Silicon nitride photonics has emerged as a promising integrated optical platform due to its broad transparency window,low optical loss,and mature fabrication technology.However,the inherent centrosymmetric crystal str...Silicon nitride photonics has emerged as a promising integrated optical platform due to its broad transparency window,low optical loss,and mature fabrication technology.However,the inherent centrosymmetric crystal structure of silicon nitride fundamentally restricts its applications in second-order nonlinear optical processes.Monolayer transition metal dichalcogenides,particularly tungsten disulfide(WS_(2)),exhibit strong second-order nonlinear responses,making them ideal candidates for nonlinear photonic applications.Herein,we demonstrate a heterogeneously integrated platform combining silicon nitride waveguides with chemical vapor deposition(CVD)-grown monolayer WS_(2),enabling second harmonic generation.A specially designed silica cladding featuring gentle-slope profile on silicon nitride strip waveguides facilitates the integration of centimeter-scale WS_(2)film with photonic circuits.This approach provides a robust solution for incorporating second-order nonlinearity into silicon nitride photonic systems.The demonstrated platform holds significant potential for advancing quantum networks,visible-light lasers,and integrated optical modulation/detection systems.展开更多
Point-of-care diagnostics and inline quantitative phase imaging(QPI)drive the demand for portable,ultra-miniaturized,and robust optical imaging and metrology systems.We propose and demonstrate a wavefront sensor integ...Point-of-care diagnostics and inline quantitative phase imaging(QPI)drive the demand for portable,ultra-miniaturized,and robust optical imaging and metrology systems.We propose and demonstrate a wavefront sensor integrated into a photonic integrated circuit,enabling single-shot optical phase retrieval.We implemented an integrated wavefront sensor array with a spatial resolution of 17μm and a numerical aperture of 0.1.Furthermore,we experimentally demonstrated the reconstruction of wavefronts defined by Zernike polynomials,specifically the first 14 terms(Z_(1)to Z_(14)),achieving an average root mean square error below 0.07.This advancement paves the way for fully integrated,portable,and robust optical imaging systems,facilitating integrated wavefront sensors in demanding applications such as point-of-care diagnostics,endoscopy,in situ QPI,and inline surface profile measurement.展开更多
Hybrid integration ofⅢ-Ⅴand ferroelectric materials is being broadly adopted to enhance functionalities in silicon photonic integrated circuits(PICs).Bonding and transfer printing have been the popular approaches fo...Hybrid integration ofⅢ-Ⅴand ferroelectric materials is being broadly adopted to enhance functionalities in silicon photonic integrated circuits(PICs).Bonding and transfer printing have been the popular approaches for integration of III–V gain media with silicon PICs.Similar approaches are also being considered for ferroelectrics to enable larger RF modulation bandwidths,higher linearity,lower optical loss integrated optical modulators on chip.In this paper,we review existing integration strategies ofⅢ-Ⅴmaterials and present a route towards hybrid integration of bothⅢ-Ⅴand ferroelectrics on the same chip.We show that adiabatic transformation of the optical mode between hybrid ferroelectric and silicon sections enables efficient transfer of optical modal energies for maximum overlap of the optical mode with the ferroelectric media,similar to approaches adopted to maximize optical overlap with the gain section,thereby reducing lasing thresholds for hybridⅢ-Ⅴintegration with silicon PICs.Preliminary designs are presented to enable a foundry compatible hybrid integration route of diverse functionalities on silicon PICs.展开更多
In many application scenarios,silicon(Si)photonics favors the integration of Ⅲ-Ⅴ gain material onto Si substrate to real-ize the on-chip light source.In addition to the current popular integration approaches of Ⅲ-...In many application scenarios,silicon(Si)photonics favors the integration of Ⅲ-Ⅴ gain material onto Si substrate to real-ize the on-chip light source.In addition to the current popular integration approaches of Ⅲ-Ⅴ-on-Si wafer bonding or dir-ect heteroepitaxial growth,a newly emerged promising solution of epitaxial regrowth on bonded substrate has attracted a lot of interests.High-quality Ⅲ-Ⅴ material realization and successful laser demonstrations show its great potential to be a promising integration platform for low-cost,high-integration density and highly scalable active-passive photonic integra-tion on Si.This paper reviews recent research work on this regrowth on bonded template platform including template de-velopments,regrown material characterizations and laser demonstrations.The potential advantages,opportunities and challenges of this approach are discussed.展开更多
Suitable optoelectronic integration platforms enable the realization of numerous application systems at the chip scale and are highly anticipated in the rapidly growing market.We report a GaN-on-silicon-based photonic...Suitable optoelectronic integration platforms enable the realization of numerous application systems at the chip scale and are highly anticipated in the rapidly growing market.We report a GaN-on-silicon-based photonic integration platform and demonstrate a photonic integrated chip comprising a light source,modulator,photodiode(PD),waveguide,and Y-branch splitter based on this platform.The light source,modulator,and PD adopt the same multiple quantum wells(MQWs)diode structure without encountering incompatibility problems faced in other photonic integration approaches.The waveguide-structure MQW electro-absorption modulator has obvious indirect light modulation capability,and its absorption coefficient changes with the applied bias voltage.The results successfully validate the data transmission and processing using near-ultraviolet light with peak emission wavelength of 386 nm.The proposed complete active–passive approach that has simple fabrication and low cost provides new prospects for next-generation photonic integration.展开更多
The rise of large-scale artificial intelligence(AI)models,such as ChatGPT,Deep-Seek,and autonomous vehicle systems,has significantly advanced the boundaries of AI,enabling highly complex tasks in natural language proc...The rise of large-scale artificial intelligence(AI)models,such as ChatGPT,Deep-Seek,and autonomous vehicle systems,has significantly advanced the boundaries of AI,enabling highly complex tasks in natural language processing,image recognition,and real-time decisionmaking.However,these models demand immense computational power and are often centralized,relying on cloud-based architectures with inherent limitations in latency,privacy,and energy efficiency.To address these challenges and bring AI closer to real-world applications,such as wearable health monitoring,robotics,and immersive virtual environments,innovative hardware solutions are urgently needed.This work introduces a near-sensor edge computing(NSEC)system,built on a bilayer AlN/Si waveguide platform,to provide real-time,energy-efficient AI capabilities at the edge.Leveraging the electro-optic properties of AlN microring resonators for photonic feature extraction,coupled with Si-based thermo-optic Mach-Zehnder interferometers for neural network computations,the system represents a transformative approach to AI hardware design.Demonstrated through multimodal gesture and gait analysis,the NSEC system achieves high classification accuracies of 96.77%for gestures and 98.31%for gaits,ultra-low latency(<10 ns),and minimal energy consumption(<0.34 pJ).This groundbreaking system bridges the gap between AI models and real-world applications,enabling efficient,privacy-preserving AI solutions for healthcare,robotics,and next-generation human-machine interfaces,marking a pivotal advancement in edge computing and AI deployment.展开更多
The single-molecule detection tech-nique plays a pivotal role in elucidat-ing the fundamental mechanisms of various scientific processes at the molecular level,and holds essential im-portance in multiple fields includ...The single-molecule detection tech-nique plays a pivotal role in elucidat-ing the fundamental mechanisms of various scientific processes at the molecular level,and holds essential im-portance in multiple fields including physics,biology,and chemistry.Re-cently,single-molecule detection has garnered increasing attention owing to its practical utility in medical diagno-sis,primarily due to its exceptional sensitivity and the minimal sample volume required for analysis.However,the conventional single-molecule technique,represented by total internal reflection microscopy,faces challenges such as sophisticated operation procedures and limited detection throughput,thereby impeding its broader application.To address these limitations,we have demonstrated single-molecule detection using an integrated silicon photonic chip,of-fering a cost-effective and user-friendly alternative.By employing basic optics,we efficiently introduce the excitation source for single-molecule fluorescence by harnessing the strong evanescent field of high refractive-index waveguides.Subsequently,fluorescence signals are collected using basic optics comprising a water-immersion objective,relay optics,and a digi-tal camera.Our results highlight a low-cost,high-throughput single-molecule technique achieved through the integrated silicon photonic chip.This innovative approach is promised to facilitate the widespread adoption of single-molecule fluorescence in medical diagnosis.展开更多
Rising demands for bandwidth,speed,and energy efficiency are reshaping the landscape of computing beyond the limits of von Neumann electronics.Neuromorphic photonics—using light to emulate neural computation—offers ...Rising demands for bandwidth,speed,and energy efficiency are reshaping the landscape of computing beyond the limits of von Neumann electronics.Neuromorphic photonics—using light to emulate neural computation—offers ultrafast,massively parallel,and low-energy information processing,positioning integrated photonic neural networks(IPNNs)as promising hardware for next-generation artificial intelligence(AI).By combining the architectural efficiency of neuromorphic models with the physical advantages of integrated photonics,IPNNs enable high-speed and programmable linear operations during the in-plane optical transmission,while leaving room for compact and reconfigurable on-chip optical nonlinearities and memory functions.Firstly,we review the concepts and principles of key building blocks in IPNN,that are photonic synapses,neurons,and photonic memristors which offer optical memory and storage capabilities.And then,we summarize the representative IPNN architectures and their recent advances,including coherent,parallel,diffractive,and reservoir computing,for photonic neuromorphic computing with high throughput and high efficiency.Finally,we outline practical considerations—calibration and stability of large-scale networks,routes toward co-integration with electronics,diffractive–interferometric hybrid architectures,and programmable photonic architectures for general AI purposes.We highlight a forward outlook on enabling IPNN with low energy consumption,robust photonic operations,and efficient training strategies,aiming to guide the maturation of general-purpose,low-power photonic AI.展开更多
Novel thin films consisting of optical materials such as lithium niobate and barium titanate enable various high-performance integrated photonic devices.However,the nanofabrication of these devices requires high-quali...Novel thin films consisting of optical materials such as lithium niobate and barium titanate enable various high-performance integrated photonic devices.However,the nanofabrication of these devices requires high-quality etching of these thin films,necessitating the long-term development of the fabrication recipe and specialized equipment.Here we present a strong-confinement low-index-rib-loaded waveguide structure as the building block of various passive and active integrated photonic devices based on novel thin films.By optimizing this low-index-rib-loaded waveguide structure without etching the novel thin film,we can simultaneously realize strong optical power confinement in the thin film,low optical propagation loss,and strong electro-optic coupling for the fundamental transverse electric mode.Based on our low-index-rib-loaded waveguide structure,we designed and fabricated a thin film lithium niobate(TFLN)modulator,featuring a 3-dB modulation bandwidth over 110 GHz and a voltage-length product as low as 2.26 V·cm,which is comparable to those of the state-of-the-art etched TFLN modulators.By alleviating the etching of novel thin films,the proposed structure opens up new ways of fast proof-of-concept demonstration and even mass production of high-performance integrated electro-optic and nonlinear devices based on novel thin films.展开更多
In this paper,we present a broadband,high-extinction-ratio,nonvolatile 2×2 Mach-Zehnder interfer⁃ometer(MZI)optical switch based on the phase change material Sb_(2)Se_(3).The insertion loss(IL)is 0.84 dB and the ...In this paper,we present a broadband,high-extinction-ratio,nonvolatile 2×2 Mach-Zehnder interfer⁃ometer(MZI)optical switch based on the phase change material Sb_(2)Se_(3).The insertion loss(IL)is 0.84 dB and the extinction ratio(ER)reaches 28.8 dB at the wavelength of 1550 nm.The 3 dB bandwidth is greater than 150 nm.Within the 3 dB bandwidth,the ER is greater than 20.3 dB and 16.3 dB at bar and cross states,respectively.The power consumption for crystallization and amorphization of Sb_(2)Se_(3) is 105.86 nJ and 49 nJ,respectively.The switch holds significant promise for optical interconnects and optical computing applications.展开更多
Programmable two-particle quantum walks are crucial for advancing quantum simulation,computation,and information processing.Although disorder is traditionally associated with information loss,it can also facilitate em...Programmable two-particle quantum walks are crucial for advancing quantum simulation,computation,and information processing.Although disorder is traditionally associated with information loss,it can also facilitate emergent phenomena such as enhanced energy transport.Here,we experimentally realize a 12-step discrete-time quantum walk in programmable integrated photonic circuits,introducing tunable static and dynamic disorder to explore quantum transport dynamics.In periodic lattices,disorder induces light localization and drives a transition from quantum ballistic to classical diffusive behavior.In particular,quantum walks of correlated photons exhibit a disorder-induced bunching effect,accompanied by enhanced nonclassical correlations.Our platform provides a scalable framework for investigating multiparticle quantum dynamics in engineered environments,promoting the development of quantum optics toward large-scale applications.展开更多
Chip-scale programmable optical signal processors are often used to flexibly manipulate the optical signals for satisfying the demands in various applications,such as lidar,radar,and artificial intelligence.Silicon ph...Chip-scale programmable optical signal processors are often used to flexibly manipulate the optical signals for satisfying the demands in various applications,such as lidar,radar,and artificial intelligence.Silicon photonics has unique advantages of ultra-high integration density as well as CMOS compatibility,and thus makes it possible to develop large-scale programmable optical signal processors.The challenge is the high silicon waveguides propagation losses and the high calibration complexity for all tuning elements due to the random phase errors.In this paper,we propose and demonstrate a programmable silicon photonic processor for the first time by introducing low-loss multimode photonic waveguide spirals and low-random-phase-error Mach-Zehnder switches.The present chip-scale programmable silicon photonic processor comprises a 1×4 variable power splitter based on cascaded Mach-Zehnder couplers(MZCs),four Ge/Si photodetectors,four channels of thermally-tunable optical delaylines.Each channel consists of a continuously-tuning phase shifter based on a waveguide spiral with a micro-heater and a digitally-tuning delayline realized with cascaded waveguide-spiral delaylines and MZSs for 5.68 ps time-delay step.Particularly,these waveguide spirals used here are designed to be as wide as 2μm,enabling an ultralow propagation loss of 0.28 dB/cm.Meanwhile,these MZCs and MZSs are designed with 2-μm-wide arm waveguides,and thus the random phase errors in the MZC/MZS arms are negligible,in which case the calibration for these MZSs/MZCs becomes easy and furthermore the power consumption for compensating the phase errors can be reduced greatly.Finally,this programmable silicon photonic processor is demonstrated successfully to verify a number of distinctively different functionalities,including tunable time-delay,microwave photonic beamforming,arbitrary optical signal filtering,and arbitrary waveform generation.展开更多
Neuromorphic photonic computing has emerged as a competitive computing paradigm to overcome the bottlenecks of the von-Neumann architecture.Linear weighting and nonlinear spike activation are two fundamental functions...Neuromorphic photonic computing has emerged as a competitive computing paradigm to overcome the bottlenecks of the von-Neumann architecture.Linear weighting and nonlinear spike activation are two fundamental functions of a photonic spiking neural network(PSNN).However,they are separately implemented with different photonic materials and devices,hindering the large-scale integration of PSNN.Here,we propose,fabricate and experimentally demonstrate a photonic neuro-synaptic chip enabling the simultaneous implementation of linear weighting and nonlinear spike activation based on a distributed feedback(DFB)laser with a saturable absorber(DFB-SA).A prototypical system is experimentally constructed to demonstrate the parallel weighted function and nonlinear spike activation.Furthermore,a fourchannel DFB-SA laser array is fabricated for realizing matrix convolution of a spiking convolutional neural network,achieving a recognition accuracy of 87%for the MNIST dataset.The fabricated neuro-synaptic chip offers a fundamental building block to construct the large-scale integrated PSNN chip.展开更多
Silicon photonics technology has drawn significant interest due to its potential for compact and high-performance photonic integrated circuits.The Ge-or III-V material-based avalanche photodiodes integrated on silicon...Silicon photonics technology has drawn significant interest due to its potential for compact and high-performance photonic integrated circuits.The Ge-or III-V material-based avalanche photodiodes integrated on silicon photonics provide ideal high sensitivity optical receivers for telecommunication wavelengths.Herein,the last advances of monolithic and hetero-geneous avalanche photodiodes on silicon are reviewed,including different device structures and semiconductor systems.展开更多
The basic indexes of all-optical integrated photonic circuits include high-density integration,ultrafast response and ultralow energy consumption.Traditional methods mainly adopt conventional micro/nano-structures.The...The basic indexes of all-optical integrated photonic circuits include high-density integration,ultrafast response and ultralow energy consumption.Traditional methods mainly adopt conventional micro/nano-structures.The overall size of the circuit is large,usually reaches hundreds of microns.Besides,it is difficult to balance the ultrafast response and ultra-low energy consumption problem,and the crosstalk between two traditional devices is difficult to overcome.Here,we propose and experimentally demonstrate an approach based on inverse design method to realize a high-density,ultrafast and ultra-low energy consumption integrated photonic circuit with two all-optical switches controlling the input states of an all-optical XOR logic gate.The feature size of the whole circuit is only 2.5μm×7μm,and that of a single device is 2μm×2μm.The distance between two adjacent devices is as small as 1.5μm,within wavelength magnitude scale.Theoretical response time of the circuit is 150 fs,and the threshold energy is within 10 fJ/bit.We have also considered the crosstalk problem.The circuit also realizes a function of identifying two-digit logic signal results.Our work provides a new idea for the design of ultrafast,ultra-low energy consumption all-optical devices and the implementation of high-density photonic integrated circuits.展开更多
A compact spectrometer on silicon is proposed and demonstrated with an ultrahigh resolution.It consists of a thermally-tunable ultra-high-Q resonator aiming at ultrahigh resolution and an array of wideband resonators ...A compact spectrometer on silicon is proposed and demonstrated with an ultrahigh resolution.It consists of a thermally-tunable ultra-high-Q resonator aiming at ultrahigh resolution and an array of wideband resonators for achieving a broadened working window.The present on-chip spectrometer has a footprint as compact as 0.35 mm^(2),and is realized with standard multi-project-wafer foundry processes.The measurement results show that the on-chip spectrometer has an ultra-high resolution Δλ of 5 pm and a wide working window of 10 nm.The dynamic range defined as the ratio of the working window and the wavelength resolution is as large as 1940,which is the largest for on-chip dispersive spectro-meters to the best of our knowledge.The present high-performance on-chip spectrometer has great potential for high-resolution spectrum measurement in the applications of gas sensing,food monitoring,health analysis,etc.展开更多
As Moore’s law approaching its end,electronics is hitting its power,bandwidth,and capacity limits.Photonics is able to overcome the performance limits of electronics but lacks practical photonic register and flexible...As Moore’s law approaching its end,electronics is hitting its power,bandwidth,and capacity limits.Photonics is able to overcome the performance limits of electronics but lacks practical photonic register and flexible control.Combining electronics and photonics provides the best of both worlds and is widely regarded as an important post-Moore’s direction.For stability and dynamic operations considerations,feedback tuning of photonic devices is required.For silicon photonics,the thermooptic effect is the most frequently used tuning mechanism due to the advantages of high efficiency and low loss.However,it brings new design requirements,creating new design challenges.Emerging applications,such as optical phased array,optical switches,and optical neural networks,employ a large number of photonic devices,making PCB tuning solutions no longer suitable.Electronic-photonic-converged solutions with compact footprints will play an important role in system scalability.In this paper,we present a unified model for thermo-optic feedback tuning that can be specialized to different applications,review its recent advances,and discuss its future trends.展开更多
We formulate a “Moore’s law” for photonic integrated circuits (PICs) and their spatial integration density using two methods. One is decomposing the integrated photonics devices of diverse types into equivalent bas...We formulate a “Moore’s law” for photonic integrated circuits (PICs) and their spatial integration density using two methods. One is decomposing the integrated photonics devices of diverse types into equivalent basic elements, which makes a comparison with the generic elements of electronic integrated circuits more meaningful. The other is making a complex compo- nent equivalent to a series of basic elements of the same functionality, which is used to calculate the integration density for func- tional components realized with different structures. The results serve as a benchmark of the evolution of PICs and we can con- clude that the density of integration measured in this way roughly increases by a factor of 2 per year. The prospects for a continued increase of spatial integration density are discussed.展开更多
Multi-level programmable photonic integrated circuits(PICs)and optical metasurfaces have gained widespread attention in many fields,such as neuromorphic photonics,opticalcommunications,and quantum information.In this ...Multi-level programmable photonic integrated circuits(PICs)and optical metasurfaces have gained widespread attention in many fields,such as neuromorphic photonics,opticalcommunications,and quantum information.In this paper,we propose pixelated programmable Si_(3)N_(4)PICs with record-high 20-level intermediate states at 785 nm wavelength.Such flexibility in phase or amplitude modulation is achieved by a programmable Sb_(2)S_(3)matrix,the footprint of whose elements can be as small as 1.2μm,limited only by the optical diffraction limit of anin-house developed pulsed laser writing system.We believe our work lays the foundation for laser-writing ultra-high-level(20 levels and even more)programmable photonic systems and metasurfaces based on phase change materials,which could catalyze diverse applications such as programmable neuromorphic photonics,biosensing,optical computing,photonic quantum computing,and reconfigurable metasurfaces.展开更多
Integrated circuit(IC)industry has fully considered the fact that the Moore’s Law is slowing down or ending.Alternative solutions are highly and urgently desired to break the physical size limits in the More-than-Moo...Integrated circuit(IC)industry has fully considered the fact that the Moore’s Law is slowing down or ending.Alternative solutions are highly and urgently desired to break the physical size limits in the More-than-Moore era.Integrated silicon photonics technology exhibits distinguished potential to achieve faster operation speed,less power dissipation,and lower cost in IC industry,because their COMS compatibility,fast response,and high monolithic integration capability.Particularly,compared with other on-chip resonators(e.g.microrings,2D photonic crystal cavities)silicon-on-insulator(SOI)-based photonic crystal nanobeam cavity(PCNC)has emerged as a promising platform for on-chip integration,due to their attractive properties of ultra-high Q/V,ultra-compact footprints and convenient integration with silicon bus-waveguides.In this paper,we present a comprehensive review on recent progress of on-chip PCNC devices for lasing,modulation,switching/filting and label-free sensing,etc.展开更多
基金Project supported by the National Innovative Training Program for College Students of China(Grant No.2023069)the University Research and Innovation Project of the National University of Defense Technology。
文摘Silicon nitride photonics has emerged as a promising integrated optical platform due to its broad transparency window,low optical loss,and mature fabrication technology.However,the inherent centrosymmetric crystal structure of silicon nitride fundamentally restricts its applications in second-order nonlinear optical processes.Monolayer transition metal dichalcogenides,particularly tungsten disulfide(WS_(2)),exhibit strong second-order nonlinear responses,making them ideal candidates for nonlinear photonic applications.Herein,we demonstrate a heterogeneously integrated platform combining silicon nitride waveguides with chemical vapor deposition(CVD)-grown monolayer WS_(2),enabling second harmonic generation.A specially designed silica cladding featuring gentle-slope profile on silicon nitride strip waveguides facilitates the integration of centimeter-scale WS_(2)film with photonic circuits.This approach provides a robust solution for incorporating second-order nonlinearity into silicon nitride photonic systems.The demonstrated platform holds significant potential for advancing quantum networks,visible-light lasers,and integrated optical modulation/detection systems.
基金supported by the National Natural Science Foundation of China(Grant Nos.52175509 and 52450158)the National Key Research and Development Program of China(Grant No.2023YFF1500900)+2 种基金the Shenzhen Fundamental Research Program(Grant No.JCYJ20220818100412027)the Guangdong-Hong Kong Technology Cooperation Funding Scheme Category C Platform(Grant No.SGDX20230116093543005)the Innovation Project of Optics Valley Laboratory(Grant No.OVL2023PY003)。
文摘Point-of-care diagnostics and inline quantitative phase imaging(QPI)drive the demand for portable,ultra-miniaturized,and robust optical imaging and metrology systems.We propose and demonstrate a wavefront sensor integrated into a photonic integrated circuit,enabling single-shot optical phase retrieval.We implemented an integrated wavefront sensor array with a spatial resolution of 17μm and a numerical aperture of 0.1.Furthermore,we experimentally demonstrated the reconstruction of wavefronts defined by Zernike polynomials,specifically the first 14 terms(Z_(1)to Z_(14)),achieving an average root mean square error below 0.07.This advancement paves the way for fully integrated,portable,and robust optical imaging systems,facilitating integrated wavefront sensors in demanding applications such as point-of-care diagnostics,endoscopy,in situ QPI,and inline surface profile measurement.
文摘Hybrid integration ofⅢ-Ⅴand ferroelectric materials is being broadly adopted to enhance functionalities in silicon photonic integrated circuits(PICs).Bonding and transfer printing have been the popular approaches for integration of III–V gain media with silicon PICs.Similar approaches are also being considered for ferroelectrics to enable larger RF modulation bandwidths,higher linearity,lower optical loss integrated optical modulators on chip.In this paper,we review existing integration strategies ofⅢ-Ⅴmaterials and present a route towards hybrid integration of bothⅢ-Ⅴand ferroelectrics on the same chip.We show that adiabatic transformation of the optical mode between hybrid ferroelectric and silicon sections enables efficient transfer of optical modal energies for maximum overlap of the optical mode with the ferroelectric media,similar to approaches adopted to maximize optical overlap with the gain section,thereby reducing lasing thresholds for hybridⅢ-Ⅴintegration with silicon PICs.Preliminary designs are presented to enable a foundry compatible hybrid integration route of diverse functionalities on silicon PICs.
文摘In many application scenarios,silicon(Si)photonics favors the integration of Ⅲ-Ⅴ gain material onto Si substrate to real-ize the on-chip light source.In addition to the current popular integration approaches of Ⅲ-Ⅴ-on-Si wafer bonding or dir-ect heteroepitaxial growth,a newly emerged promising solution of epitaxial regrowth on bonded substrate has attracted a lot of interests.High-quality Ⅲ-Ⅴ material realization and successful laser demonstrations show its great potential to be a promising integration platform for low-cost,high-integration density and highly scalable active-passive photonic integra-tion on Si.This paper reviews recent research work on this regrowth on bonded template platform including template de-velopments,regrown material characterizations and laser demonstrations.The potential advantages,opportunities and challenges of this approach are discussed.
基金supported by the Natural Science Foundation of Jiangsu Province(Grant Nos.BK20200743,BK20200755,and BK20170909)the National Natural Science Foundation of China(Grant Nos.62004103,62005130,61827804,U21A201550,and 61904086)+3 种基金the Natural Science Foundation of the Jiangsu Higher Education Institutions of China(Grant No.20KJB510019)the Foundation of Jiangsu Provincial Double-Innovation Doctor Program(Grant No.CZ002SC20021)the National Key Research and Development Program of China(Grant No.2022YFE0112000)the Higher Education Discipline Innovation Project(Grant No.D17018).The authors declare no conflicts of interest.
文摘Suitable optoelectronic integration platforms enable the realization of numerous application systems at the chip scale and are highly anticipated in the rapidly growing market.We report a GaN-on-silicon-based photonic integration platform and demonstrate a photonic integrated chip comprising a light source,modulator,photodiode(PD),waveguide,and Y-branch splitter based on this platform.The light source,modulator,and PD adopt the same multiple quantum wells(MQWs)diode structure without encountering incompatibility problems faced in other photonic integration approaches.The waveguide-structure MQW electro-absorption modulator has obvious indirect light modulation capability,and its absorption coefficient changes with the applied bias voltage.The results successfully validate the data transmission and processing using near-ultraviolet light with peak emission wavelength of 386 nm.The proposed complete active–passive approach that has simple fabrication and low cost provides new prospects for next-generation photonic integration.
基金the National Research Foundation(NRF)Singapore mid-sized center grant(NRF-MSG-2023-0002)FrontierCRP grant(NRF-F-CRP-2024-0006)+2 种基金A*STAR Singapore MTC RIE2025 project(M24W1NS005)IAF-PP project(M23M5a0069)Ministry of Education(MOE)Singapore Tier 2 project(MOE-T2EP50220-0014).
文摘The rise of large-scale artificial intelligence(AI)models,such as ChatGPT,Deep-Seek,and autonomous vehicle systems,has significantly advanced the boundaries of AI,enabling highly complex tasks in natural language processing,image recognition,and real-time decisionmaking.However,these models demand immense computational power and are often centralized,relying on cloud-based architectures with inherent limitations in latency,privacy,and energy efficiency.To address these challenges and bring AI closer to real-world applications,such as wearable health monitoring,robotics,and immersive virtual environments,innovative hardware solutions are urgently needed.This work introduces a near-sensor edge computing(NSEC)system,built on a bilayer AlN/Si waveguide platform,to provide real-time,energy-efficient AI capabilities at the edge.Leveraging the electro-optic properties of AlN microring resonators for photonic feature extraction,coupled with Si-based thermo-optic Mach-Zehnder interferometers for neural network computations,the system represents a transformative approach to AI hardware design.Demonstrated through multimodal gesture and gait analysis,the NSEC system achieves high classification accuracies of 96.77%for gestures and 98.31%for gaits,ultra-low latency(<10 ns),and minimal energy consumption(<0.34 pJ).This groundbreaking system bridges the gap between AI models and real-world applications,enabling efficient,privacy-preserving AI solutions for healthcare,robotics,and next-generation human-machine interfaces,marking a pivotal advancement in edge computing and AI deployment.
基金supported by the National Key Research and Development Program(No.2022YFE0107400)the internal research funding from Photonic View Technology Technology Co.,Ltd.the GuangCi Deep Mind Project of Ruijin Hospital Shanghai Jiao Tong University School of Medicine.
文摘The single-molecule detection tech-nique plays a pivotal role in elucidat-ing the fundamental mechanisms of various scientific processes at the molecular level,and holds essential im-portance in multiple fields including physics,biology,and chemistry.Re-cently,single-molecule detection has garnered increasing attention owing to its practical utility in medical diagno-sis,primarily due to its exceptional sensitivity and the minimal sample volume required for analysis.However,the conventional single-molecule technique,represented by total internal reflection microscopy,faces challenges such as sophisticated operation procedures and limited detection throughput,thereby impeding its broader application.To address these limitations,we have demonstrated single-molecule detection using an integrated silicon photonic chip,of-fering a cost-effective and user-friendly alternative.By employing basic optics,we efficiently introduce the excitation source for single-molecule fluorescence by harnessing the strong evanescent field of high refractive-index waveguides.Subsequently,fluorescence signals are collected using basic optics comprising a water-immersion objective,relay optics,and a digi-tal camera.Our results highlight a low-cost,high-throughput single-molecule technique achieved through the integrated silicon photonic chip.This innovative approach is promised to facilitate the widespread adoption of single-molecule fluorescence in medical diagnosis.
基金supported by the Shanghai Municipal Science and Technology Major Project, the Science and Technology Commission of Shanghai Municipality (No. 21DZ1100500)the Shanghai Frontiers Science Center Program (2021-2025 No. 20)+2 种基金the National Key Research and Development Program of China (No. 2021YFB2802000)the National Natural Science Foundation of China (No. 61975123, No. 62305217),the National Natural Science Foundation of China (No. 52075504)the Shanghai Pujiang Programme
文摘Rising demands for bandwidth,speed,and energy efficiency are reshaping the landscape of computing beyond the limits of von Neumann electronics.Neuromorphic photonics—using light to emulate neural computation—offers ultrafast,massively parallel,and low-energy information processing,positioning integrated photonic neural networks(IPNNs)as promising hardware for next-generation artificial intelligence(AI).By combining the architectural efficiency of neuromorphic models with the physical advantages of integrated photonics,IPNNs enable high-speed and programmable linear operations during the in-plane optical transmission,while leaving room for compact and reconfigurable on-chip optical nonlinearities and memory functions.Firstly,we review the concepts and principles of key building blocks in IPNN,that are photonic synapses,neurons,and photonic memristors which offer optical memory and storage capabilities.And then,we summarize the representative IPNN architectures and their recent advances,including coherent,parallel,diffractive,and reservoir computing,for photonic neuromorphic computing with high throughput and high efficiency.Finally,we outline practical considerations—calibration and stability of large-scale networks,routes toward co-integration with electronics,diffractive–interferometric hybrid architectures,and programmable photonic architectures for general AI purposes.We highlight a forward outlook on enabling IPNN with low energy consumption,robust photonic operations,and efficient training strategies,aiming to guide the maturation of general-purpose,low-power photonic AI.
基金financial supports from National Key Research and Development Program of China (2021YFA1401000)National Natural Science Foundation of China (62435009)+2 种基金Beijing Municipal Natural Science Foundation (Z220008)Zhuhai Industry University Research Collaboration Project (ZH-2201700121010)supported by the Center of High Performance Computing,Tsinghua University
文摘Novel thin films consisting of optical materials such as lithium niobate and barium titanate enable various high-performance integrated photonic devices.However,the nanofabrication of these devices requires high-quality etching of these thin films,necessitating the long-term development of the fabrication recipe and specialized equipment.Here we present a strong-confinement low-index-rib-loaded waveguide structure as the building block of various passive and active integrated photonic devices based on novel thin films.By optimizing this low-index-rib-loaded waveguide structure without etching the novel thin film,we can simultaneously realize strong optical power confinement in the thin film,low optical propagation loss,and strong electro-optic coupling for the fundamental transverse electric mode.Based on our low-index-rib-loaded waveguide structure,we designed and fabricated a thin film lithium niobate(TFLN)modulator,featuring a 3-dB modulation bandwidth over 110 GHz and a voltage-length product as low as 2.26 V·cm,which is comparable to those of the state-of-the-art etched TFLN modulators.By alleviating the etching of novel thin films,the proposed structure opens up new ways of fast proof-of-concept demonstration and even mass production of high-performance integrated electro-optic and nonlinear devices based on novel thin films.
基金Supported by the National Natural Science Foundation of China(62204250)Autonomous deployment project of State Key Laboratory of Materials for Integrated Circuits(SKLJC-Z2024-A05).
文摘In this paper,we present a broadband,high-extinction-ratio,nonvolatile 2×2 Mach-Zehnder interfer⁃ometer(MZI)optical switch based on the phase change material Sb_(2)Se_(3).The insertion loss(IL)is 0.84 dB and the extinction ratio(ER)reaches 28.8 dB at the wavelength of 1550 nm.The 3 dB bandwidth is greater than 150 nm.Within the 3 dB bandwidth,the ER is greater than 20.3 dB and 16.3 dB at bar and cross states,respectively.The power consumption for crystallization and amorphization of Sb_(2)Se_(3) is 105.86 nJ and 49 nJ,respectively.The switch holds significant promise for optical interconnects and optical computing applications.
基金supported by the National Natural Science Foundation of China(Grant Nos.T2325022,U23A2074,12204462,62275240,62435009,12474494,and 12204468)the Chinese Academy of Sciences(CAS)Project for Young Scientists in Basic Research(Grant No.253 YSBR-049)+3 种基金the Key Research and Development Program of Anhui Province(Grant No.2022b1302007)the China Postdoctoral Science Foundation(Grant No.2024M753083)the National Postdoctoral Program for Innovative Talents(Grant No.BX20240353)the Fundamental Research Funds for the Central Universities(Grant Nos.WK2030000107,WK2030000108,and WK2030000081)。
文摘Programmable two-particle quantum walks are crucial for advancing quantum simulation,computation,and information processing.Although disorder is traditionally associated with information loss,it can also facilitate emergent phenomena such as enhanced energy transport.Here,we experimentally realize a 12-step discrete-time quantum walk in programmable integrated photonic circuits,introducing tunable static and dynamic disorder to explore quantum transport dynamics.In periodic lattices,disorder induces light localization and drives a transition from quantum ballistic to classical diffusive behavior.In particular,quantum walks of correlated photons exhibit a disorder-induced bunching effect,accompanied by enhanced nonclassical correlations.Our platform provides a scalable framework for investigating multiparticle quantum dynamics in engineered environments,promoting the development of quantum optics toward large-scale applications.
基金We are grateful for financial supports from National Major Research and Development Program(No.2018YFB2200200)National Science Fund for Distinguished Young Scholars(61725503)+1 种基金Zhejiang Provincial Natural Science Foundation(LZ18F050001,LGF21F050003)National Natural Science Foundation of China(NSFC)(91950205,6191101294,11861121002,61905209,62175214,62111530147).
文摘Chip-scale programmable optical signal processors are often used to flexibly manipulate the optical signals for satisfying the demands in various applications,such as lidar,radar,and artificial intelligence.Silicon photonics has unique advantages of ultra-high integration density as well as CMOS compatibility,and thus makes it possible to develop large-scale programmable optical signal processors.The challenge is the high silicon waveguides propagation losses and the high calibration complexity for all tuning elements due to the random phase errors.In this paper,we propose and demonstrate a programmable silicon photonic processor for the first time by introducing low-loss multimode photonic waveguide spirals and low-random-phase-error Mach-Zehnder switches.The present chip-scale programmable silicon photonic processor comprises a 1×4 variable power splitter based on cascaded Mach-Zehnder couplers(MZCs),four Ge/Si photodetectors,four channels of thermally-tunable optical delaylines.Each channel consists of a continuously-tuning phase shifter based on a waveguide spiral with a micro-heater and a digitally-tuning delayline realized with cascaded waveguide-spiral delaylines and MZSs for 5.68 ps time-delay step.Particularly,these waveguide spirals used here are designed to be as wide as 2μm,enabling an ultralow propagation loss of 0.28 dB/cm.Meanwhile,these MZCs and MZSs are designed with 2-μm-wide arm waveguides,and thus the random phase errors in the MZC/MZS arms are negligible,in which case the calibration for these MZSs/MZCs becomes easy and furthermore the power consumption for compensating the phase errors can be reduced greatly.Finally,this programmable silicon photonic processor is demonstrated successfully to verify a number of distinctively different functionalities,including tunable time-delay,microwave photonic beamforming,arbitrary optical signal filtering,and arbitrary waveform generation.
基金financial supports from National Key Research and Development Program of China (2021YFB2801900,2021YFB2801901,2021YFB2801902,2021YFB2801904)National Natural Science Foundation of China (No.61974177)+1 种基金National Outstanding Youth Science Fund Project of National Natural Science Foundation of China (62022062)The Fundamental Research Funds for the Central Universities (QTZX23041).
文摘Neuromorphic photonic computing has emerged as a competitive computing paradigm to overcome the bottlenecks of the von-Neumann architecture.Linear weighting and nonlinear spike activation are two fundamental functions of a photonic spiking neural network(PSNN).However,they are separately implemented with different photonic materials and devices,hindering the large-scale integration of PSNN.Here,we propose,fabricate and experimentally demonstrate a photonic neuro-synaptic chip enabling the simultaneous implementation of linear weighting and nonlinear spike activation based on a distributed feedback(DFB)laser with a saturable absorber(DFB-SA).A prototypical system is experimentally constructed to demonstrate the parallel weighted function and nonlinear spike activation.Furthermore,a fourchannel DFB-SA laser array is fabricated for realizing matrix convolution of a spiking convolutional neural network,achieving a recognition accuracy of 87%for the MNIST dataset.The fabricated neuro-synaptic chip offers a fundamental building block to construct the large-scale integrated PSNN chip.
文摘Silicon photonics technology has drawn significant interest due to its potential for compact and high-performance photonic integrated circuits.The Ge-or III-V material-based avalanche photodiodes integrated on silicon photonics provide ideal high sensitivity optical receivers for telecommunication wavelengths.Herein,the last advances of monolithic and hetero-geneous avalanche photodiodes on silicon are reviewed,including different device structures and semiconductor systems.
基金the National Key Research and Development Program of China under Grant No.2018YFB2200403the National Natural Science Foundation of China under Grant Nos.11734001,91950204,92150302.
文摘The basic indexes of all-optical integrated photonic circuits include high-density integration,ultrafast response and ultralow energy consumption.Traditional methods mainly adopt conventional micro/nano-structures.The overall size of the circuit is large,usually reaches hundreds of microns.Besides,it is difficult to balance the ultrafast response and ultra-low energy consumption problem,and the crosstalk between two traditional devices is difficult to overcome.Here,we propose and experimentally demonstrate an approach based on inverse design method to realize a high-density,ultrafast and ultra-low energy consumption integrated photonic circuit with two all-optical switches controlling the input states of an all-optical XOR logic gate.The feature size of the whole circuit is only 2.5μm×7μm,and that of a single device is 2μm×2μm.The distance between two adjacent devices is as small as 1.5μm,within wavelength magnitude scale.Theoretical response time of the circuit is 150 fs,and the threshold energy is within 10 fJ/bit.We have also considered the crosstalk problem.The circuit also realizes a function of identifying two-digit logic signal results.Our work provides a new idea for the design of ultrafast,ultra-low energy consumption all-optical devices and the implementation of high-density photonic integrated circuits.
基金financial supports from National Major Research and Development Program(No.2018YFB2200200)National Science Fund for Distinguished Young Scholars(61725503)+2 种基金National Natural Science Foundation of China(NSFC)(6191101294,91950205)Zhejiang Provincial Natural Science Foundation(LZ18F050001,LD19F050001)The Fundamental Research Funds for the Central Universities.Leading Innovative and Entrepreneur Team Introduction Program of Zhejiang(2021R01001).
文摘A compact spectrometer on silicon is proposed and demonstrated with an ultrahigh resolution.It consists of a thermally-tunable ultra-high-Q resonator aiming at ultrahigh resolution and an array of wideband resonators for achieving a broadened working window.The present on-chip spectrometer has a footprint as compact as 0.35 mm^(2),and is realized with standard multi-project-wafer foundry processes.The measurement results show that the on-chip spectrometer has an ultra-high resolution Δλ of 5 pm and a wide working window of 10 nm.The dynamic range defined as the ratio of the working window and the wavelength resolution is as large as 1940,which is the largest for on-chip dispersive spectro-meters to the best of our knowledge.The present high-performance on-chip spectrometer has great potential for high-resolution spectrum measurement in the applications of gas sensing,food monitoring,health analysis,etc.
基金This work was supported by the National Key Research and Development Program of China(No.2018YFA0704400).
文摘As Moore’s law approaching its end,electronics is hitting its power,bandwidth,and capacity limits.Photonics is able to overcome the performance limits of electronics but lacks practical photonic register and flexible control.Combining electronics and photonics provides the best of both worlds and is widely regarded as an important post-Moore’s direction.For stability and dynamic operations considerations,feedback tuning of photonic devices is required.For silicon photonics,the thermooptic effect is the most frequently used tuning mechanism due to the advantages of high efficiency and low loss.However,it brings new design requirements,creating new design challenges.Emerging applications,such as optical phased array,optical switches,and optical neural networks,employ a large number of photonic devices,making PCB tuning solutions no longer suitable.Electronic-photonic-converged solutions with compact footprints will play an important role in system scalability.In this paper,we present a unified model for thermo-optic feedback tuning that can be specialized to different applications,review its recent advances,and discuss its future trends.
文摘We formulate a “Moore’s law” for photonic integrated circuits (PICs) and their spatial integration density using two methods. One is decomposing the integrated photonics devices of diverse types into equivalent basic elements, which makes a comparison with the generic elements of electronic integrated circuits more meaningful. The other is making a complex compo- nent equivalent to a series of basic elements of the same functionality, which is used to calculate the integration density for func- tional components realized with different structures. The results serve as a benchmark of the evolution of PICs and we can con- clude that the density of integration measured in this way roughly increases by a factor of 2 per year. The prospects for a continued increase of spatial integration density are discussed.
基金funded by the National Nature Science Foundation of China(Grant Nos.52175509 and 52130504)National Key Research and Development Program of China(2017YFF0204705)2021 Postdoctoral Innovation Research Plan of Hubei Province(0106100226)。
文摘Multi-level programmable photonic integrated circuits(PICs)and optical metasurfaces have gained widespread attention in many fields,such as neuromorphic photonics,opticalcommunications,and quantum information.In this paper,we propose pixelated programmable Si_(3)N_(4)PICs with record-high 20-level intermediate states at 785 nm wavelength.Such flexibility in phase or amplitude modulation is achieved by a programmable Sb_(2)S_(3)matrix,the footprint of whose elements can be as small as 1.2μm,limited only by the optical diffraction limit of anin-house developed pulsed laser writing system.We believe our work lays the foundation for laser-writing ultra-high-level(20 levels and even more)programmable photonic systems and metasurfaces based on phase change materials,which could catalyze diverse applications such as programmable neuromorphic photonics,biosensing,optical computing,photonic quantum computing,and reconfigurable metasurfaces.
基金This work was supported by the National Key R&D Program of China(Grant No.2016YFA0301302 and No.2018YFB 2200401)the National Natural Science Foundation of China(Grant Nos.11974058,11825402,11654003,61435001)+4 种基金Beijing Academy of Quantum Information Sciences(Grant No.Y18G20)Key R&D Program of Guangdong Province(Grant No.2018B030329001)Beijing Nova Program(Grant No.Z201100006820125)from Beijing Municipal ScienceTechnology Commission,Fundamental Research Funds for the Central Universities(Grant No.2018XKJC05)the High Performance Computing Platform of Peking University.
文摘Integrated circuit(IC)industry has fully considered the fact that the Moore’s Law is slowing down or ending.Alternative solutions are highly and urgently desired to break the physical size limits in the More-than-Moore era.Integrated silicon photonics technology exhibits distinguished potential to achieve faster operation speed,less power dissipation,and lower cost in IC industry,because their COMS compatibility,fast response,and high monolithic integration capability.Particularly,compared with other on-chip resonators(e.g.microrings,2D photonic crystal cavities)silicon-on-insulator(SOI)-based photonic crystal nanobeam cavity(PCNC)has emerged as a promising platform for on-chip integration,due to their attractive properties of ultra-high Q/V,ultra-compact footprints and convenient integration with silicon bus-waveguides.In this paper,we present a comprehensive review on recent progress of on-chip PCNC devices for lasing,modulation,switching/filting and label-free sensing,etc.
