The pursuit of high speed,large capacity,and low power consumption of electronic and photonic systems drives the long-term tendency of device miniaturization.The gate width in typical transistors has been reduced to s...The pursuit of high speed,large capacity,and low power consumption of electronic and photonic systems drives the long-term tendency of device miniaturization.The gate width in typical transistors has been reduced to several nanometers in 7 to 2 nm photolithographic processes,while nano-electronic devices from two-dimensional(2D)materials possess even smaller critical dimensions.展开更多
基金supported by the National Key R&D Program of China(2024YFB4505100)。
文摘The pursuit of high speed,large capacity,and low power consumption of electronic and photonic systems drives the long-term tendency of device miniaturization.The gate width in typical transistors has been reduced to several nanometers in 7 to 2 nm photolithographic processes,while nano-electronic devices from two-dimensional(2D)materials possess even smaller critical dimensions.
