The influence of nodule defects on the characteristics of femtosecond laser-induced damage has not been fully investigated.In this study,two types of 800 nm/1064 nm dual-band HfO_(2)=Si O_(2) high-reflection films wit...The influence of nodule defects on the characteristics of femtosecond laser-induced damage has not been fully investigated.In this study,two types of 800 nm/1064 nm dual-band HfO_(2)=Si O_(2) high-reflection films with different configurations were analyzed.Combined with finite-difference time-domain electric field simulation and focused ion beam analysis,the initial state and growth process of femtosecond laser damage of nodules were explored.In particular,the sequence of blister damage determined by the film design and the inner damage caused by nodules were clarified.The rule of the laser-induced damage threshold of different size nodules was obtained.The difference in the damage behavior of nodules in the two types of films was elucidated.展开更多
Various coatings in high-power laser facilities suffer from laser damage due to nodule defects.We propose a nodule dome removal(NDR)strategy to eliminate unwanted localized electric-field(E-field)enhancement caused by...Various coatings in high-power laser facilities suffer from laser damage due to nodule defects.We propose a nodule dome removal(NDR)strategy to eliminate unwanted localized electric-field(E-field)enhancement caused by nodule defects,thereby improving the laser-induced damage threshold(LIDT)of laser coatings.It is theoretically demonstrated that the proposed NDR strategy can reduce the localized E-field enhancement of nodules in mirror coatings,polarizer coatings and beam splitter coatings.An ultraviolet(UV)mirror coating is experimentally demonstrated using the NDR strategy.The LIDT is improved to about 1.9 and 2.2 times for the UV mirror coating without artificial nodules and the UV mirror coating with artificial nodule seeds with a diameter of 1000 nm,respectively.The NDR strategy,applicable to coatings prepared by different deposition methods,improves the LIDT of laser coating without affecting other properties,such as the spectrum,stress and surface roughness,indicating its broad applicability in high-LIDT laser coatings.展开更多
The laser-induced damage threshold(LIDT)of plate laser beam splitter(PLBS)coatings is closely related to the subsurface absorption defects of the substrate.Herein,a two-step deposition temperature method is proposed t...The laser-induced damage threshold(LIDT)of plate laser beam splitter(PLBS)coatings is closely related to the subsurface absorption defects of the substrate.Herein,a two-step deposition temperature method is proposed to understand the effect of substrate subsurface impurity defects on the LIDT of PLBS coatings.Firstly,BK7 substrates are heat-treated at three different temperatures.The surface morphology and subsurface impurity defect distribution of the substrate before and after the heat treatment are compared.Then,a PLBS coating consisting of alternating HfO2–Al2O3 mixture and SiO2 layers is designed to achieve a beam-splitting ratio(transmittance to reflectance,s-polarized light)of approximately 50:50 at 1053 nm and an angle of incidence of 45◦,and it is prepared under four different deposition processes.The experimental and simulation results show that the subsurface impurity defects of the substrate migrate to the surface and accumulate on the surface during the heat treatment,and become absorption defect sources or nodule defect seeds in the coating,reducing the LIDT of the coating.The higher the heat treatment temperature,the more evident the migration and accumulation of impurity defects.A lower deposition temperature(at which the coating can be fully oxidized)helps to improve the LIDT of the PLBS coating.When the deposition temperature is 140◦C,the LIDT(s-polarized light,wavelength:1064 nm,pulse width:9 ns,incident angle:45◦)of the PLBS coating is 26.2 J/cm2,which is approximately 6.7 times that of the PLBS coating deposited at 200◦C.We believe that the investigation into the laser damage mechanism of PLBS coatings will help to improve the LIDT of coatings with partial or high transmittance at laser wavelengths.展开更多
基金supported by the National Natural Science Foundation of China(Nos.61675156 and 61975153)。
文摘The influence of nodule defects on the characteristics of femtosecond laser-induced damage has not been fully investigated.In this study,two types of 800 nm/1064 nm dual-band HfO_(2)=Si O_(2) high-reflection films with different configurations were analyzed.Combined with finite-difference time-domain electric field simulation and focused ion beam analysis,the initial state and growth process of femtosecond laser damage of nodules were explored.In particular,the sequence of blister damage determined by the film design and the inner damage caused by nodules were clarified.The rule of the laser-induced damage threshold of different size nodules was obtained.The difference in the damage behavior of nodules in the two types of films was elucidated.
基金supported by the National Natural Science Foundation of China(61975215)the Youth Innovation Promotion Association of the Chinese Academy of Sciences,Strategic Priority Research Program of the Chinese Academy of Sciences(XDA25020206)the Science and Technology Planning Project of Shanghai Municipal Science&Technology Commission(21DZ1100400).
文摘Various coatings in high-power laser facilities suffer from laser damage due to nodule defects.We propose a nodule dome removal(NDR)strategy to eliminate unwanted localized electric-field(E-field)enhancement caused by nodule defects,thereby improving the laser-induced damage threshold(LIDT)of laser coatings.It is theoretically demonstrated that the proposed NDR strategy can reduce the localized E-field enhancement of nodules in mirror coatings,polarizer coatings and beam splitter coatings.An ultraviolet(UV)mirror coating is experimentally demonstrated using the NDR strategy.The LIDT is improved to about 1.9 and 2.2 times for the UV mirror coating without artificial nodules and the UV mirror coating with artificial nodule seeds with a diameter of 1000 nm,respectively.The NDR strategy,applicable to coatings prepared by different deposition methods,improves the LIDT of laser coating without affecting other properties,such as the spectrum,stress and surface roughness,indicating its broad applicability in high-LIDT laser coatings.
基金This study was supported by the National Natural Science Foundation of China(61975215)Youth Innovation Promotion Association of the Chinese Academy of Sciences,Strategic Priority Research Program of the Chinese Academy of Sciences(XDA25020206)the Science and Technology Planning Project of Shanghai Municipal Science&Technology Commission(21DZ1100400).
文摘The laser-induced damage threshold(LIDT)of plate laser beam splitter(PLBS)coatings is closely related to the subsurface absorption defects of the substrate.Herein,a two-step deposition temperature method is proposed to understand the effect of substrate subsurface impurity defects on the LIDT of PLBS coatings.Firstly,BK7 substrates are heat-treated at three different temperatures.The surface morphology and subsurface impurity defect distribution of the substrate before and after the heat treatment are compared.Then,a PLBS coating consisting of alternating HfO2–Al2O3 mixture and SiO2 layers is designed to achieve a beam-splitting ratio(transmittance to reflectance,s-polarized light)of approximately 50:50 at 1053 nm and an angle of incidence of 45◦,and it is prepared under four different deposition processes.The experimental and simulation results show that the subsurface impurity defects of the substrate migrate to the surface and accumulate on the surface during the heat treatment,and become absorption defect sources or nodule defect seeds in the coating,reducing the LIDT of the coating.The higher the heat treatment temperature,the more evident the migration and accumulation of impurity defects.A lower deposition temperature(at which the coating can be fully oxidized)helps to improve the LIDT of the PLBS coating.When the deposition temperature is 140◦C,the LIDT(s-polarized light,wavelength:1064 nm,pulse width:9 ns,incident angle:45◦)of the PLBS coating is 26.2 J/cm2,which is approximately 6.7 times that of the PLBS coating deposited at 200◦C.We believe that the investigation into the laser damage mechanism of PLBS coatings will help to improve the LIDT of coatings with partial or high transmittance at laser wavelengths.
