The 193 nm deep-ultraviolet(DUV)laser plays a critical role in advanced semiconductor chip manufacturing[1,2],micro-nano material characterization[3,4]and biomedical analysis[5,6],due to its high spatial resolution an...The 193 nm deep-ultraviolet(DUV)laser plays a critical role in advanced semiconductor chip manufacturing[1,2],micro-nano material characterization[3,4]and biomedical analysis[5,6],due to its high spatial resolution and short wavelength.Efficient and compact 193 nm DUV laser source thus becomes a hot research area.Currently,193 nm Ar F excimer gas laser is widely employed in DUV lithography systems and serves as the enabling technology for 7 and 5 nm semiconductor fabrication.展开更多
良性前列腺增生(benign prostatic hyperplasia,BPH)是一种以前列腺肥大为特征的医学疾病,尤其常见于50岁以上的中老年男性,是导致其发生排尿困难最常见的疾病,严重程度的排尿困难者,手术解除梗阻是治疗中老年前列腺增生最有效的方法^([...良性前列腺增生(benign prostatic hyperplasia,BPH)是一种以前列腺肥大为特征的医学疾病,尤其常见于50岁以上的中老年男性,是导致其发生排尿困难最常见的疾病,严重程度的排尿困难者,手术解除梗阻是治疗中老年前列腺增生最有效的方法^([1])。如今,经尿道前列腺电切术(transurethral resection of the prostate,TURP)是标准的治疗方法^([2]),但该术式术后性功能障碍发生率为78%,并发症发生率为2.3%~22%^([3])。展开更多
基金supported by the National Natural Science Foundation of China(Grant Nos.62450006,62304217,62274157,62127807,62234011,62034008,62074142,62074140)Tianshan Innovation Team Program(Grant No.2022TSYCTD0005)+1 种基金Strategic Priority Research Program of the Chinese Academy of Sciences(Grant No.XDB0880000)Youth Innovation Promotion Association of the Chinese Academy of Sciences(Grant Nos.2023124,Y2023032)。
文摘The 193 nm deep-ultraviolet(DUV)laser plays a critical role in advanced semiconductor chip manufacturing[1,2],micro-nano material characterization[3,4]and biomedical analysis[5,6],due to its high spatial resolution and short wavelength.Efficient and compact 193 nm DUV laser source thus becomes a hot research area.Currently,193 nm Ar F excimer gas laser is widely employed in DUV lithography systems and serves as the enabling technology for 7 and 5 nm semiconductor fabrication.
文摘良性前列腺增生(benign prostatic hyperplasia,BPH)是一种以前列腺肥大为特征的医学疾病,尤其常见于50岁以上的中老年男性,是导致其发生排尿困难最常见的疾病,严重程度的排尿困难者,手术解除梗阻是治疗中老年前列腺增生最有效的方法^([1])。如今,经尿道前列腺电切术(transurethral resection of the prostate,TURP)是标准的治疗方法^([2]),但该术式术后性功能障碍发生率为78%,并发症发生率为2.3%~22%^([3])。