Nanomaterials are known to exhibit a number of interesting physical and chemical properties for various applications,including energy conversion and storage,nanoscale electronics,sensors and actuators,photonics device...Nanomaterials are known to exhibit a number of interesting physical and chemical properties for various applications,including energy conversion and storage,nanoscale electronics,sensors and actuators,photonics devices and even for biomedical purposes.In the past decade,laser as a synthetic technique and laser as a microfabrication technique facilitated nanomaterial preparation and nanostructure construction,including the laser processing-induced carbon and non-carbon nanomaterials,hierarchical structure construction,patterning,heteroatom doping,sputtering etching,and so on.The laser-induced nanomaterials and nanostructures have extended broad applications in electronic devices,such as light–thermal conversion,batteries,supercapacitors,sensor devices,actuators and electrocatalytic electrodes.Here,the recent developments in the laser synthesis of carbon-based and non-carbon-based nanomaterials are comprehensively summarized.An extensive overview on laser-enabled electronic devices for various applications is depicted.With the rapid progress made in the research on nanomaterial preparation through laser synthesis and laser microfabrication technologies,laser synthesis and microfabrication toward energy conversion and storage will undergo fast development.展开更多
Liquid-assisted laser ablation has the advantage of relieving thermal effects of common laser ablation processes, whereas the light scattering and shielding effects by laser-induced cavitation bubbles, suspended debri...Liquid-assisted laser ablation has the advantage of relieving thermal effects of common laser ablation processes, whereas the light scattering and shielding effects by laser-induced cavitation bubbles, suspended debris, and turbulent liquid flow generally deteriorate laser beam transmission stability, leading to low energy efficiency and poor surface quality. Here, we report that a continuous and directional high-speed microjet will form in the laser ablation zone if laser-induced primary cavitation bubbles asymmetrically collapse sequentially near the air-liquid interface under a critical thin liquid layer. The laser-induced microjet can instantaneously and directionally remove secondary bubbles and ablation debris around the laser ablation region, and thus a very stable material removal process can be obtained. The shadowgraphs of high-speed camera reveal that the average speed of laser-induced continuous microjet can be as high as 1.1 m sin its initial 500 μm displacement. The coupling effect of laser ablation, mechanical impact along with the collapse of cavitation bubbles and flushing of high-speed microjet helps achieve a high material removal rate and significantly improved surface quality. We name this uncovered liquid-assisted laser ablation process as laser-induced microjet-assisted ablation(LIMJAA) based on its unique characteristics. High-quality microgrooves with a large depth-to-width ratio of 5.2 are obtained by LIMJAA with a single-pass laser scanning process in our experiments. LIMJAA is capable of machining various types of difficult-to-process materials with high-quality arrays of micro-channels, square and circle microscale through-holes. The results and disclosed mechanisms in our work provide a deep understanding of the role of laser-induced microjet in improving the processing quality of liquid-assisted laser micromachining.展开更多
Although femtosecond laser microfabrication is one of the most promising three-dimensional（3D） fabrication techniques, it could suffer from low fabrication efficiency for structures with high 3D complexities. By usi...Although femtosecond laser microfabrication is one of the most promising three-dimensional（3D） fabrication techniques, it could suffer from low fabrication efficiency for structures with high 3D complexities. By using etching as a main assistant technique, the processing can be speeded up and an improved structure surface quality can be provided. However,the assistance of a single technique cannot satisfy the increasing demands of fabrication and integration of highly functional 3D microstructures. Therefore, a multi-technique-based 3D microfabrication method is required. In this paper, we briefly review the recent development on etching-assisted femtosecond laser microfabrication（EAFLM）. Various processing approaches have been proposed to further strengthen the flexibilities of the EAFLM. With the use of the multi-technique-based microfabrication method, 3D microstructure arrays can be rapidly defined on planar or curved surfaces with high structure qualities.展开更多
We describe a novel technique, low surface energy Gas Expansion Molding （GEM）, to fabricate microbubble arrays in polydimethylsiloxane （PDMS） which are incorporated into parallel plate flow chambers and tested in ...We describe a novel technique, low surface energy Gas Expansion Molding （GEM）, to fabricate microbubble arrays in polydimethylsiloxane （PDMS） which are incorporated into parallel plate flow chambers and tested in cell sorting and microcell cuTture applications. This architecture confers several operational advantages that distinguish this technology approach from currently used methods. Herein we describe the GEM process and the parameters that are used to control microbubble formation and a Vacuum-Assisted Coating （VAC） process developed to selectively and spatially alter the PDMS surface chemistry in the wells and on the microchannel surface. We describe results from microflow image visualization studies conducted to investigate fluid streams above and within microbubble wells and conclude with a discussion of cell culture studies in PDMS.展开更多
The microfabrication and performance NiTi shape memory thin films for microdevice applications were studied by microfabrication processes, which were compatible with those of microelectronics fabrication processes. Th...The microfabrication and performance NiTi shape memory thin films for microdevice applications were studied by microfabrication processes, which were compatible with those of microelectronics fabrication processes. The sputter-deposition conditions, patterning process, and annealing conditions were investigated. The B2 crystal structures of the thin films can be obtained by annealing at 525°C for 30min. The results from x-ray photoemission spectroscopy indicated that the atomic concentration in the surface of the annealed thin films with preferred structures is comparable with those of the as-deposited films.展开更多
Rough micro-nano structures and low surface energy chemical compositions are two essential conditions for constructing superhydrophobic surfaces.However,for low surface tension liquids,which are extremely easy to spre...Rough micro-nano structures and low surface energy chemical compositions are two essential conditions for constructing superhydrophobic surfaces.However,for low surface tension liquids,which are extremely easy to spread and wet on solid surfaces,the design of cantilever structures with internal concavity is the third important parameter to achieve their superomniphobic,whose negative geometrical inflections can effectively lock the solid-liquid-gas three phase contact line,maximize the upward component of capillary force of the suspended droplets,and provide a larger breakthrough pressure for the structured surfaces to avoid the low surface tension liquids from collapsing on the solid surfaces.Based on this,microfabrication was used to prepare mushroom structured surfaces.By precisely controlling the etching parameters,mushroom structures with diameter of 3μm and circular centre distance of 8μm were prepared.The mushroom structure not only achieves super-repellent from high surface tension water(72.8 mN/m)to ultra-low surface tension perfluorohexane(10 mN/m),but also achieves complete rebound even to the high-speed impact of liquid droplets,including water droplets with an impact height of 7.9 cm and perfluorohexane with a height of 3 mm.This fabrication technology helps to build a robust superomniphobic surface for use in harsh environments such as high-speed droplet impacts.展开更多
As electronic devices continue to evolve toward higher power densities,faster speeds,and smaller form factors,the demand for high-performance electronic packaging materials has become increasingly critical.These mater...As electronic devices continue to evolve toward higher power densities,faster speeds,and smaller form factors,the demand for high-performance electronic packaging materials has become increasingly critical.These materials serve as the physical and functional interface between semiconductor components and their operating environment,impacting the overall reliability,thermal management,mechanical protection,and electrical performance of modern electronic systems.This study investigates the development,formulation,and performance evaluation of advanced packaging materials,focusing on polymer-based composites,metal and ceramic matrix systems,and nanomaterial-enhanced formulations.A comprehensive analysis of key performance metrics-including thermal conductivity,electrical insulation,mechanical robustness,and environmental resistance-is presented,alongside strategies for material optimization through interface engineering and processing innovations.Furthermore,the study explores cutting-edge integration technologies such as 3D packaging compatibility,low-temperature co-firing,and high-density interconnects.The findings provide critical insights into the structure-property-processing relationships that define the effectiveness of next-generation packaging materials and offer a roadmap for material selection and system integration in high-reliability electronic applications.展开更多
Grooved tuning forks with hierarchical structures have become some of the most widely used piezoelectric quartz microelectromechanical system devices;however,fabricating these devices requires multi-step processes due...Grooved tuning forks with hierarchical structures have become some of the most widely used piezoelectric quartz microelectromechanical system devices;however,fabricating these devices requires multi-step processes due to the complexity of etching of quartz,particularly in specific orientations of the crystal lattice.This paper proposes a one-step fabrication strategy that can form a complete hierarchical structure with only a single etching process using novel lithography patterns.The core principle of this strategy is based on the effect of the size of the groove patterns on quartz etching,whereby trenches of varying depths can be created in a fixed etching time by adjusting the width of the hard mask.Specifically,the device outline and grooved structure can be completed using a seamlessly designed etching pattern and optimized time.Furthermore,the etching structure itself influences the etching results.It was found that dividing a wide trench by including a wall to separate it into two narrow trenches significantly reduces the etching rate,allowing for predictable tuning of the etching rate for wider grooves.This effectively increases the usability and flexibility of the one-step strategy.This was applied to the manufacture of an ultra-small quartz grooved tuning fork resonator with a frequency of 32.768 kHz in a single step,increasing production efficiency by almost 45%and reducing costs by almost 30%compared to current methods.This has great potential for improving the productivity of grooved tuning fork devices.It can also be extended to the fabrication of other quartz crystal devices requiring hierarchical structures.展开更多
基金This work was supported by Taishan Scholars Project Special Funds(tsqn201812083)Natural Science Foundation of Shandong Province(ZR2019YQ20,2019JMRH0410,ZR2019BB001)the National Natural Science Foundation of China(51972147,51902132,52022037).
文摘Nanomaterials are known to exhibit a number of interesting physical and chemical properties for various applications,including energy conversion and storage,nanoscale electronics,sensors and actuators,photonics devices and even for biomedical purposes.In the past decade,laser as a synthetic technique and laser as a microfabrication technique facilitated nanomaterial preparation and nanostructure construction,including the laser processing-induced carbon and non-carbon nanomaterials,hierarchical structure construction,patterning,heteroatom doping,sputtering etching,and so on.The laser-induced nanomaterials and nanostructures have extended broad applications in electronic devices,such as light–thermal conversion,batteries,supercapacitors,sensor devices,actuators and electrocatalytic electrodes.Here,the recent developments in the laser synthesis of carbon-based and non-carbon-based nanomaterials are comprehensively summarized.An extensive overview on laser-enabled electronic devices for various applications is depicted.With the rapid progress made in the research on nanomaterial preparation through laser synthesis and laser microfabrication technologies,laser synthesis and microfabrication toward energy conversion and storage will undergo fast development.
基金financially supported by the Guangdong Provincial University Science and Technology Program(Grant No.2020KTSCX119)the Shenzhen Science and Technology Programs(Grant Nos.20200925155508001,GJHZ20190820151801786,JCYJ20210324115608024 and KQTD20170810110250357)。
文摘Liquid-assisted laser ablation has the advantage of relieving thermal effects of common laser ablation processes, whereas the light scattering and shielding effects by laser-induced cavitation bubbles, suspended debris, and turbulent liquid flow generally deteriorate laser beam transmission stability, leading to low energy efficiency and poor surface quality. Here, we report that a continuous and directional high-speed microjet will form in the laser ablation zone if laser-induced primary cavitation bubbles asymmetrically collapse sequentially near the air-liquid interface under a critical thin liquid layer. The laser-induced microjet can instantaneously and directionally remove secondary bubbles and ablation debris around the laser ablation region, and thus a very stable material removal process can be obtained. The shadowgraphs of high-speed camera reveal that the average speed of laser-induced continuous microjet can be as high as 1.1 m sin its initial 500 μm displacement. The coupling effect of laser ablation, mechanical impact along with the collapse of cavitation bubbles and flushing of high-speed microjet helps achieve a high material removal rate and significantly improved surface quality. We name this uncovered liquid-assisted laser ablation process as laser-induced microjet-assisted ablation(LIMJAA) based on its unique characteristics. High-quality microgrooves with a large depth-to-width ratio of 5.2 are obtained by LIMJAA with a single-pass laser scanning process in our experiments. LIMJAA is capable of machining various types of difficult-to-process materials with high-quality arrays of micro-channels, square and circle microscale through-holes. The results and disclosed mechanisms in our work provide a deep understanding of the role of laser-induced microjet in improving the processing quality of liquid-assisted laser micromachining.
基金Project supported by the National Natural Science Foundation of China(Grant No.51501070)
文摘Although femtosecond laser microfabrication is one of the most promising three-dimensional（3D） fabrication techniques, it could suffer from low fabrication efficiency for structures with high 3D complexities. By using etching as a main assistant technique, the processing can be speeded up and an improved structure surface quality can be provided. However,the assistance of a single technique cannot satisfy the increasing demands of fabrication and integration of highly functional 3D microstructures. Therefore, a multi-technique-based 3D microfabrication method is required. In this paper, we briefly review the recent development on etching-assisted femtosecond laser microfabrication（EAFLM）. Various processing approaches have been proposed to further strengthen the flexibilities of the EAFLM. With the use of the multi-technique-based microfabrication method, 3D microstructure arrays can be rapidly defined on planar or curved surfaces with high structure qualities.
基金supported by grants fromthe NIH/NIAID 5K25AI060884 to Lisa A.
文摘We describe a novel technique, low surface energy Gas Expansion Molding （GEM）, to fabricate microbubble arrays in polydimethylsiloxane （PDMS） which are incorporated into parallel plate flow chambers and tested in cell sorting and microcell cuTture applications. This architecture confers several operational advantages that distinguish this technology approach from currently used methods. Herein we describe the GEM process and the parameters that are used to control microbubble formation and a Vacuum-Assisted Coating （VAC） process developed to selectively and spatially alter the PDMS surface chemistry in the wells and on the microchannel surface. We describe results from microflow image visualization studies conducted to investigate fluid streams above and within microbubble wells and conclude with a discussion of cell culture studies in PDMS.
文摘The microfabrication and performance NiTi shape memory thin films for microdevice applications were studied by microfabrication processes, which were compatible with those of microelectronics fabrication processes. The sputter-deposition conditions, patterning process, and annealing conditions were investigated. The B2 crystal structures of the thin films can be obtained by annealing at 525°C for 30min. The results from x-ray photoemission spectroscopy indicated that the atomic concentration in the surface of the annealed thin films with preferred structures is comparable with those of the as-deposited films.
基金funded by the Postdoctoral Fellowship Program of CPSF under Grant Number GZC20233434the Key Cultivation Program of the Harbin Institute of Technology FUEA0400400523.
文摘Rough micro-nano structures and low surface energy chemical compositions are two essential conditions for constructing superhydrophobic surfaces.However,for low surface tension liquids,which are extremely easy to spread and wet on solid surfaces,the design of cantilever structures with internal concavity is the third important parameter to achieve their superomniphobic,whose negative geometrical inflections can effectively lock the solid-liquid-gas three phase contact line,maximize the upward component of capillary force of the suspended droplets,and provide a larger breakthrough pressure for the structured surfaces to avoid the low surface tension liquids from collapsing on the solid surfaces.Based on this,microfabrication was used to prepare mushroom structured surfaces.By precisely controlling the etching parameters,mushroom structures with diameter of 3μm and circular centre distance of 8μm were prepared.The mushroom structure not only achieves super-repellent from high surface tension water(72.8 mN/m)to ultra-low surface tension perfluorohexane(10 mN/m),but also achieves complete rebound even to the high-speed impact of liquid droplets,including water droplets with an impact height of 7.9 cm and perfluorohexane with a height of 3 mm.This fabrication technology helps to build a robust superomniphobic surface for use in harsh environments such as high-speed droplet impacts.
文摘As electronic devices continue to evolve toward higher power densities,faster speeds,and smaller form factors,the demand for high-performance electronic packaging materials has become increasingly critical.These materials serve as the physical and functional interface between semiconductor components and their operating environment,impacting the overall reliability,thermal management,mechanical protection,and electrical performance of modern electronic systems.This study investigates the development,formulation,and performance evaluation of advanced packaging materials,focusing on polymer-based composites,metal and ceramic matrix systems,and nanomaterial-enhanced formulations.A comprehensive analysis of key performance metrics-including thermal conductivity,electrical insulation,mechanical robustness,and environmental resistance-is presented,alongside strategies for material optimization through interface engineering and processing innovations.Furthermore,the study explores cutting-edge integration technologies such as 3D packaging compatibility,low-temperature co-firing,and high-density interconnects.The findings provide critical insights into the structure-property-processing relationships that define the effectiveness of next-generation packaging materials and offer a roadmap for material selection and system integration in high-reliability electronic applications.
文摘Grooved tuning forks with hierarchical structures have become some of the most widely used piezoelectric quartz microelectromechanical system devices;however,fabricating these devices requires multi-step processes due to the complexity of etching of quartz,particularly in specific orientations of the crystal lattice.This paper proposes a one-step fabrication strategy that can form a complete hierarchical structure with only a single etching process using novel lithography patterns.The core principle of this strategy is based on the effect of the size of the groove patterns on quartz etching,whereby trenches of varying depths can be created in a fixed etching time by adjusting the width of the hard mask.Specifically,the device outline and grooved structure can be completed using a seamlessly designed etching pattern and optimized time.Furthermore,the etching structure itself influences the etching results.It was found that dividing a wide trench by including a wall to separate it into two narrow trenches significantly reduces the etching rate,allowing for predictable tuning of the etching rate for wider grooves.This effectively increases the usability and flexibility of the one-step strategy.This was applied to the manufacture of an ultra-small quartz grooved tuning fork resonator with a frequency of 32.768 kHz in a single step,increasing production efficiency by almost 45%and reducing costs by almost 30%compared to current methods.This has great potential for improving the productivity of grooved tuning fork devices.It can also be extended to the fabrication of other quartz crystal devices requiring hierarchical structures.
