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Research on ultraprecision turning and profile-error compensation technology for multi-axis linkage
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作者 Xipeng Guo Jiabin Yuan +1 位作者 Wei Shi Shaohui Yin 《Nanotechnology and Precision Engineering》 2026年第1期60-69,共10页
In an ultraprecision turning process for small-diameter optical aspheric workpieces,tool-profile errors induce mid-frequency errors in the workpiece profile,limiting further improvements in precision.In this study,an ... In an ultraprecision turning process for small-diameter optical aspheric workpieces,tool-profile errors induce mid-frequency errors in the workpiece profile,limiting further improvements in precision.In this study,an XZB three-axis linkage ultraprecision machining method is proposed,and the effects of tool-center errors are analyzed.To address residual errors in Z-direction profile-error compensation,a workpiece normal-profile-error compensation method is proposed.After XZB three-axis linkage turning and compensation,the workpiece profile error(PV)reaches 0.086μm,surpassing the precision of XZ two-axis machining,and mid-frequency errors are reduced.Compared with Z-direction profile-error compensation,which results in a profile error of 0.092μm,normal-profile-error compensation reduces PV to 0.047μm,considerably improving aspheric accuracy.Experimental results demonstrate that XZB three-axis linkage machining significantly improves the aspheric workpiece profile,enhancing both its accuracy and surface quality.This method reduces mid-frequency errors,and the subsequent application of normal-profile-error compensation further refines the profile,achieving higher overall accuracy. 展开更多
关键词 Aspheric workpiece Ultraprecision turning XZB three-axis linkage normal error compensation
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Designing of Quasi-universal Compensator for Testing Aspherical Surface 被引量:1
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作者 WANGWensheng XUBin 《Semiconductor Photonics and Technology》 CAS 1998年第1期40-44,61,共6页
According to the theory of testing aspherical surface by normal aberration compensation method,the designing method of quasi-universal compensator is studied.On the basis of third-order aberration theory,after calcula... According to the theory of testing aspherical surface by normal aberration compensation method,the designing method of quasi-universal compensator is studied.On the basis of third-order aberration theory,after calculating and optimizing with an optical design program,the structure parameters of a compensator are obtained.This new compensator could be used in Twyman-Green interferometer,and in measurement of a certain range of paraboloid ellipsoid and hyperboloid.The compensation accuracy is more than 0.02 λ . 展开更多
关键词 Aspherical Surface normal Aberration compensation Method Quasi-universal Compensator
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New Bezout Identity and Parameterizationof All Properly Stabilizing NormalControllers for Singular Systems 被引量:1
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作者 GAO Zhiwei LIU Baokun LI Guangquan(Department of Automation, Tianjin University, Tianjin 300072, China) 《Systems Science and Systems Engineering》 CSCD 1999年第1期9-21,共13页
A new construction approach of the Bezout identity for singular systems with directcontrol feedthrough is developed here on the basis of a normal dynamic compensator design, and theparameterization of all Properly sta... A new construction approach of the Bezout identity for singular systems with directcontrol feedthrough is developed here on the basis of a normal dynamic compensator design, and theparameterization of all Properly stabilizing normal controllers is characterized and interpreted in astate-space form. Finally, an illustrative example is given. 展开更多
关键词 singular systems factorization approach Bezout identity normal dynamic compensators singular observer-based controllers
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