This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined chips,each packaged by polymer and metal.The novel combin...This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined chips,each packaged by polymer and metal.The novel combined differential structure effectively reduces various environmental affections,such as thermal drift,humidity drift and electrostatic charge accumulation.The sensor is tested in near-ground place as well as balloon-borne sounding.In different weather conditions,the measurement results showed good agreement with those of the commercial electric field mill.展开更多
A compact and highly sensitive gas pressure and temperature sensor based on Fabry-Pérot interferometer(FPI)and fiber Bragg grating(FBG)is proposed and demonstrated experimentally in this paper.The theoretical mod...A compact and highly sensitive gas pressure and temperature sensor based on Fabry-Pérot interferometer(FPI)and fiber Bragg grating(FBG)is proposed and demonstrated experimentally in this paper.The theoretical model for pressure and temperature sensing is established.Building on this foundation,a novel micro silicon cavity sensor structure sensitive to pressure is devised downstream of an FBG.The concept of separate measurement and the mechanisms enhancing pressure sensitivity are meticulously analyzed,and the corresponding samples are fabricated.The experimental results indicate that the pressure sensitivity of the sensor is-747.849 nm/MPa in 0—100 k Pa and its linearity is 99.7%and it maintains good stability in 150 min.The sensor offers the advantages of compact size,robust construction,easy fabrication,and high sensitivity,making it potentially valuable for micro-pressure application.展开更多
A new silicon micro flow sensor with multiple temperature sensing elements was proposed and numerically simulated in considering wide range flow measuring properties.The micro flow sensor has three pairs of temperatur...A new silicon micro flow sensor with multiple temperature sensing elements was proposed and numerically simulated in considering wide range flow measuring properties.The micro flow sensor has three pairs of temperature sensing elements with a central heater compared with typical sensor which has only a temperature sensing element on each side of a central heater.A numerical analysis of the micro flow sensor by Finite Difference Formulation for Heat Transfer Equation was performed.The nearest pair of temperature sensor showed very good linear sensitivity between 0 to 0.4m/s flow and saturated from 0.75m/s flow.However the furthest pair of temperature sensor showed some flow sensitivity even though the flow rate of 2.0m/s.Thus,this suggested new micro flow meter with multiple temperature sensing elements could be used as a thermal mass flow sensor which has accuracy sensitivity for very wide flow range.展开更多
This paper covers a micro sensor analog signal processing circuit system（MASPS） chip with low power and a digital signal processing circuit board implementation including hardware connection and software design. Att...This paper covers a micro sensor analog signal processing circuit system（MASPS） chip with low power and a digital signal processing circuit board implementation including hardware connection and software design. Attention has been paid to incorporate the MASPS chip into the digital circuit board.The ultimate aim is to form a hybrid circuit used for mixed-signal processing,which can be applied to a micro sensor flow monitoring system.展开更多
Recently,the possibility of a disaster due to the improper use of highly toxic gases which are known as agents throughout the world has been increased.Therefore,the development of technology for countermeasure against...Recently,the possibility of a disaster due to the improper use of highly toxic gases which are known as agents throughout the world has been increased.Therefore,the development of technology for countermeasure against CWA has been highly demanded.In this study,thick film SnO_2-based gas sensing devices were prepared and the sensing properties for the four different kinds of simulants such as dimethyl methyl phosphonate (DMMP),acetonitrile,dichloromethane and dipropylene glycol methyl ether have been investigated.And a micro sensor array consists of six devices was prepared using MEMS technology to provide high selective and reliable sensing system for the detection of chemical warfare agents.The micro gas sensor array prepared showed good sensitivity and selectivity to CWA.展开更多
The sensitivity and selectivity of gas sensors are related with not only sensing material,but also their operating temperatures.Applying this property,temperature modulation technique has been proposed to improve the ...The sensitivity and selectivity of gas sensors are related with not only sensing material,but also their operating temperatures.Applying this property,temperature modulation technique has been proposed to improve the selectivity of gas sensors.With a newly developed alumina based micro gas sensor,the sensitivity to CO and CH_4 at different operating temperatures was investigated.By modulating the temperature of the sensor at pulse and sine wave modes with different frequencies and amplitudes,the dynamic responses of the sensor were measured and processed.Results show that the modulating waveshape plays an important role in the improvement of selectivity,while the influence of frequency is small at the suitable sampling frequency in the range of 25 mHz～200 mHz.展开更多
This paper describes a micro thermal shear stress sensor with a cavity underneath, based on vacuum anodic bonding and bulk micromachined technology. A Ti/Pt alloy strip, 2μm×100μm, is deposited on the top of a ...This paper describes a micro thermal shear stress sensor with a cavity underneath, based on vacuum anodic bonding and bulk micromachined technology. A Ti/Pt alloy strip, 2μm×100μm, is deposited on the top of a thin silicon nitride diaphragm and functioned as the thermal sensor element. By using vacuum anodic bonding and bulk-si anisotropic wet etching process instead of the sacrificial-layer technique, a cavity, functioned as the adiabatic vacuum chamber, 200μm×200μm×400μm, is placed between the silicon nitride diaphragm and glass （Corning 7740）. This method totally avoid adhesion problem which is a major issue of the sacrificial-layer technique.展开更多
In this article, we used the self-excitation and self-inductance characteristics of polyvinylidene fluoride(PVDF) piezoelectric materials, combined with the powerful signal processing and calculation analysis capabili...In this article, we used the self-excitation and self-inductance characteristics of polyvinylidene fluoride(PVDF) piezoelectric materials, combined with the powerful signal processing and calculation analysis capabilities of integrated circuits, for the first time to explore a set of microcantilever sensor "readout system" without additional driver(self-driving) and can realize self-sensing external signal(self-sensing).It was successfully applied to the unlabeled detection of avian influenza virus(AIV) H9N_(2). The specific force of the antigen-antibody complexes on the surface of the microcantilever leads to the change of the stress of the cantilever, which drives the constructed detection device, and does not require an additional excitation source to drive it, that is, the self-driving part. At the same time, due to the movement of piezoelectric charges in the film caused by the positive piezoelectric effect of the PVDF film, self-inductive charges are generated on the surface of the sensor dielectric. The charge signal is converted into a voltage signal, and the sensing part is completed, that is, self-sensing. The immunosensor has a linear range of100-1000 ng/m L with a detection limit of 2.9 ng/m L. The method will also open up a new avenue for the detection of other analytes based on antigen-antibody responses.展开更多
A new low noise interface circuit for detecting weak current of micro-sensors is designed.By using the transimpedance amplifier to substitute the charge amplifier,the closed-loop circuit can avoid the phase error of t...A new low noise interface circuit for detecting weak current of micro-sensors is designed.By using the transimpedance amplifier to substitute the charge amplifier,the closed-loop circuit can avoid the phase error of the charge amplifier.Therefore,the phase compensation devices will be cancelled,because there is no phase transformation through the transimpedance amplifier.As well as,by using CCCII devices to implement the high value feedback resistor of the impedance amplifier,the noise of the I-V transformation devices is reduced,comparing with the passive resistor.The floating resistor is easy to be integrated into chips,making the integration of the interface circuit of the intelligent sensors increase.Through the simulation,the phase error of the charge amplifier is almost 9°at 2 kHz and it changes with the working frequency of the micro-sensors making the phase compensation not easy.The value of the floating resistor is 250 kΩ where the bias current is 50 μA.The noise of the active resistor is 0.037 fV2/Hz,comparing with the noise of the passive resistor,which is 4.14 fV2/Hz.展开更多
<div style="text-align:justify;"> An in-fiber axial micro-strain sensor based on a Few Mode Fiber Bragg Grating (FM-FBG) is proposed and experimentally characterized. This FM-FBG is in inscribed in a m...<div style="text-align:justify;"> An in-fiber axial micro-strain sensor based on a Few Mode Fiber Bragg Grating (FM-FBG) is proposed and experimentally characterized. This FM-FBG is in inscribed in a multi-layer few-mode fiber (ML-FMF), and could acquire the change of the axial strain along fibers, which depends on the transmission dips. On account of the distinct dual-mode property, a good stability of this sensor is realized. The two transmission dips could have the different sensing behaviors. Both the propagation characteristics and operation principle of such a sensor are demonstrated in detail. High sensitivity of the FM-FBG, ~4 pm/με and ~4.5 pm/με within the range of 0 με - 1456 με, is experimentally achieved. FM-FBGs could be easily scattered along one fiber. So this sensor may have a great potential of being used in sensor networks. </div>展开更多
In this paper, we present a Micro-payment based Isolation of Misbehavior(MIM) secure routing protocol. The protocol contains three parts: micro-payment scheme, routingdiscovery and malicious nodes detection The micro-...In this paper, we present a Micro-payment based Isolation of Misbehavior(MIM) secure routing protocol. The protocol contains three parts: micro-payment scheme, routingdiscovery and malicious nodes detection The micro-payment scheme proposed in MIM is the firstvirtual currency system that can be suit lor sensor network environment, Based on the micro-paymentscheme, we device an energy aware routing protocol, which forwards packets by auction. Furthermore,the base station can detect and isolate misbehave or non-cooptrare nodes according to the routinginformation.展开更多
On the basis of existing techniques, a compact micro-displacement sensor of phase grating interference （PGI） is described, which adopts cylindrical hologram diffraction grating as the calibration standard. The optic...On the basis of existing techniques, a compact micro-displacement sensor of phase grating interference （PGI） is described, which adopts cylindrical hologram diffraction grating as the calibration standard. The optical principle of the sensor is explained, and the relation between the grating motion displacement and the phase shift of interference stripes is deduced. The improvement of the integral structure and the method of photoelectric signal processing are described in detail. With the software system based on the virtual instrument development platform Labwindows/CVI and other hardwares such as the precision displacement worktable, the surfaces of typical parts are measured and the characterization results are given. The sensor has wide measuring range and high resolution, its sensitivity and resolution being independent of the wavelength of the incident light. The vertical measuring range is 0-6 mm, and the vertical resolution is 0.005μm. The experimental results show that the sensor can be used to measure and characterize the surface topography parameters of the plane and curved surface.展开更多
A new silicon beam resonator design for a novel gas sensor based on simultaneous conductivity and mass change measurement is investigated. High selectivity and sensitivity in gas detection can be obtained by measuring...A new silicon beam resonator design for a novel gas sensor based on simultaneous conductivity and mass change measurement is investigated. High selectivity and sensitivity in gas detection can be obtained by measuring the charge-to-mass ratio of gas molecules. Structures of silicon beam resonators are designed, simulated, and optimized. This gas sensor is fabricated using sacrificial layer microelectronmechanical system technology, and the resonant frequency of the microbeam is measured.展开更多
基金Supported by the National High Technology Research and Development Program of China(863 Program,2011AA-040405)the National Natural Science Foundation of China(Nos.61101049,61201078,61302032,61327810)
文摘This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined chips,each packaged by polymer and metal.The novel combined differential structure effectively reduces various environmental affections,such as thermal drift,humidity drift and electrostatic charge accumulation.The sensor is tested in near-ground place as well as balloon-borne sounding.In different weather conditions,the measurement results showed good agreement with those of the commercial electric field mill.
基金supported in part by the National Natural Science Foundation of China(Nos.61735014 and 61927812)the Shaanxi Provincial Education Department(No.18JS093)+2 种基金the Natural Science Basic Research Program of Shaanxi Province(No.2024JC-YBMS-530)the Operation Fund of Logging Key Laboratory of Group Company(No.2021DQ0107-11)the Graduate Student Innovation Fund of Xi’an Shiyou University(No.YCS23213193)。
文摘A compact and highly sensitive gas pressure and temperature sensor based on Fabry-Pérot interferometer(FPI)and fiber Bragg grating(FBG)is proposed and demonstrated experimentally in this paper.The theoretical model for pressure and temperature sensing is established.Building on this foundation,a novel micro silicon cavity sensor structure sensitive to pressure is devised downstream of an FBG.The concept of separate measurement and the mechanisms enhancing pressure sensitivity are meticulously analyzed,and the corresponding samples are fabricated.The experimental results indicate that the pressure sensitivity of the sensor is-747.849 nm/MPa in 0—100 k Pa and its linearity is 99.7%and it maintains good stability in 150 min.The sensor offers the advantages of compact size,robust construction,easy fabrication,and high sensitivity,making it potentially valuable for micro-pressure application.
文摘A new silicon micro flow sensor with multiple temperature sensing elements was proposed and numerically simulated in considering wide range flow measuring properties.The micro flow sensor has three pairs of temperature sensing elements with a central heater compared with typical sensor which has only a temperature sensing element on each side of a central heater.A numerical analysis of the micro flow sensor by Finite Difference Formulation for Heat Transfer Equation was performed.The nearest pair of temperature sensor showed very good linear sensitivity between 0 to 0.4m/s flow and saturated from 0.75m/s flow.However the furthest pair of temperature sensor showed some flow sensitivity even though the flow rate of 2.0m/s.Thus,this suggested new micro flow meter with multiple temperature sensing elements could be used as a thermal mass flow sensor which has accuracy sensitivity for very wide flow range.
基金Project supported by National Natural Science Foundation of China(No60843005)the Basic Research Foundation of Beijing Institute of Technology,China(No20070142018)
文摘This paper covers a micro sensor analog signal processing circuit system（MASPS） chip with low power and a digital signal processing circuit board implementation including hardware connection and software design. Attention has been paid to incorporate the MASPS chip into the digital circuit board.The ultimate aim is to form a hybrid circuit used for mixed-signal processing,which can be applied to a micro sensor flow monitoring system.
文摘Recently,the possibility of a disaster due to the improper use of highly toxic gases which are known as agents throughout the world has been increased.Therefore,the development of technology for countermeasure against CWA has been highly demanded.In this study,thick film SnO_2-based gas sensing devices were prepared and the sensing properties for the four different kinds of simulants such as dimethyl methyl phosphonate (DMMP),acetonitrile,dichloromethane and dipropylene glycol methyl ether have been investigated.And a micro sensor array consists of six devices was prepared using MEMS technology to provide high selective and reliable sensing system for the detection of chemical warfare agents.The micro gas sensor array prepared showed good sensitivity and selectivity to CWA.
文摘The sensitivity and selectivity of gas sensors are related with not only sensing material,but also their operating temperatures.Applying this property,temperature modulation technique has been proposed to improve the selectivity of gas sensors.With a newly developed alumina based micro gas sensor,the sensitivity to CO and CH_4 at different operating temperatures was investigated.By modulating the temperature of the sensor at pulse and sine wave modes with different frequencies and amplitudes,the dynamic responses of the sensor were measured and processed.Results show that the modulating waveshape plays an important role in the improvement of selectivity,while the influence of frequency is small at the suitable sampling frequency in the range of 25 mHz～200 mHz.
基金Project supported by the National Natural Science Foundation of China (Grant No 60576053)Technology Innovation of Chinese Academy of Sciences (Grant No CXJJ-176)
文摘This paper describes a micro thermal shear stress sensor with a cavity underneath, based on vacuum anodic bonding and bulk micromachined technology. A Ti/Pt alloy strip, 2μm×100μm, is deposited on the top of a thin silicon nitride diaphragm and functioned as the thermal sensor element. By using vacuum anodic bonding and bulk-si anisotropic wet etching process instead of the sacrificial-layer technique, a cavity, functioned as the adiabatic vacuum chamber, 200μm×200μm×400μm, is placed between the silicon nitride diaphragm and glass （Corning 7740）. This method totally avoid adhesion problem which is a major issue of the sacrificial-layer technique.
基金the financial support from National Natural Science Foundation of China (No. 22102141)the Priority Academic Program Development of Jiangsu Higher Education Institutions (PAPD)+2 种基金Nature Science Foundation of Jiangsu Province No.BK20190905Project for Science and Technology of Yangzhou(No. YZ2020067)the open funds of the Ministry of Education Key Lab for Avian Preventive Medicine (No. YF202020)。
文摘In this article, we used the self-excitation and self-inductance characteristics of polyvinylidene fluoride(PVDF) piezoelectric materials, combined with the powerful signal processing and calculation analysis capabilities of integrated circuits, for the first time to explore a set of microcantilever sensor "readout system" without additional driver(self-driving) and can realize self-sensing external signal(self-sensing).It was successfully applied to the unlabeled detection of avian influenza virus(AIV) H9N_(2). The specific force of the antigen-antibody complexes on the surface of the microcantilever leads to the change of the stress of the cantilever, which drives the constructed detection device, and does not require an additional excitation source to drive it, that is, the self-driving part. At the same time, due to the movement of piezoelectric charges in the film caused by the positive piezoelectric effect of the PVDF film, self-inductive charges are generated on the surface of the sensor dielectric. The charge signal is converted into a voltage signal, and the sensing part is completed, that is, self-sensing. The immunosensor has a linear range of100-1000 ng/m L with a detection limit of 2.9 ng/m L. The method will also open up a new avenue for the detection of other analytes based on antigen-antibody responses.
基金Sponsored by the National High Technology Research Development Plan of China(Grant No.2008AA042201)
文摘A new low noise interface circuit for detecting weak current of micro-sensors is designed.By using the transimpedance amplifier to substitute the charge amplifier,the closed-loop circuit can avoid the phase error of the charge amplifier.Therefore,the phase compensation devices will be cancelled,because there is no phase transformation through the transimpedance amplifier.As well as,by using CCCII devices to implement the high value feedback resistor of the impedance amplifier,the noise of the I-V transformation devices is reduced,comparing with the passive resistor.The floating resistor is easy to be integrated into chips,making the integration of the interface circuit of the intelligent sensors increase.Through the simulation,the phase error of the charge amplifier is almost 9°at 2 kHz and it changes with the working frequency of the micro-sensors making the phase compensation not easy.The value of the floating resistor is 250 kΩ where the bias current is 50 μA.The noise of the active resistor is 0.037 fV2/Hz,comparing with the noise of the passive resistor,which is 4.14 fV2/Hz.
文摘<div style="text-align:justify;"> An in-fiber axial micro-strain sensor based on a Few Mode Fiber Bragg Grating (FM-FBG) is proposed and experimentally characterized. This FM-FBG is in inscribed in a multi-layer few-mode fiber (ML-FMF), and could acquire the change of the axial strain along fibers, which depends on the transmission dips. On account of the distinct dual-mode property, a good stability of this sensor is realized. The two transmission dips could have the different sensing behaviors. Both the propagation characteristics and operation principle of such a sensor are demonstrated in detail. High sensitivity of the FM-FBG, ~4 pm/με and ~4.5 pm/με within the range of 0 με - 1456 με, is experimentally achieved. FM-FBGs could be easily scattered along one fiber. So this sensor may have a great potential of being used in sensor networks. </div>
文摘In this paper, we present a Micro-payment based Isolation of Misbehavior(MIM) secure routing protocol. The protocol contains three parts: micro-payment scheme, routingdiscovery and malicious nodes detection The micro-payment scheme proposed in MIM is the firstvirtual currency system that can be suit lor sensor network environment, Based on the micro-paymentscheme, we device an energy aware routing protocol, which forwards packets by auction. Furthermore,the base station can detect and isolate misbehave or non-cooptrare nodes according to the routinginformation.
基金This project is supported by National Natural Sciences Foundation of China (No.50175037).
文摘On the basis of existing techniques, a compact micro-displacement sensor of phase grating interference （PGI） is described, which adopts cylindrical hologram diffraction grating as the calibration standard. The optical principle of the sensor is explained, and the relation between the grating motion displacement and the phase shift of interference stripes is deduced. The improvement of the integral structure and the method of photoelectric signal processing are described in detail. With the software system based on the virtual instrument development platform Labwindows/CVI and other hardwares such as the precision displacement worktable, the surfaces of typical parts are measured and the characterization results are given. The sensor has wide measuring range and high resolution, its sensitivity and resolution being independent of the wavelength of the incident light. The vertical measuring range is 0-6 mm, and the vertical resolution is 0.005μm. The experimental results show that the sensor can be used to measure and characterize the surface topography parameters of the plane and curved surface.
文摘A new silicon beam resonator design for a novel gas sensor based on simultaneous conductivity and mass change measurement is investigated. High selectivity and sensitivity in gas detection can be obtained by measuring the charge-to-mass ratio of gas molecules. Structures of silicon beam resonators are designed, simulated, and optimized. This gas sensor is fabricated using sacrificial layer microelectronmechanical system technology, and the resonant frequency of the microbeam is measured.
