期刊文献+
共找到141篇文章
< 1 2 8 >
每页显示 20 50 100
Surface Modification With Zinc and Zn-Ni Alloy Compositionally Modulated Multilayer Coatings 被引量:15
1
作者 FEI Jing-yin LIANG Guo-zheng XIN Wen-li WANG Wei-kang 《Journal of Iron and Steel Research International》 SCIE EI CAS CSCD 2006年第4期61-67,共7页
Zinc and Zn-Ni alloy compositionally modulated multilayer (CMM) coatings were electrodeposited on to a steel substrate by the successive deposition of zinc and Zn-Ni alloy sublayers from dual baths. The coated sampl... Zinc and Zn-Ni alloy compositionally modulated multilayer (CMM) coatings were electrodeposited on to a steel substrate by the successive deposition of zinc and Zn-Ni alloy sublayers from dual baths. The coated samples were evaluated in terms of the surface appearance, surface and cross-sectional morphologies, as well as corrosion resistance. The microstructural characteristics that were examined using the field emission gun scanning electron microscopy (FEGSEM) confirmed the layered structure, grain refinement of the zinc and Zn-Ni alloy CMM coatings, and revealed the existence of microcracks caused by the internal stress in the thick Zn-Ni alloy sublayers. The corrosion resistance that was evaluated by means of the salt spray test shows that the zinc and Zn-Ni alloy CMM coatings were more corrosion-resistant than the monolithic coatings of zinc or Zn-Ni alloy of the same thickness. The possible reasons for the better protective performance of Zn-Ni/Zn CMM coatings were given on the basis of the analysis on the micrographic features of zinc and Zn-Ni alloy CMM eoatings after the corrosion test. A probable corrosion mechanism of zinc and Zn-Ni alloy CMM coatings was also proposed. 展开更多
关键词 ELECTRODEPOSITION compositionally modulated multilayer coating Zn-Ni alloy corrosion resistance
在线阅读 下载PDF
Corrosion Performance of Zinc and Zinc-cobalt Alloy Compositionally Modulated Multilayer (CMM) Coatings 被引量:2
2
作者 费敬银 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2006年第4期40-44,共5页
Varieties of zinc and Zn-Co alloy compositionally modulated multilayer (CMM) coatings were electrodeposited onto steel substrates using dual bath technique. The surface and cross-sectional morphologies of coated sam... Varieties of zinc and Zn-Co alloy compositionally modulated multilayer (CMM) coatings were electrodeposited onto steel substrates using dual bath technique. The surface and cross-sectional morphologies of coated samples were examined using scanning electron microscopy ( SEM ). The existence of iuternal stress in ZnCo alloy deposits was confirmed by the cross-sectional morphalogies for the occurrence of micro-cracks in the thick Zn-Co alloy deposit alone. The corrosion performance was evaluated using neutral salt spray testing, corrosion potential measurement and anodic polarization methods. The experimental results slum, that the zinc and Zn- Co alloy CMM coatings were more corrosion-resistant than the monolithic coatings of zinc or Zn-Co alloy alone with a similar thickness. The analysis on the micrographic features of zinc and Zn-Co alloy CMM coatings, using field emission gun scanning electron microscopy (FEGSEM) after corrosion testing, explains the probable reusons why the Zn-Co/ Zn CMM coating system has a better protective performance. 展开更多
关键词 corrosion resistance Zn-Co alloy composhionally modulated multilayer coating
在线阅读 下载PDF
Electrodeposition of Compositionally Modulated Zinc-cobalt Alloy Multilayer Coatings 被引量:3
3
作者 费敬银 梁国正 辛文利 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2005年第2期259-265,共7页
The effects of pulse parameters on the cobalt content, surface morphologies and grain size of Zn-Co alloy deposits were studied using a pulse plating technique with a square-wave current containing reverse pulse. Aver... The effects of pulse parameters on the cobalt content, surface morphologies and grain size of Zn-Co alloy deposits were studied using a pulse plating technique with a square-wave current containing reverse pulse. Average current density and reverse anodic current density amongst the variables investigated have very strong effects on the cobalt content in the Zn-Co alloy deposits. Grain size, surface appearance and internal stress in the deposit were improved significantly by introducing the reverse current. Varieties of Zn-Co alloy compositionally modulated multilayer (CMM) coatings with large differences in cobalt contents for different sublayers were electrodeposited by designing corresponding waveforms using a computer-aided pulse plater and characterized in terms of surface morphologies. Cross-sectional morphologies of the Zn-Co alloy CMM coatings, examined using field emission gun scanning electron microscopy (FEGSEM), confirmed the layered structure. 展开更多
关键词 zinc-cobalt alloy ELECTRODEPOSITION composltionally modulated multilayer coating
在线阅读 下载PDF
Low insertion loss silicon-based spatial light modulator with high reflective materials outside Fabry–Perot cavity
4
作者 Li-Fei Tian Ying-Xin Kuang +1 位作者 Zhong-Chao Fan Zhi-Yong Li 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第10期376-380,共5页
The extinction ratio and insertion loss of spatial light modulator are subject to the material problem, thus limiting its applications. One reflection-type silicon-based spatial light modulator with high reflective ma... The extinction ratio and insertion loss of spatial light modulator are subject to the material problem, thus limiting its applications. One reflection-type silicon-based spatial light modulator with high reflective materials outside the Fabry-Perot cavity is demonstrated in this paper. The reflectivity values of the outside-cavity materials with different film layer numbers are simulated. The reflectivity values of 6-pair Ta2O5/SiO2 films at 1550 nm are experimentally verified to be as high as 99.9%. The surfaces of 6-pair Ta2O5/SiO2 films are smooth: their root-mean-square roughness values are as small as 0.53 nm. The insertion loss of the device at 1550 nm is only 1.2 dB. The high extinction ratio of the device at 1550 nm and 11 V is achieved to be 29.7 dB. The spatial light modulator has a high extinction ratio and low insertion loss for applications. 展开更多
关键词 spatial light modulator HIGH REFLECTIVE materials silicon-based FABRY-PEROT cavity
原文传递
Corrosion behaviors of zinc and Zn-Ni alloy compositionally modulated multilayer coatings
5
作者 Jingyin Fei Guozheng Liang Wenli Xin Weikang Wang Jianghong Liu 《Journal of University of Science and Technology Beijing》 CSCD 2005年第6期545-552,共8页
Zinc and Zn-Ni alloy compositionally modulated multilayer (CMM) coatings were electrodeposited from dual baths. The coated samples were evaluated in terms of surface appearance, surface and cross-sectional morpholog... Zinc and Zn-Ni alloy compositionally modulated multilayer (CMM) coatings were electrodeposited from dual baths. The coated samples were evaluated in terms of surface appearance, surface and cross-sectional morphologies, as well as corrosion resistance. The results obtained from the salt spray test show that the zinc and Zn-Ni alloy CMM coatings are more corrosion-resistant than the monolithic coatings of zinc or Zn-Ni alloy alone with a similar thickness. The corrosion potential measurement and anodic polarisation tests were undertaken to examine the probable corrosion mechanisms of zinc and Zn-Ni alloy CMM coatings. Analysis on the micrographic features of zinc and Zn-Ni alloy CMM coatings after the corrosion test explains the probable reasons why the Zn-Ni/Zn CMM coatings have a better protective performance. Surface morphologies and compositional analysis of the remaining coating material of Zn-Ni alloy deposit after the corrosion test confirms the dezincification mechanism of the Zn-Ni alloy deposit during the corrosion process. 展开更多
关键词 ELECTRODEPOSITION Zn-Ni alloy compositionally modulated multilayer coatings
在线阅读 下载PDF
Structural design of Cr/GLC films for high tribological performance in artificial seawater:Cr/GLC ratio and multilayer structure 被引量:12
6
作者 Lei Li Peng Guo +3 位作者 Lin-Lin Liu Xiaowei Li Peiling Ke Aiying Wang 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2018年第8期1273-1280,共8页
In this paper, graphite-like carbon (GLC) films with Cr buffer layer were fabricated by DC magnetron sputtering technique with the thickness ratio of Cr to GLC films varying from 1:2 to 1:20. The effect of Cr]GLC ... In this paper, graphite-like carbon (GLC) films with Cr buffer layer were fabricated by DC magnetron sputtering technique with the thickness ratio of Cr to GLC films varying from 1:2 to 1:20. The effect of Cr]GLC modulation ratio on microstructure, mechanical and tribological properties in artificial seawater was mainly investigated by scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS), nano-indenter and a reciprocating sliding tribo-meter. The propagation of defects plays an important role in the evolution of delamination, which is critical to wear failure of GLC films in artificial seawa- ter. Designing the proper multilayer structure could inhibit the defects propagation and thus protect the basis material. The multilayer Cr/GLC film with optimized ratio of 1:3 demonstrates a low average friction coefficient of 0.08 ± 0.006 and wear rate of (2.3 ± 0.3) × 10^-8 mm3/(N m) in artificial seawater, respectively. 展开更多
关键词 Cr/GLC films multilayer modulation ratio Tribological properties
原文传递
Structure and tribological properties of Si/a-C:H(Ag)multilayer film in stimulated body fluid 被引量:1
7
作者 Yan-Xia Wu Yun-Lin Liu +5 位作者 Ying Liu Bing Zhou Hong-Jun Hei Yong Ma Sheng-Wang Yu Yu-Cheng Wu 《Chinese Physics B》 SCIE EI CAS CSCD 2020年第11期412-419,共8页
Si/a-C:H(Ag)multilayer films with different modulation periods are prepared to test their potential applications in human body.The composition,microstructure,mechanical and tribological properties in the simulated bod... Si/a-C:H(Ag)multilayer films with different modulation periods are prepared to test their potential applications in human body.The composition,microstructure,mechanical and tribological properties in the simulated body fluid are investigated.The results show the concentration of Ag first decreases and then increases with the modulation period decreasing from 984 nm to 250 nm.Whereas the C content has an opposite variation trend.Notably,the concentration of Ag plays a more important role than the modulation period in the properties of the multilayer film.The a-C:H sublayer of the film with an appropriate Ag concentration(8.97 at.%)(modulation period of 512 nm)maintains the highest sp3/sp2 ratio,surface roughness and hardness,and excellent tribological property in the stimulated body fluid.An appropriate number of Ag atoms and size of Ag atom allow the Ag atoms to easily enter into the contact interface for load bearing and lubricating.This work proves that the Ag nanoparticles in the a-C:H sublayer plays a more important role in the tribological properties of the composite-multilayer film in stimulated body fluid condition. 展开更多
关键词 Si/a-C:H(Ag)multilayer film modulation periods Ag concentration tribological properties
原文传递
基于多尺度卷积融合编码网络的调制识别方法
8
作者 李国军 朱思源 +2 位作者 郑建忠 王杰 叶昌荣 《通信学报》 北大核心 2025年第8期78-89,共12页
为了解决现有调制识别方法因特征提取不足而难以获得高准确率的问题,提出了一种基于Transformer架构的调制识别方法。该模型通过使用不同尺寸的卷积核,增强了对信号多尺度特征的提取能力,并将这些特征进行融合,以提升模型的特征学习能力... 为了解决现有调制识别方法因特征提取不足而难以获得高准确率的问题,提出了一种基于Transformer架构的调制识别方法。该模型通过使用不同尺寸的卷积核,增强了对信号多尺度特征的提取能力,并将这些特征进行融合,以提升模型的特征学习能力,降低后续处理对计算资源的需求。同时,利用多头自注意力机制对信号进行并行处理,以捕捉信号的多样化特征。利用双分支多层感知器增强模型的适应性和多样性学习能力,同时提高模型的运行速度。实验结果表明,该模型在测试阶段具有良好的稳定性和泛化能力,在固定训练批次大小的情况下,测试批次大小改变对模型性能的影响不大。针对RML2018.01A数据集,当信噪比达到10 dB时,识别准确率能够达到96%以上。 展开更多
关键词 卷积神经网络 调制识别 TRANSFORMER 多尺度融合 多层感知器
在线阅读 下载PDF
W/Ta纳米层状金属的拉伸力学性能和塑性变形机制
9
作者 刘雪鹏 颜家豪 《振动工程学报》 北大核心 2025年第3期637-644,共8页
W/Ta纳米层状金属是一种典型的BCC/BCC结构的层状金属材料,在核聚变装置中具有广阔的应用前景。本文采用原子尺度分子动力学方法研究了W/Ta纳米层状金属在单轴拉伸过程中的力学性能和塑性变形行为,进一步分析了调制周期对W/Ta纳米层状... W/Ta纳米层状金属是一种典型的BCC/BCC结构的层状金属材料,在核聚变装置中具有广阔的应用前景。本文采用原子尺度分子动力学方法研究了W/Ta纳米层状金属在单轴拉伸过程中的力学性能和塑性变形行为,进一步分析了调制周期对W/Ta纳米层状金属力学响应的影响。结果表明,W(110)/Ta(110)界面上会形成网络状的失配位错结构,它不仅可以作为位错形核的源头,而且可以吸收层状金属结构中的位错。微结构演化分析表明,拉伸过程中主要经历三个变形阶段,即线弹性、塑性屈服和塑性流变阶段。位错首先在Ta层中形核扩展,导致应力急剧下降,随后Ta层中的位错穿越界面至W层中并增殖扩展,导致W层发生屈服。试样的塑性屈服主要由Ta层主导,流变阶段的塑性变形由W层和Ta层中的位错及其演化共同决定。调制周期越大,界面数量越少,Ta层中位错形核较少,同样位错被界面吸收的数量较少而且界面阻碍位错的效果减弱,因此屈服强度和平均塑性流变强度分别增加和降低。 展开更多
关键词 纳米层状金属 分子动力学模拟 力学性能 塑性变形机制 调制周期
在线阅读 下载PDF
Electro-optical dual modulation on resistive switching behavior in BaTiO3/BiFeO3/TiO2 heterojunction 被引量:1
10
作者 Jia-Jia Zhao Jin-Shuai Zhang +4 位作者 Feng Zhang Wei Wang Hai-Rong He Wang-Yang Cai Jin Wang 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第12期292-297,共6页
The novel BaTiO3/BiFeO3/TiO2 multilayer heterojunction is prepared on a fluorine-doped tinoxide(FTO) substrate by the sol–gel method. The results indicate that the Pt/Ba TiO3/BiFeO3/TiO2/FTO heterojunction exhibits s... The novel BaTiO3/BiFeO3/TiO2 multilayer heterojunction is prepared on a fluorine-doped tinoxide(FTO) substrate by the sol–gel method. The results indicate that the Pt/Ba TiO3/BiFeO3/TiO2/FTO heterojunction exhibits stable bipolar resistive switching characteristic, good retention performance, and reversal characteristic. Under different pulse voltages and light fields, four stable resistance states can also be realized. The analysis shows that the main conduction mechanism of the resistive switching characteristic of the heterojunction is space charge limited current(SCLC) effect. After the comprehensive analysis of the band diagram and the P–E ferroelectric property of the multilayer heterojunction, we can deduce that the SCLC is formed by the effect of the oxygen vacancy which is controlled by ferroelectric polarizationmodulated change of interfacial barrier. And the effective photo-generated carrier also plays a regulatory role in resistance state(RS), which is formed by the double ferroelectric layer Ba TiO3/BiFeO3 under different light fields. This research is of potential application values for developing the multi-state non-volatile resistance random access memory(RRAM) devices based on ferroelectric materials. 展开更多
关键词 ferroelectric multilayer heterojunction resistive switching characteristic electro-optical dual modulation multi-state resistance
原文传递
调制周期对AlCrSiN/AlCrMoSiN多层膜微结构和性能的影响 被引量:1
11
作者 王重阳 刘艳梅 +5 位作者 阎兵 朱建博 薛锐 徐远剑 Kim Kwang Ho 王铁钢 《表面技术》 EI CAS CSCD 北大核心 2024年第15期57-67,共11页
目的通过优化AlCrSiN/AlCrMoSiN多层复合涂层的调制周期,提升涂层的力学性能和摩擦学性能。方法采用高功率脉冲磁控溅射与脉冲直流磁控溅射复合技术,固定调制比为5∶1,制备具有不同调制周期的AlCrSiN/AlCrMoSiN多层复合涂层。利用XRD和... 目的通过优化AlCrSiN/AlCrMoSiN多层复合涂层的调制周期,提升涂层的力学性能和摩擦学性能。方法采用高功率脉冲磁控溅射与脉冲直流磁控溅射复合技术,固定调制比为5∶1,制备具有不同调制周期的AlCrSiN/AlCrMoSiN多层复合涂层。利用XRD和SEM分析涂层物相组成,观察其微观形貌;借助纳米压痕仪、划痕仪、高温摩擦试验机及轮廓仪测试涂层的硬度、弹性模量、临界载荷,以及摩擦磨损性能。结果掺杂Mo元素后,AlCrMoSiN层生成了大量的非晶相,并观察到沿AlN(111)晶面共格外延生长。AlCrSiN/AlCrMoSiN多层复合涂层表面颗粒随着调制周期的增大逐渐变小,整体呈“花椰菜”状,且致密、无缺陷。随着调制周期的增大,硬度、H/E和H^(3)/E^(*2)呈先升高后降低的趋势;涂层的平均摩擦因数呈先降低后升高的趋势。当调制周期为145 nm(AlCrSiN层厚度约为120 nm,AlCrMoSiN层厚度约为25 nm)时,多层涂层中层间界面清晰,涂层的硬度最高,约为24.9GPa,摩擦因数和磨损率均最低,分别为0.57、1.46×10^(-6)mm^(3)/(N·m),临界载荷为75.8N。结论多层复合涂层的调制周期对其结构和性能具有重要影响,当调制周期为145nm时,AlCrSiN/AlCrMoSiN多层复合涂层具有最佳的综合性能。 展开更多
关键词 磁控溅射 多层复合涂层 AlCrSiN/AlCrMoSiN 调制周期 摩擦学行为
在线阅读 下载PDF
调制周期数对Mo/AZO成分调制多层膜透光、反光特性以及电性能的影响
12
作者 张邵奇 吴隽 +3 位作者 王凯丰 宋坤峰 卢志红 祝柏林 《武汉科技大学学报》 CAS 北大核心 2024年第2期107-113,共7页
采用射频(RF)和单极中频脉冲直流(UMFPDC)磁控溅射技术,在300℃下制备了Mo/AZO成分调制多层膜。测试结果表明,Mo/AZO成分调制多层膜以(002)为取向的六方纤锌矿型ZnO结构为主;薄膜中Mo的化学态随薄膜厚度而变化,当薄膜厚度为1.67 nm时,M... 采用射频(RF)和单极中频脉冲直流(UMFPDC)磁控溅射技术,在300℃下制备了Mo/AZO成分调制多层膜。测试结果表明,Mo/AZO成分调制多层膜以(002)为取向的六方纤锌矿型ZnO结构为主;薄膜中Mo的化学态随薄膜厚度而变化,当薄膜厚度为1.67 nm时,Mo除单质态外,还存在部分+4和+5的离子价态,当薄膜厚度降至0.83 nm时,已无单质态Mo;调制周期数对成分调制多层膜的透光、反光特性以及电性能影响显著,当调制周期数为3时,Mo/AZO成分调制多层膜的综合性能达到最佳,电阻率、霍尔迁移率和载流子浓度分别为8.64×10^(-4)Ω·cm、8.78 cm^2)/(V·s)和8.23×10^(20)cm^(-3)。在保持金属层、半导体层总厚度不变的情况下,通过改变调制周期数可以增加薄膜的光学透过率并可在较宽范围内调节多层膜的综合性能,这为制备综合性能优异的金属/半导体型透光导电薄膜提供了一条切实可行的途径。 展开更多
关键词 磁控溅射 Mo/AZO多层膜 调制周期 光性能 电性能
在线阅读 下载PDF
The effects of modulation period,modulation ratio,and deposition temperature on microstructure and mechanical properties of ZrB_2/W multilayers 被引量:5
13
作者 LIU MengYin,TAN Ming,LIU GuangQing,WANG HaiYuan,XUE FengYing,DENG XiangYun & LI DeJun College of Physics and Electronic Information Science,Tianjin Normal University,Tianjin 300387,China 《Science China(Technological Sciences)》 SCIE EI CAS 2010年第9期2350-2354,共5页
Monolithic ZrB2,W coatings and ZrB2/W multilayers with different modulation periods and modulation ratios were synthesized by ion beam assisted deposition at room temperature and 400°C.X-ray diffraction (XRD),sca... Monolithic ZrB2,W coatings and ZrB2/W multilayers with different modulation periods and modulation ratios were synthesized by ion beam assisted deposition at room temperature and 400°C.X-ray diffraction (XRD),scanning electron microscopy (SEM),surface profiler,and nanoindention were employed to investigate the influences of the deposition temperature and the modulation period on the growth,textures,interface structure,and mechanical properties of the multilayers.The results indicated that the multilayer with modulation period of 13 nm synthesized at room temperature possessed a higher hardness of 23.8 GPa.Deposition temperature gave a significant contribution to mechanical property enhancement.The 400°C-deposition temperature led to a maximum hardness and elastic modulus value of 32.1 and 399.1 GPa for ZrB2/W multilayer with a modulation period of 6.7 nm.Its critical load increased to 42.8 mN and residual stress decreased to -0.7 GPa.A higher deposition temperature can cause an increase in interfacial atomic mixture and mobility of surface species,which induceds an increase in areal atomic density and dislocation pinning.These results as well as small nanoscale grain sizes should be related to hardness increase. 展开更多
关键词 ion beam assisted DEPOSITION NANOSCALE multilayerS modulATION period modulATION ratio DEPOSITION temperature hardness
原文传递
基于神经网络的散热兼容型红外隐身薄膜设计 被引量:1
14
作者 张鲁豫 胡兰芳 +1 位作者 高菲菲 张文杰 《工程热物理学报》 EI CAS CSCD 北大核心 2024年第2期514-519,共6页
军事目标的红外辐射特征取决于红外大气窗口的发射率和目标温度水平。传统红外隐身涂层在全红外波段保持低发射率但并不能通过非大气窗口辐射散热。本文利用深度神经网络设计出一组由锗、铂、硅顺次排列,可用于兼容辐射散热的红外隐身... 军事目标的红外辐射特征取决于红外大气窗口的发射率和目标温度水平。传统红外隐身涂层在全红外波段保持低发射率但并不能通过非大气窗口辐射散热。本文利用深度神经网络设计出一组由锗、铂、硅顺次排列,可用于兼容辐射散热的红外隐身多层薄膜结构。分析表明:该结构在3~5μm和8~14μm的红外大气窗口探测波段中具有0.20和0.23的低平均发射率,而在5~8μm的非大气窗口波段中具有0.87的高平均发射率,可兼容辐射散热,并且该兼容性对偏振和方向不敏感。该薄膜结构光谱选择性的微观机理可归因于锗层的选择性透过、铂–硅–钛合金形成的Fabry-Perot共振,以及铂层和钛合金基底的本征吸收。 展开更多
关键词 辐射特性调控 深度神经网络 多层薄膜结构
原文传递
调制周期对CrN_(x)/TiAlSiN多层涂层抗冲蚀性的影响
15
作者 李花 李刘合 +5 位作者 李多铎 唐令 罗阳 韩明月 郑英晓 宋万万 《表面技术》 EI CAS CSCD 北大核心 2024年第19期82-92,140,共12页
目的在砂粒环境下,改善TiAlSiN硬质涂层于高角度下的抗冲蚀性能。方法采用电弧离子镀复合高功率脉冲磁控溅射技术,制备不同调制周期下的CrN_(x)/TiAlSiN多层涂层。应用电子扫描电镜、X射线衍射仪、纳米压痕仪和划痕仪对涂层的显微结构... 目的在砂粒环境下,改善TiAlSiN硬质涂层于高角度下的抗冲蚀性能。方法采用电弧离子镀复合高功率脉冲磁控溅射技术,制备不同调制周期下的CrN_(x)/TiAlSiN多层涂层。应用电子扫描电镜、X射线衍射仪、纳米压痕仪和划痕仪对涂层的显微结构、物相组成、纳米硬度、弹性模量以及结合力进行分析,于冲蚀试验平台对涂层抗冲蚀性能进行评价(Al_(3)O_(2)砂粒平均粒径为50μm,冲蚀速度为30 m/s,角度为90°)。结果涂层结构致密,由面心立方结构c-(Ti,Al)N、c-Cr、c-CrN和六方h-Cr_(2)N相构成。随着CrN_(x)子层结构的引入,TiAlSiN子层对应的(220)取向逐渐消失,(111)衍射晶面逐渐呈现。随着调制周期减少,CrN_(x)子层对应的h-Cr_(2)N(300)和c-CrN(220)衍射峰强度表现出先逐渐降低、后缓慢增加的规律。涂层结合变化幅度不大,处于68~71 N。虽然纳米硬度和弹性模量逐渐下降,分别从(37.5±0.46)GPa和(339.92±1.85)GPa下降至(31.2±0.40)GPa和(267.50±7.98)GPa,但H/E韧性指标逐渐增加,从0.110增加至0.116。在最小调制周期下,涂层表现出最优抗冲蚀性能,其冲蚀速率仅TiAlSiN硬质涂层的1/5。结论调制周期的减少增加了涂层界面数目,对扩展的裂纹起到了很好偏转作用,提升了涂层韧性,贡献了涂层抗冲蚀性能。在砂粒反复冲击作用下,于涂层中产生了交互作用的横纵裂纹,致使涂层以碎屑脆性剥落机制而失效,破坏特征表现为逐层剥落。 展开更多
关键词 电弧复合磁控 多层涂层 调制周期 抗冲蚀性能 损伤破坏
在线阅读 下载PDF
高隔离SAW双工器模组的研制 被引量:1
16
作者 蒲志勇 杨桃均 +4 位作者 罗文汀 张伟 龚旭 杨卫东 温桎茹 《压电与声光》 CAS 北大核心 2024年第4期429-434,共6页
为进一步提高LTE B3双工器频段间隔离度,利用系统级封装(SIP)技术设计了一种高隔离声表面波(SAW)双工器模组。该模组由2个SAW双工器和3个耦合器组成,利用TX-RX路径的相位相消及耦合器的隔离度,实现单颗SAW双工器上下行链路间隔离度的提... 为进一步提高LTE B3双工器频段间隔离度,利用系统级封装(SIP)技术设计了一种高隔离声表面波(SAW)双工器模组。该模组由2个SAW双工器和3个耦合器组成,利用TX-RX路径的相位相消及耦合器的隔离度,实现单颗SAW双工器上下行链路间隔离度的提高。采用阻抗元滤波器架构,实现了单颗SAW双工器隔离度达51 dB。采用宽边带状线多层螺旋耦合线结构实现了工作宽带宽、集成小型化的3 dB耦合器。研制的模组测试结果表明,在B3频段内,尺寸为8.0 mm×8.0 mm×2.0 mm,插入损耗小于3.2 dB,回波损耗大于13 dB,隔离度优于65 dB,承受瞬间功率可达34 dBm。 展开更多
关键词 高隔离 SAW双工器 耦合器 模组 频分双工 多层螺旋耦合线
在线阅读 下载PDF
多层硅基模块晶圆级键合腔体的可靠性 被引量:1
17
作者 马将 郜佳佳 杨栋 《半导体技术》 CAS 北大核心 2024年第7期674-681,共8页
晶圆级键合是实现多层硅基模块内部互连的关键工艺,针对硅片在晶圆级键合工艺中的开裂现象,建立了硅基刻蚀腔体在键合工艺中的力学模型,经样件实验验证,该模型可以准确预估腔体的开裂现象。在此基础上设计了硅片键合实验,通过引入硅通孔... 晶圆级键合是实现多层硅基模块内部互连的关键工艺,针对硅片在晶圆级键合工艺中的开裂现象,建立了硅基刻蚀腔体在键合工艺中的力学模型,经样件实验验证,该模型可以准确预估腔体的开裂现象。在此基础上设计了硅片键合实验,通过引入硅通孔(TSV)的应力集中因子确定了硅基晶圆级键合的应力失效判据。而后通过参数化仿真系统性探究了硅基刻蚀腔体面积及腔体形状等因素对键合应力的影响规律,并绘制出刻蚀腔体设计可靠范围图。结果表明,硅片键合可靠腔体临界面积约为21 mm^(2),且腔体形状越接近正方形越易开裂。该研究为多层硅基模块刻蚀腔体的可靠性设计提供了参考。 展开更多
关键词 晶圆级键合 多层硅基模块 刻蚀腔体 硅通孔(TSV) 可靠性
原文传递
Influence of modulation ratio on structure and properties of nanoscale ZrB_2/ZrAlN multilayered coatings 被引量:1
18
作者 LI DeJun 1,KANG YuanBin 1,DONG Lei 1,DENG XiangYun 1,LIU Hao 2 &SUN XueLiang 2 1College of Physics and Electronic Information Science,Tianjin Normal University,Tianjin 300387,China 2 Department of Mechanical&Materials Engineering,University of Western Ontario,London ON,Canada 《Science China(Technological Sciences)》 SCIE EI CAS 2010年第3期772-775,共4页
ZrB2/ZrAlN multilayered coatings with various modulation ratios(t ZrB2:t ZrAlN)and constant modulation periods were prepared by magnetron sputtering system at room temperature.SEM,XRD,surface profiler and nano-indente... ZrB2/ZrAlN multilayered coatings with various modulation ratios(t ZrB2:t ZrAlN)and constant modulation periods were prepared by magnetron sputtering system at room temperature.SEM,XRD,surface profiler and nano-indenter were employed to investigate the influences of tZ rB 2:tZrAlNon the microstructure and mechanical properties of the coatings.Sharp interfaces and nanoscale multilayered modulation were confirmed by SEM.The multilayer with modulation period of 40 nm and ratio of 3:1 displayed the highest hardness(36.4 GPa)and critical fracture load(76.477 mN)with lower stress.The polycrystalline structure and multilayered modulate structure were directly responsible for the enhanced mechanical properties. 展开更多
关键词 ZrB2/ZrAlN multilayerED coating MAGNETRON sputtering modulation ratio NANOSCALE
原文传递
电弧离子镀TiN/ZrN多层膜力学性能研究
19
作者 杨皓 郭圆萌 +1 位作者 东帅 黄美东 《真空科学与技术学报》 CAS CSCD 北大核心 2024年第6期537-542,共6页
采用电弧离子镀制备了调制比和总厚度一定,周期数不同的一系列TiN/ZrN多层膜,研究了周期数对多层膜力学性能的影响。使用X射线衍射仪、扫描电子显微镜分析了多层膜的结构形貌,利用显微硬度计、往复摩擦试验机和多功能材料表面性能试验... 采用电弧离子镀制备了调制比和总厚度一定,周期数不同的一系列TiN/ZrN多层膜,研究了周期数对多层膜力学性能的影响。使用X射线衍射仪、扫描电子显微镜分析了多层膜的结构形貌,利用显微硬度计、往复摩擦试验机和多功能材料表面性能试验仪测试了薄膜的力学性能和摩擦学性能。结果表明,多层膜都呈现单一的面心立方结构,以柱状晶结构生长,表面致密光滑,界面效应明显,力学性能受到界面结构和择优取向的影响,当周期数为50时,TiN具有明显的(200)择优取向,多层膜的硬度达到最大值2568 Hv,多层膜的摩擦学性能受到表面形貌和硬度的影响,当周期数为40时,具有最低的摩擦系数为0.47,磨损率随着硬度的增加而减少,在50周期时的磨损率为6.9×10^(-6)mm^(3)·N^(-1)·m^(-1),耐磨性最佳。 展开更多
关键词 电弧离子镀 多层膜 调制周期 硬度 摩擦学性能
原文传递
调制周期与调制比对Cu/Nb纳米多层膜结构和性能的影响
20
作者 郭中正 闫万珺 +3 位作者 张殿喜 杨秀凡 蒋宪邦 周丹彤 《当代化工研究》 CAS 2024年第6期45-48,共4页
为研究调制周期λ和调制比η对Cu/Nb纳米多层膜结构和性能的影响,用磁控溅射沉积Cu/Nb多层膜,λ=30~150 nm,η=1、1.5及2。多层膜微观结构与形貌用X射线衍射仪、扫描电镜及原子力显微镜分析,性能用微力拉伸仪、纳米压痕仪及四探针仪测... 为研究调制周期λ和调制比η对Cu/Nb纳米多层膜结构和性能的影响,用磁控溅射沉积Cu/Nb多层膜,λ=30~150 nm,η=1、1.5及2。多层膜微观结构与形貌用X射线衍射仪、扫描电镜及原子力显微镜分析,性能用微力拉伸仪、纳米压痕仪及四探针仪测试。结果表明,Cu/Nb多层膜的结构和性能受控于λ和η。Cu和Nb层分别呈Cu(111)和Nb(110)织构,且均为纳米晶结构。在Cu/Nb界面处,Cu扩散进入Nb层。表面Cu层颗粒尺寸随Cu层增厚而增大。随λ或η减小,Cu/Nb多层膜的屈服强度σ_(0.2)、显微硬度H和电阻率ρ都呈增加趋势。而裂纹萌生临界应变ε_(c)则与1/λ或η呈正相关。 展开更多
关键词 Cu/Nb纳米多层膜 调制周期 调制比 屈服强度 显微硬度 电阻率
在线阅读 下载PDF
上一页 1 2 8 下一页 到第
使用帮助 返回顶部