Cutting force measurement has become a crucial activity for enhancing machining process performance. This paper described the design and fabrication of embedded Ni-chrome thin-film micro-sensors in tool holders to mea...Cutting force measurement has become a crucial activity for enhancing machining process performance. This paper described the design and fabrication of embedded Ni-chrome thin-film micro-sensors in tool holders to measure the cutting force in machining operations. A Ni-chrome thin-film sensor device is embedded within a substrate structure through a dy- namic brazing process, which consists of a Ti6A14V substrate, a nickel-chromium thin-film sensor and an alumina insulating layer. The Wheatstone bridge which consists of four sensors would produce the output voltage when the thin film caused de- formation by the cutting forces. The relationship between input and output voltages was theoretically analyzed. According- ly, an in-process cutting force measurement system is established. The results show that the thin-film sensor had good lineari- ty and less mutual interference, and it is suitable for all kinds of turning forces under the measurement conditions.展开更多
A new low noise interface circuit for detecting weak current of micro-sensors is designed.By using the transimpedance amplifier to substitute the charge amplifier,the closed-loop circuit can avoid the phase error of t...A new low noise interface circuit for detecting weak current of micro-sensors is designed.By using the transimpedance amplifier to substitute the charge amplifier,the closed-loop circuit can avoid the phase error of the charge amplifier.Therefore,the phase compensation devices will be cancelled,because there is no phase transformation through the transimpedance amplifier.As well as,by using CCCII devices to implement the high value feedback resistor of the impedance amplifier,the noise of the I-V transformation devices is reduced,comparing with the passive resistor.The floating resistor is easy to be integrated into chips,making the integration of the interface circuit of the intelligent sensors increase.Through the simulation,the phase error of the charge amplifier is almost 9°at 2 kHz and it changes with the working frequency of the micro-sensors making the phase compensation not easy.The value of the floating resistor is 250 kΩ where the bias current is 50 μA.The noise of the active resistor is 0.037 fV2/Hz,comparing with the noise of the passive resistor,which is 4.14 fV2/Hz.展开更多
Pseudo-spectral method is used to numerically model the diaphragm deflection of capacitive pressure micro-sensor under uniform load. The relationship between the capacitance of the micro-sensor and the load is then an...Pseudo-spectral method is used to numerically model the diaphragm deflection of capacitive pressure micro-sensor under uniform load. The relationship between the capacitance of the micro-sensor and the load is then analyzed after the description of the computational principle. For normal mode micro-sensor, the tensile force on the diaphragm can be ignored and thereby the capacitance increases linearly with the load increase only when the load is so small that the resultant deflection is less than the diaphragm thickness. The linear relationship between the capacitance and the load turns to be nonlinear thereafter and the capacitance rises dramatically with the constant increase of the load. For touch mode micro-sensor, an algorithm to determine the touch radius of the diaphragm and substrate is presented and the curve of capacitance versus load is shown on the numerical results laying a theoretical foundation for micro-sensor design.展开更多
NiO-In2O3 composite nanofibers are synthesized via electrospinning and calcining techniques. Micro-sensors are fabricated by sputtering Pt electrodes on Si chips to form sensor substrates, and then spinning the NiO-In...NiO-In2O3 composite nanofibers are synthesized via electrospinning and calcining techniques. Micro-sensors are fabricated by sputtering Pt electrodes on Si chips to form sensor substrates, and then spinning the NiO-In2O3 composite nanofibers onto the sensor substrate surface. The as-fabricated micro-sensors exhibit excellent H2S sensing properties at room temperature. The sensi- tivity of the micro-sensors is up to 6 when the sensors are exposed to 3 μL/L HzS, and the corresponding response and recovery times are 14 and 22 s, respectively. The micro-sensors also exhibit high selectivity and good stability. Especially, the micro-sensors can operate at various humidity conditions. The sensitivity of the micro-sensors is 3.8 to 3 μL/L HzS at 75% relative humidity. These characteristics make the micro-sensors good candidates for practical H2S sensors with high performance.展开更多
基金Research Project Supported by Shanxi Scholarship Council of China(No.2013-086)
文摘Cutting force measurement has become a crucial activity for enhancing machining process performance. This paper described the design and fabrication of embedded Ni-chrome thin-film micro-sensors in tool holders to measure the cutting force in machining operations. A Ni-chrome thin-film sensor device is embedded within a substrate structure through a dy- namic brazing process, which consists of a Ti6A14V substrate, a nickel-chromium thin-film sensor and an alumina insulating layer. The Wheatstone bridge which consists of four sensors would produce the output voltage when the thin film caused de- formation by the cutting forces. The relationship between input and output voltages was theoretically analyzed. According- ly, an in-process cutting force measurement system is established. The results show that the thin-film sensor had good lineari- ty and less mutual interference, and it is suitable for all kinds of turning forces under the measurement conditions.
基金Sponsored by the National High Technology Research Development Plan of China(Grant No.2008AA042201)
文摘A new low noise interface circuit for detecting weak current of micro-sensors is designed.By using the transimpedance amplifier to substitute the charge amplifier,the closed-loop circuit can avoid the phase error of the charge amplifier.Therefore,the phase compensation devices will be cancelled,because there is no phase transformation through the transimpedance amplifier.As well as,by using CCCII devices to implement the high value feedback resistor of the impedance amplifier,the noise of the I-V transformation devices is reduced,comparing with the passive resistor.The floating resistor is easy to be integrated into chips,making the integration of the interface circuit of the intelligent sensors increase.Through the simulation,the phase error of the charge amplifier is almost 9°at 2 kHz and it changes with the working frequency of the micro-sensors making the phase compensation not easy.The value of the floating resistor is 250 kΩ where the bias current is 50 μA.The noise of the active resistor is 0.037 fV2/Hz,comparing with the noise of the passive resistor,which is 4.14 fV2/Hz.
基金supported by the National Natural Science Foundation of China(Grant No.90207003).
文摘Pseudo-spectral method is used to numerically model the diaphragm deflection of capacitive pressure micro-sensor under uniform load. The relationship between the capacitance of the micro-sensor and the load is then analyzed after the description of the computational principle. For normal mode micro-sensor, the tensile force on the diaphragm can be ignored and thereby the capacitance increases linearly with the load increase only when the load is so small that the resultant deflection is less than the diaphragm thickness. The linear relationship between the capacitance and the load turns to be nonlinear thereafter and the capacitance rises dramatically with the constant increase of the load. For touch mode micro-sensor, an algorithm to determine the touch radius of the diaphragm and substrate is presented and the curve of capacitance versus load is shown on the numerical results laying a theoretical foundation for micro-sensor design.
基金supported by the Special Fund for Agroscientific Research in the Public Interest of China(200903023)the Earmarked Fund for Modern Agroindustry Technology Research System of China([2011]3)the Guangdong Agricultural Mechanization Research Project([2010]605)
文摘NiO-In2O3 composite nanofibers are synthesized via electrospinning and calcining techniques. Micro-sensors are fabricated by sputtering Pt electrodes on Si chips to form sensor substrates, and then spinning the NiO-In2O3 composite nanofibers onto the sensor substrate surface. The as-fabricated micro-sensors exhibit excellent H2S sensing properties at room temperature. The sensi- tivity of the micro-sensors is up to 6 when the sensors are exposed to 3 μL/L HzS, and the corresponding response and recovery times are 14 and 22 s, respectively. The micro-sensors also exhibit high selectivity and good stability. Especially, the micro-sensors can operate at various humidity conditions. The sensitivity of the micro-sensors is 3.8 to 3 μL/L HzS at 75% relative humidity. These characteristics make the micro-sensors good candidates for practical H2S sensors with high performance.
