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Laboratory evaluation of a low-cost micro electro-mechanical systems sensor for inclination and acceleration monitoring
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作者 Antonis Paganis Vassiliki NGeorgiannou +1 位作者 Xenofon Lignos Reina El Dahr 《Deep Underground Science and Engineering》 2025年第1期46-54,共9页
In this study,the design and development of a sensor made of low-cost parts to monitor inclination and acceleration are presented.Αmicro electro-mechanical systems,micro electro mechanical systems,sensor was housed i... In this study,the design and development of a sensor made of low-cost parts to monitor inclination and acceleration are presented.Αmicro electro-mechanical systems,micro electro mechanical systems,sensor was housed in a robust enclosure and interfaced with a Raspberry Pi microcomputer with Internet connectivity into a proposed tilt and acceleration monitoring node.Online capabilities accessible by mobile phone such as real-time graph,early warning notification,and database logging were implemented using Python programming.The sensor response was calibrated for inherent bias and errors,and then tested thoroughly in the laboratory under static and dynamic loading conditions beside high-quality transducers.Satisfactory accuracy was achieved in real time using the Complementary Filter method,and it was further improved in LabVIEW using Kalman Filters with parameter tuning.A sensor interface with LabVIEW and a 600 MHz CPU microcontroller allowed real-time implementation of highspeed embedded filters,further optimizing sensor results.Kalman and embedded filtering results show agreement for the sensor,followed closely by the lowcomplexity complementary filter applied in real time.The sensor's dynamic response was also verified by shaking table tests,simulating past recorded seismic excitations or artificial vibrations,indicating negligible effect of external acceleration on measured tilt;sensor measurements were benchmarked using highquality tilt and acceleration measuring transducers.A preliminary field evaluation shows robustness of the sensor to harsh weather conditions. 展开更多
关键词 field monitoring Kalman filter laboratory evaluation micro electro mechanical systems(MEMS) monitoring node shaking table
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Design, fabrication and performance test of an integrated exploding foil initiator system 被引量:6
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作者 Zehao Wang Pengfei Xue +1 位作者 Qingxuan Zeng Mingyu Li 《Defence Technology(防务技术)》 SCIE EI CAS CSCD 2024年第12期125-135,共11页
The integration method of exploding foil initiator system(EFIs) used to be researched to broaden its application range in military and aerospace in the last few decades.In order to lower the firing voltage below 1 kV,... The integration method of exploding foil initiator system(EFIs) used to be researched to broaden its application range in military and aerospace in the last few decades.In order to lower the firing voltage below 1 kV,an integrated EFIs with enhanced energy efficiency was designed.Corresponding exploding foil initiator chips were fabricated in batch via micro electromechanical systems technology by integrating a unified foil,a flyer layer and a barrel on a glass substrate successively,meanwhile its package of the whole system was proposed at a volume of 2.194 cm^(3).The structural parameters were determined by predicted performance including flyer velocity,impact behavior and conduction property via the proposed theoretical models and the static electric field simulation.As expect,this integrated EFIs exhibited excellent functions,which could accelerate the flyer to a terminal velocity over 4 km/s and preeminently initiate HNS-IV pellet at a circuit of 0.24 μF/0.9 kV.Furthermore,the theoretical design,fabrication and performance test have been all included to validate the feasibility of this integrated EFIs that was beneficial for its commercial development in the future. 展开更多
关键词 Exploding foil initiator system INTEGRATION Planar trigger switch micro electromechanical systems Flyer velocity Shock initiation
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Design and Fabrication of MEMS Gyroscopes on the Silicon-on-insulator Substrate with Decoupled Oscillation Modes 被引量:1
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作者 XIE Jianbing YUAN Weizheng CHANG Honglong 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2010年第1期16-20,共5页
The mode coupling is a major factor to affect the precision of the micro electromechanical systems(MEMS)gyroscope.Currently,many MEMS gyroscopes with separate oscillation modes for drive and detection have been develo... The mode coupling is a major factor to affect the precision of the micro electromechanical systems(MEMS)gyroscope.Currently,many MEMS gyroscopes with separate oscillation modes for drive and detection have been developed to decrease the mode coupling,but the gyroscope accuracy can not satisfy the high-precision demand well.Therefore,high performance decoupled MEMS gyroscopes is still a hot topic at present.An innovative design scheme for a MEMS gyroscope is designed,and in this design,the inertial mass is divided into three parts including the inner mass,the outer mass and the main frame mass.The masses are supported and separated by a set of mutually orthogonal beams to decouple their movements.Moreover,the design is modelled by multi-port-element network(MuPEN)method and the simulation results show that the mode coupling of the gyroscope between driving and sensing mode was eliminated effectively.Furthermore,we proposed a new silicon-on-insulator(SOI)process to fabricate the gyroscope.The scale factor of the fabricated gyroscope is 8.9 mV/((~)os)and the quality factor(Q-factor)is as high as 600 at atmosphere pressure,and then,the resonant frequency,scale factor and bias drift has been test.Process and test results show that the proposed MEMS gyroscope are effective for decrease mode coupling,furthermore,it can achieve a high performance at atmosphere pressure.Furthermore,the MEMS gyroscope can achieve a high performance at atmosphere pressure.The research can be taken as good advice for the design and fabrication of MEMS gyroscope,meanwhile,it also provides technical support for speeding up of MEMS gyroscope industrialization. 展开更多
关键词 micro electromechanical systems(MEMS) GYROSCOPE SILICON-ON-INSULATOR decoupled oscillation modes
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Application of Novel Rotation Angular Model for 3D Mouse System Based on MEMS Accelerometers
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作者 钱莉 陈文元 徐国平 《Journal of Shanghai Jiaotong university(Science)》 EI 2009年第2期137-142,共6页
A new scheme is proposed to model 3D angular motion of a revolving regular object with miniature, low-cost micro electro mechanical systems(MEMS) accelerometers(instead of gyroscope),which is employed in 3D mouse syst... A new scheme is proposed to model 3D angular motion of a revolving regular object with miniature, low-cost micro electro mechanical systems(MEMS) accelerometers(instead of gyroscope),which is employed in 3D mouse system.To sense 3D angular motion,the static property of MEMS accelerometer,sensitive to gravity acceleration,is exploited.With the three outputs of configured accelerometers,the proposed model is implemented to get the rotary motion of the rigid object.In order to validate the effectiveness of the proposed model,an input device is developed with the configuration of the scheme.Experimental results show that a simulated 3D cube can accurately track the rotation of the input device.The result indicates the feasibility and effectiveness of the proposed model in the 3D mouse system. 展开更多
关键词 micro electro mechanical systems (MEMS) accelerometer 3D mouse rotation angular model homogeneous transformation matrix 3D graphical user interface
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Real-Time, Automatic and Wireless Bridge Monitoring System Based on MEMS Technology
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作者 Bo Qiu Jianda Tan 《Journal of Civil Engineering and Architecture》 2016年第9期1027-1031,共5页
Currently, the monitoring of bridges in China heavily relies on manual operation, which has several major problems. It generally takes a very long time to complete an inspection process on bridges. The manual data is ... Currently, the monitoring of bridges in China heavily relies on manual operation, which has several major problems. It generally takes a very long time to complete an inspection process on bridges. The manual data is sometimes unreliable or even wrong in the case of careless operation. The inspection activity itself is dangerous for inspectors, e.g., bridges are located in the sea or river. Some semi-automatic monitoring methods are recently employed, but they are either very expensive or do not work properly. Therefore, the traditional bridge monitoring process becomes an increasing challenge for bridge operators. In this paper, a real-time and automatic bridge monitoring system is presented to meet the bridge monitoring needs, and MEMS (Micro Electro Mechanical Systems) are the key building block in this system. By using the MEMS-based sensors, it is much more efficient and accurate in monitoring bridges with the measurement of inclination, acceleration, displacement, moisture, temperature, stress and other data. 展开更多
关键词 Bridge monitoring system MEMS micro Electro Mechanical systems AUTOMATIC REAL-TIME wireless.
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Integration of Strain Sensors on Additively Manufactured Implantable Devices
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作者 Marta Graziano Giorgio De Pasquale 《材料科学与工程(中英文B版)》 2021年第4期133-137,共5页
The development of personalized healthcare is rapidly growing thanks to the support of low-power electronics,advanced fabrication processes and secured data transmission protocols.Long-acting drug delivery systems abl... The development of personalized healthcare is rapidly growing thanks to the support of low-power electronics,advanced fabrication processes and secured data transmission protocols.Long-acting drug delivery systems able to sustain the release of therapeutics in a controllable manner can provide several advantages in the treatment of chronic diseases.Various systems under development control drug release from an implantable reservoir via concentration driven diffusion through nanofluidic membranes.Given the high drug concentration in the reservoir,an inward osmotic fluid transport occurs across the membrane,which counters the outward diffusion of drugs.The resulting osmotic pressure buildup may be sufficient to cause the failure of implants with associated risks to patients.Confidently assessing the osmotic pressure buildup requires testing in vivo.Here,using metal and polymer AM(additive manufacturing)processes,we designed and developed implantable drug reservoirs with embedded strain sensors to directly measure the osmotic pressure in drug delivery implants in vitro and in vivo. 展开更多
关键词 Drug delivery devices AM design for additive manufacturing(DFAM) micro electro mechanical systems(MEMS) experimental mechanics.
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From MEMS to NEMS: Smart Chips with Senses and Muscles
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作者 Ali Jazairy 《Journal of Chemistry and Chemical Engineering》 2013年第10期1001-1005,共5页
The last half-century was transformed by the electronic revolution that essentially reproduced the human brain and its computing capacity on a chip. But over time, scientists have realized that something was missing t... The last half-century was transformed by the electronic revolution that essentially reproduced the human brain and its computing capacity on a chip. But over time, scientists have realized that something was missing to give life, so to speak, to the small chip with a brain: One needed to awaken its senses and develop its muscles! This challenge was solved through MEMS (micro electro mechanical systems). Indeed, MEMS today are equipped with the sense of sight, smell, hearing, taste and touch through microsensors. They are also capable of physical exertion through small muscles called microactuators. These new capabilities open wide fields of imagination and important specific applications. 展开更多
关键词 MEMS MOEMS micro opto electro mechanical systems NEMS (nano electro mechanical systems wavelength-tunable FP (Fabry-P6rot) interferometer DWDM (dense wavelength division multiplexing) telecommunication VECSELS (vertical external cavity surface emitting lasers).
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Study on Energy Stored in Thin Layers of MEMS Ultrasonic Resonance Separator
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作者 丁杰雄 《Journal of Electronic Science and Technology of China》 2006年第2期181-186,共6页
The particles suspending in liquid suffer acoustical radiation force from ultrasonic field. The force may cause particles movement and has special advantage to separate particles from liquid in Micro Electro Mechanica... The particles suspending in liquid suffer acoustical radiation force from ultrasonic field. The force may cause particles movement and has special advantage to separate particles from liquid in Micro Electro Mechanical Systems (MEMS). It is important to improve the energy stored in liquid layer so as to increase separation ability for decreasing drive demand in MEMS. Resonance may hugely increase the magnitude and generally be employed in micro separator. The summits of admittance spectrum show the resonance frequencies. It may come from resonance in one layer or multi layers in micro separator. This paper studies the difference of energy stored in layers at each rein frequency. It provides the way to select the most effect separation frequency other than admittance spectrum. 展开更多
关键词 micro Electro Mechanical systems (MEMS) ULTRASONIC SEPARATION FLUID
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RF MEMS Based Reconfigurable Rectangular Slotted Self Similar Antenna
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作者 S. Anand J. Josephine Pon Gloria 《Circuits and Systems》 2016年第6期859-876,共18页
Wireless communication systems which require flexibility and reconfigurability in antenna systems faces main problems like antenna performance, size, weight and cost. A wide band Frequency Reconfigurable Rectangular S... Wireless communication systems which require flexibility and reconfigurability in antenna systems faces main problems like antenna performance, size, weight and cost. A wide band Frequency Reconfigurable Rectangular Slotted Self Similar Antenna has been proposed in this paper. The rectangular slotted patch is repeated for two iterations at different scales and is separated by means of Radio Frequency Micro Electro Mechanical Systems (RF MEMS) switches in order to provide reconfigurability. The antenna can operate in three frequency bandsi.e. K-band, Ku-band and Ka-band by altering the states of RF MEMS switches. To avoid fringing effects and to improve antenna performance, quarter wavelength (λ/4) spacing is required between the antenna and the ground plane. However, a Reconfigurable Antenna requires different λ/4 spacing which is difficult to achieve using a common ground plane. So the Frequency Reconfigurable antenna is integrated with high impedance surface (HIS) like Electronic Band Gap (EBG) structures to suppress standing waves and surface waves with a unified profile thickness of 1.75 mm. The overall dimension of the proposed antenna along with RF MEMS Switch, feed element and HIS is about 8 mm × 8 mm × 1.75 mm. The simulated results of the proposed antenna reveal enhancement in antennas performance like Voltage Standing Wave Ratio (VSWR), Front to Back Ratio (FBR) and bandwidth when it is placed over HIS EBG. Also the radiation patterns of the proposed antenna when placed over EBG shows the suppression of side lobe and backward radiation. 展开更多
关键词 Frequency Reconfigurable Antenna Radio Frequency micro Electro Mechanical systems High Impedance Structure Self Similar Structures
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Recent advances in bio-microsystem integration and Lab-on-PCB technology
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作者 Sotirios Papamatthaiou Pavlos Menelaou +1 位作者 Bilal El Achab Oussallam Despina Moschou 《Microsystems & Nanoengineering》 2025年第3期91-121,共31页
The concept of micro-total analysis systems(µTAS)introduced in the early 1990s revolutionized the development of lab-on-a-chip(LoC)technologies by miniaturizing and automating complex laboratory processes.Despite... The concept of micro-total analysis systems(µTAS)introduced in the early 1990s revolutionized the development of lab-on-a-chip(LoC)technologies by miniaturizing and automating complex laboratory processes.Despite their potential in diagnostics,drug development,and environmental monitoring,the widespread adoption of LoC systems has been hindered by challenges in scalability,integration,and cost-effective mass production.Traditional substrates like silicon,glass,and polymers struggle to meet the multifunctional requirements of practical applications.Lab-on-Printed Circuit Board(Lab-on-PCB)technology has emerged as a transformative solution,leveraging the cost-efficiency,scalability,and precision of PCB fabrication techniques.This platform facilitates the seamless integration of microfluidics,sensors,and actuators within a single device,enabling complex,multifunctional systems suitable for real-world deployment.Recent advancements have demonstrated Lab-on-PCB’s versatility across biomedical applications,such as point-of-care diagnostics,electrochemical biosensing,and molecular detection,as well as drug development and environmental monitoring.This review examines the evolution of Lab-on-PCB technology over the past eight years,focusing on its applications and impact within the research community.By analyzing recent progress in PCB-based microfluidics and biosensing,this work highlights how Lab-on-PCB systems address key technical barriers,paving the way for scalable and practical lab-on-chip solutions.The growing academic and industrial interest in Lab-on-PCB is underscored by a notable increase in publications and patents,signaling its potential for commercialization and broader adoption. 展开更多
关键词 diagnosticsdrug developmentand environmental monitoringthe integration bio microsystem integration miniaturizing automating complex laboratory processesdespite lab pcb SCALABILITY micro total analysis systems
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Transparent micropatterned conductive films based on highlyordered nanowire network 被引量:1
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作者 Xin-Ran Zhang Hai-Tao Deng +3 位作者 Xu Zeng Yi-Lin Wang Peng Huang Xiao-Sheng Zhang 《Nano Research》 SCIE EI CSCD 2024年第5期4288-4297,共10页
Transparent conductive films that are based on nanowire networks are essential to construct flexible,wearable,and even stretchable electronics.However,large-scale precise micropatterning,especially with regard to the ... Transparent conductive films that are based on nanowire networks are essential to construct flexible,wearable,and even stretchable electronics.However,large-scale precise micropatterning,especially with regard to the controllability of the organizing orientation of nanowires,is a critical challenge.Herein,we proposed a liquid film rupture self-assembly approach for manufacturing transparent conductive films with microstructure arrays based on a highly ordered nanowire network.The large-scale microstructure conductive films were fabricated through air-liquid interface self-assembly and liquid film rupture self-assembly.Six typical micropattern morphologies,including square,hexagon,circle,serpentine,etc.,were prepared to reveal the universal applicability of the proposed approach.The homogeneity and controllability of this approach were verified for multiple assemblies.With the assembly cycles increasing,the optical transmittance decreases slightly.In addition,theoretical model analysis is carried out,and the analytical formula of the speed of the film moving with the surface tension and the density of the liquid film is presented.Finally,the feasibility of this approach for piezoresistive strain sensors is verified.This fabrication approach demonstrated a cost-effective and efficient method for precisely arranging nanowires,which is useful in transparent and wearable applications. 展开更多
关键词 flexible electronics transparent conductive network microPATTERNING NANOWIRES micro electromechanical systems(MEMS)
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A New Process and Technology for Rapid Prototyping of A μ-Micro Motor
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作者 郑炜 郑珲 廖锐 《Tsinghua Science and Technology》 SCIE EI CAS 2009年第S1期149-153,共5页
A new process and technology of rapid prototyping for a μ-micro motor is presented as a nontraditional machining and an advanced manufacturing technology (AMT) to be realized by using masks, including the operation p... A new process and technology of rapid prototyping for a μ-micro motor is presented as a nontraditional machining and an advanced manufacturing technology (AMT) to be realized by using masks, including the operation principle of the motor, structure design, technique, driven circuit, and quality examination with Raman spectrum. The μ-micro motor is fabricated by the micro electro-mechanical systems (MEMS) process, the structure design must be considered to fabricate or assembly the parts during machining the motor in the meantime. The research proved that integration of IC (integrated circuit) process and MEMS using masks is effective in obtaining the rapid prototyping manufacturing of the μ-micro motor. With the mature technique to fabricate the motor, there are advantages to produce the motor in short time and with lower cost than before. The motor is a common power source of micro machines in military and civilian applications, for example, applied to micro robot, micro bio medicine, and micro machine. The size of the motor is 190 μm in maximum diameter by 125 μm in height that is bulk machined in array with the number of hundreds of micro motors on a substrate. 展开更多
关键词 micro motor nontraditional machining advanced manufacturing technology micro-/nano-tech-nology micro electro-mechanical systems (MEMS) China
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A micro amperometric immunosensor for detection of human immunoglobulin
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作者 XU Yuanyuan XIA Shanhong BIAN Chao CHEN Shaofeng 《Science in China(Series F)》 2006年第3期397-408,共12页
A novel amperometric immunosensor based on the micro electromechanical systems (MEMS) technology, using protein A and self-assembled monolayers (SAMs) for the orientation-controlled immobilization of antibodies, h... A novel amperometric immunosensor based on the micro electromechanical systems (MEMS) technology, using protein A and self-assembled monolayers (SAMs) for the orientation-controlled immobilization of antibodies, has been developed. Using MEMS technology, an "Au, Pt, Pt" three-microelectrode system enclosed in a SU-8 micro pool was fabricated. Employing SAMs, a monolayer of protein A was immobilized on the cysteamine modified Au electrode to achieve the orientation-controlled immobilization of the human immunoglobulin (HIgG) antibody. The immunosensor aimed at low unit cost, small dimension, high level of integration and the prospect of a biosensor system-on-a-chip. Cyclic voltammetry and chronoamperometry were conducted to characterize the immunosensor. Compared with the traditional immunosensor using bulky gold electrode or screen-printed electrode and the procedure directly binding protein A to electrode for immobilization of antibodies, it had attractive advantages, such as miniaturization, compatibility with CMOS technology, fast response (30 s), broad linear range (50-400 pg/L) and low detection limit (10 pg/L) for HIgG. In addition, this immunosensor was easy to be designed into micro array and to realize the simultaneously multi-parameter detection. 展开更多
关键词 amperometric immunosensor micro electromechanical systems (MEMS) self-assembled monolay-ers (SAMs) protein A orientation-controlled immobilization biosensor system-on-a-chip.
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Bacillus cereus AR156 primes induced systemic resistance by suppressing miR825/825 and activating defense-related genes in Arabidopsis 被引量:8
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作者 Dongdong Niu Jing Xia +7 位作者 Chunhao Jiang Beibei Qi Xiaoyu Ling Siyuan Lin Weixiong Zhang Jianhua Guo Hailing Jin Hongwei Zhao 《Journal of Integrative Plant Biology》 SCIE CAS CSCD 2016年第4期426-439,共14页
Small RNAs play an important role in plant immune responses. However, their regulatory function in induced systemic resistance(ISR) is nascent. Bacillus cereus AR156 is a plant growth-promoting rhizobacterium that i... Small RNAs play an important role in plant immune responses. However, their regulatory function in induced systemic resistance(ISR) is nascent. Bacillus cereus AR156 is a plant growth-promoting rhizobacterium that induces ISR in Arabidopsis against bacterial infection. Here,by comparing small RNA profiles of Pseudomonas syringae pv. tomato(Pst) DC3000-infected Arabidopsis with and without AR156 pretreatment, we identified a group of Arabidopsis micro RNAs(mi RNAs) that are differentially regulated by AR156 pretreatment. mi R825 and mi R825 are two mi RNA generated from a single mi RNA gene.Northern blot analysis indicated that they were significantly downregulated in Pst DC3000-infected plants pretreated with AR156, in contrast to the plants without AR156 pretreatment. mi R825 targets two ubiquitin-protein ligases,while mi R825 targets toll-interleukin-like receptor(TIR)-nucleotide binding site(NBS) and leucine-rich repeat(LRR)type resistance(R) genes. The expression of these target genes negatively correlated with the expression of mi R825 and mi R825. Moreover, transgenic plants showing reduced expression of mi R825 and mi R825 displayed enhanced resistance to Pst DC3000 infection, whereas transgenic plants overexpressing mi R825 and mi R825 were more susceptible. Taken together, our data indicates that Bacillus cereus AR156 pretreatment primes ISR to Pst infection by suppressing mi R825 and mi R825 and activating the defense related genes they targeted. 展开更多
关键词 Induced systemic resistance ISR micro RNA plant innate immunity small RNA
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Graphene foam resonators:Fabrication and characterization
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作者 Yahav Ben-Shimon Siva KReddy Assaf Ya'akobovitz 《Nano Research》 SCIE EI CSCD 2022年第1期225-229,共5页
Three-dimensional graphene foams(GFs)benefit from a large surface area and unique physical properties.We present here the first-ever miniaturized GF-based resonators.We developed a simple yet reliable fabrication proc... Three-dimensional graphene foams(GFs)benefit from a large surface area and unique physical properties.We present here the first-ever miniaturized GF-based resonators.We developed a simple yet reliable fabrication process,in which GFs are synthesized and assembled on a cavity to form suspended GF devices.We electrostatically excited these devices and analyzed their resonance and ring-down responses.We observed significant energy dissipation,as the quality factor of the devices was in the order of several tens.Additionally,we investigated the influence of temperature on the operation of the devices and found that high temperatures mechanically soften the resonators but also considerably enhance energy dissipation.Finally,our devices demonstrated a mode-coupling of a resonance mode and a mode having twice its frequency.Thus,this work paves the way toward the development of novel GF resonators that could be integrated into future devices,such as GF-based nano-electromechanical sensors,electrical circuits,and oscillators. 展开更多
关键词 energy dissipation graphene foam micro/nano electromechanical systems three-dimensional graphene resonators
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