The integration of atomically thin van der Waals(vd W)materials into next-generation electronic systems holds great promise for extending Moore's Law and enabling high-density,energy-efficient devices[1-4].These m...The integration of atomically thin van der Waals(vd W)materials into next-generation electronic systems holds great promise for extending Moore's Law and enabling high-density,energy-efficient devices[1-4].These materials,such as transition metal dichalcogenides,graphene,and hexagonal boron nitride,are ideal candidates for both front-end and back-end integration in siliconcompatible platforms[5].展开更多
文摘The integration of atomically thin van der Waals(vd W)materials into next-generation electronic systems holds great promise for extending Moore's Law and enabling high-density,energy-efficient devices[1-4].These materials,such as transition metal dichalcogenides,graphene,and hexagonal boron nitride,are ideal candidates for both front-end and back-end integration in siliconcompatible platforms[5].
