The 193 nm deep-ultraviolet(DUV)laser plays a critical role in advanced semiconductor chip manufacturing[1,2],micro-nano material characterization[3,4]and biomedical analysis[5,6],due to its high spatial resolution an...The 193 nm deep-ultraviolet(DUV)laser plays a critical role in advanced semiconductor chip manufacturing[1,2],micro-nano material characterization[3,4]and biomedical analysis[5,6],due to its high spatial resolution and short wavelength.Efficient and compact 193 nm DUV laser source thus becomes a hot research area.Currently,193 nm Ar F excimer gas laser is widely employed in DUV lithography systems and serves as the enabling technology for 7 and 5 nm semiconductor fabrication.展开更多
The thorium-229 nucleus possesses a uniquely low-energy nuclear transition(-8.4 eV,corresponding to a wavelength of-148 nm),which is the first confirmed nuclear excitation that can be coherently manipulated by narrow-...The thorium-229 nucleus possesses a uniquely low-energy nuclear transition(-8.4 eV,corresponding to a wavelength of-148 nm),which is the first confirmed nuclear excitation that can be coherently manipulated by narrow-linewidth lasers.Consequently,this transition has garnered widespread interest over the past decades.Owing to the small nuclear size and strong resistance to environmental perturbations,a thorium-based nuclear clock is theoretically capable of achieving an unprecedented fractional frequency uncertainty at the 10^(−20) level,offering great promise as a next-generation frequency standard.Among the key ingredients of such a thorium-based nuclear clock,a high-performance 148 nm excitation source is of critical importance.Since the feasibility of directly exciting the transition,as well as the overall clock performance,depends heavily on the availability and quality of such a source,the development of high-quality 148 nm laser sources represents a frontier for scientists worldwide.In this article,we provide a systematic overview of the current development of 148 nm laser sources.First,we briefly introduce the scientific motivation for high-precision spectroscopy of the thorium nuclear transition and the corresponding technical requirements for 148 nm laser sources.Then,we summarize four main types of existing 148 nm source generation schemes and their working principles,along with recent progress in nuclear transition measurements using such sources.Finally,we discuss potential future directions.展开更多
基金supported by the National Natural Science Foundation of China(Grant Nos.62450006,62304217,62274157,62127807,62234011,62034008,62074142,62074140)Tianshan Innovation Team Program(Grant No.2022TSYCTD0005)+1 种基金Strategic Priority Research Program of the Chinese Academy of Sciences(Grant No.XDB0880000)Youth Innovation Promotion Association of the Chinese Academy of Sciences(Grant Nos.2023124,Y2023032)。
文摘The 193 nm deep-ultraviolet(DUV)laser plays a critical role in advanced semiconductor chip manufacturing[1,2],micro-nano material characterization[3,4]and biomedical analysis[5,6],due to its high spatial resolution and short wavelength.Efficient and compact 193 nm DUV laser source thus becomes a hot research area.Currently,193 nm Ar F excimer gas laser is widely employed in DUV lithography systems and serves as the enabling technology for 7 and 5 nm semiconductor fabrication.
基金supported by the Strategic Priority Research Program of the Chinese Academy of Sciences(Grant No.XDB0920000)the National Natural Science Foundation of China(Grant Nos.12121004 and U21A20435)+1 种基金the Chinese Academy of Sciences Project for Young Scientists in Basic Research(Grant No.YSBR-055)the Science and Technology Department of Hubei Province(Grant No.2025AFA004)。
文摘The thorium-229 nucleus possesses a uniquely low-energy nuclear transition(-8.4 eV,corresponding to a wavelength of-148 nm),which is the first confirmed nuclear excitation that can be coherently manipulated by narrow-linewidth lasers.Consequently,this transition has garnered widespread interest over the past decades.Owing to the small nuclear size and strong resistance to environmental perturbations,a thorium-based nuclear clock is theoretically capable of achieving an unprecedented fractional frequency uncertainty at the 10^(−20) level,offering great promise as a next-generation frequency standard.Among the key ingredients of such a thorium-based nuclear clock,a high-performance 148 nm excitation source is of critical importance.Since the feasibility of directly exciting the transition,as well as the overall clock performance,depends heavily on the availability and quality of such a source,the development of high-quality 148 nm laser sources represents a frontier for scientists worldwide.In this article,we provide a systematic overview of the current development of 148 nm laser sources.First,we briefly introduce the scientific motivation for high-precision spectroscopy of the thorium nuclear transition and the corresponding technical requirements for 148 nm laser sources.Then,we summarize four main types of existing 148 nm source generation schemes and their working principles,along with recent progress in nuclear transition measurements using such sources.Finally,we discuss potential future directions.
