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Effects of coil structure and electromagnetic shielding on plasma distribution and uniformity in large-area radio-frequency inductively coupled plasmas
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作者 Cheng Xin Xiang-Yun Lyu +5 位作者 Si-Yu Xing Yu-Ru Zhang Tao Liu Wei-Ping Le Fei Gao You-Nian Wang 《Chinese Physics B》 2026年第2期233-246,共14页
Improving plasma uniformity is a critical issue in the development of large-area radio-frequency(RF)inductively coupled plasma(ICP)sources.In this work,the effects of coil structure and electromagnetic shielding on th... Improving plasma uniformity is a critical issue in the development of large-area radio-frequency(RF)inductively coupled plasma(ICP)sources.In this work,the effects of coil structure and electromagnetic shielding on the spatial distribution and uniformity of the plasma are systematically investigated using a three-dimensional fluid model.The model integrates plasma and electromagnetic field modules to simulate the discharge characteristics of a large-area RF ICP source with dimensions of 100 cm×50 cm.The results reveal that the electron density distribution varies significantly with the coil structure.For the rotating and translating coil structures,the electron density is high at off-axis positions and low at the center.In contrast,the mirror coil structure exhibits a significantly higher electron density at the chamber center,resulting in a high-center and low-edge density distribution.Among the three configurations,the rotating coil structure provides the best plasma uniformity.The incorporation of electromagnetic shielding further improves plasma uniformity,particularly for the mirror coil structure.For the rotating and translating coil structures,the electron density exhibits a saddle-shaped distribution regardless of electromagnetic shielding.However,introducing electromagnetic shielding into the mirror coil structure reduces the electron density at the chamber center and decreases the non-uniformity degree by 18.4%.Overall,the mirror coil structure with electromagnetic shielding achieves the highest uniformity,with an exceptional plasma uniformity of 94%.This work offers valuable insights for the design of large-area ICP sources in advanced plasma processing systems. 展开更多
关键词 large-area radio-frequency inductively coupled plasma three-dimensional fluid model plasma uniformity
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Investigation of ruling parameters on the growth of side and back stimulated Raman scattering in inhomogeneous plasmas at shock ignition laser intensity
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作者 G.Cristoforetti E.Hume +28 位作者 S.Agarwal D.Batani M.Cervenak P.Devi R.Dudzak D.Ettel P.Gajdos K.Glize S.Jelinek L.Juha P.Koester M.Krupka M.Krus H.Larreur G.Malka D.Mancelli P.E.Masson-Laborde A.Morace Ph.Nicolai O.Renner D.Singappuli S.Singh M.Tatarakis X.Yuan Y.Wang N.Woolsey J.Zhang X.Zhao L.A.Gizzi 《Matter and Radiation at Extremes》 2025年第4期15-23,共9页
Recent experiments at the National Ignition Facility and theoretical modeling suggest that side stimulated Raman scattering(SSRS)instability could reduce laser–plasma coupling and generate considerable fluxes of supr... Recent experiments at the National Ignition Facility and theoretical modeling suggest that side stimulated Raman scattering(SSRS)instability could reduce laser–plasma coupling and generate considerable fluxes of suprathermal hot electrons under interaction conditions envisaged for direct-drive schemes for inertial confinement fusion.Nonetheless,SSRS remains to date one of the least understood parametric instabilities.Here,we report the first angularly and spectrally resolved measurements of scattered light at laser intensities relevant for the shock ignition scheme(I×10^(16)W/cm^(2)),showing significant SSRS growth in the direction perpendicular to the laser polarization.Modification of the focal spot shape and orientation,obtained by using two different random phase plates,and of the density gradient of the plasma,by utilizing exploding foil targets of different thicknesses,clearly reveals a different dependence of backward SRS(BSRS)and SSRS on experimental parameters.While convective BSRS scales with plasma density scale length,as expected by linear theory,the growth of SSRS depends on the spot extension in the direction perpendicular to laser polarization.Our analysis therefore demonstrates that under current experimental conditions,with density scale lengths L_(n)≈60–120μm and spot sizes FWHM≈40–100μm,SSRS is limited by laser beam size rather than by the density scale length of the plasma. 展开更多
关键词 inertial confinement fusionnonethelessssrs theoretical modeling backwards stimulated Raman scattering side stimulated raman scattering ssrs instability national ignition facility plasma density gradient reduce laser plasma coupling suprathermal hot electrons
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Study on the Methane Coupling under Pulse Corona Plasma by Using CO_2 as Oxidant 被引量:7
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作者 代斌 张秀玲 +1 位作者 宫为民 何仁 《Plasma Science and Technology》 SCIE EI CAS CSCD 2000年第6期577-580,共4页
In this paper, the conversion of CO2/CH4 by using pulse corona plasma was studied at atmospheric pressure and ambient temperature. The effects of ratio of CO2/CH4, pulse voltage and repeated frequency of plasma discha... In this paper, the conversion of CO2/CH4 by using pulse corona plasma was studied at atmospheric pressure and ambient temperature. The effects of ratio of CO2/CH4, pulse voltage and repeated frequency of plasma discharge were first studied in the system. 展开更多
关键词 THAN Study on the Methane coupling under Pulse Corona plasma by Using CO2 as Oxidant CO
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Inductively Coupling Plasma(ICP) Treatment of Propylene(PP) Surface and Adhesion Improvement 被引量:1
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作者 刘彦君 傅彦培 《Plasma Science and Technology》 SCIE EI CAS CSCD 2009年第6期704-708,共5页
Study on increasing the roughness of the polymer substrate surface to enhance the adhesion with the copper layer in an inductively coupling plasma (ICP) process was carried out. The microstructure of the polymer sub... Study on increasing the roughness of the polymer substrate surface to enhance the adhesion with the copper layer in an inductively coupling plasma (ICP) process was carried out. The microstructure of the polymer substrate surfaces, which were exposed to different kinds of plasma treatment, was identified by scanning electron microscopy(SEM) analysis, peel strength of the copper coating and water surface contact angle. The adhesion of the substrate was largely enhanced by plasma treatment and the copper deposited coating reached a value of 7.68 kgf/m in verifying the adhesion of the copper coating with polymer material. The quality of the line/space 50/50 μm produced in the laboratory was examined by the pressure cooker test and proved to meet the requirement. 展开更多
关键词 inductively coupling plasma (ICP) water contact angle peel strength
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Synergism of Plasma and Catalyst on the Dehydrogenative Coupling of Methane 被引量:1
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作者 朱爱民 张秀玲 +1 位作者 宫为民 张报安 《Plasma Science and Technology》 SCIE EI CAS CSCD 1999年第1期61-66,共6页
At atmospheric pressure and ambient temperature, pulse corona induced plasma was used as a new method for dehydrogenative coupling of methane. The synergism of plasma and catalyst on dehydrogenative coupling of metha... At atmospheric pressure and ambient temperature, pulse corona induced plasma was used as a new method for dehydrogenative coupling of methane. The synergism of plasma and catalyst on dehydrogenative coupling of methane was investigated. Experimental results have revealed that the synergism does exist, when positive corona within a suitable power range and an intermediate pulse repetition frequency (PRF) for a loaded 7-Mn2O3/7-A12O3 catalyst were chosen. In respect to the mechanism approach, a tentative model for general pathway was proposed to explain the role of plasma and catalyst partaking in the process of methane decomposition and C2 products formation. 展开更多
关键词 Synergism of plasma and Catalyst on the Dehydrogenative coupling of Methane
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The combined effects of quantum and strong coupling on the nonlinear collective excitation in quantum dusty plasmas
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作者 Chengkai Li Youyou Kang Yunliang Wang 《Communications in Theoretical Physics》 SCIE CAS CSCD 2024年第10期135-140,共6页
The quantum hydrodynamic model for electrons and ions and the generalized hydrodynamic model for the strongly coupled dust particles are proposed in the strongly coupled quantum dusty plasma, where the combined quantu... The quantum hydrodynamic model for electrons and ions and the generalized hydrodynamic model for the strongly coupled dust particles are proposed in the strongly coupled quantum dusty plasma, where the combined quantum effects of quantum diffraction, quantum statistic pressure,as well as electron exchange and correlation effects are all considered in the quantum hydrodynamic model. The shear and bulk viscosity effects are included in the viscoelastic relaxation, which leads to the decay of the dust-ion-acoustic waves. The approximate time-dependent solitary solution is obtained by the momentum conservation law in the presence of viscosity. 展开更多
关键词 quantum plasma strongly coupled plasma dusty plasma
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Study of the Electromagnetic Coupling in an Inductively Coupledplasma Torch at Atmospheric Pressure
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作者 B.Saadi J.Altenberend +1 位作者 G.Chichignoud Y. Delannoy 《Journal of Iron and Steel Research International》 SCIE EI CAS CSCD 2012年第S2期695-699,共5页
This work is devoted to study the behaviour of an inductively coupled plasma torch using argon,hydrogen and oxygen at atmospheric pressure.Thermal plasmas are generally used to form highly reactive species and to tran... This work is devoted to study the behaviour of an inductively coupled plasma torch using argon,hydrogen and oxygen at atmospheric pressure.Thermal plasmas are generally used to form highly reactive species and to transfer enthalpy.Precise characterisation of the plasma behaviour is thus relevant to evaluate chemical and thermal effects of the plasma.For equivalent configurations in terms of torch geometry and gas flows,a transition between two different coupling modes is identified affecting atomic species distribution and energy transmitted to a copper target.These two modes are affected by total electrical power input and oxygen and hydrogen flow rates,showing up hysteresis behaviour. Electrical current and frequency progress are analysed to highlight the transition between the two coupling modes. Optical spectroscopy is used to measure temperature profiles and radial atomic oxygen concentration profiles for different coupling modes.We observe that-depending on the coupling mode-temperature profile,atomic species distribution as well as the power transmission to a copper target are affected. 展开更多
关键词 inductively coupled plasma optical spectroscopy temperature field
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Non-equilibrium Plasma Dehydrogenation Coupling of Methane
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作者 刘万楹 雷正兰 陈栋梁 《Plasma Science and Technology》 SCIE EI CAS CSCD 2001年第3期755-760,共6页
A few factors effecting the reaction of plasma dehydrocoupling of methane have been investigated. The experiment shows that plasma power load, i.e. the ratio of methane flow to plasma power, is the most important fact... A few factors effecting the reaction of plasma dehydrocoupling of methane have been investigated. The experiment shows that plasma power load, i.e. the ratio of methane flow to plasma power, is the most important factor effecting methane dehydrocoupling. The products of the reaction are mainly acetylene, ethylene, ethane and unreacted methane etc. If oxygen with a suitable molar ratio is introduced into plasma region at a reasonable position, the selectivity of C2 hydrocarbons can be increased greatly. 展开更多
关键词 Non-equilibrium plasma Dehydrogenation coupling of Methane
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Effects of Hydrogen on the Methane Coupling under Non-equilibrium Plasma
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作者 代斌 张秀玲 +1 位作者 宫为民 何仁 《Plasma Science and Technology》 SCIE EI CAS CSCD 2001年第1期637-639,共3页
In this paper, hydrogen is first utilized in the study on methane coupling under nonequilibrium plasma. Results indicate that the addition of hydrogen is beneficial. to the methane coupling so as to increase the conv... In this paper, hydrogen is first utilized in the study on methane coupling under nonequilibrium plasma. Results indicate that the addition of hydrogen is beneficial. to the methane coupling so as to increase the conversion rate of methane and the yield of C2 hydrocarbon with a gradual increase in the addition of hydrogen in a certain range of proportionality. This conclusion explores a new route of hydrogenated methane coupling. 展开更多
关键词 Effects of Hydrogen on the Methane coupling under Non-equilibrium plasma
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Arsenic speciation in freshwater fish using high performance liquid chromatography and inductively coupled plasma mass spectrometry 被引量:1
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作者 Chester Lau Xiufen Lu +4 位作者 Karen S.Hoy Tetiana Davydiuk Jennifer A.Graydon Megan Reichert X.Chris Le 《Journal of Environmental Sciences》 2025年第7期302-315,共14页
Arsenic speciation in freshwater fish is crucial for providing meaningful consumption guidelines that allow the public to make informed decisions regarding its consumption.While marine fish have attractedmuch research... Arsenic speciation in freshwater fish is crucial for providing meaningful consumption guidelines that allow the public to make informed decisions regarding its consumption.While marine fish have attractedmuch research interest due to their higher arsenic content,research on freshwater fish is limited due to the challenges in quantifying and identifying arsenic species present at trace levels.We describe here a sensitivemethod and its application to the quantification of arsenic species in freshwater fish.Arsenic species from fish tissues were extracted using a methanol/water mixture(1:1 vol.ratio)and ultrasound sonication.Anion-exchange high-performance liquid chromatography(HPLC)enabled separation of arsenobetaine(AsB),inorganic arsenite(iAs^(Ⅲ)),dimethylarsinic acid(DMA),monomethylarsonic acid(MMA),inorganic arsenate(iAs^(Ⅴ)),and three new arsenic species.Inductively coupled plasma mass spectrometry(ICPMS)provided highly sensitive and specific detection of arsenic.A limit of detection of 0.25μg/kg(wet weight fish tissue)was achieved for the five target arsenic species:AsB,iAs^(Ⅲ),DMA,MMA,and iAs^(Ⅴ).A series of experimentswere conducted to ensure the accuracy and validity of the analytical method.The method was successfully applied to the determination of arsenic species in lakewhitefish,northern pike,and walleye,with AsB,DMA,and iAs^(Ⅴ) being frequently detected.Three new arsenic species were detected,but their chromatographic retention times did not match with those of any available arsenic standards.Future research is necessary to elucidate the identity of these new arsenic species detected in freshwater fish. 展开更多
关键词 Arsenic species Freshwater fish HPLC ICPMS Chromatography separation Inductively coupled plasma mass SPECTROMETRY Non-targeted new species Speciation method validation
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Luminescent target interactions in ICP discharges:a diagnostic method for plasma current density
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作者 Zhe ZHANG Lujia ZHANG +4 位作者 Huibin ZHENG Jiayun QI Zun ZHANG Xiangyang LIU Haibin TANG 《Plasma Science and Technology》 2025年第6期59-68,共10页
Recently,it has been observed that during the operation of an inductively coupled plasma(ICP),a luminescent target(BAM,BaMgAl10O17:Eu)can interact with the plasma beam and emit blue light.After excluding the influence... Recently,it has been observed that during the operation of an inductively coupled plasma(ICP),a luminescent target(BAM,BaMgAl10O17:Eu)can interact with the plasma beam and emit blue light.After excluding the influence of ultraviolet(UV)and electromagnetic wave radiation,the results indicate that the BAM target may undergo luminescent excitation due to collisions with electrons and ions.This led us to investigate the physical mechanism behind this plasma luminescence excitation phenomenon.A spectrometer was used to record the luminescent spectroscopy and peak light intensity.Under excitation by argon plasma,the BAM material emits a continuum spectrum from 400 nm to 550 nm,with the peak light intensity located at 462.58 nm,which is the same as the spectrum excited by UV torchlight.To identify the relationship between the plasma parameters and the luminescent intensity,Langmuir and Faraday probes were employed to determine the local plasma parameters such as electron density,electron temperature,and current density.After normalizing the peak light intensity to the plasma parameters,the most interesting point is that the current density is linearly correlated with the luminescent light intensity.To verify the repeatability and lifetime of the plasma-luminescence interaction,a 600 s lifetime test was conducted in a 200 W ICP discharge environment.The maximum difference for the peak light strength of the luminescent spectrum is 6.5%.From a voltage bias experiment and a theoretical derivation,we initially identified that bombardment by ions plays the dominant role in the luminescence excitation process,which also explains the mechanism by which the current density is proportional to the luminescence intensity.This new finding leads us to reconsider the possibility of applying this plasma luminescence phenomenon to optical plasma diagnostics.The BAM light intensity can potentially be used to predict the current density of a plasma beam for large-area two-dimensional(2D)measurements and can capture high spatial resolution in a single test.We believe that this method may lead to high-efficiency,spatially resolved plasma current density measurement. 展开更多
关键词 inductively coupled plasma plasma-luminescence excitation current density luminescence intensity
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Towards the creation of an inverse electron distribution function in two-chamber inductively coupled plasma discharges
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作者 Ying WANG Nie CHEN +4 位作者 Jingfeng YAO Evgeniy BOGDANOV Anatoly KUDRYAVTSEV Chengxun YUAN Zhongxiang ZHOU 《Plasma Science and Technology》 2025年第5期122-128,共7页
This work continues the studies on searching for plasma media with the inverse electron energy distribution function(EEDF)and providing recommendations for setting up subsequent experiments.The inverse EEDF is a distr... This work continues the studies on searching for plasma media with the inverse electron energy distribution function(EEDF)and providing recommendations for setting up subsequent experiments.The inverse EEDF is a distribution function that increases with an increase in energy at zero electron energy.The inverse EEDF plays a central role in the problem of negative conductivity.Based on the previously obtained criterion for the formation of an inverse EEDF in a spatially inhomogeneous plasma,a heuristic method is proposed that allows one to avoid resource-intensive calculations for spatially two-dimensional(2D)kinetic modeling on a large array of different glow discharges.It is shown that the conditions for EEDF inversion can be realized in two-chamber discharge structures due to violating the known Boltzmann distribution for electron density.The theoretical conclusions are validated by numerical modeling of lowpressure two-chamber inductively-coupled plasma(ICP)discharges in the COMSOL Multiphysics environment.As a result,areas of conditions with inverse EEDF were found for subsequent detailed kinetic analysis and experimental studies. 展开更多
关键词 electron kinetics nonlocal electron distribution function gas discharge Boltzmann kinetic equation inverse electron distribution function inductively coupled plasma
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Recent ICRF coupling experiments on EAST
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作者 杨宇晴 张新军 +17 位作者 赵燕平 秦成明 程艳 毛玉周 杨桦 王健华 袁帅 王磊 琚松青 陈根 邓旭 张开 万宝年 李建刚 宋云涛 龚先祖 钱金平 张涛 《Plasma Science and Technology》 SCIE EI CAS CSCD 2018年第4期107-111,共5页
Recent ion cyclotron resonance frequency(ICRF) coupling experiments for optimizing ICRF heating in high power discharge were performed on EAST. The coupling experiments were focus on antenna phasing and gas puffing,... Recent ion cyclotron resonance frequency(ICRF) coupling experiments for optimizing ICRF heating in high power discharge were performed on EAST. The coupling experiments were focus on antenna phasing and gas puffing, which were performed separately on two ports of the ion cyclotron resonance heating(ICRH) system of EAST. The antenna phasing was performed on the I-port antenna, which consists of four toroidally spaced radiating straps operating in multiple phasing cases; the coupling performance was better under low wave number ∣k;∣(ranging from 4.5 to 6.5). By fuelling the plasma from gas injectors, placed as uniformly spaced array from top to bottom at each side limiter of the B-port antenna, which works in dipole phasing, the coupling resistance of the B-port antenna increased obviously.Furthermore, the coupling resistance of the I-port antenna was insensitive to a smaller rate of gas puffing but when the gas injection rate was more than a certain value(>1021 s;), a sharp increase in the coupling resistance of the I-port antenna occurred, which was mainly caused by the toroidal asymmetric boundary density arising from gas puffing. A more specific analysis is given in the paper. 展开更多
关键词 EAST ICRF antenna–plasma coupling antenna phasing and gas puffing
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Content Determination of Zhuang Medicine Sauropus spatulifolius Beille from Guangxi
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作者 Lixin SUN Yongshan JIN +8 位作者 Wenjing YANG Aipeng LI Yarong WEI Liangna SU Chengxu CHEN Fangyuan SHEN Yanmin LU Suoyi HUANG Lixiang LU 《Medicinal Plant》 2026年第1期1-4,共4页
[Objectives]To determine the content of Zhuang medicine Sauropus spatulifolius Beille from Guangxi.[Methods]The amino acid content of S.spatulifolius Beille was determined by ultraviolet spectrophotometry(UVs).The con... [Objectives]To determine the content of Zhuang medicine Sauropus spatulifolius Beille from Guangxi.[Methods]The amino acid content of S.spatulifolius Beille was determined by ultraviolet spectrophotometry(UVs).The content of kaempferol-3-O-gentiobioside in S.spatulifolius Beille was determined by liquid chromatography-mass spectrometry(LC-MS).Pesticide residues in S.spatulifolius Beille were detected by gas chromatography-mass spectrometry(GC-MS).Heavy metal elements arsenic(As),cadmium(Cd),and lead(Pb)in S.spatulifolius Beille were detected by inductively coupled plasma mass spectrometry(ICP-MS).[Results]The amino acid content in S.spatulifolius Beille was 3.233 mg/g,with a relative standard deviation(RSD)of 0.36%.The content of kaempferol-3-O-gentiobioside was 1.15μg/mL.No pesticide residues or heavy metals were detected in the S.spatulifolius Beille medicinal material.[Conclusions]This study improves the quality control system for S.spatulifolius Beille and provides a reference basis for the quality standard control of Zhuang medicine S.spatulifolius Beille from Guangxi. 展开更多
关键词 Zhuang medicine Sauropus spatulifolius Beille Liquid chromatography-mass spectrometry(LC-MS) Gas chromatography-mass spectrometry(GC-MS) Inductively coupled plasma mass spectrometry(ICP-MS) Content determination
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Analysis of magnetic elements in otoliths of the macula lagena in homing pigeons with inductively coupled plasma mass spectrometry
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作者 赵颖 黄伊娜 +1 位作者 史律 陈林 《Neuroscience Bulletin》 SCIE CAS CSCD 2009年第3期101-108,共8页
Objective The macula lagena in birds is located at the apical end of the cochlea and contains many tiny otoliths. The macula lagena is innervated and has neural projections to the brainstem, but its physiological func... Objective The macula lagena in birds is located at the apical end of the cochlea and contains many tiny otoliths. The macula lagena is innervated and has neural projections to the brainstem, but its physiological function is still unclear. It remains disputable that it is because otoliths in the lagena are rich in elements Fe and Zn that birds can obtain geomagnetic information for homing. To clarify this issue, we carried out a study to determine whether or not otoliths in the lagena of homing pigeons are richer in magnetic elements than those in the saccule and the utricle. Methods The contents of ferromagnetic elements (Fe, Co, Ni) and other metal elements in lagenal otoliths of adult homing pigeons were precisely analyzed with inductively coupled plasma mass spectrometry (ICP-MS) of high sensitivity, and then they were compared with those in saccular and utricular otoliths (all the contents were normalized to Ca). Results In adult homing pigeons, the contents of ferromagnetic elements (Fe, Co, Ni) in lagenal otoliths were less than 0.7% (normalized to Ca element) and were the same order in magnitude as those in saccular and utricular otoliths. The content of Fe in lagenal otoliths was not significantly different from that in utricular otoliths and was even lower than that in saccular otoliths. The content of Co in lagenal otoliths was lower than that in saccular otoliths and higher than that in utricular otoliths. The content of Ni in lagenal otoliths was not significantly different from that in saccular otoliths and was higher than that in utricular otoliths. The contents of other metal elements Na, Mg, K, Al, Mn and Pb in lagenal otoliths were not significantly different from those in utricular and saccular otoliths. The contents of metal elements Zn, Ba and Cu in lagenal otoliths were lower than those in saccular otoliths. Conclusion The contents of magnetic elements in lagenal otoliths of homing pigeons are not much higher than those in utricular and saccular otoliths, which does not support the hypothesis that birds depend on high contents of Fe and Zn in lagenal otoliths for sensation of geomagnetic information. Similarities in morphology, element ingredient and element content between lagenal otoliths and utricular otoliths suggest that the two types of otolithic organs may play similar roles in sensing gravitational and acceleration signals. 展开更多
关键词 homing pigeons lagena OTOLITH magnetic element SACCULE UTRICLE inductively coupled plasma mass spectrometry
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Determination of trace elements in high purity nickel by high resolution inductively coupled plasma mass spectrometry 被引量:11
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作者 聂西度 梁逸曾 +1 位作者 唐有根 谢华林 《Journal of Central South University》 SCIE EI CAS 2012年第9期2416-2420,共5页
The contents ofMg, Al, Si, Ti, Cr, Mn, Fe, Co, Cu, Ga, As, Se, Cd, Sb, Pb and Bi in high purity nickel were determined by high resolution inductively coupled plasma mass spectrometry (HR-ICP-MS). The sample was diss... The contents ofMg, Al, Si, Ti, Cr, Mn, Fe, Co, Cu, Ga, As, Se, Cd, Sb, Pb and Bi in high purity nickel were determined by high resolution inductively coupled plasma mass spectrometry (HR-ICP-MS). The sample was dissolved in HNO3 and HCI by microwave digestion. Most of the spectral interferences could be avoided by measuring in the high resolution mode. The matrix effects because of the presence of excess HC1 and nickel were evaluated. Correction for matrix effects was made using Sc, Rh and T1 as internal standards. The optimum conditions for the determination were tested and discussed. The detection limits range from 0.012 to 1.76 ~tg/g depending on the type of elements. The applicability of the proposed method is also validated by the analysis of high purity nickel reference material (NIST SRM 671). The relative standard deviation (RSD) is less than 3.3%. Results for determination of trace elements in high purity nickel were presented. 展开更多
关键词 high resolution inductively coupled plasma mass spectrometry high purity nickel trace element matrix effect internal standard
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Quantification of trace amounts of impurities in high purity cobalt by high resolution inductively coupled plasma mass spectrometry 被引量:10
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作者 XIE Hualin HUANG Kelong +1 位作者 NIE Xidu TANG Yougen 《Rare Metals》 SCIE EI CAS CSCD 2007年第3期286-291,共6页
A An analytical method using high resolution inductively coupled plasma mass spectrometry (HR-ICP-MS) for rapid simultaneous determination of 24 elements (Be, Mg, A1, Ti, V, Cr, Mn, Fe, Ni, Cu, Zn, Ga, Ge, As, Se, ... A An analytical method using high resolution inductively coupled plasma mass spectrometry (HR-ICP-MS) for rapid simultaneous determination of 24 elements (Be, Mg, A1, Ti, V, Cr, Mn, Fe, Ni, Cu, Zn, Ga, Ge, As, Se, Mo, Ag, Cd, Sn Sb, Ba, Pt, Au, and Pb) in high purity cobalt was described. Sample digestions were performed in closed microwave vessels using HNO3 and HCI. The matrix effects because of the presence of excess HCI and Co were evaluated. The usefulness of high mass resolution for overcoming some spectral interference was demonstrated. The optimum conditions for the determination were tested and discussed. The standard addition method was employed for quantitative analysis. The detection limits were 0.016-1.50 ].tg·g^-1, the recovery ratios were 92.2%-111.2%, and the RSD was less than 3.6%. The method was accurate, quick, and convenient. It was applied to the determination of trace impurities in high purity cobalt with satisfactory results. 展开更多
关键词 high resolution inductively coupled plasma mass spectrometry high purity cobalt trace impurities matrix effect standard addition method
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Experimental Study of the Influence of Process Pressure and Gas Composition on GaAs Etching Characteristics in Cl_2/BCl_3-Based Inductively Coupled Plasma 被引量:5
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作者 D.S.RAWAL B.K.SEHGAL +1 位作者 R.MURALIDHARAN H.K.MALIK 《Plasma Science and Technology》 SCIE EI CAS CSCD 2011年第2期223-229,共7页
A study of Cl2/BCl3-based inductively coupled plasma (ICP) was conducted using thick photoresist mask for anisotropic etching of 50μm diameter holes in a GaAs wafer at a relatively high average etching rate for etc... A study of Cl2/BCl3-based inductively coupled plasma (ICP) was conducted using thick photoresist mask for anisotropic etching of 50μm diameter holes in a GaAs wafer at a relatively high average etching rate for etching depths of more than 150μm. Plasma etch characteristics with ICP process pressure and the percentage of BCI3 were studied in greater detail at a constant ICP coil/bias power. The measured peak-to-peak voltage as a function of pressure was used to estimate the minimum energy of the ions bombarding the substrate. The process pressure was found to have a substantial influence on the energy of heavy ions. Various ion species in plasma showed minimum energy variation from 1.85 eV to 7.5 eV in the pressure range of 20 mTorr to 50 mTorr. The effect of pressure and the percentage of BCl3 on the etching rate and surface smoothness of the bottom surface of the etched hole were studied for a fixed total flow rate. The etching rate was found to decrease with the percentage of BCl3, whereas the addition of BCl3 resulted in anisotropic holes with a smooth veil free bottom surface at a pressure of 30 mTorr and 42% BC13. In addition, variation of the etching yield with pressure and etching depth were also investigated. 展开更多
关键词 GAAS inductively coupled plasma ETCHING ion energy etch yield
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Spheroidization of silica powders by radio frequency inductively coupled plasma with Ar–H2 and Ar–N2 as the sheath gases at atmospheric pressure 被引量:4
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作者 Lin Li Guo-hua Ni +3 位作者 Qi-jia Guo Qi-fu Lin Peng Zhao Jun-li Cheng 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 2017年第9期1067-1074,共8页
Amorphous spherical silica powders were prepared by inductively coupled thermal plasma treatment at a radio frequency of 36.2 MHz. The effects of the added content of hydrogen and nitrogen into argon(serving as the sh... Amorphous spherical silica powders were prepared by inductively coupled thermal plasma treatment at a radio frequency of 36.2 MHz. The effects of the added content of hydrogen and nitrogen into argon(serving as the sheath gas), as well as the carrier gas flow rate, on the spheroidization rate of silica powders, were investigated. The prepared silica powders before and after plasma treatment were examined by scanning electron microscopy, X-ray diffraction, and laser granulometric analysis. Results indicated that the average size of the silica particles increased, and the transformation of crystals into the amorphous state occurred after plasma treatment. Discharge image processing was employed to analyze the effect of the plasma temperature field on the spheroidization rate. The spheroidization rate of the silica powder increased with the increase of the hydrogen content in the sheath gas. On the other hand, the spheroidization rate of the silica power first increased and then decreased with the increase of the nitrogen content in the sheath gas. Moreover, the amorphous content increased with the increase of the spheroidization rate of the silica powder. 展开更多
关键词 silica powders SPHEROIDIZATION inductively coupled plasma mixed gas
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An atmosphere-breathing propulsion system using inductively coupled plasma source 被引量:5
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作者 Peng ZHENG Jianjun WU +2 位作者 Yu ZHANG Bixuan CHE Yuanzheng ZHAO 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2023年第5期223-238,共16页
CubeSats have attracted more research interest recently due to their lower cost and shorter production time.A promising technology for CubeSat application is atmosphere-breathing electric propulsion,which can capture ... CubeSats have attracted more research interest recently due to their lower cost and shorter production time.A promising technology for CubeSat application is atmosphere-breathing electric propulsion,which can capture the atmospheric particles as propulsion propellant to maintain longterm mission at very low Earth orbit.This paper designs an atmosphere-breathing electric propulsion system for a 3 U CubeSat,which consists of an intake device and an electric thruster based on the inductively coupled plasma.The capture performance of intake device is optimized considering both particles capture efficiency and compression ratio.The plasma source is also analyzed by experiment and simulation.Then,the thrust performance is also estimated when taking into account the intake performance.The results show that it is feasible to use atmosphere-breathing electric propulsion technology for CubeSats to compensate for aerodynamic drag at lower Earth orbit. 展开更多
关键词 Atmosphere-Breathing Electric Propulsion(ABEP) CUBESAT Inductively coupled plasma Intake device Very Low Earth Orbit(VLEO)
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