This article presents the physics for determining an appropriate helicon plasma source for the linear experimental advanced device(LEAD)through tripartite mutual verification encompassing theoretical analysis,code sim...This article presents the physics for determining an appropriate helicon plasma source for the linear experimental advanced device(LEAD)through tripartite mutual verification encompassing theoretical analysis,code simulation,and experimental validation.Using the HELIC code,plasma excitation processes were simulated with three antenna configurations:m=1 half-helix,m=1 Boswell,and m=0 single-loop helicon antennas,and complemented by theoretical analysis.Key parameters including plasma impedance(R_(p))and energy deposition profiles along radial(P_(r))and axial(P_(z))directions were comparatively analyzed,revealing significantly enhanced R_(p),P_(r),and P_(z) values for the loop antenna configuration as compared with other configurations.Wave propagation equation solutions predicted a primary plasma generation layer at the antenna center;numerical simulations identified an additional plasma formation region at the antenna boundary,indicative of edge Landau damping effects.Interestingly,stronger axial magnetic fields do not necessarily result in higher plasma densities,especially for m=0 antenna configurations.Experimental validation conducted with an m=0 multi-loop plasma source confirmed these findings.Both theoretical analyses and experimental studies on large-volume plasma generation utilizing this innovative source elucidated the underlying mechanisms responsible for the remarkable low mode transition threshold of 150-watt input power and demonstrated significantly enhanced plasma confinement properties.展开更多
By utilization of different excitation power sources, linear plasma sources can be differentiated into DC, RF, VHF, microwave and dual frequency types. Through installing several linear plasma sources in parallel or a...By utilization of different excitation power sources, linear plasma sources can be differentiated into DC, RF, VHF, microwave and dual frequency types. Through installing several linear plasma sources in parallel or adopting the so-called roll-to-roll （air-to-air） process, scale uniform linear plasma sources were realized and successfully applied to the deposition of large area uniform dielectric thin films, Furthermore, the magnetic field system can effectively reduce the recombination losses on the wall of the vacuum chamber and enhance the plasma density. Linear plasma sources with approximately one square meter deposition area with the plasma density of 1011 cm 3 have been developed, some of which have been used for the deposition of dielectric layers and large area plasma etching.展开更多
The HIT-PSI is a linear plasma device built for physically simulating the high heat flux environment of future reactor divertors to test/develop advanced target plate materials.In this study,the geometry-modified SOLP...The HIT-PSI is a linear plasma device built for physically simulating the high heat flux environment of future reactor divertors to test/develop advanced target plate materials.In this study,the geometry-modified SOLPS-ITER program is employed to examine the effects of the magnetic field strength and neutral pressure in the device on the heat flux experienced by the target plate of the HIT-PSI device.The findings of the numerical simulation indicate a positive correlation between the magnetic field strength and the heat flux density.Conversely,there is a negative correlation observed between the heat flux density and the neutral pressure.When the magnetic field strength at the axis exceeds 1 tesla and the neutral pressure falls below 10 Pa,the HIT-PSI has the capability to attain a heat flux of 10 MW·m-2 at the target plate.The simulation results offer a valuable point of reference for subsequent experiments at HIT-PSI.展开更多
This contribution summarized the recent studies of tungsten-based plasma-facing materials in the linear plasma device like the simulator for tokamak edge plasma(STEP),focusing on the examination of newly developed tun...This contribution summarized the recent studies of tungsten-based plasma-facing materials in the linear plasma device like the simulator for tokamak edge plasma(STEP),focusing on the examination of newly developed tungsten(W)-based materi-als and plasma-induced defects in pure W.Pure W,W-V,W-Y_(2)O_(3)and W-ZrC samples were exposed to a high-flux plasma of~1021-1022 m^(−2)s^(−1) with a fluence up to 1026 m^(−2) at a surface temperature below 500 K.The investigation of fundamental evolution of plasma-induced defects in pure W indicated a critical role of hydrogen-dislocation interactions.Suppressed surface blistering was observed in all W-based materials,but deuterium desorption behavior and retention were distinct with respect to different materials.The studies showed that the linear plasma device like the STEP was indispensable in the understanding of plasma-material interactions and the qualification of new materials for future fusion reactors.展开更多
Researches on plasma-facing materials/components(PFMs/PFCs)have become a focus in magnetic confinement fusion studies,particularly for advanced tokamak operation scenarios.Similarly,spacecraft surface materials must m...Researches on plasma-facing materials/components(PFMs/PFCs)have become a focus in magnetic confinement fusion studies,particularly for advanced tokamak operation scenarios.Similarly,spacecraft surface materials must maintain stable performance under relatively high temperatures and other harsh plasma conditions,making studies of their thermal and ablation resistance critical.Recently,a low-cost,low-energy-storage for superconducting magnets,and compact linear device,HIT-PSI,has been designed and constructed at Harbin Institute of Technology(HIT)to investigate the interaction between stable high heat flux plasma and PFMs/PFCs in scrape-off-layer(SOL)and divertor regions,as well as spacecraft surface materials.The parameters of the argon plasma beam of HIT-PSI are diagnosed using a water-cooled planar Langmuir probe and emission spectroscopy.As magnetic field rises to 2 T,the argon plasma beam generated by a cascaded arc source achieves high density exceeding 1.2×10^(21)m^(-3)at a distance of 25 cm from the source with electron temperature surpassing 4 eV,where the particle flux reaches 10^(24)m^(-2)s^(-1),and the heat flux loaded on the graphite target measured by infrared camera reaches 4 MW/m^(2).Combined with probe and emission spectroscopy data,the transport characteristics of the argon plasma beam are analyzed.展开更多
The piecewise linear recursive convolution （PLRC） finite-different time-domain （FDTD） method greatly improves accuracy over the original recursive convolution （RC） FDTD approach but retains its speed and efficie...The piecewise linear recursive convolution （PLRC） finite-different time-domain （FDTD） method greatly improves accuracy over the original recursive convolution （RC） FDTD approach but retains its speed and efficiency advantages. A PLRC-FDTD formulation for magnetized plasma which incorporates both anisotropy and frequency dispersion at the same time is presented, enabled the transient analysis of magnetized plasma media. The technique is illustrated by numerical simulations the reflection and transmission coefficients through a magnetized plasma layer. The results show that the PLRC-FDTD method has significantly improved the accuracy over the original RC method.展开更多
Cold atmospheric plasma(CAP)jet has wide applications in various fields including advanced materials synthesis and modifications,biomedicine,environmental protection and energy saving,etc.Appropriate control on the vo...Cold atmospheric plasma(CAP)jet has wide applications in various fields including advanced materials synthesis and modifications,biomedicine,environmental protection and energy saving,etc.Appropriate control on the volume,temperature and chemically reactive species concentratio ns of the CAP jet is of great importance in actual applications.In this paper,an radio-frequency atmospheric-pressure glow discharge(RF-APGD)plasma generator with a hybrid cross-linear-field electrode configuration is proposed.The experimental results show that,with the aid of the copper mesh located at the downstream of the traditional co-axial-type plasma generator with a cross-field electrode configuration,a linear field between the inner powered electrode of the traditional plasma generator and the copper mesh can be established.This linerfield can,to some extent,enhance the discharges at the upstream of the copper mesh,resulting in small increments(all less than 12.5%)of the species emission intensities,electron excitation temperatures and gas temperatures by keeping other parameters being unchanged.And due to the intrinsic transparent and conducting features of the grounded copper mesh to the gas flowing,electric current and heat flux of the plasma plumes,a plasma region with higher concentrations of chemically reactive species and larger plasma plume diameters is obtained at the downstream of the grounded copper mesh on the same level of the gas temperature and electron excitation temperature compared to those of the plasma free jet.In addition,the charged particle number densities at the same downstream axial location of the grounded copper mesh decrease significantly compared to those of the plasma free jet.This means that the copper mesh is also,to some extent,helpful for separating the chemically reactive neutral species from the charged particles in side a plasma environment.The preceding results indicate that the cross-linear-field electrode configuration of the plasma generator is an effective approach for tuning the characteristics of the RF-APGD plasma jet in order to obtain an appropriate combination of the plasma jet properties with higher chemically reactive species concentrations,especially relative higher number densities of neutral species,larger plasma volumes and lower gas temperatures.展开更多
To develop a larger in-line plasma enhanced chemical vapor deposition(PECVD)device,the length of the linear microwave plasma source needs to be increased to 1550 mm.This paper proposes a solution to the problem of pla...To develop a larger in-line plasma enhanced chemical vapor deposition(PECVD)device,the length of the linear microwave plasma source needs to be increased to 1550 mm.This paper proposes a solution to the problem of plasma inhomogeneity caused by increasing device length.Based on the COMSOL Multiphysics,a multi-physics field coupling model for in-line PECVD device is developed and validated.The effects of microwave power,chamber pressure,and magnetic flux density on the plasma distribution are investigated,respectively,and their corresponding optimized values are obtained.This paper also presents a new strategy to optimize the wafer position to achieve the balance between deposition rate and film quality.Numerical results have indicated that increasing microwave power and magnetic flux density or decreasing chamber pressure all play positive roles in improving plasma homogeneity,and among them,the microwave power is the most decisive influencing factor.It is found that the plasma homogeneity is optimal under the condition of microwave power at 2000 W,chamber pressure at 15 Pa,and magnetic field strength at 45 mT.The relative deviation is within−3.7%to 3.9%,which fully satisfies the process requirements of the equipment.The best position for the wafer is 88 mm from the copper antenna.The results are very valuable for improving the quality of the in-line PECVD device.展开更多
The piecewise linear recursive convolution （PLRC） finite-different time-domain （FDTD） method improves accuracy over the original recursive convolution （RC） FDTD approach and current density convolution （JEC） b...The piecewise linear recursive convolution （PLRC） finite-different time-domain （FDTD） method improves accuracy over the original recursive convolution （RC） FDTD approach and current density convolution （JEC） but retains their advantages in speed and efficiency. This paper describes a revised piecewise linear recursive convolution PLRC-FDTD formulation for magnetized plasma which incorporates both anisotropy and frequency dispersion at the same time, enabling the transient analysis of magnetized plasma media. The technique is illustrated by numerical simulations of the reflection and transmission coefficients through a magnetized plasma layer. The results show that the revised PLRC-FDTD method has improved the accuracy over the original RC FDTD method and JEC FDTD method.展开更多
The quantum magnetohydrodynamic （QMHD） model is applied in investigating the propagation of linear waves in quantum magnetoplasmas. Using the QMHD model, the dispersion equation for quantum magnetoplasmas and the di...The quantum magnetohydrodynamic （QMHD） model is applied in investigating the propagation of linear waves in quantum magnetoplasmas. Using the QMHD model, the dispersion equation for quantum magnetoplasmas and the dispersion relations of linear waves are deduced. Results show that quantum effects affect the propagation of electron plasma waves and extraordinary waves （X waves）. When we select the plasma parameters of the laser-based plasma compression （LBPC） schemes for calculation, the quantum correction cannot be neglected. Meanwhile, the corrections produced by the Fermi degeneracy pressure and Bohm potential are compared under different plasma parameter conditions.展开更多
A rigorous theoretical investigation of linear dust ion acoustic (DIA) solitary waves in an unmagnetized complex plasma consisting of ion and ion beam fluids, nonthermal electrons that are Cairns distributed and immob...A rigorous theoretical investigation of linear dust ion acoustic (DIA) solitary waves in an unmagnetized complex plasma consisting of ion and ion beam fluids, nonthermal electrons that are Cairns distributed and immobile dust particles were undertaken. It was found out that, for large beam speeds, three stable modes propagated as solitary waves in the beam plasma. These were the “Fast”, “Slow” and “Ion-acoustic” modes. For two stream instability to occur between ion and ion beam, it is shown that or when .展开更多
A new compact cascaded arc device for plasma-wall interaction study is developed at the Institute of Plasma Physics,Chinese Academy of Sciences.A magnetic field up to 0.8 T is achieved to confine plasmas in a 1.2 m lo...A new compact cascaded arc device for plasma-wall interaction study is developed at the Institute of Plasma Physics,Chinese Academy of Sciences.A magnetic field up to 0.8 T is achieved to confine plasmas in a 1.2 m long and 0.1 m diameter vacuum chamber.Gas fluid type analysis in this compact vacuum system was done under high particle flux condition.The gas pressure obtained by calculation was consistent with the measurement result.Continuous argon plasma discharge with ion flux of~0.5×10^(24)m^(-2)s^(-1)is successfully sustained for more than 1h.The effects of magnetic field configuration,gas flow rate,and discharge arc current on the ion flux to target were studied in detail.展开更多
A general,fast,and effective approach is developed for numerical calculation of kinetic plasma linear dispersion relations.The plasma dispersion function is approximated by J-pole expansion.Subsequently,the dispersion...A general,fast,and effective approach is developed for numerical calculation of kinetic plasma linear dispersion relations.The plasma dispersion function is approximated by J-pole expansion.Subsequently,the dispersion relation is transformed to a standard matrix eigenvalue problem of an equivalent linear system.Numerical solutions for the least damped or fastest growing modes using an 8-pole expansion are generally accurate;more strongly damped modes are less accurate,but are less likely to be of physical interest.In contrast to conventional approaches,such as Newton＇s iterative method,this approach can give either all the solutions in the system or a few solutions around the initial guess.It is also free from convergence problems.The approach is demonstrated for electrostatic dispersion equations with one-dimensional and twodimensional wavevectors,and for electromagnetic kinetic magnetized plasma dispersion relation for bi-Maxwellian distribution with relative parallel velocity flows between species.展开更多
When plasma size scale is comparable with the wavelength of electromagnetic waves, W.K.B. solution isn't applicable. In this paper a new numerical solution technique to investigate interactions of microwave with p...When plasma size scale is comparable with the wavelength of electromagnetic waves, W.K.B. solution isn't applicable. In this paper a new numerical solution technique to investigate interactions of microwave with plasmas is presented by using Runge-Kutta method. The results of numerical solution coincide with that of analytical solution while the model is linear electron density profile in calculated accuracy.展开更多
The dispersion characteristics of binary 1D-PPCs having inhomogeneous plasma in the unit cell are studied. Using the transfer matrix method the required dispersion relations are obtained. Here the linear and exponenti...The dispersion characteristics of binary 1D-PPCs having inhomogeneous plasma in the unit cell are studied. Using the transfer matrix method the required dispersion relations are obtained. Here the linear and exponential plasma density profiles are considered and compared with the homogeneous plasma having uniform density profile. It is observed that the inhomogeneity in plasma layer highly affect dispersion curves. By comparing the dispersion curves obtained in all considered cases, it is found that the widths of band gaps and phase velocities are always larger for exponential density profile than the linear uniform density profiles in the considered frequency range.展开更多
A plasma column excited by a surface wave can act as a plasma antenna. Experiments are carried out to study the current and conductivity distributions, field, power patterns, directivity and efficiency of such a plasm...A plasma column excited by a surface wave can act as a plasma antenna. Experiments are carried out to study the current and conductivity distributions, field, power patterns, directivity and efficiency of such a plasma antenna. In addition, an equivalent metallic copper antenna is built up and its antenna parameters are compared with that of the plasma antenna. Our findings indicate that the power content in the harmonics of the plasma antenna is more prominent as compared to the copper antenna （which only generates a fundamental frequency）. However, the power patterns for both antennae are quite similar. To provide a more qualitative understanding regarding the generation of harmonics in the field of the plasma antenna, a bi-spectral analysis is performed to study the nonlinear interactions in the current fluctuations. Some specific features of the plasma antenna are investigated in our study, which may enhance the application prospect of the plasma antenna with respect to the conventional metallic antenna.展开更多
We present calculations and improvement inspired by the work of Lorenzo Zaninetti, published in 2020, it concerns a problem whose origin dates back 1911 with so called Maxwell-Jüttner distribution these lies on t...We present calculations and improvement inspired by the work of Lorenzo Zaninetti, published in 2020, it concerns a problem whose origin dates back 1911 with so called Maxwell-Jüttner distribution these lies on the Lorentz factor , with . This work uses powerful modern software for a reconstruction of Zaninetti work, which computes with special functions, these are included in the Mathematica software, as by instance Bessel and Meijer G-functions ready to manipulate. A progress is made, it is possible to perform an integral that is not computed in Zaninetti paper. This author connects the correct relativistic probability law: the Maxwell-Jüttner to the synchrotron emissivity with a magnetic B field, this work generalize these results, using the linear Stark effect and deals with an electric field E.展开更多
基金supported by the National Key Research and Development Program of China(Grant No.2022YFE03100002)the National Natural Science Foundation of China(Grant Nos.12435015 and 12075241)。
文摘This article presents the physics for determining an appropriate helicon plasma source for the linear experimental advanced device(LEAD)through tripartite mutual verification encompassing theoretical analysis,code simulation,and experimental validation.Using the HELIC code,plasma excitation processes were simulated with three antenna configurations:m=1 half-helix,m=1 Boswell,and m=0 single-loop helicon antennas,and complemented by theoretical analysis.Key parameters including plasma impedance(R_(p))and energy deposition profiles along radial(P_(r))and axial(P_(z))directions were comparatively analyzed,revealing significantly enhanced R_(p),P_(r),and P_(z) values for the loop antenna configuration as compared with other configurations.Wave propagation equation solutions predicted a primary plasma generation layer at the antenna center;numerical simulations identified an additional plasma formation region at the antenna boundary,indicative of edge Landau damping effects.Interestingly,stronger axial magnetic fields do not necessarily result in higher plasma densities,especially for m=0 antenna configurations.Experimental validation conducted with an m=0 multi-loop plasma source confirmed these findings.Both theoretical analyses and experimental studies on large-volume plasma generation utilizing this innovative source elucidated the underlying mechanisms responsible for the remarkable low mode transition threshold of 150-watt input power and demonstrated significantly enhanced plasma confinement properties.
基金supported by National Natural Science Foundation of China(No.11205201)
文摘By utilization of different excitation power sources, linear plasma sources can be differentiated into DC, RF, VHF, microwave and dual frequency types. Through installing several linear plasma sources in parallel or adopting the so-called roll-to-roll （air-to-air） process, scale uniform linear plasma sources were realized and successfully applied to the deposition of large area uniform dielectric thin films, Furthermore, the magnetic field system can effectively reduce the recombination losses on the wall of the vacuum chamber and enhance the plasma density. Linear plasma sources with approximately one square meter deposition area with the plasma density of 1011 cm 3 have been developed, some of which have been used for the deposition of dielectric layers and large area plasma etching.
基金Project supported by the National Key Research and Development Program of China(Grant No.2018YFE0303105)the Fundamental Research Funds for the Central Universities(Grant No.2022FRFK060021)the National MCF Energy Research and Development Program(Grant No.2019YFE03080300).
文摘The HIT-PSI is a linear plasma device built for physically simulating the high heat flux environment of future reactor divertors to test/develop advanced target plate materials.In this study,the geometry-modified SOLPS-ITER program is employed to examine the effects of the magnetic field strength and neutral pressure in the device on the heat flux experienced by the target plate of the HIT-PSI device.The findings of the numerical simulation indicate a positive correlation between the magnetic field strength and the heat flux density.Conversely,there is a negative correlation observed between the heat flux density and the neutral pressure.When the magnetic field strength at the axis exceeds 1 tesla and the neutral pressure falls below 10 Pa,the HIT-PSI has the capability to attain a heat flux of 10 MW·m-2 at the target plate.The simulation results offer a valuable point of reference for subsequent experiments at HIT-PSI.
基金the National Nature Science Foundation of China(Grant 51720105006 and 11805007)the Science and Technology on Surface Physics and Chemistry Laboratory(Grant 02020317).
文摘This contribution summarized the recent studies of tungsten-based plasma-facing materials in the linear plasma device like the simulator for tokamak edge plasma(STEP),focusing on the examination of newly developed tungsten(W)-based materi-als and plasma-induced defects in pure W.Pure W,W-V,W-Y_(2)O_(3)and W-ZrC samples were exposed to a high-flux plasma of~1021-1022 m^(−2)s^(−1) with a fluence up to 1026 m^(−2) at a surface temperature below 500 K.The investigation of fundamental evolution of plasma-induced defects in pure W indicated a critical role of hydrogen-dislocation interactions.Suppressed surface blistering was observed in all W-based materials,but deuterium desorption behavior and retention were distinct with respect to different materials.The studies showed that the linear plasma device like the STEP was indispensable in the understanding of plasma-material interactions and the qualification of new materials for future fusion reactors.
基金supported by National Natural Science Foundation of China(No.12105067)the ITER Organization and China Domestic Agency for the support of this work(No.ITER5.5.P01.CN.05)。
文摘Researches on plasma-facing materials/components(PFMs/PFCs)have become a focus in magnetic confinement fusion studies,particularly for advanced tokamak operation scenarios.Similarly,spacecraft surface materials must maintain stable performance under relatively high temperatures and other harsh plasma conditions,making studies of their thermal and ablation resistance critical.Recently,a low-cost,low-energy-storage for superconducting magnets,and compact linear device,HIT-PSI,has been designed and constructed at Harbin Institute of Technology(HIT)to investigate the interaction between stable high heat flux plasma and PFMs/PFCs in scrape-off-layer(SOL)and divertor regions,as well as spacecraft surface materials.The parameters of the argon plasma beam of HIT-PSI are diagnosed using a water-cooled planar Langmuir probe and emission spectroscopy.As magnetic field rises to 2 T,the argon plasma beam generated by a cascaded arc source achieves high density exceeding 1.2×10^(21)m^(-3)at a distance of 25 cm from the source with electron temperature surpassing 4 eV,where the particle flux reaches 10^(24)m^(-2)s^(-1),and the heat flux loaded on the graphite target measured by infrared camera reaches 4 MW/m^(2).Combined with probe and emission spectroscopy data,the transport characteristics of the argon plasma beam are analyzed.
基金The project was supported by the National Natural Science Foundation of China (60471002) and the Jiangxi ProvincialNatural Science Foundation (0412014)
文摘The piecewise linear recursive convolution （PLRC） finite-different time-domain （FDTD） method greatly improves accuracy over the original recursive convolution （RC） FDTD approach but retains its speed and efficiency advantages. A PLRC-FDTD formulation for magnetized plasma which incorporates both anisotropy and frequency dispersion at the same time is presented, enabled the transient analysis of magnetized plasma media. The technique is illustrated by numerical simulations the reflection and transmission coefficients through a magnetized plasma layer. The results show that the PLRC-FDTD method has significantly improved the accuracy over the original RC method.
基金supported by National Natural Science Foundation of China(Nos.11475103,21627812)the National Key Research and Development Program of China(No.2016YFD0102106)Tsinghua University Initiative Scientific Program(20161080108)
文摘Cold atmospheric plasma(CAP)jet has wide applications in various fields including advanced materials synthesis and modifications,biomedicine,environmental protection and energy saving,etc.Appropriate control on the volume,temperature and chemically reactive species concentratio ns of the CAP jet is of great importance in actual applications.In this paper,an radio-frequency atmospheric-pressure glow discharge(RF-APGD)plasma generator with a hybrid cross-linear-field electrode configuration is proposed.The experimental results show that,with the aid of the copper mesh located at the downstream of the traditional co-axial-type plasma generator with a cross-field electrode configuration,a linear field between the inner powered electrode of the traditional plasma generator and the copper mesh can be established.This linerfield can,to some extent,enhance the discharges at the upstream of the copper mesh,resulting in small increments(all less than 12.5%)of the species emission intensities,electron excitation temperatures and gas temperatures by keeping other parameters being unchanged.And due to the intrinsic transparent and conducting features of the grounded copper mesh to the gas flowing,electric current and heat flux of the plasma plumes,a plasma region with higher concentrations of chemically reactive species and larger plasma plume diameters is obtained at the downstream of the grounded copper mesh on the same level of the gas temperature and electron excitation temperature compared to those of the plasma free jet.In addition,the charged particle number densities at the same downstream axial location of the grounded copper mesh decrease significantly compared to those of the plasma free jet.This means that the copper mesh is also,to some extent,helpful for separating the chemically reactive neutral species from the charged particles in side a plasma environment.The preceding results indicate that the cross-linear-field electrode configuration of the plasma generator is an effective approach for tuning the characteristics of the RF-APGD plasma jet in order to obtain an appropriate combination of the plasma jet properties with higher chemically reactive species concentrations,especially relative higher number densities of neutral species,larger plasma volumes and lower gas temperatures.
基金by Hunan Provincial Science and Technology Department'Key Field Research and Development Project'(No.2019WK2011)。
文摘To develop a larger in-line plasma enhanced chemical vapor deposition(PECVD)device,the length of the linear microwave plasma source needs to be increased to 1550 mm.This paper proposes a solution to the problem of plasma inhomogeneity caused by increasing device length.Based on the COMSOL Multiphysics,a multi-physics field coupling model for in-line PECVD device is developed and validated.The effects of microwave power,chamber pressure,and magnetic flux density on the plasma distribution are investigated,respectively,and their corresponding optimized values are obtained.This paper also presents a new strategy to optimize the wafer position to achieve the balance between deposition rate and film quality.Numerical results have indicated that increasing microwave power and magnetic flux density or decreasing chamber pressure all play positive roles in improving plasma homogeneity,and among them,the microwave power is the most decisive influencing factor.It is found that the plasma homogeneity is optimal under the condition of microwave power at 2000 W,chamber pressure at 15 Pa,and magnetic field strength at 45 mT.The relative deviation is within−3.7%to 3.9%,which fully satisfies the process requirements of the equipment.The best position for the wafer is 88 mm from the copper antenna.The results are very valuable for improving the quality of the in-line PECVD device.
基金National Natural Science Foundation of China (No. 60471002) and the Natural Science Foundation ofJiangxi Province (No. 0412014)
文摘The piecewise linear recursive convolution （PLRC） finite-different time-domain （FDTD） method improves accuracy over the original recursive convolution （RC） FDTD approach and current density convolution （JEC） but retains their advantages in speed and efficiency. This paper describes a revised piecewise linear recursive convolution PLRC-FDTD formulation for magnetized plasma which incorporates both anisotropy and frequency dispersion at the same time, enabling the transient analysis of magnetized plasma media. The technique is illustrated by numerical simulations of the reflection and transmission coefficients through a magnetized plasma layer. The results show that the revised PLRC-FDTD method has improved the accuracy over the original RC FDTD method and JEC FDTD method.
基金supported by National Natural Science Foundation of China(No.11447125)the Research Training Program for Undergraduates of Shanxi University of China(Nos.2014012167,2015013182)
文摘The quantum magnetohydrodynamic （QMHD） model is applied in investigating the propagation of linear waves in quantum magnetoplasmas. Using the QMHD model, the dispersion equation for quantum magnetoplasmas and the dispersion relations of linear waves are deduced. Results show that quantum effects affect the propagation of electron plasma waves and extraordinary waves （X waves）. When we select the plasma parameters of the laser-based plasma compression （LBPC） schemes for calculation, the quantum correction cannot be neglected. Meanwhile, the corrections produced by the Fermi degeneracy pressure and Bohm potential are compared under different plasma parameter conditions.
文摘A rigorous theoretical investigation of linear dust ion acoustic (DIA) solitary waves in an unmagnetized complex plasma consisting of ion and ion beam fluids, nonthermal electrons that are Cairns distributed and immobile dust particles were undertaken. It was found out that, for large beam speeds, three stable modes propagated as solitary waves in the beam plasma. These were the “Fast”, “Slow” and “Ion-acoustic” modes. For two stream instability to occur between ion and ion beam, it is shown that or when .
基金supported by Comprehensive Research Facility for Fusion Technology Program of China (No. 2018000052-73-01001228)the Youth Innovation Promotion Association CAS (No. 2018484)
文摘A new compact cascaded arc device for plasma-wall interaction study is developed at the Institute of Plasma Physics,Chinese Academy of Sciences.A magnetic field up to 0.8 T is achieved to confine plasmas in a 1.2 m long and 0.1 m diameter vacuum chamber.Gas fluid type analysis in this compact vacuum system was done under high particle flux condition.The gas pressure obtained by calculation was consistent with the measurement result.Continuous argon plasma discharge with ion flux of~0.5×10^(24)m^(-2)s^(-1)is successfully sustained for more than 1h.The effects of magnetic field configuration,gas flow rate,and discharge arc current on the ion flux to target were studied in detail.
基金supported by the National Magnetic Confinement Fusion Science Program of China(Nos.2015GB110003,2011GB105001,2013GB111000)National Natural Science Foundation of China(No.91130031)the Recruitment Program of Global Youth Experts
文摘A general,fast,and effective approach is developed for numerical calculation of kinetic plasma linear dispersion relations.The plasma dispersion function is approximated by J-pole expansion.Subsequently,the dispersion relation is transformed to a standard matrix eigenvalue problem of an equivalent linear system.Numerical solutions for the least damped or fastest growing modes using an 8-pole expansion are generally accurate;more strongly damped modes are less accurate,but are less likely to be of physical interest.In contrast to conventional approaches,such as Newton＇s iterative method,this approach can give either all the solutions in the system or a few solutions around the initial guess.It is also free from convergence problems.The approach is demonstrated for electrostatic dispersion equations with one-dimensional and twodimensional wavevectors,and for electromagnetic kinetic magnetized plasma dispersion relation for bi-Maxwellian distribution with relative parallel velocity flows between species.
文摘When plasma size scale is comparable with the wavelength of electromagnetic waves, W.K.B. solution isn't applicable. In this paper a new numerical solution technique to investigate interactions of microwave with plasmas is presented by using Runge-Kutta method. The results of numerical solution coincide with that of analytical solution while the model is linear electron density profile in calculated accuracy.
文摘The dispersion characteristics of binary 1D-PPCs having inhomogeneous plasma in the unit cell are studied. Using the transfer matrix method the required dispersion relations are obtained. Here the linear and exponential plasma density profiles are considered and compared with the homogeneous plasma having uniform density profile. It is observed that the inhomogeneity in plasma layer highly affect dispersion curves. By comparing the dispersion curves obtained in all considered cases, it is found that the widths of band gaps and phase velocities are always larger for exponential density profile than the linear uniform density profiles in the considered frequency range.
文摘A plasma column excited by a surface wave can act as a plasma antenna. Experiments are carried out to study the current and conductivity distributions, field, power patterns, directivity and efficiency of such a plasma antenna. In addition, an equivalent metallic copper antenna is built up and its antenna parameters are compared with that of the plasma antenna. Our findings indicate that the power content in the harmonics of the plasma antenna is more prominent as compared to the copper antenna （which only generates a fundamental frequency）. However, the power patterns for both antennae are quite similar. To provide a more qualitative understanding regarding the generation of harmonics in the field of the plasma antenna, a bi-spectral analysis is performed to study the nonlinear interactions in the current fluctuations. Some specific features of the plasma antenna are investigated in our study, which may enhance the application prospect of the plasma antenna with respect to the conventional metallic antenna.
文摘We present calculations and improvement inspired by the work of Lorenzo Zaninetti, published in 2020, it concerns a problem whose origin dates back 1911 with so called Maxwell-Jüttner distribution these lies on the Lorentz factor , with . This work uses powerful modern software for a reconstruction of Zaninetti work, which computes with special functions, these are included in the Mathematica software, as by instance Bessel and Meijer G-functions ready to manipulate. A progress is made, it is possible to perform an integral that is not computed in Zaninetti paper. This author connects the correct relativistic probability law: the Maxwell-Jüttner to the synchrotron emissivity with a magnetic B field, this work generalize these results, using the linear Stark effect and deals with an electric field E.
