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Femtosecond laser micro/nano processing:from fundamental to applications
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作者 Le Gao Qiming Zhang Min Gu 《International Journal of Extreme Manufacturing》 2025年第2期337-386,共50页
Able to precisely control and manipulate materials'states at micro/nano-scale level,femtosecond(fs)laser micro/nano processing technology has undergone tremendous development over the past three decades.Free-formi... Able to precisely control and manipulate materials'states at micro/nano-scale level,femtosecond(fs)laser micro/nano processing technology has undergone tremendous development over the past three decades.Free-forming three-dimensional(3D)microscale functional devices and inducing fascinating and unique physical or chemical phenomena have granted this technology powerful versatility that no other technology can match.As this technology advances rapidly in various fields of application,some key challenges have emerged and remain to be urgently addressed.This review firstly introduces the fundamental principles for understanding how fs laser pulses interact with materials and the associated unique phenomena in section 2.Then micro/nano-fabrication in transparent materials by fs laser processing is presented in section 3.Thereafter,several high efficiency/throughput fabrication methods as well as pulse-shaping techniques are listed in sections 4 and 5 reviews four-dimensional(4D)and nanoscale printing realized by fs laser processing technology.Special attention is paid to the heterogeneous integration(HI)of functional materials enabled by fs laser processing in section 6.Several intriguing examples of 3D functional micro-devices created by fs laser-based manufacturing methods such as microfluidics,lab-on-chip,micro-optics,micro-mechanics,micro-electronics,micro-bots and micro-biodevices are reviewed in section 7.Finally,a summary of the review and a perspective are proposed to explore the challenges and future opportunities for further betterment of fs laser micro/nano processing technology. 展开更多
关键词 femtosecond laser laser micro/nano processing laser fabrication direct laser writing 3D laser lithography
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Experimental Research on Effects of Process Parameters on Servo Scanning 3D Micro Electrical Discharge Machining 被引量:3
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作者 TONG Hao LI Yong HU Manhong 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2012年第1期114-121,共8页
Servo scanning 3D micro electrical discharge machining (3D SSMEDM) is a novel and effective method in fabricating complex 3D micro structures with high aspect ratio on conducting materials. In 3D SSMEDM process, the a... Servo scanning 3D micro electrical discharge machining (3D SSMEDM) is a novel and effective method in fabricating complex 3D micro structures with high aspect ratio on conducting materials. In 3D SSMEDM process, the axial wear of tool electrode can be compensated automatically by servo-keeping discharge gap, instead of the traditional methods that depend on experiential models or intermittent compensation. However, the effects of process parameters on 3D SSMEDM have not been reported up until now. In this study, the emphasis is laid on the effects of pulse duration, peak current, machining polarity, track style, track overlap, and scanning velocity on the 3D SSMEDM performances of machining efficiency, processing status, and surface accuracy. A series of experiments were carried out by machining a micro-rectangle cavity (900 μm×600 μm) on doped silicon. The experimental results were obtained as follows. Peak current plays a main role in machining efficiency and surface accuracy. Pulse duration affects obviously the stability of discharge state. The material removal rate of cathode processing is about 3/5 of that of anode processing. Compared with direction-parallel path, contour-parallel path is better in counteracting the lateral wear of tool electrode end. Scanning velocity should be selected moderately to avoid electric arc and short. Track overlap should be slightly less than the radius of tool electrode. In addition, a typical 3D micro structure of eye shape was machined based on the optimized process parameters. These results are beneficial to improve machining stability, accuracy, and efficiency in 3D SSMEDM. 展开更多
关键词 micro electrical discharge machining(micro EDM) servo scanning machining 3D micro-structure process parameter
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Hybrid Micro-forming Processes and Quality Evaluation of Micro-double Gear 被引量:1
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作者 徐杰 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2009年第S1期90-94,共5页
Micro-gear is an important actuating component used widely in the micro electro mechanical systems(MEMS) devices.The technologies of micro-forming and precision assembly are urgently developed to manufacture the micro... Micro-gear is an important actuating component used widely in the micro electro mechanical systems(MEMS) devices.The technologies of micro-forming and precision assembly are urgently developed to manufacture the micro-double gear with central shaft.In the paper,a novel hy-brid-forming process with two kinds of piercing method have been proposed to manufacture the micro-double gear using micro forming technology.The tests of hybrid forming process were carried out with two steps and the micro-double gear was successfully manufactured with good surface quality.The results also show that the hybrid micro-forming process with central piercing method can improve the defects of inclining shaft generated by double-ended piercing method.The quality evaluation of micro-double gear was conducted with surface roughness,micro-hardness and impact tests.The results show that the micro-double gear with good mechanical properties can meet the requirements of application for milli-machines. 展开更多
关键词 micro-FORMING hybrid forging process quality evaluation micro-double gear
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Micro-seeding and soft template effects on the control of polymorph and morphology of HMX micro particles in solvent-antisolvent process 被引量:5
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作者 Sajjad Damiri Shahriar Namvar Hadi Panahi 《Defence Technology(防务技术)》 SCIE EI CAS CSCD 2017年第6期392-396,共5页
A seeding strategy was developed in the preparation of cyclotetramethylenetetranitramine(HMX)explosive micro-particles by solvent-antisolvent method, to control their polymorphs from dangerous gamma(y) type to the des... A seeding strategy was developed in the preparation of cyclotetramethylenetetranitramine(HMX)explosive micro-particles by solvent-antisolvent method, to control their polymorphs from dangerous gamma(y) type to the desired and standard beta(β) form with the size distribution of <10.0 μm, by using a low concentration of β-HMX fine particles as micro-seed in the antisolvent medium. All products were characterized by X-ray diffraction(XRD), scanning electron microscopy(SEM), and dynamic light scattering particle size analyzer. In the next step, the effective factors on the sizes and morphologies of micro-particles in the presence and absence of two soft templates of poly(ethylene glycol)-400(PEG-400) polymer and coconut fatty acid diethanolamide(lauramide) surfactant were investigated. The results of experiments showed that using of water-soluble PEG-400 in the low antisolvent temperatures leads to the production of very spherical particles. Also non-ionic surfactant of lauramide, direct the crystal growth to needle-like structures. The advantages of this method are its capability for the simple production of β-HMX micro-particles in the large scale production process, with the various crystal structures and particles size distributions. 展开更多
关键词 micro SEEDING POLYMORPH HMX Explosive micro-particle Solvent-antisolvent process
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Research on Optical Properties and Micro-processing Characteristics of Collodion Thin Film
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作者 Chang-long CAI Xiong HAN +1 位作者 Xiao-ling NIU Wei-guo LIU 《Defence Technology(防务技术)》 SCIE EI CAS 2013年第3期167-170,共4页
Colorless and transparent thin films of collodion are prepared on silicon wafers and K9 optical glass substrates by using spin-coating technique.The visible light transmittance,IR absorption spectra and optical consta... Colorless and transparent thin films of collodion are prepared on silicon wafers and K9 optical glass substrates by using spin-coating technique.The visible light transmittance,IR absorption spectra and optical constants of collodion thin film are measured by UV-3501Spectrophotometer,Fourier transform infrared spectrometer(FTIR)and spectroscopic ellipsometry.The measured results show that its average visible light transmittance is 91.9%,and its average infrared absorptivity is better than 0.69/um.In the visible light region,the refractive index of collodion thin film changes in the range of 1.5—1.53,which accords with normal dispersion.The collodion films are etched using oxygen gas plasma.The surface morphology and thickness of etched thin film are measured by the polarizing microscope and MP-100S thickness measurement system,respectively.The results show that the collodion thin film is etched out in the oxygen gas plasma. 展开更多
关键词 光学性能 火棉胶 薄膜 加工特性 傅里叶变换红外光谱仪 可见光透射率 厚度测量系统 红外吸收光谱
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Microphysical Processes of a Stratiform Precipitation Event over Eastern China:Analysis Using Micro Rain Radar data 被引量:16
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作者 Hong WANG Hengchi LEI Jiefan YANG 《Advances in Atmospheric Sciences》 SCIE CAS CSCD 2017年第12期1472-1482,共11页
Data collected using the micro rain radar(MRR) situated in Jinan city, eastern China, were used to explore the altitudinal and temporal evolution of rainfall microphysical characteristics, and to analyze the bright ba... Data collected using the micro rain radar(MRR) situated in Jinan city, eastern China, were used to explore the altitudinal and temporal evolution of rainfall microphysical characteristics, and to analyze the bright band(BB) characteristics and hydrometeor classification. Specifically, a low-intensity and stable stratiform precipitation event that occurred from 0000 to0550 UTC 15 February 2015 and featured a BB was studied. During this event, the rainfall intensity was less than 2 mm h-1 at a height of 300 m, which was above the radar site level, so the errors caused by the vertical air motion could be ignored.The freezing height from the radiosonde matched well with the top of the BB observed by the MRR. It was also found that the number of 0.5–1 mm diameter drops showed no noticeable variation below the BB. The maximum fall velocity and the maximum gradient fall velocity(GFV) of the raindrops appeared at the bottom of the BB. Meanwhile, a method that uses the GFV and reflectivity to identify the altitude and the thickness of the BB was established, with which the MRR can provide a reliable and real-time estimation of the 0?C isotherm. The droplet fall velocity was used to classify the types of snow crystals above the BB. In the first 20 min of the selected precipitation event, graupel prevailed above the BB; and at an altitude of2000 m, graupel also dominated in the first 250 min. After 150 min, the existence of graupel and dendritic crystals with water droplets above the BB was inferred. 展开更多
关键词 drop size distribution micro rain radar bright band microphysical processes
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Micro Evolutionary Processes and Adaptation
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作者 SHADMANOV R K RUBAN I N VOROPAEVA N L SHADMANOVA A R 《棉花学报》 CSCD 北大核心 2008年第S1期112-,共1页
It would be well to note that in the absence of clear data about the formation of adaptation systems,or mechanisms of their occurrence,all that is recognized is the realization of the micro evolutionary processes.Ther... It would be well to note that in the absence of clear data about the formation of adaptation systems,or mechanisms of their occurrence,all that is recognized is the realization of the micro evolutionary processes.There is no well-defined connection between information exchange and formation 展开更多
关键词 micro Evolutionary processes and Adaptation
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A Brief Introduction of Extrusion and Micro-storage Processing Technology of Corn Stover
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作者 Qi Hongwei Yu Wei +2 位作者 Wu Jian Zhang Guoliang Song Yuejun 《Animal Husbandry and Feed Science》 CAS 2016年第5期295-296,共2页
A new corn stover roughage processing method, corn stover extrusion and micro-storage processing technology, was introduced from the aspects of basic working principle, production and processing process, characteristi... A new corn stover roughage processing method, corn stover extrusion and micro-storage processing technology, was introduced from the aspects of basic working principle, production and processing process, characteristics of cornstalk via extrusion and micro-storage processing. The technology was proved to be a feasible and practical processing technology of stover feed with broad prospect. 展开更多
关键词 Corn stover EXTRUSION micro-storage processING
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Experimental Study on Electrostatically Actuated Micro-Gripper Based on Silica Process
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作者 Pengnian Yang Yuhe Li +1 位作者 Yong Li Qingxiang Li 《World Journal of Engineering and Technology》 2017年第4期126-133,共8页
The characteristics of a kind of comb-drive electrostatic actuated micro-gripper are tested. The test platform using a microscope-CCD-computer, the state information of the micro-gripper obtained by data acquisition a... The characteristics of a kind of comb-drive electrostatic actuated micro-gripper are tested. The test platform using a microscope-CCD-computer, the state information of the micro-gripper obtained by data acquisition and image processing, voltage-displacement characteristic curve is obtained and the mathematical equation is established. The analysis of the characteristic equation has shown the consistency and rationality of the theoretical design and the experimental results. The main factors that cause the difference between the theoretical design and the actual test performance are analyzed, and the design method and experimental results is obtained for the micro-gripper in the field of micro-assembly. 展开更多
关键词 micro-GRIPPER IMAGE process EXPERIMENTAL Analysis
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Development of Micro Food Processing Sector through Food Processing Entrepreneurship in Manipur
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作者 Angam Raleng Ngangkham Joykumar Singh 《NASS Journal of Agricultural Sciences》 2021年第2期33-37,共5页
Micro Food processing industry is gaining its momentum in the recent years in Northeast India and particularly in Manipur.This sector plays an important role in connecting the bridge between the agricultural productio... Micro Food processing industry is gaining its momentum in the recent years in Northeast India and particularly in Manipur.This sector plays an important role in connecting the bridge between the agricultural production and the entrepreneurship development.The region bestows by the abundance of unique and rich agro and horticultural produce gives schemes and projects also add to the development of this sector and to the food entrepreneur by providing financial,technical,infrastructural and business support.The state sharing its border with the Myanmar has a significant impact on the food processing industry particularly in terms of marketing and trading aspects.Food Entrepreneurs should enhance their work on diversifying the horizons of the value added products,increasing job opportunities,marketing,training and technical skills etc.which will ultimately help in developing the Micro food processing sector in the state. 展开更多
关键词 micro food processing sector Food entrepreneurship Food processing MARKETING MANIPUR
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PROTOTYPE SURFACE MICRO- PRECISION IN FUSED DEPOSITION MODELING PROCESS 被引量:2
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作者 WANG Tianming XI Juntong JIN Ye 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2007年第1期100-106,共7页
To aim at prototype parts fabricated with fused deposition modeling (FDM) process, the problems how to improve and enhance their surface micro-precision are studied. The producing mechanism of surface roughness is e... To aim at prototype parts fabricated with fused deposition modeling (FDM) process, the problems how to improve and enhance their surface micro-precision are studied. The producing mechanism of surface roughness is explained with three aspects concretely including the principle error of rapid prototyping (RP) process, the inherent characteristics of FDM process, and some mi- cro-scratches on the surface of the extruded fiber. Based on the micro-characters of section shape of the FDM prototype, a physical model reflecting the outer shape characters is abstracted. With the physical simplified and deduced, the evaluating equations of surface roughness are acquired. According to the FDM sample parts with special design for experimental measurement, the real surface roughness values of different inclined planes are obtained. And the measuring values of surface roughness are compared with the calculation values. Furthermore, the causes of surface roughness deviation between measuring values and calculation values are respectively analyzed and studied. With the references of analytic conclusions, the measuring values of the experimental part surface are revised, and the revised values nearly accord with the calculation values. Based on the influencing principles of FDM process parameters and special post processing of FDM prototype parts, some concrete measures are proposed to reduce the surface roughness of FDM parts, and the applying effects are better. 展开更多
关键词 Rapid prototyping Fused deposition modeling micro-precision Surface roughness Post processing sequence
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Low-Power Operational Amplifier for Real-Time Signal Processing System of Micro Air Vehicle
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作者 王竹萍 仲顺安 聂丹丹 《Journal of Beijing Institute of Technology》 EI CAS 2010年第3期353-356,共4页
A low-power complementary metal oxide semiconductor(CMOS) operational amplifier (op-amp) for real-time signal processing of micro air vehicle (MAV) is designed in this paper.Traditional folded cascode architectu... A low-power complementary metal oxide semiconductor(CMOS) operational amplifier (op-amp) for real-time signal processing of micro air vehicle (MAV) is designed in this paper.Traditional folded cascode architecture with positive channel metal oxide semiconductor(PMOS) differential input transistors and sub-threshold technology are applied under the low supply voltage.Simulation results show that this amplifier has significantly low power,while maintaining almost the same gain,bandwidth and other key performances.The power required is only 0.12 mW,which is applicable to low-power and low-voltage real-time signal acquisition and processing system. 展开更多
关键词 microelectromechanical system(MEMS) operational amplifier(op-amp) LOW-POWER real-time signal processing system micro air vehicle(MAV)
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Effects of micro-alloying and production process on precipitation behaviors and mechanical properties of HRB600 被引量:7
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作者 Hong-bo Pan Meng-jiao Zhang +4 位作者 Wei-ming Liu Jun Yan Hui-ting Wang Chang-sheng Xie Zhan Guo 《Journal of Iron and Steel Research International》 SCIE EI CAS CSCD 2017年第5期536-543,共8页
Effects of micro-alloying elements and production process on microstructure, mechanical properties and precipitates of 600 MPa grade rebars were studied by using pilot test, metallographic observa- tion, tensile test,... Effects of micro-alloying elements and production process on microstructure, mechanical properties and precipitates of 600 MPa grade rebars were studied by using pilot test, metallographic observa- tion, tensile test, thermodynamic calculation and transmission electron microscopy. The results show that the tested steels are composed of ferrite and pearlite, in which the conterlt range of pearlite is 33%-45%. For vanadium micro-alloyed steel, interphase preeipitation Strengthening effect of V can be promoted and the yield strength of tested steels can be increased with increasing V content and de- creasing finishing rolling temperature. The temperature of terminated cooling should be more than 700 ℃ when the water cooling is used. When niobium is added to the steel, more coarse (Nb,V)C,N precipitates are generated at high temperature, so that the solid solubility of precipitated phases of vanadium is reduced and the precipitation strengthening effect of vanadium is weakened. 展开更多
关键词 micro-alloying High-strength steel rebar THERMO-MECHANICAL controlling process Mechanical property Precipitation strengthening THERMODYNAMICS
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Topology Chemical Process Research on the Condensing and Growing Phase Multi Micro Oil Droplets Based on Hydrodynamics
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作者 周毅 李旋旗 +1 位作者 张东翔 TAPACOB B B 《Journal of Beijing Institute of Technology》 EI CAS 2009年第1期84-88,共5页
The hydrodynamic research about the droplet condensing of the multi phase liquid state on the surface of the coal glass and water discusses the deepening process of convex shape curve and the formation of S shape, and... The hydrodynamic research about the droplet condensing of the multi phase liquid state on the surface of the coal glass and water discusses the deepening process of convex shape curve and the formation of S shape, and puts emphasis on describing the diagram formation method of the later. In the induction period the active diagram of the micro droplet is decided by pH value forming as convex shape diagram or S shape diagram. When pH value is above 4.0, the damage of convex shape diagram cannot be recovered, in that case produce S shape activity diagram. When pH value is equal to or above 12.0, the hard surface with alkali liquid state loses adhesion, so that the micro droplet condensing of the multi phase liquid state stops completely. The research result shows that the water cleaning conditions of getting rid of the oil micro droplets can be decided by the pH value. 展开更多
关键词 growing of micro oil droplet condensing of micro oil droplet topology chemical process convexshape diagram S shape diagram
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Improving Radar Rainfall Estimation by Accounting for Microphysical Processes Using a Micro Rain Radar in West Africa
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作者 Ghislain Kouadio Eric-Pascal Zahiri +3 位作者 Modeste Kacou Augustin Kadjo Koffi Abé Delfin Ochou Paul Assamoi 《Atmospheric and Climate Sciences》 2021年第4期658-688,共31页
This study evaluates the improvement of the radar Quantitative Precipitation Estimation (QPE) by involving microphysical processes in the determination of </span><i><span style="font-family:Verdana... This study evaluates the improvement of the radar Quantitative Precipitation Estimation (QPE) by involving microphysical processes in the determination of </span><i><span style="font-family:Verdana;">Z</span></i><span style="font-family:Verdana;">-</span><i><span style="font-family:Verdana;">R</span></i><span style="font-family:Verdana;"> algorithms. Within the framework of the AMMA campaign, measurements of an X-band radar (Xport), a vertical pointing Micro Rain Radar (MRR) to investigate microphysical processes and a dense network of rain </span><span style="font-family:Verdana;">gauges deployed in Northern Benin (West Africa) in 2006 and 2007 were</span><span style="font-family:Verdana;"> used as support to establish such estimators and evaluate their performance compared to other estimators in the literature. By carefully considering and correcting MRR attenuation and calibration issues, the </span><i><span style="font-family:Verdana;">Z</span></i><span style="font-family:Verdana;">-</span><i><span style="font-family:Verdana;">R</span></i><span style="font-family:Verdana;"> estimator developed </span><span style="font-family:Verdana;">with the contribution of microphysical processes and non-linear least</span></span><span style="font-family:Verdana;">-</span><span style="font-family:""><span style="font-family:Verdana;">squares adjustment proves to be more efficient for quantitative rainfall estimation and produces the best statistic scores than other optimal </span><i><span style="font-family:Verdana;">Z</span></i><span style="font-family:Verdana;">-</span><i><span style="font-family:Verdana;">R</span></i><span style="font-family:Verdana;"> algorithms in the literature. We also find that it gives results comparable to some polarimetric algorithms including microphysical information through DSD integrated parameter retrievals. 展开更多
关键词 Drop Distribution micro Rain Radar Calibration microphysical processes Z-R Relationships Rainfall Estimation
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2.5D C_(f)/SiC复合材料与SiC陶瓷微磨削性能对比试验研究
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作者 巩亚东 李远峰 +1 位作者 温泉 任启震 《东北大学学报(自然科学版)》 北大核心 2025年第1期52-60,共9页
为探究2.5D C_(f)/SiC复合材料与SiC陶瓷的微尺度磨削过程,对比2种材料在同一工艺参数下表面显微形貌、表面粗糙度与磨削力的差异,并分析工艺参数变化对磨削性能评价参数的影响;采用直径为0.9 mm的500#电镀金刚石微磨具对2种材料分别进... 为探究2.5D C_(f)/SiC复合材料与SiC陶瓷的微尺度磨削过程,对比2种材料在同一工艺参数下表面显微形貌、表面粗糙度与磨削力的差异,并分析工艺参数变化对磨削性能评价参数的影响;采用直径为0.9 mm的500#电镀金刚石微磨具对2种材料分别进行单因素微磨削试验.结果表明,2.5D C_(f)/SiC复合材料去除过程不同于SiC陶瓷,这是因为复合材料增强纤维的存在,有效抑制了微磨削过程中裂纹的扩展;在同一工艺参数下,2.5D C_(f)/SiC复合材料表面微观形貌较好、缺陷少、表面粗糙度小,而无纤维增强的SiC陶瓷表面微观形貌较差、缺陷多、表面粗糙度大;SiC陶瓷的平均磨削力大于2.5D C_(f)/SiC,并且在微磨削过程中,2.5D C_(f)/SiC的实时磨削力信号较平稳,而SiC陶瓷的实时磨削力信号存在尖刺. 展开更多
关键词 2.5D C_(f)/SiC复合材料 SIC陶瓷 微磨削过程 表面微观形貌 表面粗糙度 磨削力
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弹性磨具磨抛叶片叶尖圆角工艺研究
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作者 田凤杰 齐子建 +1 位作者 张彦智 李论 《航空制造技术》 北大核心 2025年第4期76-82,共7页
为了实现航空发动机叶片叶尖圆角的自动化磨抛加工,进行了基于弹性磨具的微弧圆角磨抛加工研究,提出了一种可控性良好的叶尖微弧圆角加工方法。以聚酯纤维作为基体材料的弹性磨抛轮,在加工过程中,利用磨抛轮弹性变形的特点使涂附于基体... 为了实现航空发动机叶片叶尖圆角的自动化磨抛加工,进行了基于弹性磨具的微弧圆角磨抛加工研究,提出了一种可控性良好的叶尖微弧圆角加工方法。以聚酯纤维作为基体材料的弹性磨抛轮,在加工过程中,利用磨抛轮弹性变形的特点使涂附于基体表面的磨料将叶尖顶角磨抛加工成微小半径圆角。基于弹性接触理论与Preston去除理论,建立了磨抛轮与叶尖顶角加工状态下的理论接触模型和材料去除模型,采用Abaqus软件对模型进行了接触区域应力仿真分析,并对去除分布函数进行了仿真。理论证明,弹性磨抛轮与叶尖顶角通过自适应包络接触变形,在加工区域与磨抛轮之间形成“微面触切”,从而实现微小半径圆弧的圆角加工。进行了叶片叶尖顶角的圆角磨抛试验,对实现微小圆弧圆角加工的可行性与可控性进行了验证。结果表明,弹性磨抛轮的自适应包络变形使叶尖顶角加工接触区域形成圆弧状应力分布,涂附于基体上的磨料可以良好地磨抛去除,实现圆角加工。此加工方法实现了叶片叶尖微弧圆角的自动化加工,加工后的叶片尺寸精度高,表面质量一致性良好,表面粗糙度稳定在0.20~0.28μm之间,圆角半径大小变化稳定在16μm范围内。 展开更多
关键词 弹性磨抛 航空发动机叶片 叶尖 微弧圆角 工艺参数
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矩形微同轴工艺研究与器件制备
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作者 马强 王锐 +1 位作者 吴伟 马思阅 《半导体技术》 北大核心 2025年第9期908-914,共7页
在需要大带宽和低损耗的微波传输系统中,微电子机械系统(MEMS)工艺参数对矩形微同轴结构的射频(RF)性能影响较大。仿真分析了该微同轴内部导体表面粗糙度、内导体宽度、侧壁倾斜度与传输损耗、特性阻抗等射频参数的关系。结果表明,表面... 在需要大带宽和低损耗的微波传输系统中,微电子机械系统(MEMS)工艺参数对矩形微同轴结构的射频(RF)性能影响较大。仿真分析了该微同轴内部导体表面粗糙度、内导体宽度、侧壁倾斜度与传输损耗、特性阻抗等射频参数的关系。结果表明,表面粗糙度增大导致传输损耗单调增大,内导体宽度减小和侧壁倾斜度增大均导致特性阻抗变大。通过工艺实验验证了仿真结果并优化了相关参数。制作了矩形微同轴功分器、多零点带通滤波器样品并进行测试,验证了理论分析和工艺实验结果的一致性。本文研究结果可为下一代高频微系统的发展提供技术支持。 展开更多
关键词 矩形微同轴 微电子机械系统(MEMS) 工艺参数 功分器 滤波器
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MICRO-PHASE SAEPARATION IN EPOXY RESIN WATERBORNE PARTICLES DURING CURING PROCESS
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作者 过梅丽 《Chinese Journal of Polymer Science》 SCIE CAS CSCD 2005年第5期561-566,共6页
Sub-micron sized phenolic epoxy resin waterborne particles were prepared by phase inversion emulsification. Micro-phase separation occurred during the curing process at high temperature. The as-prepared samples posses... Sub-micron sized phenolic epoxy resin waterborne particles were prepared by phase inversion emulsification. Micro-phase separation occurred during the curing process at high temperature. The as-prepared samples possessed one glass transition temperature (Tg) and two exothermal processes during DSC heating scannings. After being thermally treated above the exothermal peak temperature, they possessed two glass transition temperatures with the disappearance of exothermal peaks, whilst a core/shell structure was formed. This was likely related with the outward diffusion of reactive oligomers to the outer layer of particles. 展开更多
关键词 Curing process Phenolic epoxy resin Waterborne dispersions micro-phase separation Core/shell structure.
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利用飞秒激光在熔融石英雕塑中加工结构色
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作者 陈靖 周鸿溦 +1 位作者 宋云鹏 程亚 《红外与激光工程》 北大核心 2025年第7期305-311,共7页
颜色是艺术家们创作时的重要艺术语言。长久以来艺术家们通过颜料在艺术品表面展示出创作的颜色。结构色是颜色显示的另一种技术方案,近年来得到了广泛的研究。文中在熔融石英材料内部,利用飞秒激光加工出高精度的周期光栅,基于光栅衍... 颜色是艺术家们创作时的重要艺术语言。长久以来艺术家们通过颜料在艺术品表面展示出创作的颜色。结构色是颜色显示的另一种技术方案,近年来得到了广泛的研究。文中在熔融石英材料内部,利用飞秒激光加工出高精度的周期光栅,基于光栅衍射效应,实现了在某观察角度上的结构色呈现;在此基础上,展示了该结构色在雕塑领域的应用效果。结果表明,飞秒激光加工技术不仅可以对透明石英材料表面进行3D打印雕刻,制作出雕塑;还可以在材料内部进行彩色三维结构加工,为雕塑艺术的内在表达提供了新的技术支撑。 展开更多
关键词 飞秒激光 熔融石英材料 三维微纳加工 光栅衍射 结构色 雕塑
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