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Characterization of La-doped xBiInO_3(1-x)PbTiO_3 Piezoelectric Films Deposited by the Radio-Frequency Magnetron Sputtering Method 被引量:1
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作者 孙科学 张淑仪 +1 位作者 Kiyotaka Wasa 水修基 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第6期49-52,共4页
La-doped and undoped xBiIn03-(1 - x)PbTi03 (BI-PT) thin films are deposited on (101)SrRuO3/(lOO)Pt/(lO0) MgO substrates by the rf-magnetron sputtering method. The structures of the films are characterized by... La-doped and undoped xBiIn03-(1 - x)PbTi03 (BI-PT) thin films are deposited on (101)SrRuO3/(lOO)Pt/(lO0) MgO substrates by the rf-magnetron sputtering method. The structures of the films are characterized by XRD and SEM, and the results indicate that the thin films are grown with mainly (100) oriented and columnar structures. The ferroelectricity and piezoelectricity of the BI-PT films are also measured, and the measured results illustrate that both performances are effectively improved by the La-doping with suitable concentrations. These results will open up wide potential applications of the films in electronic devices. 展开更多
关键词 of BI Characterization of La-doped xBiInO3 x)PbTiO3 Piezoelectric Films Deposited by the Radio-Frequency magnetron sputtering method in by La PT
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High Ferroelectricities and High Curie Temperature of BiInO3PbTiO3Thin Films Deposited by RF Magnetron Sputtering Method
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作者 孙科学 张淑仪 Kiyotaka Wasa 《Chinese Physics Letters》 SCIE CAS CSCD 2018年第12期19-22,共4页
Properties of ferroelectric xBiInO3-(1-x)PbTiO3(xBI-(1-x)PT) thin films deposited on(101) SrRuO3/(200)Pt/(200) MgO substrates by rf magnetron sputtering method and effects of deposition conditions are inve... Properties of ferroelectric xBiInO3-(1-x)PbTiO3(xBI-(1-x)PT) thin films deposited on(101) SrRuO3/(200)Pt/(200) MgO substrates by rf magnetron sputtering method and effects of deposition conditions are investigated.The structures of the xBI-(1-x)PT films are characterized by x-ray diffraction and scanning electron microscopy.The results indicate that the thin films are grown with mainly(001) orientation. The chemical compositions of the films are analyzed by scanning electron probe and the results indicate that the loss phenomena of Pb and Bi elements depend on the pressure and temperature during the sputtering process.The sputtering parameters including target composition, substrate temperature, and gas pressure are adjusted to obtain optimum sputtering conditions. To decrease leakage currents,2 mol% La2 O3 is doped in the targets. The P-E hysteresis loops show that the optimized xBI-(1-x)PT(x = 0.24) film has high ferroelectricities with remnant polarization2 Pr = 80μC/cm2 and coercive electric field 2 EC = 300 kV/cm. The Curie temperature is about 640℃. The results show that the films have optimum performance and will have wide applications. 展开更多
关键词 In Pb MGO High Ferroelectricities and High Curie Temperature of BiInO3PbTiO3Thin Films Deposited by RF magnetron sputtering method
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Robust ferroelectricity in ultrathin BaTiO_(3)films deposited at room temperature
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作者 Cong-Meng Li Hui Li +2 位作者 Jian Chen Ming-Kai Li Hong-Wei Gu 《Rare Metals》 2025年第7期5106-5111,共6页
Ferroelectric materials are widely applied in the ferroelectronic devices,photovoltaics,and so on.Ultrathin ferroelectric thin films are highly desired for their applications,which still remain a challenge.In this wor... Ferroelectric materials are widely applied in the ferroelectronic devices,photovoltaics,and so on.Ultrathin ferroelectric thin films are highly desired for their applications,which still remain a challenge.In this work,the ultrathin barium titanate(BaTiO_(3),BTO)films are deposited directly on the fluorine-doped tin oxide glass(SnO_(2):F,FTO)substrates by radio frequency magnetron sputtering method at different temperatures.All BTO ultrathin films exhibit strong ferroelectric properties.Interestingly,BTO thin films deposited at room temperature(RT)also exhibit robust ferroelectricity.The polar domains are switched reversibly with a phase degree of~180°by piezoelectric force microscopy for the BTO thin films deposited at room temperature,attributing to the strain and ion migration. 展开更多
关键词 radio frequency magnetron sputtering method barium titanate batio bto films ferroelectronic devicesphotovoltaicsand ferroelectric propertiesinterestinglybto ferroelectric materials ultrathin films ferroelectric thin films barium titanate
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