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Origami-inspired reprogrammable microactuator system
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作者 Vincent Gottwald Lena Seigner +6 位作者 Makoto Ohtsuka Rundong Jia Pejman Shayanfard Frank Wendler Lars Bumke Eckhard Quandt Manfred Kohl 《Microsystems & Nanoengineering》 2025年第5期577-589,共13页
A reprogrammable microactuator system is presented,consisting of antagonistic shape memory alloy(SMA)microactuators for bidirectional folding of miniature-scale tiles following the concept of origami.Additional integr... A reprogrammable microactuator system is presented,consisting of antagonistic shape memory alloy(SMA)microactuators for bidirectional folding of miniature-scale tiles following the concept of origami.Additional integrated heatable soft-magnetic pads with low ferromagnetic transition temperature allow for control of magnetic latching forces.The strongly coupled thermo-mechanical and thermo-magnetic properties of the microactuator and magnetic subsystems are taken into account in a model-based design to enable their selective control by Joule heating.A procedure for local shape setting of the SMA microactuators is presented to adjust their memory shape at either maximum or minimum bending angle and,thus,to functionalize their performance as protagonists or antagonists.A microfabrication process is developed that takes the specific requirements for processing the various materials and structures into account.A demonstrator system consisting of four triangular tiles with an edge length of 500μm and an angular range of about±100°is introduced that is programmed to adopt the shape of a pyramid and later on reprogrammed to self-unlatch,self-unfold,and subsequently to adopt the shape of a table. 展开更多
关键词 control magnetic latching forcesthe bidirectional folding reprogrammable microactuator magnetic latching magnetic subsystems ORIGAMI shape memory alloy antagonistic shape memory
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