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Silicon micro-hemispheres with periodic nanoscale rings produced by the laser ablation of single crystalline silicon
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作者 陈明 李爽 +1 位作者 崔清强 刘向东 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第10期375-380,共6页
We describe the fabrication of silicon micro-hemispheres by adopting the conventional laser ablation of single crystalline silicon in the vacuum condition without using any catalysts or additives. The highly oriented ... We describe the fabrication of silicon micro-hemispheres by adopting the conventional laser ablation of single crystalline silicon in the vacuum condition without using any catalysts or additives. The highly oriented structures of silicon micro-hemispheres exhibit many periodic nanoscale rings along their outer surfaces. We consider that the self-organized growth of silicon micro-structures is highly dependent on the laser intensity and background air medium. The difference between these surface modifications is attributed to the amount of laser energy deposited in the silicon material and the consequent cooling velocity. 展开更多
关键词 silicon micro-hemispheres pulsed laser ablation
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