Relatively to non-traditional and high-energy-beam micro-manufacturing technique, the micro-cutting technology has many merits. For instance, the machining range is bigger, the cost of equipments is much lower, and th...Relatively to non-traditional and high-energy-beam micro-manufacturing technique, the micro-cutting technology has many merits. For instance, the machining range is bigger, the cost of equipments is much lower, and the productivity and machining accuracy are higher. Therefore, the micro-cutting technology will take an important effect on the machining technique of complex shape microparts. In this paper, based on selfly-developed machine tool, the precision cutting technology of complex shape microparts made of metal material was studied by analyzing the modeling method on complex shape, the means of toolpaths layout and the optimal selection for cutting parameters. On the basis of above work, a typical duralumin specimen of high precision, low surface roughness and complex shape micropart was manufactured. This result will provide favorable technical support for farther research on the micro-cutting technology.展开更多
The swelling of SU-8 mold is one of the most important factors influencing the dimensional accuracy of a metal mieropart produced by ultra-violet lithography galvanik abformung（UV-LIGA）. The isolation belt struc- tu...The swelling of SU-8 mold is one of the most important factors influencing the dimensional accuracy of a metal mieropart produced by ultra-violet lithography galvanik abformung（UV-LIGA）. The isolation belt struc- ture is usually employed to enhance the dimensional accuracy of electroformed metal mieropart. However, noble metal is wasted because the isolation belt is filled with metal when noble metal mieroparts are fabricated. There- fore, a semi-isolation belt structure is presented to save noble metal. Furthermore, a high current density is also introduced to shorten the eleetroforming time, and thus the dimensional accuracy of electroformed gold micropart is improved by using the electrolyte jet. The experimental results indicate that both the semi-isolation belt and the high current density can help to enhance the dimensional accuracy of electroformed gold micropart. Its dimen- sional error is only 5 μm at the current density of 0. 6 A/dm2 while the semi-isolation belt structure is used.展开更多
基金Sponsored by China Postdoctoral Science Foundation (Grant No2004035530)
文摘Relatively to non-traditional and high-energy-beam micro-manufacturing technique, the micro-cutting technology has many merits. For instance, the machining range is bigger, the cost of equipments is much lower, and the productivity and machining accuracy are higher. Therefore, the micro-cutting technology will take an important effect on the machining technique of complex shape microparts. In this paper, based on selfly-developed machine tool, the precision cutting technology of complex shape microparts made of metal material was studied by analyzing the modeling method on complex shape, the means of toolpaths layout and the optimal selection for cutting parameters. On the basis of above work, a typical duralumin specimen of high precision, low surface roughness and complex shape micropart was manufactured. This result will provide favorable technical support for farther research on the micro-cutting technology.
基金Supported by the National Natural Science Foundation of China(91023018)~~
文摘The swelling of SU-8 mold is one of the most important factors influencing the dimensional accuracy of a metal mieropart produced by ultra-violet lithography galvanik abformung（UV-LIGA）. The isolation belt struc- ture is usually employed to enhance the dimensional accuracy of electroformed metal mieropart. However, noble metal is wasted because the isolation belt is filled with metal when noble metal mieroparts are fabricated. There- fore, a semi-isolation belt structure is presented to save noble metal. Furthermore, a high current density is also introduced to shorten the eleetroforming time, and thus the dimensional accuracy of electroformed gold micropart is improved by using the electrolyte jet. The experimental results indicate that both the semi-isolation belt and the high current density can help to enhance the dimensional accuracy of electroformed gold micropart. Its dimen- sional error is only 5 μm at the current density of 0. 6 A/dm2 while the semi-isolation belt structure is used.
