A micro-displacement sensor based on fiber Bragg grating(FBG) is proposed. The device consists of a pair of FBGs with different central wavelengths fabricated by femtosecond laser phase mask method and a metal substra...A micro-displacement sensor based on fiber Bragg grating(FBG) is proposed. The device consists of a pair of FBGs with different central wavelengths fabricated by femtosecond laser phase mask method and a metal substrate with lever structure. The displacement is amplified by lever structure and it converts into axial tension of FBG, which has a high displacement sensitivity. The amplification factors obtained by theoretical analysis and finite element simulation are 2.67 and 2.50, respectively. The experimental results show that in the range of 0-50 μm the shift of FBG center wavelength is linearly related to the displacement of measured object and displacement sensitivity reaches 121 pm/μm. In addition, the cascaded FBG is used to compensate the temperature.展开更多
On the basis of existing techniques,a compact micro-displacement sensor of phase grating interference(PGI)is described,which adopts cylindrical hologram diffraction grating as the calibration standard.The optical prin...On the basis of existing techniques,a compact micro-displacement sensor of phase grating interference(PGI)is described,which adopts cylindrical hologram diffraction grating as the calibration standard.The optical principle of the sensor is explained,and the relation between the grating motion displacement and the phase shift of interference stripes is deduced.The improvement of the integral structure and the method of photoelectric signal processing are described in detail.With the software system based on the virtual instrument development platform Labwindows/CVI and other hardwares such as the precision displacement worktable,the surfaces of typical parts are measured and the characterization results are given.The sensor has wide measuring range and high resolution,its sensitivity and resolution being independent of the wavelength of the incident light.The vertical measuring range is 0-6 mm,and the vertical resolution is 0.005μm.The experimental results show that the sensor can be used to measure and characterize the surface topography parameters of the plane and curved surface.展开更多
Based on dual-differential comparing principle, an experimental system of optical fiber F-P interferometric micro-displacement measurement is introduced. It is capable of achieving the absolute displacement measuremen...Based on dual-differential comparing principle, an experimental system of optical fiber F-P interferometric micro-displacement measurement is introduced. It is capable of achieving the absolute displacement measurement, and wavelet transforms is adopted as theory fundament to extract the optical F-P interferometric characteristic signal and remove the noise, so its resolution can reach 0. 01 μm in the dynamic range of 0～ 1 mm.展开更多
基金Projects(51875585, 51875584, 51935013) supported by the National Natural Science Foundation of ChinaProject(2020JJ4247) supported by the Natural Science Foundation of Hunan Province,ChinaProject(ZHD202001) supported by the Opening Project of Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory,China。
文摘A micro-displacement sensor based on fiber Bragg grating(FBG) is proposed. The device consists of a pair of FBGs with different central wavelengths fabricated by femtosecond laser phase mask method and a metal substrate with lever structure. The displacement is amplified by lever structure and it converts into axial tension of FBG, which has a high displacement sensitivity. The amplification factors obtained by theoretical analysis and finite element simulation are 2.67 and 2.50, respectively. The experimental results show that in the range of 0-50 μm the shift of FBG center wavelength is linearly related to the displacement of measured object and displacement sensitivity reaches 121 pm/μm. In addition, the cascaded FBG is used to compensate the temperature.
基金This project is supported by National Natural Sciences Foundation of China(No.50175037).
文摘On the basis of existing techniques,a compact micro-displacement sensor of phase grating interference(PGI)is described,which adopts cylindrical hologram diffraction grating as the calibration standard.The optical principle of the sensor is explained,and the relation between the grating motion displacement and the phase shift of interference stripes is deduced.The improvement of the integral structure and the method of photoelectric signal processing are described in detail.With the software system based on the virtual instrument development platform Labwindows/CVI and other hardwares such as the precision displacement worktable,the surfaces of typical parts are measured and the characterization results are given.The sensor has wide measuring range and high resolution,its sensitivity and resolution being independent of the wavelength of the incident light.The vertical measuring range is 0-6 mm,and the vertical resolution is 0.005μm.The experimental results show that the sensor can be used to measure and characterize the surface topography parameters of the plane and curved surface.
文摘Based on dual-differential comparing principle, an experimental system of optical fiber F-P interferometric micro-displacement measurement is introduced. It is capable of achieving the absolute displacement measurement, and wavelet transforms is adopted as theory fundament to extract the optical F-P interferometric characteristic signal and remove the noise, so its resolution can reach 0. 01 μm in the dynamic range of 0～ 1 mm.
