTER plasma contactor plasma throttling effect
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Effects of a liquid lithium curtain as the first wall in a fusion reactor plasma 被引量:1
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作者 李承跃 邓柏权 J.P.Allain 《Chinese Physics B》 SCIE EI CAS CSCD 2007年第11期3312-3318,共7页
This paper explores the effect of a liquid lithium curtain on fusion reactor plasma, such curtain is utilized as the first wall for the engineering outline design of the Fusion Experimental Breeder (FEB-E). The rela... This paper explores the effect of a liquid lithium curtain on fusion reactor plasma, such curtain is utilized as the first wall for the engineering outline design of the Fusion Experimental Breeder (FEB-E). The relationships between the surface temperature of a liquid lithium curtain and the effective plasma charge, fuel dilution and fusion power production have been derived. Results indicate that under normal operation, the evaporation of liquid lithium does not seriously affect the effective plasma charge, but effects on fuel dilution and fusion power are more sensitive. As an example, it has investigated the relationships between the liquid lithium curtain flow velocity and the rise of surface temperature based on operation scenario II of the FEB-E design with reversed shear configuration and high power density. Results show that even if the liquid lithium curtain flow velocity is as low as 0.5 m/s, the effects of evaporation from the liquid lithium curtain on plasma are negligible. In the present design, the sputtering of liquid lithium curtain and the particle removal effects of the divertor are not yet considered in detail. Further studies are in progress, and in this work implication of lithium erosion and divertor physics on fusion reactor operation are discussed. 展开更多
关键词 liquid lithium curtain first wall fuel dilution effective plasma charge plasma-wall interaction
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Enhanced effect of plasma on catalytic reduction of CO2 to CO with hydrogen over Au/CeO2 at low temperature 被引量:3
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作者 Xiaobing Zhu Jian-Hao Liu +3 位作者 Xiao-Song Li Jing-Lin Liu Xin Qu Ai-Min Zhu 《Journal of Energy Chemistry》 SCIE EI CAS CSCD 2017年第3期488-493,共6页
In terms of the reaction of COreduction to CO with hydrogen, COconversion is very low at low temperature due to the limitation of thermodynamic equilibrium(TE). To overcome this limitation, plasma catalytic reductio... In terms of the reaction of COreduction to CO with hydrogen, COconversion is very low at low temperature due to the limitation of thermodynamic equilibrium(TE). To overcome this limitation, plasma catalytic reduction of COto CO in a catalyst-filled dielectric barrier discharge(DBD) reactor is studied. An enhanced effect of plasma on the reaction over Au/CeOcatalysts is observed. For both the conventionally catalytic(CC) and plasma catalytic(PC, Pin= 15 W) reactions under conditions of 400 °C, H/CO= 1,200 SCCM, GHSV = 12,000 mL·gcat·h, COconversions over Au/CeOreach 15.4% and 25.5% due to the presence of Au, respectively, however, those over CeOare extremely low and negligible. Moreover,COconversion over Au/CeOin the PC reaction exceeds 22.4% of the TE conversion. Surface intermediate species formed on the catalyst samples during the reactions are determined by in-situ temperatureprogrammed decomposition(TPD) technique. Interestingly, it disclosed that in the PC reaction, the formation of formate intermediate is enhanced by plasma, and the acceleration by plasma in the decomposition of formate species is much greater than that in the formation of formate species on Au/CeO. Enhancement factor is introduced to quantify the enhanced effect of plasma. Lower reactor temperature, higher gas hourly space velocity(GHSV), and lower molar ratio of H/COwould be associated with larger enhancement factor. 展开更多
关键词 CO2 reduction plasma catalysis Enhanced effect
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Influence of air pressure on mechanical effect of laser plasma shock wave 被引量:3
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作者 章玉珠 王广安 +3 位作者 朱金荣 沈中华 倪晓武 陆建 《Chinese Physics B》 SCIE EI CAS CSCD 2007年第9期2752-2756,共5页
The influence of air pressure on mechanical effect of laser plasma shock wave in a vacuum chamber produced by a Nd:YAG laser has been studied. The laser pulses with pulse width of 10ns and pulse energy of about 320mJ... The influence of air pressure on mechanical effect of laser plasma shock wave in a vacuum chamber produced by a Nd:YAG laser has been studied. The laser pulses with pulse width of 10ns and pulse energy of about 320mJ at 1.06μm wavelength is focused on the aluminium target mounted on a ballistic pendulum, and the air pressure in the chamber changes from 2.8 × 10^ 3 to 1.01 × 10^5pa. The experimental results show that the impulse coupling coefficient changes as the air pressure and the distance of the target from focus change. The mechanical effects of the plasma shock wave on the target are analysed at different distances from focus and the air pressure. 展开更多
关键词 mechanical effect plasma shock wave impulse coupling coefficient air pressure
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Resonant magneto-optical Kerr effect induced by hybrid plasma modes in ferromagnetic nanovoids 被引量:1
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作者 张霞 石磊 +2 位作者 李晶 夏云杰 周仕明 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第11期489-497,共9页
With nanovoids buried in Co films, resonant structures were observed in spectra of polar magneto-optical Kerr effect(MOKE), where both a narrow bandwidth and high intensity were acquired. Through changing the thickn... With nanovoids buried in Co films, resonant structures were observed in spectra of polar magneto-optical Kerr effect(MOKE), where both a narrow bandwidth and high intensity were acquired. Through changing the thickness of Co films and the lattice of voids, different optical modes were introduced. For a very shallow array of voids, the resonant MOKE was induced by Ag plasma edge resonance, for deeper ones, hybrid plasma modes, such as void plasmons in the voids, surface lattice plasmons between the voids, and the co-action of them, etc. resulted in resonant MOKE. We found that resonant MOKE resulted from the void plasmons resonance which possesses the narrowest bandwidth for the lowest absorption of voids. The simulated electromagnetic field(EF) distribution consolidated different effects of these three optical modes on resonant MOKE modulation. Such resonant polar MOKE possesses high sensitivity, which might pave the way to on-chip MO devices. 展开更多
关键词 magneto-optical Kerr effect surface plasma polariton nanocavity mode surface lattice resonance
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EFFECT OF ACUPUNCTURE ON PLASMA GLUCOSE LEVEL IN HUMAN VOLUNTEERS 被引量:1
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作者 Amit Kumar Chakraborty Mrigendranath Gantait Biswapati Mukherjee 《World Journal of Acupuncture-Moxibustion》 2006年第4期24-27,共4页
Objective To observe the changes of plasma glucose level (PGL) in human volunteers after acupuncture. Methods Seventy-seven human volunteers were taken up from the acupuncture clinic. All of them were non-diabetic s... Objective To observe the changes of plasma glucose level (PGL) in human volunteers after acupuncture. Methods Seventy-seven human volunteers were taken up from the acupuncture clinic. All of them were non-diabetic subjects. Electroacupuncture at acupoints Zhongwan (中脘 CV 12) and Guanyuan (关元 CV 4) was given for 20 minutes. Venous blood was collected before acupuncture and 10 minutes after completion of acupuncture. All cases were at four hours abstinence from food before doing acupuncture. Results Plasma glucose level varied 5 mg% or more in 62 cases (80.51%) and only those were considered for computation. PGL increased in cases who had generally plasma glucose level below 90 mg% before acupuncture; and PGL decreased in cases who had plasma glucose 90 mg% or above. In 10 control cases there was no variation of the considerable level of 5 mg% in any case. Conclusion Bi-directional variation of PGL after acupuncture indicates that acupuncture can be used to maintain optimum PGL through endogenous mechanism, suggesting that it is applicable in controlling hyperglycemia in diabetes rnellitus patients. 展开更多
关键词 Acupuncture efficacy plasma glucose Bi-directional effect of acupuncture Diabetes
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The effect of gas additives on reactive species and bacterial inactivation by a helium plasma jet 被引量:3
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作者 Han XU Chen CHEN +5 位作者 Dingxin LIU Weitao WANG Wenjie XIA Zhijie LIU Li GUO M G KONG 《Plasma Science and Technology》 SCIE EI CAS CSCD 2019年第11期68-76,共9页
In this paper,the influences of gas doping(O2,N2,Air)on the concentrations of reactive species and bactericidal effects induced by a He plasma jet are studied.Firstly,results show that gas doping causes an increase in... In this paper,the influences of gas doping(O2,N2,Air)on the concentrations of reactive species and bactericidal effects induced by a He plasma jet are studied.Firstly,results show that gas doping causes an increase in voltage and a decrease in current compared with the pure He discharge under the same discharge power,which might be attributed to the different chemical characteristics of O2 and N2 and verified by the changes in the gaseous reactive species shown in the optical emission spectroscopy(OES)and Fourier transform infrared(FTIR)spectroscopy.Secondly,the concentrations of aqueous reactive oxygen species(ROS)and reactive nitrogen species(RNS)are tightly related to the addition of O2 and N2 into the working gas.The concentrations of aqueous NO-2 and NO-3 significantly increase while the concentrations of aqueous ROS decrease with the admixture of N2.The addition of O2 has little effect on the concentrations of NO-2 and NO-3 and pH values;however,the addition of O2 increases the concentration of O-2 and deceases the concentrations of H2O2 and OH.Finally,the results of bactericidal experiments demonstrate that the inactivation efficiency of the four types of plasma jets is He+O2>He+Air>He>He+N2,which is in accordance with the changing trend of the concentration of aqueous O.-2 Simultaneously to the better understanding of the formation and removal mechanisms of reactive species in the plasma–liquid interaction,these results also prove the effectiveness of regulating the concentrations of aqueous reactive species and the bacteria inactivation effects by gas doping. 展开更多
关键词 cold plasma JET REACTIVE species plasma-liquid interaction BACTERICIDAL effects
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Atmospheric Pressure Plasma Treatment and Following Aging Effect of Chromium Surfaces 被引量:1
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作者 Vadym Prysiazhnyi 《Journal of Surface Engineered Materials and Advanced Technology》 2013年第2期138-145,共8页
The results of atmospheric pressure plasma treatments using diffuse coplanar surface barrier discharge (type of surface dielectric barrier discharge) on chromium surfaces are reported. A significant increase of surfac... The results of atmospheric pressure plasma treatments using diffuse coplanar surface barrier discharge (type of surface dielectric barrier discharge) on chromium surfaces are reported. A significant increase of surface wettability was observed after short plasma exposition. A quantitative value of surface wettability, i.e. the surface free energy, changed from 29 mJ/m2 to over 80 mJ/m2. In time, a hydrophobic recovery of the plasma treated surfaces was observed. Careful study by surface free energy measurements and x-ray photoelectron spectroscopy was performed to be able explaining the effects of plasma treatment. Studied samples were treated in air, oxygen and nitrogen plasma and aged in air and vacuum. Main reasons for increased wettability and aging effect are surface cleaning and transformations in chromium oxide. Additionally, generation of surface nitrate groups was found on the chromium surface as a result of plasma treatment in humid air. 展开更多
关键词 CHROMIUM Surface plasma Treatment DCSBD AGING effect ATMOSPHERIC Pressure plasmaS
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A Review on Chemical Effects in Aqueous Solution induced by Plasma with Glow Discharge 被引量:5
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作者 高锦章 王晓艳 +2 位作者 胡中爱 侯经国 陆泉芳 《Plasma Science and Technology》 SCIE EI CAS CSCD 2001年第3期765-774,共10页
Chemical effects in different aqueous solutions induced by plasma with glow discharge electrolysis (GDE) and contact glow discharge electrolysis (CGDE) are described in this paper. The experimental and discharge char... Chemical effects in different aqueous solutions induced by plasma with glow discharge electrolysis (GDE) and contact glow discharge electrolysis (CGDE) are described in this paper. The experimental and discharge characteristics are also reviewed. These are followed by a discussion of their mechanisms of both anodic and cathodic CGDE.. 展开更多
关键词 A Review on Chemical effects in Aqueous Solution induced by plasma with Glow Discharge GDE
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Clinical Application of Monitoring Glomerular Filtration Rate and Effective Renal Plasma Flow
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作者 姚薇萱 常国钧 +3 位作者 徐兆强 马玉琪 林戟 李永军 《The Journal of Biomedical Research》 CAS 1997年第1期26-29,共4页
Glomerular filtration rate (GFR) and effective renal plasma flow (ERPF) were measured by SPECT in 172 patients (192 times) with renal impairment due to various diseases and also in 18 normal controls. The results sugg... Glomerular filtration rate (GFR) and effective renal plasma flow (ERPF) were measured by SPECT in 172 patients (192 times) with renal impairment due to various diseases and also in 18 normal controls. The results suggest that GFR and ERPF are sensitive and efficient renal function indicators in monitoring the change of the disease and assessing therapeutic effect. However, they should be checked carefully because of many factors affect the resutls of the measurement. 展开更多
关键词 glomerular filtration rate (GFR) effective renal plasma flow (ERPF) renal function
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Effects of Three Typical Resistivity Models on Pulsed Inductive Plasma Acceleration Modeling 被引量:2
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作者 孙新锋 贾艳辉 +6 位作者 张天平 吴宸辰 温晓东 郭宁 金海 柯于俊 郭伟龙 《Chinese Physics Letters》 SCIE CAS CSCD 2017年第12期46-50,共5页
The effects of three different typical resistivity models(Spitzer, Z&L and M&G) on the performance of pulsed inductive acceleration plasma are studied. Numerical results show that their influences decrease with th... The effects of three different typical resistivity models(Spitzer, Z&L and M&G) on the performance of pulsed inductive acceleration plasma are studied. Numerical results show that their influences decrease with the increase of the plasma temperature. The significant discriminations among them appear at the plasma temperature lower than 2.5 eV, and the maximum gap of the pulsed inductive plasma accelerated efficiency is approximately 2.5%.Moreover, the pulsed inductive plasma accelerated efficiency is absolutely related to the dynamic impedance parameters, such as voltage, inductance, capacitance and flow rate. However, the distribution of the efficiency as a function of plasma temperature with three resistivity models has nothing to do with the dynamic impedance parameter. 展开更多
关键词 In effects of Three Typical Resistivity Models on Pulsed Inductive plasma Acceleration Modeling
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Nitrogen Plasma Treatment Effect on Graphene Sheeted Vertically Aligned Carbon Nanofibers
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作者 Dilip Chandra Ghimire M. Matsushima M. Umeno 《Journal of Chemistry and Chemical Engineering》 2013年第9期842-846,共5页
Nitrogen plasma treatment effect on GS-CNFs (graphene seeted vertically aligned carbon nanofibers) has been studied. GS-CNFs were grown on nickel coated cupper substrates by DC-plasma CVD (chemical vapor deposition... Nitrogen plasma treatment effect on GS-CNFs (graphene seeted vertically aligned carbon nanofibers) has been studied. GS-CNFs were grown on nickel coated cupper substrates by DC-plasma CVD (chemical vapor deposition) at relatively low temperature. GS-CNFs were studied by SEM (scanning electron microscopy), HR-TEM (high-resolution transmission electron microscopy), XPS and Raman measurements. GS-CNFs are composed of cylindrical shaped having pure graphite sheets with about 5 μm length and nanometer size tips and roots diameter. Nitrogen plasma treatment causes nitrogen chemical etching on the graphene seeted carbon nanofibers were disordered its fine shape and increase the graphetization due to nitrogen incorporation. 展开更多
关键词 DC-plasma CVD graphene seeted carbon nanofibers nitrogen plasma treatment effect.
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Gravitational Effects on Plasma Waves in Environment of Sun and Neutron Star
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作者 陆全康 ZHOU Hsiao-Ling 《Plasma Science and Technology》 SCIE EI CAS CSCD 2014年第8期738-748,共11页
Local plasma phenomena in environment of Sun are observed closely by spacecrafts in recent years. We provide a new method to apply general relativity to astro-plasma physics in small local area. The relativistic dispe... Local plasma phenomena in environment of Sun are observed closely by spacecrafts in recent years. We provide a new method to apply general relativity to astro-plasma physics in small local area. The relativistic dispersion relations of Langmuir, electromagnetic and cyclotron waves are obtained. The red shifts of Langmuir and cyclotron frequencies are given analytically. A new equilibrium velocity distribution of particles soaked in local gravitational field is suggested. The gravitational effect of a neutron star is also estimated. 展开更多
关键词 plasma gravitational effect relativistic dispersion
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Plasma-screening effects on positronium formation
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作者 马佳 王远成 +1 位作者 周雅君 王珩 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第1期346-350,共5页
Plasma-screening effects on positronium (Ps) formation for positron-hydrogen collisions in a Debye plasma environ- ment is further investigated using the screening approximation model with the inclusion of the modif... Plasma-screening effects on positronium (Ps) formation for positron-hydrogen collisions in a Debye plasma environ- ment is further investigated using the screening approximation model with the inclusion of the modified structure of Ps. More accurate Ps formation cross sections (n = 1,2) are obtained for various Debye lengths from the Ps formation thresh- olds to 50 eV. The influence of considering modified bound-state wave functions and eigenenergies for the Ps is found to result in the reduction of the Ps formation cross sections at low energies, whereas it cannot counteract the enhancement of the Ps formation by the Debye screening. 展开更多
关键词 plasma-screening effect POSITRON SCATTERING positronium formation
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Stabilizing effect of plasma discharge on bubbling fluidized granular bed 被引量:1
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作者 胡茂彬 党赛超 +1 位作者 马强 夏维东 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第7期288-292,共5页
Fluidized beds have been widely used for processing granular materials. In this paper, we study the effect of plasma on the fluidization behavior of a bubbling fluidized bed with an atmospheric pressure plasma dischar... Fluidized beds have been widely used for processing granular materials. In this paper, we study the effect of plasma on the fluidization behavior of a bubbling fluidized bed with an atmospheric pressure plasma discharger. Experiment results show that the bubbling fluidized bed is stabilized with the discharge of plasma. When the discharge current reaches a minimum stabilization current Cms, air bubbles in the bed will disappear and the surface fluctuation is completely suppressed.A simplified model is proposed to consider the effect of electric Coulomb force generated by the plasma. It is found that the Coulomb force will propel the particles to move towards the void area, so that the bubbling fluidized bed is stabilized with a high enough plasma discharge. 展开更多
关键词 plasma fluidized bed granular matter stabilization effect
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Synergistic Effect of Atmospheric Pressure Plasma Pre-Treatment on Alkaline Etching of Polyethylene Terephthalate Fabrics and Films
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作者 Amel E.A.ELABID 郭颖 +2 位作者 石建军 丁可 张菁 《Plasma Science and Technology》 SCIE EI CAS CSCD 2016年第4期346-352,共7页
Dyeing of PET materials by traditional methods presents several problems.Plasma technology has received enormous attention as a solution for the environmental problems related with textile surface modifications,and th... Dyeing of PET materials by traditional methods presents several problems.Plasma technology has received enormous attention as a solution for the environmental problems related with textile surface modifications,and there has been a rapid development and commercialization of plasma technology over the past decade.In this work,the synergistic effect of atmospheric pressure plasma on alkaline etching and deep coloring of dyeing properties on polyethylene terephthalate(PET)fabrics and films was investigated.The topographical changes of the PET surface were investigated by atomic force microscopy(AFM)images,which revealed a smooth surface morphology of the untreated sample whereas a high surface roughness for the plasma and/or alkaline treated samples.The effects of atmospheric pressure plasma on alkaline etching of the structure and properties of PET were investigated by means of differential scanning calorimetry(DSC),the main objective of performing DSC was to investigate the effect of the plasma pre-treatment on the T_g and T_m.Using a tensile strength tester YG065 H and following a standard procedure the maximum force and elongation at maximum force of PET materials was investigated.Oxygen and argon plasma pre-treatment was found to increase the PET fabric weight loss rate.The color strength of PET fabrics was increased by various plasma pre-treatment times.The penetration of plasma and alkaline reactive species deep into the PET structure results in better dyeability and leaves a significant effect on the K/S values of the plasma pre-treated PET.It indicated that plasma pre-treatment has a great synergistic effect with the alkaline treatment of PET. 展开更多
关键词 atmospheric pressure plasma synergistic effect alkaline treatment polyethylene terephthalate materials K/S value surface roughness
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Lowering plasma frequency by enhancing the effective mass of electrons: A route to deep sub-wavelength metamaterials
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作者 秦刚 王甲富 +3 位作者 闫明宝 陈维 陈红雅 李勇峰 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第8期589-595,共7页
Deep sub-wavelength metamaterials are the key to the further development of practical metamaterials with small volumes and broadband properties. We propose to reduce the electrical sizes of metamaterials down to more ... Deep sub-wavelength metamaterials are the key to the further development of practical metamaterials with small volumes and broadband properties. We propose to reduce the electrical sizes of metamaterials down to more sub-wavelength scales by lowering the plasma frequencies of metallic wires. The theoretical model is firstly established by analyzing the plasma frequency of continuous thin wires. By introducing more inductance elements, the effective electron mass can be enhanced drastically, leading to significantly lowered plasma frequencies. Based on this theory, we demonstrate that both the electric and the magnetic plasma frequencies of metamaterials can be lowered significantly and thus the electrical sizes of metamaterials can be reduced to more sub-wavelength scales. This provides an efficient route to deep sub-wavelength metamaterials and will give rigorous impetus for the further development of practical metamaterials. 展开更多
关键词 METAMATERIALS deep sub-wavelength plasma frequency effective electron mass
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Is plasma exchange effective for microscopic polyarteritis?
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《中国输血杂志》 CAS CSCD 2001年第S1期391-,共1页
关键词 Is plasma exchange effective for microscopic polyarteritis
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Charging Effect in Plasma Etching Mask of Hole Array
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作者 张鹏 王俊 +1 位作者 孙阳 丁泽军 《Plasma Science and Technology》 SCIE EI CAS CSCD 2013年第6期570-576,共7页
It has already been found that the round shape of holes can be changed into hexagonal shape during plasma etching processes.This work aims to understand the mechanism behind such a shape change using particle simulati... It has already been found that the round shape of holes can be changed into hexagonal shape during plasma etching processes.This work aims to understand the mechanism behind such a shape change using particle simulation method.The distribution of electric field produced by electrons was calculated for different heights from the mask surface.It is found that the field strength reaches its maximum around a hole edge and becomes the weakest between two holes. The field strength is weakened as moving away from the surface.The spatial distribution of this electric field shows obvious hexagonal shape around a hole edge at some distances from the surface. This charging distribution then affects the trajectories of ions that fall on a mask surface so that the round hole edge is etched to become a hexagonal hole edge.The changing of this hole shape will again alter the spatial distribution of electric field to enhance the charging effect dynamically. 展开更多
关键词 plasma etching charging effect hole array
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