Integrated gas sensor suspending bridge style micro-structure has been developed on Al_2O_3 new type membrane based on MEMS.CH_4 gas sensing unit and CO gas sensing unit were fabricated separately on 4 unit array styl...Integrated gas sensor suspending bridge style micro-structure has been developed on Al_2O_3 new type membrane based on MEMS.CH_4 gas sensing unit and CO gas sensing unit were fabricated separately on 4 unit array style suspending bridge structure.We have studied on time-sequence modulation form voltage pulse heating method which forms different work temperature展开更多
文摘Integrated gas sensor suspending bridge style micro-structure has been developed on Al_2O_3 new type membrane based on MEMS.CH_4 gas sensing unit and CO gas sensing unit were fabricated separately on 4 unit array style suspending bridge structure.We have studied on time-sequence modulation form voltage pulse heating method which forms different work temperature
