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Direct growth of globally aligned graphene nanoribbons on reconstructed sapphire substrate using PECVD 被引量:1
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作者 Mingzhi Zou Weiming Liu +5 位作者 Yue Yu Shanshan Wang Bo Xu Liu Qian Tianze Tong Jin Zhang 《Nano Research》 SCIE EI CSCD 2023年第1期62-69,共8页
Graphene nanoribbons(GNRs)are regarded as an ideal candidate for beyond-silicon electronics.However,synthesis of aligned GNR arrays on insulating substrates with high efficiency is challenging.In this work,we develop ... Graphene nanoribbons(GNRs)are regarded as an ideal candidate for beyond-silicon electronics.However,synthesis of aligned GNR arrays on insulating substrates with high efficiency is challenging.In this work,we develop a facile strategy,involving KOH pre-treatment and high-temperature annealing,to construct parallel steps on the two-fold symmetry a-plane sapphire substrate.Horizontal GNRs as narrow as 15.1 nm with global alignment across a region of 20 mm^(2)are then grown on the step edgeenriched substrate through plasma enhanced chemical vapor deposition(PECVD)method.GNRs align well along the atomic steps on sapphire([■]direction)with their widths and densities swiftly adjustable by step morphology modification on substrate surface.A step-edge confined growth mechanism is proposed,attributing the constraint on the nanoribbon broadening to a relatively low growth temperature in PECVD,which restrains the activation energy to suppress GNRs across step edges on sapphire and prevents detrimental nanoribbon widening.The results provide a new perspective for scalable synthesizing well aligned nanoribbons of other two-dimensional materials. 展开更多
关键词 graphene nanoribbon(GNR) global alignment SAPPHIRE insulating substrates plasma enhanced chemical vapor deposition(PECVD)
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