In this study,the design and development of a sensor made of low-cost parts to monitor inclination and acceleration are presented.Αmicro electro-mechanical systems,micro electro mechanical systems,sensor was housed i...In this study,the design and development of a sensor made of low-cost parts to monitor inclination and acceleration are presented.Αmicro electro-mechanical systems,micro electro mechanical systems,sensor was housed in a robust enclosure and interfaced with a Raspberry Pi microcomputer with Internet connectivity into a proposed tilt and acceleration monitoring node.Online capabilities accessible by mobile phone such as real-time graph,early warning notification,and database logging were implemented using Python programming.The sensor response was calibrated for inherent bias and errors,and then tested thoroughly in the laboratory under static and dynamic loading conditions beside high-quality transducers.Satisfactory accuracy was achieved in real time using the Complementary Filter method,and it was further improved in LabVIEW using Kalman Filters with parameter tuning.A sensor interface with LabVIEW and a 600 MHz CPU microcontroller allowed real-time implementation of highspeed embedded filters,further optimizing sensor results.Kalman and embedded filtering results show agreement for the sensor,followed closely by the lowcomplexity complementary filter applied in real time.The sensor's dynamic response was also verified by shaking table tests,simulating past recorded seismic excitations or artificial vibrations,indicating negligible effect of external acceleration on measured tilt;sensor measurements were benchmarked using highquality tilt and acceleration measuring transducers.A preliminary field evaluation shows robustness of the sensor to harsh weather conditions.展开更多
Permanent magnet synchronous motor based electro-mechanical actuation servo drives have widespread applications in the aviation field,such as unmanned aerial vehicle electric servos,electric cabin doors,and mechanical...Permanent magnet synchronous motor based electro-mechanical actuation servo drives have widespread applications in the aviation field,such as unmanned aerial vehicle electric servos,electric cabin doors,and mechanical arms.The performance of the servo drive,which encompasses the response to the torque,efficiency,control bandwidth and the steady-state positioning accuracy,significantly influences the performance of the aviation actuation.Consequently,enhancing the control bandwidth and refining the positioning accuracy of aviation electro-mechanical actuation servo drives have emerged as a focal point of research.This paper investigates the multi-source disturbances present in aviation electro-mechanical actuation servo systems and summarizes recent research on high-performance servo control methods based on active disturbance rejection control(ADRC).We present a comprehensive overview of the research status pertaining to servo control architecture,strategies for suppressing disturbances in the current loop,and ADRC-based strategies for the position loop.We delineate the research challenges and difficulties encountered by aviation electro-mechanical actuation servo drive control technology.展开更多
The accepted doping ion in Ti^(4+)-site of PbZr_(y)Ti_(1–y)O_(3)(PZT)-based piezoelectric ceramics is a well-known method to increase mechanical quality factor(Q_(m)),since the acceptor coupled by oxygen vacancy beco...The accepted doping ion in Ti^(4+)-site of PbZr_(y)Ti_(1–y)O_(3)(PZT)-based piezoelectric ceramics is a well-known method to increase mechanical quality factor(Q_(m)),since the acceptor coupled by oxygen vacancy becomes defect dipole,which prevents the domain rotation.In this field,a serious problem is that generally,Qm decreases as the temperature(T)increases,since the oxygen vacancies are decoupled from the defect dipoles.In this work,Q_(m) of Pb_(0.95)Sr_(0.05)(Zr_(0.53)Ti_(0.47))O_(3)(PSZT)ceramics doped by 0.40%Fe_(2)O_(3)(in mole)abnormally increases as T increases,of which the Qm and piezoelectric coefficient(d_(33))at room temperature and Curie temperature(TC)are 507,292 pC/N,and 345℃,respectively.The maximum Qm of 824 was achieved in the range of 120–160℃,which is 62.52%higher than that at room temperature,while the dynamic piezoelectric constant(d_(31))was just slightly decreased by 3.85%.X-ray diffraction(XRD)and piezoresponse force microscopy results show that the interplanar spacing and the fine domains form as temperature increases,and the thermally stimulated depolarization current shows that the defect dipoles are stable even the temperature up to 240℃.It can be deduced that the aggregation of oxygen vacancies near the fine domains and defect dipole can be stable up to 240℃,which pins domain rotation,resulting in the enhanced Q_(m) with the increasing temperature.These results give a potential path to design high Q_(m) at high temperature.展开更多
The precise computation of nanoelectromechanical switches’(NEMS)multi-physical interactions requires advanced numerical models and is a crucial part of the development of micro-and nano-systems.This paper presents a ...The precise computation of nanoelectromechanical switches’(NEMS)multi-physical interactions requires advanced numerical models and is a crucial part of the development of micro-and nano-systems.This paper presents a novel compound numerical method to study the instability of a functionally graded(FG)beam-type NEMS,considering surface elasticity effects as stated by Gurtin-Murdoch theory in an Euler-Bernoulli beam.The presented method is based on a combination of the Method of Adjoints(MoA)together with the Bézier-based multistep technique.By utilizing the MoA,a boundary value problem(BVP)is turned into an initial value problem(IVP).The resulting IVP is then solved by employing a cost-efficient multi-step process.It is demonstrated that the mentioned method can arrive at a high level of accuracy.Furthermore,it is revealed that the stability of the presented methodology is far better than that of other common multi-step methods,such as Adams-Bashforth,particularly at higher step sizes.Finally,the effects of axially functionally graded(FG)properties on the pull-in phenomenon and the main design parameters of NEMS,including the detachment length,are inspected.It was shown that the main parameter of design is the modulus of elasticity of the material,as Silver(Ag),which had better mechanical properties,showed almost a 6%improvement compared to aluminum(Al).However,by applying the correct amount of material with sturdier surface parameters,such as Aluminum(Al),at certain points,the nanobeams’functionality can be improved even further by around 1.5%.展开更多
According to the inland micro electro-mechanical system （MEMS） process technique level, a design platform of piezoresistive micro electro-mechanical accelerometer is given. This platform is much more adaptable to th...According to the inland micro electro-mechanical system （MEMS） process technique level, a design platform of piezoresistive micro electro-mechanical accelerometer is given. This platform is much more adaptable to the inland designer compared with the current MEMS CAD software. The design flow is presented in detail, and the key techique in the platform is analyzed amply. The structure design methodology is exemplified in the design of a piezoresistive accelerometer, and the accelerometer is the optimized structure for the given performance requirements. The accelerometer is now being manufactured.展开更多
Fuze micro-electro-mechanical system（MEMS） has become a popular subject in recent years.Studies have been done for the application of MEMS-based fuze safety and arm devices.The existing researches mainly focused on ...Fuze micro-electro-mechanical system（MEMS） has become a popular subject in recent years.Studies have been done for the application of MEMS-based fuze safety and arm devices.The existing researches mainly focused on reducing the cost and volume of the fuze safety device.The reduction in volume allows more payload and,thus,makes small-caliber rounds more effective and the weapon system more affordable.At present,MEMS-based fuze safety devices are fabricated mainly by using deep reactive ion ething or LIGA technology,and the fabrication process research on the fuze MEMS safety device is in the exploring stage.In this paper,a new micro fabrication method of metal-based fuze MEMS safety device is presented based on ultra violet（UV）-LIGA technology.The method consists of SU-8 thick photoresist lithography process,micro electroforming process,no back plate growing process,and SU-8 photoresist sacrificial layer process.Three kinds of double-layer moveable metal devices have been fabricated on metal substrates directly with the method.Because UV-LIGA technology and no back plate growing technology are introduced,the production cycle is shortened and the cost is reduced.The smallest dimension of the devices is 40 μm,which meets the requirement of size.To evaluate the adhesion property between electroforming deposit layer and substrate qualitatively,the impact experiments have been done on the device samples.The experimental result shows that the samples are still in good condition and workable after undergoing impact pulses with 20 kg peak and 150 μs duration and completely met the requirement of strength.The presented fabrication method provides a new option for the development of MEMS fuze and is helpful for the fabrication of similar kinds of micro devices.展开更多
Micro/nano hierarchical structures could endow materials with various surface functions.However,the multilayer and multiscale characteristics of micro/nano hierarchical structures bring difficulties for their one step...Micro/nano hierarchical structures could endow materials with various surface functions.However,the multilayer and multiscale characteristics of micro/nano hierarchical structures bring difficulties for their one step and controllable fabrication.Accordingly,based on tip-based fabrication techniques,this study proposed a micro-amplitude vibration-assisted scratching method by introducing a periodic backward displacement into the conventional scratching process,which enabled the synchronous creation of the microscale V-groove and nanoscale ripples,i.e.a typical micro/nano hierarchical structure.The experiments and finite element modeling were employed to explore the formation process and mechanism of the micro/nano hierarchical structures.Being different from conventional cutting,this method was mainly based on the plow mechanism,and it could accurately replicate the shape of the indenter on the material surface.The microscale V-groove was formed due to the scratching action,and the nanoscale ripple was formed due to the extrusion action of the indenter on the microscale V-groove’s surface.Furthermore,the relationships between the processing parameters and the dimensions of the micro/nano hierarchical structures were established through experiments,and optimized processing parameters were determined to achieve regular micro/nano hierarchical structures.By this method,complex patterns constructed by various micro/nano hierarchical structures were fabricated on both flat and curved surfaces,achieving diverse surface structural colors.展开更多
基金Research Committee,National Technical University of Athens。
文摘In this study,the design and development of a sensor made of low-cost parts to monitor inclination and acceleration are presented.Αmicro electro-mechanical systems,micro electro mechanical systems,sensor was housed in a robust enclosure and interfaced with a Raspberry Pi microcomputer with Internet connectivity into a proposed tilt and acceleration monitoring node.Online capabilities accessible by mobile phone such as real-time graph,early warning notification,and database logging were implemented using Python programming.The sensor response was calibrated for inherent bias and errors,and then tested thoroughly in the laboratory under static and dynamic loading conditions beside high-quality transducers.Satisfactory accuracy was achieved in real time using the Complementary Filter method,and it was further improved in LabVIEW using Kalman Filters with parameter tuning.A sensor interface with LabVIEW and a 600 MHz CPU microcontroller allowed real-time implementation of highspeed embedded filters,further optimizing sensor results.Kalman and embedded filtering results show agreement for the sensor,followed closely by the lowcomplexity complementary filter applied in real time.The sensor's dynamic response was also verified by shaking table tests,simulating past recorded seismic excitations or artificial vibrations,indicating negligible effect of external acceleration on measured tilt;sensor measurements were benchmarked using highquality tilt and acceleration measuring transducers.A preliminary field evaluation shows robustness of the sensor to harsh weather conditions.
基金supported by the National Natural Science Foundation of China(Nos.52177059 and 52407064).
文摘Permanent magnet synchronous motor based electro-mechanical actuation servo drives have widespread applications in the aviation field,such as unmanned aerial vehicle electric servos,electric cabin doors,and mechanical arms.The performance of the servo drive,which encompasses the response to the torque,efficiency,control bandwidth and the steady-state positioning accuracy,significantly influences the performance of the aviation actuation.Consequently,enhancing the control bandwidth and refining the positioning accuracy of aviation electro-mechanical actuation servo drives have emerged as a focal point of research.This paper investigates the multi-source disturbances present in aviation electro-mechanical actuation servo systems and summarizes recent research on high-performance servo control methods based on active disturbance rejection control(ADRC).We present a comprehensive overview of the research status pertaining to servo control architecture,strategies for suppressing disturbances in the current loop,and ADRC-based strategies for the position loop.We delineate the research challenges and difficulties encountered by aviation electro-mechanical actuation servo drive control technology.
基金National Natural Science Foundation of China(U2241242)National Key R&D Program of China(2023YFB3812000,2021YFA0716502)。
文摘The accepted doping ion in Ti^(4+)-site of PbZr_(y)Ti_(1–y)O_(3)(PZT)-based piezoelectric ceramics is a well-known method to increase mechanical quality factor(Q_(m)),since the acceptor coupled by oxygen vacancy becomes defect dipole,which prevents the domain rotation.In this field,a serious problem is that generally,Qm decreases as the temperature(T)increases,since the oxygen vacancies are decoupled from the defect dipoles.In this work,Q_(m) of Pb_(0.95)Sr_(0.05)(Zr_(0.53)Ti_(0.47))O_(3)(PSZT)ceramics doped by 0.40%Fe_(2)O_(3)(in mole)abnormally increases as T increases,of which the Qm and piezoelectric coefficient(d_(33))at room temperature and Curie temperature(TC)are 507,292 pC/N,and 345℃,respectively.The maximum Qm of 824 was achieved in the range of 120–160℃,which is 62.52%higher than that at room temperature,while the dynamic piezoelectric constant(d_(31))was just slightly decreased by 3.85%.X-ray diffraction(XRD)and piezoresponse force microscopy results show that the interplanar spacing and the fine domains form as temperature increases,and the thermally stimulated depolarization current shows that the defect dipoles are stable even the temperature up to 240℃.It can be deduced that the aggregation of oxygen vacancies near the fine domains and defect dipole can be stable up to 240℃,which pins domain rotation,resulting in the enhanced Q_(m) with the increasing temperature.These results give a potential path to design high Q_(m) at high temperature.
文摘The precise computation of nanoelectromechanical switches’(NEMS)multi-physical interactions requires advanced numerical models and is a crucial part of the development of micro-and nano-systems.This paper presents a novel compound numerical method to study the instability of a functionally graded(FG)beam-type NEMS,considering surface elasticity effects as stated by Gurtin-Murdoch theory in an Euler-Bernoulli beam.The presented method is based on a combination of the Method of Adjoints(MoA)together with the Bézier-based multistep technique.By utilizing the MoA,a boundary value problem(BVP)is turned into an initial value problem(IVP).The resulting IVP is then solved by employing a cost-efficient multi-step process.It is demonstrated that the mentioned method can arrive at a high level of accuracy.Furthermore,it is revealed that the stability of the presented methodology is far better than that of other common multi-step methods,such as Adams-Bashforth,particularly at higher step sizes.Finally,the effects of axially functionally graded(FG)properties on the pull-in phenomenon and the main design parameters of NEMS,including the detachment length,are inspected.It was shown that the main parameter of design is the modulus of elasticity of the material,as Silver(Ag),which had better mechanical properties,showed almost a 6%improvement compared to aluminum(Al).However,by applying the correct amount of material with sturdier surface parameters,such as Aluminum(Al),at certain points,the nanobeams’functionality can be improved even further by around 1.5%.
文摘According to the inland micro electro-mechanical system （MEMS） process technique level, a design platform of piezoresistive micro electro-mechanical accelerometer is given. This platform is much more adaptable to the inland designer compared with the current MEMS CAD software. The design flow is presented in detail, and the key techique in the platform is analyzed amply. The structure design methodology is exemplified in the design of a piezoresistive accelerometer, and the accelerometer is the optimized structure for the given performance requirements. The accelerometer is now being manufactured.
基金supported by National Basic Research Program of China(973 Program,Grant No. 2007CB714502)National Natural Science Foundation of China (Grant No. 50675025)
文摘Fuze micro-electro-mechanical system（MEMS） has become a popular subject in recent years.Studies have been done for the application of MEMS-based fuze safety and arm devices.The existing researches mainly focused on reducing the cost and volume of the fuze safety device.The reduction in volume allows more payload and,thus,makes small-caliber rounds more effective and the weapon system more affordable.At present,MEMS-based fuze safety devices are fabricated mainly by using deep reactive ion ething or LIGA technology,and the fabrication process research on the fuze MEMS safety device is in the exploring stage.In this paper,a new micro fabrication method of metal-based fuze MEMS safety device is presented based on ultra violet（UV）-LIGA technology.The method consists of SU-8 thick photoresist lithography process,micro electroforming process,no back plate growing process,and SU-8 photoresist sacrificial layer process.Three kinds of double-layer moveable metal devices have been fabricated on metal substrates directly with the method.Because UV-LIGA technology and no back plate growing technology are introduced,the production cycle is shortened and the cost is reduced.The smallest dimension of the devices is 40 μm,which meets the requirement of size.To evaluate the adhesion property between electroforming deposit layer and substrate qualitatively,the impact experiments have been done on the device samples.The experimental result shows that the samples are still in good condition and workable after undergoing impact pulses with 20 kg peak and 150 μs duration and completely met the requirement of strength.The presented fabrication method provides a new option for the development of MEMS fuze and is helpful for the fabrication of similar kinds of micro devices.
基金supported by the Jilin Province Key Research and Development Plan Project(20240302066GX)the National Natural Science Foundation of China(Grant No.52075221)the Fundamental Research Funds for the Central Universities(2023-JCXK-02)。
文摘Micro/nano hierarchical structures could endow materials with various surface functions.However,the multilayer and multiscale characteristics of micro/nano hierarchical structures bring difficulties for their one step and controllable fabrication.Accordingly,based on tip-based fabrication techniques,this study proposed a micro-amplitude vibration-assisted scratching method by introducing a periodic backward displacement into the conventional scratching process,which enabled the synchronous creation of the microscale V-groove and nanoscale ripples,i.e.a typical micro/nano hierarchical structure.The experiments and finite element modeling were employed to explore the formation process and mechanism of the micro/nano hierarchical structures.Being different from conventional cutting,this method was mainly based on the plow mechanism,and it could accurately replicate the shape of the indenter on the material surface.The microscale V-groove was formed due to the scratching action,and the nanoscale ripple was formed due to the extrusion action of the indenter on the microscale V-groove’s surface.Furthermore,the relationships between the processing parameters and the dimensions of the micro/nano hierarchical structures were established through experiments,and optimized processing parameters were determined to achieve regular micro/nano hierarchical structures.By this method,complex patterns constructed by various micro/nano hierarchical structures were fabricated on both flat and curved surfaces,achieving diverse surface structural colors.
