A DC motor and ball-screw-driven stage is studied for long-range nanometer positioning.The closed-loop system with high-gain PID controller is specially designed for high-precision point-to-point (PTP) positioning.A p...A DC motor and ball-screw-driven stage is studied for long-range nanometer positioning.The closed-loop system with high-gain PID controller is specially designed for high-precision point-to-point (PTP) positioning.A particular input shape of the closed-loop system is proposed to avoid overshoot and vibration by taking into account the nonlinear characteristics of the feed drive.Friction modeling and identification are avoided and the effect of friction is greatly suppressed by the controller.Experimental and simulated results demonstrate long-range nanometer positioning is achieved without overshoot.In PTP positioning from 10 mm down to 5 nm,the positioning error is within ±5 nm and response dynamic is satisfactory.展开更多
基金Funded by Development Program for Outstanding Young Teachers in Harbin Institute of Technology (HITQNJS.2008.013)
文摘A DC motor and ball-screw-driven stage is studied for long-range nanometer positioning.The closed-loop system with high-gain PID controller is specially designed for high-precision point-to-point (PTP) positioning.A particular input shape of the closed-loop system is proposed to avoid overshoot and vibration by taking into account the nonlinear characteristics of the feed drive.Friction modeling and identification are avoided and the effect of friction is greatly suppressed by the controller.Experimental and simulated results demonstrate long-range nanometer positioning is achieved without overshoot.In PTP positioning from 10 mm down to 5 nm,the positioning error is within ±5 nm and response dynamic is satisfactory.
