Optical filters capable of single control parameter based wide tuning are implemented and studied.A prototype surface micromachined 1 3μm Si based MOEMS (micro opto electro mechanical systems) tunable filter e...Optical filters capable of single control parameter based wide tuning are implemented and studied.A prototype surface micromachined 1 3μm Si based MOEMS (micro opto electro mechanical systems) tunable filter exhibits a continuous and large tuning range of 90nm at 50V tuning voltage.The filter can be integrated with Si based photodetector in a low cost component for coarse wavelength division multiplexing systems operating in the 1 3μm band.展开更多
文摘Optical filters capable of single control parameter based wide tuning are implemented and studied.A prototype surface micromachined 1 3μm Si based MOEMS (micro opto electro mechanical systems) tunable filter exhibits a continuous and large tuning range of 90nm at 50V tuning voltage.The filter can be integrated with Si based photodetector in a low cost component for coarse wavelength division multiplexing systems operating in the 1 3μm band.
