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Study of a novel SiC-based light initiated multi-gate semiconductor switch
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作者 Chongbiao Luan Jianqiang Yuan +7 位作者 Hongwei Liu Longfei Xiao Huiru Sha Le Xu Yang He Lingyun Wang Hongtao Li Yupeng Huang 《Journal of Semiconductors》 2025年第11期48-54,共7页
To optimize turn on velocity of the SiC LIMS,we proposed a new structure for the LIMS that incorporates an opti-mized n^(+)layer and a multi-light triggered electrode design for the anode.The chip size is 5.5 mm×... To optimize turn on velocity of the SiC LIMS,we proposed a new structure for the LIMS that incorporates an opti-mized n^(+)layer and a multi-light triggered electrode design for the anode.The chip size is 5.5 mm×5.5 mm in dimension.The experiment results indicate that the saturation laser energy required to trigger the prepared SiC LIMS has been decreased from 1.8 mJ to 40μJ,with the forward blocking voltage of the prepared SiC LIMSs capable of withstanding over 7000 V.The leakage current is about 0.3μA at room temperature,and the output current density achieves 4.25 kA/cm^(2)(with di/dt larger than 20 kA/μs). 展开更多
关键词 SIC light initiated multi-gate semiconductor switch leakage current pulsed power system
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