Ion beam figuring （IBF） technology is an effective technique for fabricating continuous phase plates （CPPs） with small feature structures. This study proposes a multi-pass IBF approach with different beam diameter...Ion beam figuring （IBF） technology is an effective technique for fabricating continuous phase plates （CPPs） with small feature structures. This study proposes a multi-pass IBF approach with different beam diameters based on the frequency filtering method to improve the machining accuracy and efficiency of CPPs during IBF. We present the selection principle of the frequency filtering method, which incorporates different removal functions that maximize material removal over the topographical frequencies being imprinted. Large removal functions are used early in the fabrication to figure the surface profile with low frequency. Small removal functions are used to perform final topographical correction with higher fre- quency and larger surface gradient. A high-precision surface can be obtained as long as the filtering frequency is suitably selected. This method maximizes the high removal efficiency of the large removal function and the high corrective capability of the small removal function. Consequently, the fast convergence of the machining accuracy and efficiency can be achieved.展开更多
基金Acknowledgements We gratefully acknowledge the support of the National Natural Science Foundation of China （Grant Nos. 91323302 and 61505259） and the Program for New Century Excellent Talents in University （NCET- 13 -0165）.
文摘Ion beam figuring （IBF） technology is an effective technique for fabricating continuous phase plates （CPPs） with small feature structures. This study proposes a multi-pass IBF approach with different beam diameters based on the frequency filtering method to improve the machining accuracy and efficiency of CPPs during IBF. We present the selection principle of the frequency filtering method, which incorporates different removal functions that maximize material removal over the topographical frequencies being imprinted. Large removal functions are used early in the fabrication to figure the surface profile with low frequency. Small removal functions are used to perform final topographical correction with higher fre- quency and larger surface gradient. A high-precision surface can be obtained as long as the filtering frequency is suitably selected. This method maximizes the high removal efficiency of the large removal function and the high corrective capability of the small removal function. Consequently, the fast convergence of the machining accuracy and efficiency can be achieved.
