In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS （micro electromechanical systems） non-silicon tech...In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS （micro electromechanical systems） non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus assembly and packaging design for dimension metrology on micro/nano scale, in which a data acquiring system is developed with AD7747. Some measurements of the micro capacitive tactile probe are performed on a nano positioning and measuring machine （NMM）. The measurement results show good linearity and hysteresis with a range of 11.6 μm and resolution of better than 5 nm. Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy.展开更多
The size of pores and throats is at the nano- meter scale in tight oil and shale gas zones, and the resistivity of these reservoirs is very high, so the reservoirs show more dielectric properties than conductivity pro...The size of pores and throats is at the nano- meter scale in tight oil and shale gas zones, and the resistivity of these reservoirs is very high, so the reservoirs show more dielectric properties than conductivity proper- ties. The conductive and dielectric characteristics of a parallel plate capacitor full of fresh water, NaCl solutions, and solid dielectrics, for example, sands are investigated in this paper, and the capacitance data of the non-gas capacitor are measured at different salinities and frequencies by a spectrum analyzer. The experimental results illustrate that the capacitance of this kind of capacitor is directly pro- portional to the salinity of the solutions and inversely proportional to the measuring frequency, the same as a vacuum parallel plate capacitor. The remarkable phenom- enon, however, is that the capacitance is inversely pro- portional to the square of the distance between two plates. The specific characteristic of this capacitor is different from the conventional parallel plate capacitor. In order to explain this phenomenon, the paper proposed a new concept, named ＂single micro ion capacitor＂, and established a novel model to describe the characteristics of this particular capacitor. Based on this new model, the theoretical capacitance value of the single micro ion capacitor is calculated, and its polarization and relaxation mechanisms are analyzed.展开更多
基金supported by the Nano Special Projects of Shanghai Science and Technology Commission of China(Grant No.11nm0560800)the Young Scientists Fund of the National Natural Science Foundation of China(Grant No.11104284)
文摘In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS （micro electromechanical systems） non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus assembly and packaging design for dimension metrology on micro/nano scale, in which a data acquiring system is developed with AD7747. Some measurements of the micro capacitive tactile probe are performed on a nano positioning and measuring machine （NMM）. The measurement results show good linearity and hysteresis with a range of 11.6 μm and resolution of better than 5 nm. Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy.
基金Basic Science Program of Advanced Well Logging Technology of CNPC (2014A-2319)the Science and Technology Program (G12-3) of State Key Laboratory of Oil and Gas Reservoir Geology and Exploitation of SWPU (Southwest Petroleum University)
文摘The size of pores and throats is at the nano- meter scale in tight oil and shale gas zones, and the resistivity of these reservoirs is very high, so the reservoirs show more dielectric properties than conductivity proper- ties. The conductive and dielectric characteristics of a parallel plate capacitor full of fresh water, NaCl solutions, and solid dielectrics, for example, sands are investigated in this paper, and the capacitance data of the non-gas capacitor are measured at different salinities and frequencies by a spectrum analyzer. The experimental results illustrate that the capacitance of this kind of capacitor is directly pro- portional to the salinity of the solutions and inversely proportional to the measuring frequency, the same as a vacuum parallel plate capacitor. The remarkable phenom- enon, however, is that the capacitance is inversely pro- portional to the square of the distance between two plates. The specific characteristic of this capacitor is different from the conventional parallel plate capacitor. In order to explain this phenomenon, the paper proposed a new concept, named ＂single micro ion capacitor＂, and established a novel model to describe the characteristics of this particular capacitor. Based on this new model, the theoretical capacitance value of the single micro ion capacitor is calculated, and its polarization and relaxation mechanisms are analyzed.
