Ambient suspended particulate matter(PM)(primarily with particle diameter 2.5m or less,i.e.,PM2.5)can adversely affect ecosystems and human health.Currently,optical particle sensors based on light scattering dominate ...Ambient suspended particulate matter(PM)(primarily with particle diameter 2.5m or less,i.e.,PM2.5)can adversely affect ecosystems and human health.Currently,optical particle sensors based on light scattering dominate the portable PM sensing market.However,the light scattering method has poor adaptability to different-sized PM and adverse environmental conditions.Here,we design and develop a portable PM sensing microsystem that consists of a micromachined virtual impactor(VI)for particle separation,a thermophoretic deposition chip for particle collection,and an extended-gate field-effect transistor(FET)for particle analysis.This system can realize on-site separation,collection,and analysis of aerosol particles without being influenced by environmental factors.In this study,the design of the VI is thoroughly analyzed by numerical simulation,and mixtures of different-sized silicon dioxide(SiO2)particles are used in an experimental verification of the performance of the VI and FET.Considering the low cost and compact design of the whole system,the proposed PM analysis microsystem has potential for PM detection under a wide range of conditions,such as heavily polluted industrial environments and for point-of-need outdoor and indoor air quality monitoring.展开更多
The rapid progress of micro/nanoelectronic systems and miniaturized portable devices has tremendously increased the urgent demands for miniaturized and integrated power supplies.Miniaturized energy storage devices(MES...The rapid progress of micro/nanoelectronic systems and miniaturized portable devices has tremendously increased the urgent demands for miniaturized and integrated power supplies.Miniaturized energy storage devices(MESDs),with their excellent properties and additional intelligent functions,are considered to be the preferable energy supplies for uninterrupted powering of microsystems.In this review,we aim to provide a comprehensive overview of the background,fundamentals,device configurations,manufacturing processes,and typical applications of MESDs,including their recent advances.Particular attention is paid to advanced device configurations,such as two-dimensional(2D)stacked,2D planar interdigital,2D arbitrary-shaped,three-dimensional planar,and wire-shaped structures,and their corresponding manufacturing strategies,such as printing,scribing,and masking techniques.Additionally,recent developments in MESDs,including microbatteries and microsupercapacitors,as well as microhybrid metal ion capacitors,are systematically summarized.A series of on-chip microsystems,created by integrating functional MESDs,are also highlighted.Finally,the remaining challenges and future research scope on MESDs are discussed.展开更多
The popularization of portable,implantable and wearable microelectronics has greatly stimulated the rapid development of high-power planar micro-supercapacitors(PMSCs).Particularly,the introduction of new functionalit...The popularization of portable,implantable and wearable microelectronics has greatly stimulated the rapid development of high-power planar micro-supercapacitors(PMSCs).Particularly,the introduction of new functionalities(e.g.,high voltage,flexibility,stretchability,self-healing,electrochromism and photo/thermal response)to PMSCs is essential for building multifunctional PMSCs and their smart selfpowered integrated microsystems.In this review,we summarized the latest advances in PMSCs from various functional microdevices to their smart integrated microsystems.Primarily,the functionalities of PMSCs are characterized by three major factors to emphasize their electrochemical behavior and unique scope of application.These include but are not limited to high-voltage outputs(realized through asymmetric configuration,novel electrolyte and modular integration),mechanical resilience that includes various feats of flexibility or stretchability,and response to stimuli(self-healing,electrochromic,photo-responsive,or thermal-responsive properties).Furthermore,three representative integrated microsystems including energy harvester-PMSC,PMSC-energy consumption,and all-in-one selfpowered microsystems are elaborately overviewed to understand the emerging intelligent interaction models.Finally,the key perspectives,challenges and opportunities of PMSCs for powering smart microelectronics are proposed in brief.展开更多
With the rapid development of flexible and portable microelectronics,the extreme demand for miniaturized,mechanically flexible,and integrated microsystems are strongly stimulated.Here,biomass-derived carbons(BDCs)are ...With the rapid development of flexible and portable microelectronics,the extreme demand for miniaturized,mechanically flexible,and integrated microsystems are strongly stimulated.Here,biomass-derived carbons(BDCs)are prepared by KOH activation using Qamgur precursor,exhibiting three-dimensional(3D)hierarchical porous structure.Benefiting from unobstructed 3D hierarchical porous structure,BDCs provide an excellent specific capacitance of 433 F g^(-1)and prominent cyclability without capacitance degradation after 50000 cycles at 50 A g^(-1).Furthermore,BDC-based planar micro-supercapacitors(MSCs)without metal collector,prepared by mask-assisted coating,exhibit outstanding areal-specific capacitance of 84 mF cm^(-2)and areal energy density of 10.6μWh cm^(-2),exceeding most of the previous carbon-based MSCs.Impressively,the MSCs disclose extraordinary flexibility with capacitance retention of almost 100%under extreme bending state.More importantly,a flexible planar integrated system composed of the MSC and temperature sensor is assembled to efficiently monitor the temperature variation,providing a feasible route for flexible MSC-based functional micro-devices.展开更多
This paper presents a method for designing a class of countermeasures for DPA attacks based on attenuation of current variations. In this class of countermeasures, designers aim at decreasing the dynamic current varia...This paper presents a method for designing a class of countermeasures for DPA attacks based on attenuation of current variations. In this class of countermeasures, designers aim at decreasing the dynamic current variations to reduce the information that can be extracted from the current consumption of secure microsystems. The proposed method is based on a novel formula that calculates the number of current traces required for a successful DPA attack using the characteristics of the microsystem current signal and the external noise of the measurement setup. The different stages of the proposed method are illustrated through designing an example current flattening circuit. Meanwhile validity and applicability of the proposed formula is verified by comparing theoretical results with those obtained experimentally for the example circuit. The proposed formula not only estimates the required level of attenuation for a target level of robustness defined by design requirements, it also predicts the effectiveness of a countermeasure using simulation results therefore dramatically reducing the time to design of secure microsystems.展开更多
Wireless power transmission based on inductive coupling for remotely implanted micro devices has been considered in this paper. The receiving coil, integrated in microsystems and the external transmitting coil compose...Wireless power transmission based on inductive coupling for remotely implanted micro devices has been considered in this paper. The receiving coil, integrated in microsystems and the external transmitting coil compose a loosely coupled transformer. The coupling coefficient was calculated and measured on spacing misalignments. The geometric size of transmitting coil was analyzed for the target of remotely delivering power. The received power was maximized by choosing appropriate value of frequency, tuning capacitance and the load resistance. A conventional full bridge rectifier circuit was employed to convert ac to dc voltage. The received dc power was up to 160 mW with a transmitting vohage of 5 Vrms when the receiving coil was placed at the center of the transmitting coil. This may meet the requirement of some microsystems for high power over a long time.展开更多
A 3D fan-out packaging method for the integration of 5G communication RF microsystem and antenna is studied.First of all,through the double-sided wiring technology on the glass wafer,the fabrication of 5G antenna arra...A 3D fan-out packaging method for the integration of 5G communication RF microsystem and antenna is studied.First of all,through the double-sided wiring technology on the glass wafer,the fabrication of 5G antenna array is realized.Then the low power devices such as through silicon via(TSV)transfer chips,filters and antenna tuners are flip-welded on the glass wafer,and the glass wafer is reformed into a wafer permanently bonded with glass and resin by the injection molding process with resin material.Finally,the thinning resin surface leaks out of the TSV transfer chip,the rewiring is carried out on the resin surface,and then the power amplifier,low-noise amplifier,power management and other devices are flip-welded on the resin wafer surface.A ball grid array(BGA)is implanted to form the final package.The loss of the RF transmission line is measured by using the RF millimeter wave probe table.The results show that the RF transmission loss from the chip end to the antenna end in the fan-out package is very small,and it is only 0.26 dB/mm when working in 60 GHz.A slot coupling antenna is designed on the glass wafer.The antenna can operate at 60 GHz and the maximum gain can reach 6 dB within the working bandwidth.This demonstration successfully provides a feasible solution for the 3D fan-out integration of RF microsystem and antenna in 5G communications.展开更多
OBJECTIVE:To test the accuracy of the distribution of reflective zones on the feet as proposed by William Fitzgerald using the spine and kidney receptors as reference points.METHODS:Spine and feet lengths were measure...OBJECTIVE:To test the accuracy of the distribution of reflective zones on the feet as proposed by William Fitzgerald using the spine and kidney receptors as reference points.METHODS:Spine and feet lengths were measured first along straight lines and then again,taking into consideration the anatomical curves.The spinal column was further measured with regard to its individual regions(cervical,thoracic,lumbar,sacrum-coccyx).Straight-line measurements were taken with the help of an anthropometer.Measurements that took into account all of the curves were performed with the opisometer(also known as a "map measurer").All the measurements were accurate to within 1 mm.The study subjects were a healthy,physically fit 16-year-old female student and a 53-year-old male office employee exposed to an average dose of physical exercise.RESULTS:The kidney receptor in the foot did not reflect onto the predetermined lumbar section of the spinal column as measured along the straight line or with regard to curves.Instead,in both subjects the kidney receptor reflected onto the thoracic spine.CONCLUSION:Te particular level of the spinal cord that innervates the given organ controls the distribution of receptors of individual organs in the foot.展开更多
JK Microsystems公司推出一种嵌入式功率控制器，把调整，监视和开/关控制安装在比信用卡还要小的平台中。这种PowerNut电源管理板把输入功率控制在现有的器件上，从而简化了电源设计。该板给设计者提供一种包括电压调整，电源开／关时...JK Microsystems公司推出一种嵌入式功率控制器，把调整，监视和开/关控制安装在比信用卡还要小的平台中。这种PowerNut电源管理板把输入功率控制在现有的器件上，从而简化了电源设计。该板给设计者提供一种包括电压调整，电源开／关时间表和电压监视的现成解决方案。从太阳能板或电池传来的电源电压能控制输出1A的电流。展开更多
Long-term continuous monitoring is essential for the Internet of Things(IoT),with efficient power use and sustainable energy supply as core challenges.This study presents a MEMS-based self-holding acoustic switch desi...Long-term continuous monitoring is essential for the Internet of Things(IoT),with efficient power use and sustainable energy supply as core challenges.This study presents a MEMS-based self-holding acoustic switch designed for uninterrupted monitoring of specific acoustic signals with zero power consumption.Microelectromechanical systems(MEMS)refer to miniaturized devices that integrate mechanical and electrical components on a single microchip.A mathematical model is developed to analyze the switch’s acoustic frequency response.Simulations and experiments demonstrate its acoustic-driven properties.Acoustic switches with different structural parameters are designed,achieving resonant frequencies ranging from 192 Hz to 862 Hz.Electrostatic voltages are applied to enable self-holding functionality,and the acoustic switch exhibits a contact resistance as low as 29.3 U.The acoustic switch successfully performs various functions,including acoustic sensing,frequency identification,on–off control,and self-holding,all without drawing power from an external power supply.By integrating this acoustic switch,a zero-power self-aware microsystem platform is realized,allowing zero-power sleep states without closed-loop circuits while remaining responsive to target acoustic signals.This technology effectively supports long-term,large-scale deployment of unattended IoT terminals.展开更多
Two-dimensional MXenes are key high-capacitance electrode materials for micro-supercapacitors(MSCs)catering to integrated microsystems.However,the narrow electrochemical voltage windows of conventional aqueous electro...Two-dimensional MXenes are key high-capacitance electrode materials for micro-supercapacitors(MSCs)catering to integrated microsystems.However,the narrow electrochemical voltage windows of conventional aqueous electrolytes(≤1.23 V)and symmetric MXene MSCs(typically≤0.6 V)substantially limit their output voltage and energy density.Highly concentrated aqueous electrolytes exhibit lower water molecule activity,which inhibits water splitting and consequently widens the operating voltage window.Herein,we report ultrahigh-voltage aqueous planar asymmetric MSCs(AMSCs)based on a highly concentrated LiCl-gel quasi-solid-state electrolyte with MXene(Ti3C2Tx)as the negative electrode and MnO_(2) nanosheets as the positive electrode(MXene//MnO_(2)-AMSCs).The MXene//MnO_(2)-AMSCs exhibit a high voltage of up to 2.4 V,attaining an ultrahigh volumetric energy density of 53 mWh cm−3.Furthermore,the in-plane geometry and the quasi-solid-state electrolyte enabled excellent mechanical flexibility and performance uniformity in the serially/parallel connected packs of our AMSCs.Notably,the MXene//MnO_(2)-AMSC-based integrated microsystem,in conjunction with solar cells and consumer electronics,could efficiently realize simultaneous energy harvesting,storage,and conversion.The findings of this study provide insights for constructing high-voltage aqueous MXene-based AMSCs as safe and self-sufficient micropower sources in smart integrated microsystems.展开更多
In the post-Moore era,the development of active phased array antennas will inevitably trend towards active array microsystems.In this paper,the characteristics and composition of the active array antenna are briefly d...In the post-Moore era,the development of active phased array antennas will inevitably trend towards active array microsystems.In this paper,the characteristics and composition of the active array antenna are briefly described.Owing to the high efficiency,low profile,and light weight of the active array microsystems,the application prospects and advantages in the engineering of multi-functional airborne radar,spaceborne radar,and communication systems are analyzed.Moreover,according to the characteristics of the post-Moore era of integrated circuits,scientific and technological problems in the active array microsystems are presented,including multi-scale,multi-signal,and multi-physics field coupling.The challenges are also discussed,such as new architectures and algorithms,miniaturization of passive components,novel materials and processes,ultra-wideband technology,and new interdisciplinary technological applications.This paper is expected to inspire in-depth research on active array microsystems.展开更多
Three-dimensional(3D)panoramic vision system plays a fundamental role in the biological perception of external information,and naturally becomes a key system for embodied intelligence to interact with the outside worl...Three-dimensional(3D)panoramic vision system plays a fundamental role in the biological perception of external information,and naturally becomes a key system for embodied intelligence to interact with the outside world.A binocular vision system with rotating eyeball has long baseline,large volume and weak sensitivity to motion.A compound eye system has small volume,high sensitivity to motion but poor precision.Here,a planar compound eye microsystem for high precision 3D perception is proposed by combining semiconductor manufacturing process and biological compound eye structure.Using a semiconductor planar image sensor as the sensing unit,a space-coded planar sub-eye array is designed and its sub field of view(FOV)is dynamically mapped to the image sensor.It solves the problem that a traditional vision system cannot simultaneously accommodate wide FOV with long focal length and high sensitivity to motion with high resolution.The parallax among different subeyes enables the system to accurately perceive and dynamically track the 3D position of the target in the range of 10 m and within the FOV of 120°in a single compound eye.This system is of great significance in the fields of intelligent robot and intelligent perception.展开更多
基金supported by the National Natural Science Foundation of China(Nos.91743110,61674114,and 21861132001)the National Key R&D Program of China(Nos.2017YFF0204604 and 2018YFE0118700)+1 种基金Tianjin Applied Basic Research and Advanced Technology(No.17JCJQJC43600),the“111”Project(No.B07014)the Foundation for Talent Scientists of Nanchang Institute for Micro-technology of Tianjin University.
文摘Ambient suspended particulate matter(PM)(primarily with particle diameter 2.5m or less,i.e.,PM2.5)can adversely affect ecosystems and human health.Currently,optical particle sensors based on light scattering dominate the portable PM sensing market.However,the light scattering method has poor adaptability to different-sized PM and adverse environmental conditions.Here,we design and develop a portable PM sensing microsystem that consists of a micromachined virtual impactor(VI)for particle separation,a thermophoretic deposition chip for particle collection,and an extended-gate field-effect transistor(FET)for particle analysis.This system can realize on-site separation,collection,and analysis of aerosol particles without being influenced by environmental factors.In this study,the design of the VI is thoroughly analyzed by numerical simulation,and mixtures of different-sized silicon dioxide(SiO2)particles are used in an experimental verification of the performance of the VI and FET.Considering the low cost and compact design of the whole system,the proposed PM analysis microsystem has potential for PM detection under a wide range of conditions,such as heavily polluted industrial environments and for point-of-need outdoor and indoor air quality monitoring.
基金the financial support from the National Natural Science Foundation of China(Grant Nos.51702095,51722503,51975204)Natural Science Foundation of Hunan Province,China(Grant No.2018JJ3041)+1 种基金the Fundamental Research Funds for the Central Universities(531118010016)Science and Technology Bureau Foundation of Changsha City(kh1904005)。
文摘The rapid progress of micro/nanoelectronic systems and miniaturized portable devices has tremendously increased the urgent demands for miniaturized and integrated power supplies.Miniaturized energy storage devices(MESDs),with their excellent properties and additional intelligent functions,are considered to be the preferable energy supplies for uninterrupted powering of microsystems.In this review,we aim to provide a comprehensive overview of the background,fundamentals,device configurations,manufacturing processes,and typical applications of MESDs,including their recent advances.Particular attention is paid to advanced device configurations,such as two-dimensional(2D)stacked,2D planar interdigital,2D arbitrary-shaped,three-dimensional planar,and wire-shaped structures,and their corresponding manufacturing strategies,such as printing,scribing,and masking techniques.Additionally,recent developments in MESDs,including microbatteries and microsupercapacitors,as well as microhybrid metal ion capacitors,are systematically summarized.A series of on-chip microsystems,created by integrating functional MESDs,are also highlighted.Finally,the remaining challenges and future research scope on MESDs are discussed.
基金the National Natural Science Foundation of China,China (Grant Nos.22125903,51872283,22109040)the“Transformational Technologies for Clean Energy and Demonstration”Strategic Priority Research Program of the Chinese Academy of Sciences (Grant No.XDA21000000)+4 种基金the Dalian Innovation Support Plan for High Level Talents,China (2019RT09)DICP,China (DICP I202032)the Dalian National Laboratory For Clean Energy (DNL),CAS,DNL Cooperation Fund,CAS,China (DNL202016,DNL202019)the Top-Notch Talent Program of Henan Agricultural University,China (30500947)the Joint Fund of the Yulin University and the Dalian National Laboratory for Clean Energy,China (YLU-DNL Fund 2021002,YLU-DNL Fund 2021009)。
文摘The popularization of portable,implantable and wearable microelectronics has greatly stimulated the rapid development of high-power planar micro-supercapacitors(PMSCs).Particularly,the introduction of new functionalities(e.g.,high voltage,flexibility,stretchability,self-healing,electrochromism and photo/thermal response)to PMSCs is essential for building multifunctional PMSCs and their smart selfpowered integrated microsystems.In this review,we summarized the latest advances in PMSCs from various functional microdevices to their smart integrated microsystems.Primarily,the functionalities of PMSCs are characterized by three major factors to emphasize their electrochemical behavior and unique scope of application.These include but are not limited to high-voltage outputs(realized through asymmetric configuration,novel electrolyte and modular integration),mechanical resilience that includes various feats of flexibility or stretchability,and response to stimuli(self-healing,electrochromic,photo-responsive,or thermal-responsive properties).Furthermore,three representative integrated microsystems including energy harvester-PMSC,PMSC-energy consumption,and all-in-one selfpowered microsystems are elaborately overviewed to understand the emerging intelligent interaction models.Finally,the key perspectives,challenges and opportunities of PMSCs for powering smart microelectronics are proposed in brief.
基金support from Liao Ning Revitalization Talents Program(XLYC1907144)Dalian Youth Science and Technology Star Project Support Program(No.2017RQ104)+6 种基金National Key Research and Development Program of China(No.2020YFB0311600)National Natural Science Foundation of China(Grant Nos.22125903,51872283,22075279)Liaoning BaiQianWan Talents Program(Grant XLYC1807153)Dalian Innovation Support Plan for High Level Talents(2019RT09)Dalian National Laboratory For Clean Energy(DNL),CAS,DNL Cooperation Fund,CAS(DNL201912,DNL201915,DNL202016,DNL202019)DICP(DICP ZZBS201802,DICP I2020032)The Joint Fund of the Yulin University and the Dalian National Laboratory for Clean Energy(YLU-DNL Fund 2021002,2021009).
文摘With the rapid development of flexible and portable microelectronics,the extreme demand for miniaturized,mechanically flexible,and integrated microsystems are strongly stimulated.Here,biomass-derived carbons(BDCs)are prepared by KOH activation using Qamgur precursor,exhibiting three-dimensional(3D)hierarchical porous structure.Benefiting from unobstructed 3D hierarchical porous structure,BDCs provide an excellent specific capacitance of 433 F g^(-1)and prominent cyclability without capacitance degradation after 50000 cycles at 50 A g^(-1).Furthermore,BDC-based planar micro-supercapacitors(MSCs)without metal collector,prepared by mask-assisted coating,exhibit outstanding areal-specific capacitance of 84 mF cm^(-2)and areal energy density of 10.6μWh cm^(-2),exceeding most of the previous carbon-based MSCs.Impressively,the MSCs disclose extraordinary flexibility with capacitance retention of almost 100%under extreme bending state.More importantly,a flexible planar integrated system composed of the MSC and temperature sensor is assembled to efficiently monitor the temperature variation,providing a feasible route for flexible MSC-based functional micro-devices.
文摘This paper presents a method for designing a class of countermeasures for DPA attacks based on attenuation of current variations. In this class of countermeasures, designers aim at decreasing the dynamic current variations to reduce the information that can be extracted from the current consumption of secure microsystems. The proposed method is based on a novel formula that calculates the number of current traces required for a successful DPA attack using the characteristics of the microsystem current signal and the external noise of the measurement setup. The different stages of the proposed method are illustrated through designing an example current flattening circuit. Meanwhile validity and applicability of the proposed formula is verified by comparing theoretical results with those obtained experimentally for the example circuit. The proposed formula not only estimates the required level of attenuation for a target level of robustness defined by design requirements, it also predicts the effectiveness of a countermeasure using simulation results therefore dramatically reducing the time to design of secure microsystems.
基金National High Technology Research and Development Program of China(863 Program),Grant number:2004AA404013.
文摘Wireless power transmission based on inductive coupling for remotely implanted micro devices has been considered in this paper. The receiving coil, integrated in microsystems and the external transmitting coil compose a loosely coupled transformer. The coupling coefficient was calculated and measured on spacing misalignments. The geometric size of transmitting coil was analyzed for the target of remotely delivering power. The received power was maximized by choosing appropriate value of frequency, tuning capacitance and the load resistance. A conventional full bridge rectifier circuit was employed to convert ac to dc voltage. The received dc power was up to 160 mW with a transmitting vohage of 5 Vrms when the receiving coil was placed at the center of the transmitting coil. This may meet the requirement of some microsystems for high power over a long time.
文摘A 3D fan-out packaging method for the integration of 5G communication RF microsystem and antenna is studied.First of all,through the double-sided wiring technology on the glass wafer,the fabrication of 5G antenna array is realized.Then the low power devices such as through silicon via(TSV)transfer chips,filters and antenna tuners are flip-welded on the glass wafer,and the glass wafer is reformed into a wafer permanently bonded with glass and resin by the injection molding process with resin material.Finally,the thinning resin surface leaks out of the TSV transfer chip,the rewiring is carried out on the resin surface,and then the power amplifier,low-noise amplifier,power management and other devices are flip-welded on the resin wafer surface.A ball grid array(BGA)is implanted to form the final package.The loss of the RF transmission line is measured by using the RF millimeter wave probe table.The results show that the RF transmission loss from the chip end to the antenna end in the fan-out package is very small,and it is only 0.26 dB/mm when working in 60 GHz.A slot coupling antenna is designed on the glass wafer.The antenna can operate at 60 GHz and the maximum gain can reach 6 dB within the working bandwidth.This demonstration successfully provides a feasible solution for the 3D fan-out integration of RF microsystem and antenna in 5G communications.
文摘OBJECTIVE:To test the accuracy of the distribution of reflective zones on the feet as proposed by William Fitzgerald using the spine and kidney receptors as reference points.METHODS:Spine and feet lengths were measured first along straight lines and then again,taking into consideration the anatomical curves.The spinal column was further measured with regard to its individual regions(cervical,thoracic,lumbar,sacrum-coccyx).Straight-line measurements were taken with the help of an anthropometer.Measurements that took into account all of the curves were performed with the opisometer(also known as a "map measurer").All the measurements were accurate to within 1 mm.The study subjects were a healthy,physically fit 16-year-old female student and a 53-year-old male office employee exposed to an average dose of physical exercise.RESULTS:The kidney receptor in the foot did not reflect onto the predetermined lumbar section of the spinal column as measured along the straight line or with regard to curves.Instead,in both subjects the kidney receptor reflected onto the thoracic spine.CONCLUSION:Te particular level of the spinal cord that innervates the given organ controls the distribution of receptors of individual organs in the foot.
基金supported in part by the National Key Research and Development Program(Grant No.2023YFB3211200)the National Nature Science Foundation of China(Grant No.U21A6003 and L2324213).
文摘Long-term continuous monitoring is essential for the Internet of Things(IoT),with efficient power use and sustainable energy supply as core challenges.This study presents a MEMS-based self-holding acoustic switch designed for uninterrupted monitoring of specific acoustic signals with zero power consumption.Microelectromechanical systems(MEMS)refer to miniaturized devices that integrate mechanical and electrical components on a single microchip.A mathematical model is developed to analyze the switch’s acoustic frequency response.Simulations and experiments demonstrate its acoustic-driven properties.Acoustic switches with different structural parameters are designed,achieving resonant frequencies ranging from 192 Hz to 862 Hz.Electrostatic voltages are applied to enable self-holding functionality,and the acoustic switch exhibits a contact resistance as low as 29.3 U.The acoustic switch successfully performs various functions,including acoustic sensing,frequency identification,on–off control,and self-holding,all without drawing power from an external power supply.By integrating this acoustic switch,a zero-power self-aware microsystem platform is realized,allowing zero-power sleep states without closed-loop circuits while remaining responsive to target acoustic signals.This technology effectively supports long-term,large-scale deployment of unattended IoT terminals.
基金supported by the National Natural Science Foundation of China(22005297,22125903,and 51872283)the“Transformational Technologies for Clean Energy and Demonstration”Strategic Priority Research Program of the Chinese Academy of Sciences(XDA21000000)+4 种基金the Dalian Innovation Support Plan for High Level Talents(2019RT09)the Dalian National Laboratory for Clean Energy(DNL),Chinese Academy of Sciences(CAS),DNL Cooperation Fund,CAS(DNL201912,DNL201915,DNL202016,and DNL202019)DICP(DICP ZZBS201802 and DICP I2020032)the Joint Fund of the Yulin University and the Dalian National Laboratory for Clean Energy(YLU-DNL Fund 2021002 and YLU-DNL Fund 2021009)the China Postdoctoral Science Foundation(2020M680995).
文摘Two-dimensional MXenes are key high-capacitance electrode materials for micro-supercapacitors(MSCs)catering to integrated microsystems.However,the narrow electrochemical voltage windows of conventional aqueous electrolytes(≤1.23 V)and symmetric MXene MSCs(typically≤0.6 V)substantially limit their output voltage and energy density.Highly concentrated aqueous electrolytes exhibit lower water molecule activity,which inhibits water splitting and consequently widens the operating voltage window.Herein,we report ultrahigh-voltage aqueous planar asymmetric MSCs(AMSCs)based on a highly concentrated LiCl-gel quasi-solid-state electrolyte with MXene(Ti3C2Tx)as the negative electrode and MnO_(2) nanosheets as the positive electrode(MXene//MnO_(2)-AMSCs).The MXene//MnO_(2)-AMSCs exhibit a high voltage of up to 2.4 V,attaining an ultrahigh volumetric energy density of 53 mWh cm−3.Furthermore,the in-plane geometry and the quasi-solid-state electrolyte enabled excellent mechanical flexibility and performance uniformity in the serially/parallel connected packs of our AMSCs.Notably,the MXene//MnO_(2)-AMSC-based integrated microsystem,in conjunction with solar cells and consumer electronics,could efficiently realize simultaneous energy harvesting,storage,and conversion.The findings of this study provide insights for constructing high-voltage aqueous MXene-based AMSCs as safe and self-sufficient micropower sources in smart integrated microsystems.
基金Project supported by the National Natural Science Foundation of China(No.92373115)the Natural Science Foundation of Anhui Province,China(No.2308085MF193)+2 种基金the Major Natural Science Project of Anhui Provincial Education Department,China(No.KJ2021ZD0003)the Key Research and Development Project of Anhui Province,China(No.2023n06020026)the Innovation and Entrepreneurship of Anhui Province,China(No.Z020118060)。
文摘In the post-Moore era,the development of active phased array antennas will inevitably trend towards active array microsystems.In this paper,the characteristics and composition of the active array antenna are briefly described.Owing to the high efficiency,low profile,and light weight of the active array microsystems,the application prospects and advantages in the engineering of multi-functional airborne radar,spaceborne radar,and communication systems are analyzed.Moreover,according to the characteristics of the post-Moore era of integrated circuits,scientific and technological problems in the active array microsystems are presented,including multi-scale,multi-signal,and multi-physics field coupling.The challenges are also discussed,such as new architectures and algorithms,miniaturization of passive components,novel materials and processes,ultra-wideband technology,and new interdisciplinary technological applications.This paper is expected to inspire in-depth research on active array microsystems.
基金supported by the National Key Research and Development Program of China(2023YFB3906300).
文摘Three-dimensional(3D)panoramic vision system plays a fundamental role in the biological perception of external information,and naturally becomes a key system for embodied intelligence to interact with the outside world.A binocular vision system with rotating eyeball has long baseline,large volume and weak sensitivity to motion.A compound eye system has small volume,high sensitivity to motion but poor precision.Here,a planar compound eye microsystem for high precision 3D perception is proposed by combining semiconductor manufacturing process and biological compound eye structure.Using a semiconductor planar image sensor as the sensing unit,a space-coded planar sub-eye array is designed and its sub field of view(FOV)is dynamically mapped to the image sensor.It solves the problem that a traditional vision system cannot simultaneously accommodate wide FOV with long focal length and high sensitivity to motion with high resolution.The parallax among different subeyes enables the system to accurately perceive and dynamically track the 3D position of the target in the range of 10 m and within the FOV of 120°in a single compound eye.This system is of great significance in the fields of intelligent robot and intelligent perception.
