For 20 V planar active-gap lateral double-diffused MOSFET （LDMOS）, the sectional channel is utilized to decrease the electric field in the n-drift region below the poly gate edge in the off-state, compared with the ...For 20 V planar active-gap lateral double-diffused MOSFET （LDMOS）, the sectional channel is utilized to decrease the electric field in the n-drift region below the poly gate edge in the off-state, compared with the conventional single channel. Then the n-drift concentration can be increased to decrease the Kirk effect, while keeping off-state breakdown voltage Vbd unchanged. Meanwhile the influence of the n-drift concentration and the n-drift length Ldrift （the drain n＋ diffusion to gate spacing） which are related to the Kirk effect is discussed. The trade-offs between Rdson.Area, breakdown voltage Vbd and the electrical safe operating area （e-SOA） performance of LDMOS are considered also. Finally the proposed planar active-gap LDMOS devices with varied values of Ldria are experimentally demonstrated. The experimental results show that the Kirk effect can be greatly suppressed with slight increase in the Rdson.Area parameter.展开更多
文摘For 20 V planar active-gap lateral double-diffused MOSFET （LDMOS）, the sectional channel is utilized to decrease the electric field in the n-drift region below the poly gate edge in the off-state, compared with the conventional single channel. Then the n-drift concentration can be increased to decrease the Kirk effect, while keeping off-state breakdown voltage Vbd unchanged. Meanwhile the influence of the n-drift concentration and the n-drift length Ldrift （the drain n＋ diffusion to gate spacing） which are related to the Kirk effect is discussed. The trade-offs between Rdson.Area, breakdown voltage Vbd and the electrical safe operating area （e-SOA） performance of LDMOS are considered also. Finally the proposed planar active-gap LDMOS devices with varied values of Ldria are experimentally demonstrated. The experimental results show that the Kirk effect can be greatly suppressed with slight increase in the Rdson.Area parameter.
