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Femtosecond laser micro/nano processing:from fundamental to applications 被引量:3
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作者 Le Gao Qiming Zhang Min Gu 《International Journal of Extreme Manufacturing》 2025年第2期337-386,共50页
Able to precisely control and manipulate materials'states at micro/nano-scale level,femtosecond(fs)laser micro/nano processing technology has undergone tremendous development over the past three decades.Free-formi... Able to precisely control and manipulate materials'states at micro/nano-scale level,femtosecond(fs)laser micro/nano processing technology has undergone tremendous development over the past three decades.Free-forming three-dimensional(3D)microscale functional devices and inducing fascinating and unique physical or chemical phenomena have granted this technology powerful versatility that no other technology can match.As this technology advances rapidly in various fields of application,some key challenges have emerged and remain to be urgently addressed.This review firstly introduces the fundamental principles for understanding how fs laser pulses interact with materials and the associated unique phenomena in section 2.Then micro/nano-fabrication in transparent materials by fs laser processing is presented in section 3.Thereafter,several high efficiency/throughput fabrication methods as well as pulse-shaping techniques are listed in sections 4 and 5 reviews four-dimensional(4D)and nanoscale printing realized by fs laser processing technology.Special attention is paid to the heterogeneous integration(HI)of functional materials enabled by fs laser processing in section 6.Several intriguing examples of 3D functional micro-devices created by fs laser-based manufacturing methods such as microfluidics,lab-on-chip,micro-optics,micro-mechanics,micro-electronics,micro-bots and micro-biodevices are reviewed in section 7.Finally,a summary of the review and a perspective are proposed to explore the challenges and future opportunities for further betterment of fs laser micro/nano processing technology. 展开更多
关键词 femtosecond laser laser micro/nano processing laser fabrication direct laser writing 3D laser lithography
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Experimental Research on Effects of Process Parameters on Servo Scanning 3D Micro Electrical Discharge Machining 被引量:3
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作者 TONG Hao LI Yong HU Manhong 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2012年第1期114-121,共8页
Servo scanning 3D micro electrical discharge machining (3D SSMEDM) is a novel and effective method in fabricating complex 3D micro structures with high aspect ratio on conducting materials. In 3D SSMEDM process, the a... Servo scanning 3D micro electrical discharge machining (3D SSMEDM) is a novel and effective method in fabricating complex 3D micro structures with high aspect ratio on conducting materials. In 3D SSMEDM process, the axial wear of tool electrode can be compensated automatically by servo-keeping discharge gap, instead of the traditional methods that depend on experiential models or intermittent compensation. However, the effects of process parameters on 3D SSMEDM have not been reported up until now. In this study, the emphasis is laid on the effects of pulse duration, peak current, machining polarity, track style, track overlap, and scanning velocity on the 3D SSMEDM performances of machining efficiency, processing status, and surface accuracy. A series of experiments were carried out by machining a micro-rectangle cavity (900 μm×600 μm) on doped silicon. The experimental results were obtained as follows. Peak current plays a main role in machining efficiency and surface accuracy. Pulse duration affects obviously the stability of discharge state. The material removal rate of cathode processing is about 3/5 of that of anode processing. Compared with direction-parallel path, contour-parallel path is better in counteracting the lateral wear of tool electrode end. Scanning velocity should be selected moderately to avoid electric arc and short. Track overlap should be slightly less than the radius of tool electrode. In addition, a typical 3D micro structure of eye shape was machined based on the optimized process parameters. These results are beneficial to improve machining stability, accuracy, and efficiency in 3D SSMEDM. 展开更多
关键词 micro electrical discharge machining(micro EDM) servo scanning machining 3D micro-structure process parameter
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Hybrid Micro-forming Processes and Quality Evaluation of Micro-double Gear 被引量:1
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作者 徐杰 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2009年第S1期90-94,共5页
Micro-gear is an important actuating component used widely in the micro electro mechanical systems(MEMS) devices.The technologies of micro-forming and precision assembly are urgently developed to manufacture the micro... Micro-gear is an important actuating component used widely in the micro electro mechanical systems(MEMS) devices.The technologies of micro-forming and precision assembly are urgently developed to manufacture the micro-double gear with central shaft.In the paper,a novel hy-brid-forming process with two kinds of piercing method have been proposed to manufacture the micro-double gear using micro forming technology.The tests of hybrid forming process were carried out with two steps and the micro-double gear was successfully manufactured with good surface quality.The results also show that the hybrid micro-forming process with central piercing method can improve the defects of inclining shaft generated by double-ended piercing method.The quality evaluation of micro-double gear was conducted with surface roughness,micro-hardness and impact tests.The results show that the micro-double gear with good mechanical properties can meet the requirements of application for milli-machines. 展开更多
关键词 micro-FORMING hybrid forging process quality evaluation micro-double gear
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Micro-seeding and soft template effects on the control of polymorph and morphology of HMX micro particles in solvent-antisolvent process 被引量:5
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作者 Sajjad Damiri Shahriar Namvar Hadi Panahi 《Defence Technology(防务技术)》 SCIE EI CAS CSCD 2017年第6期392-396,共5页
A seeding strategy was developed in the preparation of cyclotetramethylenetetranitramine(HMX)explosive micro-particles by solvent-antisolvent method, to control their polymorphs from dangerous gamma(y) type to the des... A seeding strategy was developed in the preparation of cyclotetramethylenetetranitramine(HMX)explosive micro-particles by solvent-antisolvent method, to control their polymorphs from dangerous gamma(y) type to the desired and standard beta(β) form with the size distribution of <10.0 μm, by using a low concentration of β-HMX fine particles as micro-seed in the antisolvent medium. All products were characterized by X-ray diffraction(XRD), scanning electron microscopy(SEM), and dynamic light scattering particle size analyzer. In the next step, the effective factors on the sizes and morphologies of micro-particles in the presence and absence of two soft templates of poly(ethylene glycol)-400(PEG-400) polymer and coconut fatty acid diethanolamide(lauramide) surfactant were investigated. The results of experiments showed that using of water-soluble PEG-400 in the low antisolvent temperatures leads to the production of very spherical particles. Also non-ionic surfactant of lauramide, direct the crystal growth to needle-like structures. The advantages of this method are its capability for the simple production of β-HMX micro-particles in the large scale production process, with the various crystal structures and particles size distributions. 展开更多
关键词 micro SEEDING POLYMORPH HMX Explosive micro-particle Solvent-antisolvent process
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Research on Optical Properties and Micro-processing Characteristics of Collodion Thin Film
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作者 Chang-long CAI Xiong HAN +1 位作者 Xiao-ling NIU Wei-guo LIU 《Defence Technology(防务技术)》 SCIE EI CAS 2013年第3期167-170,共4页
Colorless and transparent thin films of collodion are prepared on silicon wafers and K9 optical glass substrates by using spin-coating technique.The visible light transmittance,IR absorption spectra and optical consta... Colorless and transparent thin films of collodion are prepared on silicon wafers and K9 optical glass substrates by using spin-coating technique.The visible light transmittance,IR absorption spectra and optical constants of collodion thin film are measured by UV-3501Spectrophotometer,Fourier transform infrared spectrometer(FTIR)and spectroscopic ellipsometry.The measured results show that its average visible light transmittance is 91.9%,and its average infrared absorptivity is better than 0.69/um.In the visible light region,the refractive index of collodion thin film changes in the range of 1.5—1.53,which accords with normal dispersion.The collodion films are etched using oxygen gas plasma.The surface morphology and thickness of etched thin film are measured by the polarizing microscope and MP-100S thickness measurement system,respectively.The results show that the collodion thin film is etched out in the oxygen gas plasma. 展开更多
关键词 光学性能 火棉胶 薄膜 加工特性 傅里叶变换红外光谱仪 可见光透射率 厚度测量系统 红外吸收光谱
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Microphysical Processes of a Stratiform Precipitation Event over Eastern China:Analysis Using Micro Rain Radar data 被引量:16
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作者 Hong WANG Hengchi LEI Jiefan YANG 《Advances in Atmospheric Sciences》 SCIE CAS CSCD 2017年第12期1472-1482,共11页
Data collected using the micro rain radar(MRR) situated in Jinan city, eastern China, were used to explore the altitudinal and temporal evolution of rainfall microphysical characteristics, and to analyze the bright ba... Data collected using the micro rain radar(MRR) situated in Jinan city, eastern China, were used to explore the altitudinal and temporal evolution of rainfall microphysical characteristics, and to analyze the bright band(BB) characteristics and hydrometeor classification. Specifically, a low-intensity and stable stratiform precipitation event that occurred from 0000 to0550 UTC 15 February 2015 and featured a BB was studied. During this event, the rainfall intensity was less than 2 mm h-1 at a height of 300 m, which was above the radar site level, so the errors caused by the vertical air motion could be ignored.The freezing height from the radiosonde matched well with the top of the BB observed by the MRR. It was also found that the number of 0.5–1 mm diameter drops showed no noticeable variation below the BB. The maximum fall velocity and the maximum gradient fall velocity(GFV) of the raindrops appeared at the bottom of the BB. Meanwhile, a method that uses the GFV and reflectivity to identify the altitude and the thickness of the BB was established, with which the MRR can provide a reliable and real-time estimation of the 0?C isotherm. The droplet fall velocity was used to classify the types of snow crystals above the BB. In the first 20 min of the selected precipitation event, graupel prevailed above the BB; and at an altitude of2000 m, graupel also dominated in the first 250 min. After 150 min, the existence of graupel and dendritic crystals with water droplets above the BB was inferred. 展开更多
关键词 drop size distribution micro rain radar bright band microphysical processes
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Micro Evolutionary Processes and Adaptation
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作者 SHADMANOV R K RUBAN I N VOROPAEVA N L SHADMANOVA A R 《棉花学报》 CSCD 北大核心 2008年第S1期112-,共1页
It would be well to note that in the absence of clear data about the formation of adaptation systems,or mechanisms of their occurrence,all that is recognized is the realization of the micro evolutionary processes.Ther... It would be well to note that in the absence of clear data about the formation of adaptation systems,or mechanisms of their occurrence,all that is recognized is the realization of the micro evolutionary processes.There is no well-defined connection between information exchange and formation 展开更多
关键词 micro Evolutionary processes and Adaptation
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A Brief Introduction of Extrusion and Micro-storage Processing Technology of Corn Stover
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作者 Qi Hongwei Yu Wei +2 位作者 Wu Jian Zhang Guoliang Song Yuejun 《Animal Husbandry and Feed Science》 CAS 2016年第5期295-296,共2页
A new corn stover roughage processing method, corn stover extrusion and micro-storage processing technology, was introduced from the aspects of basic working principle, production and processing process, characteristi... A new corn stover roughage processing method, corn stover extrusion and micro-storage processing technology, was introduced from the aspects of basic working principle, production and processing process, characteristics of cornstalk via extrusion and micro-storage processing. The technology was proved to be a feasible and practical processing technology of stover feed with broad prospect. 展开更多
关键词 Corn stover EXTRUSION micro-storage processING
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Experimental Study on Electrostatically Actuated Micro-Gripper Based on Silica Process
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作者 Pengnian Yang Yuhe Li +1 位作者 Yong Li Qingxiang Li 《World Journal of Engineering and Technology》 2017年第4期126-133,共8页
The characteristics of a kind of comb-drive electrostatic actuated micro-gripper are tested. The test platform using a microscope-CCD-computer, the state information of the micro-gripper obtained by data acquisition a... The characteristics of a kind of comb-drive electrostatic actuated micro-gripper are tested. The test platform using a microscope-CCD-computer, the state information of the micro-gripper obtained by data acquisition and image processing, voltage-displacement characteristic curve is obtained and the mathematical equation is established. The analysis of the characteristic equation has shown the consistency and rationality of the theoretical design and the experimental results. The main factors that cause the difference between the theoretical design and the actual test performance are analyzed, and the design method and experimental results is obtained for the micro-gripper in the field of micro-assembly. 展开更多
关键词 micro-GRIPPER IMAGE process EXPERIMENTAL Analysis
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Development of Micro Food Processing Sector through Food Processing Entrepreneurship in Manipur
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作者 Angam Raleng Ngangkham Joykumar Singh 《NASS Journal of Agricultural Sciences》 2021年第2期33-37,共5页
Micro Food processing industry is gaining its momentum in the recent years in Northeast India and particularly in Manipur.This sector plays an important role in connecting the bridge between the agricultural productio... Micro Food processing industry is gaining its momentum in the recent years in Northeast India and particularly in Manipur.This sector plays an important role in connecting the bridge between the agricultural production and the entrepreneurship development.The region bestows by the abundance of unique and rich agro and horticultural produce gives schemes and projects also add to the development of this sector and to the food entrepreneur by providing financial,technical,infrastructural and business support.The state sharing its border with the Myanmar has a significant impact on the food processing industry particularly in terms of marketing and trading aspects.Food Entrepreneurs should enhance their work on diversifying the horizons of the value added products,increasing job opportunities,marketing,training and technical skills etc.which will ultimately help in developing the Micro food processing sector in the state. 展开更多
关键词 micro food processing sector Food entrepreneurship Food processing MARKETING MANIPUR
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Low-Power Operational Amplifier for Real-Time Signal Processing System of Micro Air Vehicle
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作者 王竹萍 仲顺安 聂丹丹 《Journal of Beijing Institute of Technology》 EI CAS 2010年第3期353-356,共4页
A low-power complementary metal oxide semiconductor(CMOS) operational amplifier (op-amp) for real-time signal processing of micro air vehicle (MAV) is designed in this paper.Traditional folded cascode architectu... A low-power complementary metal oxide semiconductor(CMOS) operational amplifier (op-amp) for real-time signal processing of micro air vehicle (MAV) is designed in this paper.Traditional folded cascode architecture with positive channel metal oxide semiconductor(PMOS) differential input transistors and sub-threshold technology are applied under the low supply voltage.Simulation results show that this amplifier has significantly low power,while maintaining almost the same gain,bandwidth and other key performances.The power required is only 0.12 mW,which is applicable to low-power and low-voltage real-time signal acquisition and processing system. 展开更多
关键词 microelectromechanical system(MEMS) operational amplifier(op-amp) LOW-POWER real-time signal processing system micro air vehicle(MAV)
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Effects of micro-alloying and production process on precipitation behaviors and mechanical properties of HRB600 被引量:7
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作者 Hong-bo Pan Meng-jiao Zhang +4 位作者 Wei-ming Liu Jun Yan Hui-ting Wang Chang-sheng Xie Zhan Guo 《Journal of Iron and Steel Research International》 SCIE EI CAS CSCD 2017年第5期536-543,共8页
Effects of micro-alloying elements and production process on microstructure, mechanical properties and precipitates of 600 MPa grade rebars were studied by using pilot test, metallographic observa- tion, tensile test,... Effects of micro-alloying elements and production process on microstructure, mechanical properties and precipitates of 600 MPa grade rebars were studied by using pilot test, metallographic observa- tion, tensile test, thermodynamic calculation and transmission electron microscopy. The results show that the tested steels are composed of ferrite and pearlite, in which the conterlt range of pearlite is 33%-45%. For vanadium micro-alloyed steel, interphase preeipitation Strengthening effect of V can be promoted and the yield strength of tested steels can be increased with increasing V content and de- creasing finishing rolling temperature. The temperature of terminated cooling should be more than 700 ℃ when the water cooling is used. When niobium is added to the steel, more coarse (Nb,V)C,N precipitates are generated at high temperature, so that the solid solubility of precipitated phases of vanadium is reduced and the precipitation strengthening effect of vanadium is weakened. 展开更多
关键词 micro-alloying High-strength steel rebar THERMO-MECHANICAL controlling process Mechanical property Precipitation strengthening THERMODYNAMICS
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Topology Chemical Process Research on the Condensing and Growing Phase Multi Micro Oil Droplets Based on Hydrodynamics
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作者 周毅 李旋旗 +1 位作者 张东翔 TAPACOB B B 《Journal of Beijing Institute of Technology》 EI CAS 2009年第1期84-88,共5页
The hydrodynamic research about the droplet condensing of the multi phase liquid state on the surface of the coal glass and water discusses the deepening process of convex shape curve and the formation of S shape, and... The hydrodynamic research about the droplet condensing of the multi phase liquid state on the surface of the coal glass and water discusses the deepening process of convex shape curve and the formation of S shape, and puts emphasis on describing the diagram formation method of the later. In the induction period the active diagram of the micro droplet is decided by pH value forming as convex shape diagram or S shape diagram. When pH value is above 4.0, the damage of convex shape diagram cannot be recovered, in that case produce S shape activity diagram. When pH value is equal to or above 12.0, the hard surface with alkali liquid state loses adhesion, so that the micro droplet condensing of the multi phase liquid state stops completely. The research result shows that the water cleaning conditions of getting rid of the oil micro droplets can be decided by the pH value. 展开更多
关键词 growing of micro oil droplet condensing of micro oil droplet topology chemical process convexshape diagram S shape diagram
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Improving Radar Rainfall Estimation by Accounting for Microphysical Processes Using a Micro Rain Radar in West Africa
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作者 Ghislain Kouadio Eric-Pascal Zahiri +3 位作者 Modeste Kacou Augustin Kadjo Koffi Abé Delfin Ochou Paul Assamoi 《Atmospheric and Climate Sciences》 2021年第4期658-688,共31页
This study evaluates the improvement of the radar Quantitative Precipitation Estimation (QPE) by involving microphysical processes in the determination of </span><i><span style="font-family:Verdana... This study evaluates the improvement of the radar Quantitative Precipitation Estimation (QPE) by involving microphysical processes in the determination of </span><i><span style="font-family:Verdana;">Z</span></i><span style="font-family:Verdana;">-</span><i><span style="font-family:Verdana;">R</span></i><span style="font-family:Verdana;"> algorithms. Within the framework of the AMMA campaign, measurements of an X-band radar (Xport), a vertical pointing Micro Rain Radar (MRR) to investigate microphysical processes and a dense network of rain </span><span style="font-family:Verdana;">gauges deployed in Northern Benin (West Africa) in 2006 and 2007 were</span><span style="font-family:Verdana;"> used as support to establish such estimators and evaluate their performance compared to other estimators in the literature. By carefully considering and correcting MRR attenuation and calibration issues, the </span><i><span style="font-family:Verdana;">Z</span></i><span style="font-family:Verdana;">-</span><i><span style="font-family:Verdana;">R</span></i><span style="font-family:Verdana;"> estimator developed </span><span style="font-family:Verdana;">with the contribution of microphysical processes and non-linear least</span></span><span style="font-family:Verdana;">-</span><span style="font-family:""><span style="font-family:Verdana;">squares adjustment proves to be more efficient for quantitative rainfall estimation and produces the best statistic scores than other optimal </span><i><span style="font-family:Verdana;">Z</span></i><span style="font-family:Verdana;">-</span><i><span style="font-family:Verdana;">R</span></i><span style="font-family:Verdana;"> algorithms in the literature. We also find that it gives results comparable to some polarimetric algorithms including microphysical information through DSD integrated parameter retrievals. 展开更多
关键词 Drop Distribution micro Rain Radar Calibration microphysical processes Z-R Relationships Rainfall Estimation
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MICRO-PHASE SAEPARATION IN EPOXY RESIN WATERBORNE PARTICLES DURING CURING PROCESS
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作者 过梅丽 《Chinese Journal of Polymer Science》 SCIE CAS CSCD 2005年第5期561-566,共6页
Sub-micron sized phenolic epoxy resin waterborne particles were prepared by phase inversion emulsification. Micro-phase separation occurred during the curing process at high temperature. The as-prepared samples posses... Sub-micron sized phenolic epoxy resin waterborne particles were prepared by phase inversion emulsification. Micro-phase separation occurred during the curing process at high temperature. The as-prepared samples possessed one glass transition temperature (Tg) and two exothermal processes during DSC heating scannings. After being thermally treated above the exothermal peak temperature, they possessed two glass transition temperatures with the disappearance of exothermal peaks, whilst a core/shell structure was formed. This was likely related with the outward diffusion of reactive oligomers to the outer layer of particles. 展开更多
关键词 Curing process Phenolic epoxy resin Waterborne dispersions micro-phase separation Core/shell structure.
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紫外皮秒激光单晶硅微孔加工研究
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作者 刘建 张全利 傅玉灿 《机械制造与自动化》 2026年第1期7-12,共6页
单晶硅是目前微芯片、微传感器和光伏发电系统制造中应用最广泛的材料。超短脉冲激光加工硬脆材料时具有重铸层少、裂纹小、边缘平整等特点,在超精细的微孔加工中有着明显的优势。针对在硅片表面制作微通孔的实际需求,采用紫外皮秒激光... 单晶硅是目前微芯片、微传感器和光伏发电系统制造中应用最广泛的材料。超短脉冲激光加工硬脆材料时具有重铸层少、裂纹小、边缘平整等特点,在超精细的微孔加工中有着明显的优势。针对在硅片表面制作微通孔的实际需求,采用紫外皮秒激光器在单晶硅片上进行微孔加工,需研究激光环形钻孔中激光参数与微孔质量的依赖关系。选择激光功率、扫描速度、扫描次数作为独立的过程变量,进行相应的单因素实验和正交实验,并根据入孔直径、出孔直径、深度、锥度及表面质量对钻孔过程进行评价。最后基于优选的工艺参数,加工得到所需深度的微通孔。 展开更多
关键词 单晶硅 超短脉冲激光 微孔 激光加工
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Triple and Double Photons Absorption Process and Down-Conversion Laser Emitting Investigation of Er-Ion Doped Microsphere
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作者 Yantang Huang Peijing Zhang +1 位作者 Yu Huang Changlei Guo 《Journal of Modern Physics》 2013年第12期1622-1626,共5页
We report a readily and cheap method to build taper optical fiber-Er3+ doped microsphere platform to investigate upconversion fluorescence emission and down-conversion laser oscillation with low threshold pump power. ... We report a readily and cheap method to build taper optical fiber-Er3+ doped microsphere platform to investigate upconversion fluorescence emission and down-conversion laser oscillation with low threshold pump power. We demonstrate to dope Er3+ into silica microsphere surface by dipping a single-taper optical fiber into a certain concentration of erbium nitrate solution (Er(NO3)) , then dry it and use the electrical-arc of the optical fiber splicer to melt the tip of taper fiber to form the Er3+-doped silica microsphere due to surface tension induced. We also present a HF acid etching setup to fabricate low loss biconical optical taper fibers. We demonstrate the Er3+ doped silica microsphere triple photons and dual photons absorption process of up-conversion fluorescence emission and down-conversion laser oscillation spectra by using the optical tapered fiber to couple 976 nm/1534 nm pump light source. 展开更多
关键词 TRIPLE PHOTONS ABSORPTION process Er3+ DOPED microSPHERE Taper Optical Fiber micro-Laser
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激光加工医用聚醚醚酮表面微织构及性能研究
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作者 赵建祥 桑顺恒 +3 位作者 闫续中 高冬芳 赵洋洋 乔阳 《表面技术》 北大核心 2026年第4期208-218,共11页
目的提高聚醚醚酮(PEEK)作为骨科植入材料的骨整合能力与生物相容性。方法采用紫外激光加工技术,在PEEK表面构建了不同中心距的正交微织构,通过对比抛光表面与四种织构参数组试样的表面粗糙度、羟基磷灰石矿化能力及成骨细胞活性,揭示... 目的提高聚醚醚酮(PEEK)作为骨科植入材料的骨整合能力与生物相容性。方法采用紫外激光加工技术,在PEEK表面构建了不同中心距的正交微织构,通过对比抛光表面与四种织构参数组试样的表面粗糙度、羟基磷灰石矿化能力及成骨细胞活性,揭示了微织构形貌与生物响应之间的构效关系。结果织构中心距对表面粗糙度(Ra)调控具有显著的规律性:随中心距从100μm增至400μm,表面粗糙度由8.23μm渐降至3.05μm,呈准线性衰减趋势。通过模拟体液浸泡实验发现,300μm中心距组试样表面羟基磷灰石沉积能力呈现最优状态,其矿化层连续且结晶颗粒显著聚集。细胞实验显示,所有试样RGR值均>90%,毒性等级为0级,表明激光加工PEEK未引入生物危害性副产物。通过对比发现,300μm中心距的正交织构接触角为最小值62.020°,亲水性提升最大,对成骨细胞行为的正向调控最为显著,培养72 h细胞增殖活性达到无织构表面的3.2倍,显微观察细胞伪足沿织构沟槽定向延伸,体现出典型的接触诱导生长特征。结论激光加工的正交织构可通过调控表面形貌显著改善PEEK材料的骨整合能力与生物相容性,且中心距为300μm的正交织表现最佳。 展开更多
关键词 聚醚醚酮(PEEK) 生物相容性 激光加工 微织构 表面粗糙度 成骨细胞
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微磨料射流对飞秒激光制孔棱边倒圆规律试验
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作者 冯琰 王杰 +3 位作者 李帆 马小刚 丁云龙 韩冰 《金刚石与磨料磨具工程》 北大核心 2026年第1期101-112,共12页
飞秒激光制孔技术在航空叶片孔加工、发动机喷油嘴等领域得到广泛应用,但在加工过程中会产生表面缺陷,影响工件使用寿命。利用微磨料射流技术对飞秒激光制孔孔口棱边进行光整工艺影响机制研究,对工件材料去除过程进行仿真模拟,分析不同... 飞秒激光制孔技术在航空叶片孔加工、发动机喷油嘴等领域得到广泛应用,但在加工过程中会产生表面缺陷,影响工件使用寿命。利用微磨料射流技术对飞秒激光制孔孔口棱边进行光整工艺影响机制研究,对工件材料去除过程进行仿真模拟,分析不同工艺参数对磨粒冲蚀过程中材料去除规律的影响,并进一步探讨各工艺参数的影响顺序。同时,对多颗磨粒冲蚀工件材料的去除过程进行模拟分析,深入研究材料去除机理。最后,对飞秒激光制孔磨料射流光整工艺影响因素进行实验研究,建立BP神经网络微孔孔口棱边倒圆预测模型。利用粒子群寻优算法得出最佳工艺参数组合:射流速度为40 m/s,磨粒粒径为37.5μm,冲蚀角度为90°。采用最佳工艺参数组合对微孔表面进行加工,加工后的孔口棱边倒圆直径平均值分别为379.10,384.25,387.75μm。试验值与预测值相对比,其相对误差<6%,证实最佳工艺参数对飞秒激光制孔表面光整加工效果显著。 展开更多
关键词 飞秒激光制孔 微磨料射流 光整加工 棱边倒圆 数值模拟分析
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增材制件内腔微细流道水基磨粒流光整加工流场仿真与试验验证
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作者 曹文涛 孙玉利 +3 位作者 闫哲 杨范轩 卢文壮 左敦稳 《南京航空航天大学学报(自然科学版)》 北大核心 2026年第1期46-57,共12页
针对增材制件内腔微细流道存在的表面质量差及抛光均匀性不佳问题,鉴于传统光整加工方法不适用且单向加工存在局限,本文采用双向光整加工模式,结合仿真与试验,系统研究了碳化硅与氧化铝两种水基磨料在单向和双向加工条件下对流道扩孔均... 针对增材制件内腔微细流道存在的表面质量差及抛光均匀性不佳问题,鉴于传统光整加工方法不适用且单向加工存在局限,本文采用双向光整加工模式,结合仿真与试验,系统研究了碳化硅与氧化铝两种水基磨料在单向和双向加工条件下对流道扩孔均匀性、表面粗糙度及表面形貌的影响。研究表明:相较单向加工,双向加工显著改善了流道抛光均匀性,使采用碳化硅磨料加工的流道入口与出口扩孔量差异从51μm缩小至27μm,采用氧化铝磨料加工的流道差异则从40μm缩小至20μm;同时,双向加工后各区域表面粗糙度明显降低且更均匀:碳化硅磨料加工的流道入口、出口及中间区域粗糙度分别降至3.726、3.612和3.639μm,氧化铝磨料加工的流道相应区域则降至4.127、3.876和3.963μm。对比两种磨料,碳化硅的抛光性能优于氧化铝,在双向加工模式下,其加工的流道表面粗糙度比氧化铝加工的流道平均低约0.3μm(入口低0.4μm,出口低0.26μm,中间低0.32μm)。 展开更多
关键词 水基磨粒流光整加工 增材制造 内腔微细流道 单/双向加工 光整均匀性
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