A waveguide grating antenna(WGA)is an important component in optical phased array(OPA)systems featured by all-solid-state configurations for 3D imaging.The high-performance WGAs with dual polarization,easy fabrication...A waveguide grating antenna(WGA)is an important component in optical phased array(OPA)systems featured by all-solid-state configurations for 3D imaging.The high-performance WGAs with dual polarization,easy fabrication,high radiation efficiency,and high angular resolution are desired for OPAs.This paper presents,to our knowledge,a novel polarization-insensitive WGA design capable of supporting both TE and TM modes,featuring a critical feature size exceeding 250 nm.The designed device demonstrates that this grating antenna exhibits similar upward radiation efficiencies(~85% for TE and ~80% for TM)and radiation angles at a wavelength of 1550 nm.The experimental results show that grating antenna perturbation strength can be achieved at less than 4.8×10^(-4)/μm for both polarizations.The measured beam divergences are 0.01°(TE)and 0.0101°(TM),with a wavelength scanning sensitivity of 0.123 deg/nm.The proposed polarization-insensitive WGA with high performance is compatible with the 3μm commercial platform and an OPA system based on the designed WGA has been designed and simulated.展开更多
基金National Key Research and Development Program of China(2023YFB2805002)National Natural Science Foundation of China(62275259,62341509)+2 种基金Autonomous Deployment Project of State Key Laboratory of Materials for Integrated Circuits(SKLJC-X2024-B05)Explorer Program of Shanghai(24TS1400600)CAS Project for Young Scientists in Basic Research(YSBR-056)。
文摘A waveguide grating antenna(WGA)is an important component in optical phased array(OPA)systems featured by all-solid-state configurations for 3D imaging.The high-performance WGAs with dual polarization,easy fabrication,high radiation efficiency,and high angular resolution are desired for OPAs.This paper presents,to our knowledge,a novel polarization-insensitive WGA design capable of supporting both TE and TM modes,featuring a critical feature size exceeding 250 nm.The designed device demonstrates that this grating antenna exhibits similar upward radiation efficiencies(~85% for TE and ~80% for TM)and radiation angles at a wavelength of 1550 nm.The experimental results show that grating antenna perturbation strength can be achieved at less than 4.8×10^(-4)/μm for both polarizations.The measured beam divergences are 0.01°(TE)and 0.0101°(TM),with a wavelength scanning sensitivity of 0.123 deg/nm.The proposed polarization-insensitive WGA with high performance is compatible with the 3μm commercial platform and an OPA system based on the designed WGA has been designed and simulated.
