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Preparation of spherical tungsten and titanium powders by RF induction plasma processing 被引量:10
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作者 Jian-Jun Wang Jun-Jie Hao +1 位作者 Zhi-Meng Guo Yu-Ming Wang 《Rare Metals》 SCIE EI CAS CSCD 2015年第6期431-435,共5页
Spherical tungsten and titanium powders were prepared by radio frequency inductively coupled plasma torch with irregular shaped tungsten and titanium hydride (TiH2) powders, respectively. The effect of the feed rate... Spherical tungsten and titanium powders were prepared by radio frequency inductively coupled plasma torch with irregular shaped tungsten and titanium hydride (TiH2) powders, respectively. The effect of the feed rate on spheroidization efficiency was investigated. The phase composition, oxygen content, morphology, and particle size distribution of the powders before and after spheroidization were characterized by X-ray diffraction (XRD), nitrogen/oxygen analyzer, scanning electron microscopy (SEM), and laser micron sizer (LMS). The results show that both kinds of plasma-processed powders have good dispersity, smooth surface, and single phase. A maximum of 100 % of spheroidization efficiency can be achieved at a lower feed rate. The spherical titanium powder obtained by the plasma treatment consists of particles with mean diameter of 33.34 gin, while the mean diameter of ori- ginal Till2 powder is 136.56 μm. The apparent density and flowability of the spherical tungsten powder are 6.3 g.cm-3 and 0.16 s.g-1, respectively. The apparent density and flowability of the spherical titanium powder are 2.8 g.cm-3 and 0.52 s.g-1, respectively. With the increase of the feed rate, the sphemidization efficiency of raw powders drops gradually. 展开更多
关键词 RF induction plasma Tungsten and titaniumpowders Titanium hydride SPHEROIDIZATION Apparentdensity FLOWABILITY
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Effect of process parameters on induction plasma reactive deposition of tungsten carbide from tungsten metal powder 被引量:7
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作者 蒋显亮 《中国有色金属学会会刊:英文版》 CSCD 2001年第5期639-643,共5页
Tungsten carbide deposit was made directly from tungsten metal powder through the reaction with methane in radio frequency induction plasma. Effect of major process parameters on the induction plasma reactive depositi... Tungsten carbide deposit was made directly from tungsten metal powder through the reaction with methane in radio frequency induction plasma. Effect of major process parameters on the induction plasma reactive deposition of tungsten carbide was studied by optical microscopy, scanning electron microscopy, X ray diffraction analysis, water displacement method, and microhardness test. The results show that methane flow rate, powder feed rate, particle size, reaction chamber pressure and deposition distance have significant influences on the phase composition, density, and microhardness of the deposit. Extra carbon is necessary to ensure the complete conversion of tungsten metal into the carbide. 展开更多
关键词 induction plasma tungsten carbide DEPOSIT CARBURIZATION phase composition
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Development of Nanopowder Synthesis Using Induction Plasma 被引量:3
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作者 Richard DOLBEC Jerzy JUREWICZ Maher BOULOS 《Plasma Science and Technology》 SCIE EI CAS CSCD 2010年第2期188-199,共12页
The application of induction plasma technology developed for the synthesis of nano- metric powders is summarized. A brief description of the scientific basis for the induction plasma processes is given, followed by th... The application of induction plasma technology developed for the synthesis of nano- metric powders is summarized. A brief description of the scientific basis for the induction plasma processes is given, followed by the presentation of an induction plasma system developed by Tekna, together with various examples of the nanopowders synthesized using its facilities. The advantages of the induction plasma process over alternative techniques and its adaptability into industrial- scale operation is particularly illustrated. Some specific issues related to the nanopowder synthesis process are also discussed. 展开更多
关键词 nano-material NANOPOWDERS induction plasma
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Radio Frequency Induction Plasma Spraying of Molybdenum 被引量:2
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作者 蒋显亮 Maher Boulos 《Plasma Science and Technology》 SCIE EI CAS CSCD 2003年第4期1895-1900,共6页
Radio frequency (RF) induction plasma was used to make free-standing deposition of molybdenum (Mo). The phenomena of particle melting, flattening, and stacking were investigated. The effect of process parameters such ... Radio frequency (RF) induction plasma was used to make free-standing deposition of molybdenum (Mo). The phenomena of particle melting, flattening, and stacking were investigated. The effect of process parameters such as plasma power, chamber pressure, and spray distance on the phenomena mentioned above was studied. Scanning electron microscopy (SEM) was used to analyze the plasma-processed powder, splats formed, and deposits obtained. Experimental results show that less Mo particles are spheroidized when compared to the number of spheroidized tungsten (W) particles at the same powder feed rate under the same plasma spray condition. Molten Mo particles can be sufficiently flattened on substrate. The influence of the process parameters on the flattening behavior is not significant. Mo deposit is not as dense as W deposit, due to the splash and low impact of molten Mo particles. Oxidation of the Mo powder with a large particle size is not evident under the low pressure plasma spray. 展开更多
关键词 induction plasma MOLYBDENUM spheroidi/ation FLATTENING deposition density
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Numerical and Experimental Investigation on the In-Flight Melting Behaviour of Granulated Powders in Induction Thermal Plasmas
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作者 姚耀春 Md.M.HOSSAIN T.WATANABE 《Plasma Science and Technology》 SCIE EI CAS CSCD 2009年第1期71-77,共7页
An innovative in-flight glass melting technology with thermal plasmas was developed for the purpose of energy conservation and environment protection. In this study, modelling and experiments of argon-oxygen induction... An innovative in-flight glass melting technology with thermal plasmas was developed for the purpose of energy conservation and environment protection. In this study, modelling and experiments of argon-oxygen induction thermal plasmas were conducted to investigate the melting behaviour of granulated soda-lime glass powders injected into the plasma. A two-dimensional local thermodynamic equilibrium (LTE) model was performed to simulate the heat and momentum transfer between plasma and particle. Results showed that the particle temperature was strongly affected by the flow rate of carrier gas and the particle size of raw material. A higher flow rate of carrier gas led to lower particle temperature and less energy transferred to particles which resulted in lower vitrification. The incomplete melting of large particles was attributed to the lower central temperature of the particle caused by a larger heat capacity. The numerical analysis explained well the experimental results, which can provide valuable practical guidelines for the process control in the melting process for the glass industry. 展开更多
关键词 induction thermal plasmas size. heat transfer numerical modelling carrier gas flow rate PARTICLE
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Arsenic speciation in freshwater fish using high performance liquid chromatography and inductively coupled plasma mass spectrometry
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作者 Chester Lau Xiufen Lu +4 位作者 Karen S.Hoy Tetiana Davydiuk Jennifer A.Graydon Megan Reichert X.Chris Le 《Journal of Environmental Sciences》 2025年第7期302-315,共14页
Arsenic speciation in freshwater fish is crucial for providing meaningful consumption guidelines that allow the public to make informed decisions regarding its consumption.While marine fish have attractedmuch research... Arsenic speciation in freshwater fish is crucial for providing meaningful consumption guidelines that allow the public to make informed decisions regarding its consumption.While marine fish have attractedmuch research interest due to their higher arsenic content,research on freshwater fish is limited due to the challenges in quantifying and identifying arsenic species present at trace levels.We describe here a sensitivemethod and its application to the quantification of arsenic species in freshwater fish.Arsenic species from fish tissues were extracted using a methanol/water mixture(1:1 vol.ratio)and ultrasound sonication.Anion-exchange high-performance liquid chromatography(HPLC)enabled separation of arsenobetaine(AsB),inorganic arsenite(iAs^(Ⅲ)),dimethylarsinic acid(DMA),monomethylarsonic acid(MMA),inorganic arsenate(iAs^(Ⅴ)),and three new arsenic species.Inductively coupled plasma mass spectrometry(ICPMS)provided highly sensitive and specific detection of arsenic.A limit of detection of 0.25μg/kg(wet weight fish tissue)was achieved for the five target arsenic species:AsB,iAs^(Ⅲ),DMA,MMA,and iAs^(Ⅴ).A series of experimentswere conducted to ensure the accuracy and validity of the analytical method.The method was successfully applied to the determination of arsenic species in lakewhitefish,northern pike,and walleye,with AsB,DMA,and iAs^(Ⅴ) being frequently detected.Three new arsenic species were detected,but their chromatographic retention times did not match with those of any available arsenic standards.Future research is necessary to elucidate the identity of these new arsenic species detected in freshwater fish. 展开更多
关键词 Arsenic species Freshwater fish HPLC ICPMS Chromatography separation Inductively coupled plasma mass SPECTROMETRY Non-targeted new species Speciation method validation
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Luminescent target interactions in ICP discharges:a diagnostic method for plasma current density
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作者 Zhe ZHANG Lujia ZHANG +4 位作者 Huibin ZHENG Jiayun QI Zun ZHANG Xiangyang LIU Haibin TANG 《Plasma Science and Technology》 2025年第6期59-68,共10页
Recently,it has been observed that during the operation of an inductively coupled plasma(ICP),a luminescent target(BAM,BaMgAl10O17:Eu)can interact with the plasma beam and emit blue light.After excluding the influence... Recently,it has been observed that during the operation of an inductively coupled plasma(ICP),a luminescent target(BAM,BaMgAl10O17:Eu)can interact with the plasma beam and emit blue light.After excluding the influence of ultraviolet(UV)and electromagnetic wave radiation,the results indicate that the BAM target may undergo luminescent excitation due to collisions with electrons and ions.This led us to investigate the physical mechanism behind this plasma luminescence excitation phenomenon.A spectrometer was used to record the luminescent spectroscopy and peak light intensity.Under excitation by argon plasma,the BAM material emits a continuum spectrum from 400 nm to 550 nm,with the peak light intensity located at 462.58 nm,which is the same as the spectrum excited by UV torchlight.To identify the relationship between the plasma parameters and the luminescent intensity,Langmuir and Faraday probes were employed to determine the local plasma parameters such as electron density,electron temperature,and current density.After normalizing the peak light intensity to the plasma parameters,the most interesting point is that the current density is linearly correlated with the luminescent light intensity.To verify the repeatability and lifetime of the plasma-luminescence interaction,a 600 s lifetime test was conducted in a 200 W ICP discharge environment.The maximum difference for the peak light strength of the luminescent spectrum is 6.5%.From a voltage bias experiment and a theoretical derivation,we initially identified that bombardment by ions plays the dominant role in the luminescence excitation process,which also explains the mechanism by which the current density is proportional to the luminescence intensity.This new finding leads us to reconsider the possibility of applying this plasma luminescence phenomenon to optical plasma diagnostics.The BAM light intensity can potentially be used to predict the current density of a plasma beam for large-area two-dimensional(2D)measurements and can capture high spatial resolution in a single test.We believe that this method may lead to high-efficiency,spatially resolved plasma current density measurement. 展开更多
关键词 inductively coupled plasma plasma-luminescence excitation current density luminescence intensity
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Towards the creation of an inverse electron distribution function in two-chamber inductively coupled plasma discharges
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作者 Ying WANG Nie CHEN +4 位作者 Jingfeng YAO Evgeniy BOGDANOV Anatoly KUDRYAVTSEV Chengxun YUAN Zhongxiang ZHOU 《Plasma Science and Technology》 2025年第5期122-128,共7页
This work continues the studies on searching for plasma media with the inverse electron energy distribution function(EEDF)and providing recommendations for setting up subsequent experiments.The inverse EEDF is a distr... This work continues the studies on searching for plasma media with the inverse electron energy distribution function(EEDF)and providing recommendations for setting up subsequent experiments.The inverse EEDF is a distribution function that increases with an increase in energy at zero electron energy.The inverse EEDF plays a central role in the problem of negative conductivity.Based on the previously obtained criterion for the formation of an inverse EEDF in a spatially inhomogeneous plasma,a heuristic method is proposed that allows one to avoid resource-intensive calculations for spatially two-dimensional(2D)kinetic modeling on a large array of different glow discharges.It is shown that the conditions for EEDF inversion can be realized in two-chamber discharge structures due to violating the known Boltzmann distribution for electron density.The theoretical conclusions are validated by numerical modeling of lowpressure two-chamber inductively-coupled plasma(ICP)discharges in the COMSOL Multiphysics environment.As a result,areas of conditions with inverse EEDF were found for subsequent detailed kinetic analysis and experimental studies. 展开更多
关键词 electron kinetics nonlocal electron distribution function gas discharge Boltzmann kinetic equation inverse electron distribution function inductively coupled plasma
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Preparation of Mo(Si,Al)_2 feedstock used for air plasma spraying
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作者 侯晖东 宁先进 +3 位作者 王全胜 高斌 柳彦博 刘颖 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2016年第11期2939-2946,共8页
In order to prepare high quality Mo(Si,Al)2 feedstock characterized with C40 phase, higher Al doping amount andexcellent flowability, Mo(Si1-x,Alx)2 with different Al contents (x=0, 0.1, 0.2, 0.3, 0.4, 0.5) were... In order to prepare high quality Mo(Si,Al)2 feedstock characterized with C40 phase, higher Al doping amount andexcellent flowability, Mo(Si1-x,Alx)2 with different Al contents (x=0, 0.1, 0.2, 0.3, 0.4, 0.5) were synthesized by self-propagatinghigh-temperature synthesis first and Mo(Si0.6,Al0.4)2 was confirmed as the suitable material through X-ray diffraction analysis. Aseries of tests with different parameters of induction plasma spheroidization were applied to improving the flowability of feedstock.Mo(Si,Al)2 feedstock with excellent flowability (26.2 s/50 g) was prepared through adding hydrogen into sheath gas and decreasingthe powder feeding rate. The composition segregation occurred in the spheroidized powder after Al consumption and oxidation. Theinhomogeneous structure of the same particle was caused by the asymmetric heating and cooling when particle passed through theplasma jet. 展开更多
关键词 Mo(Si Al)2 C40 phase self-propagating high-temperature synthesis induction plasma spheroidization compositionsegregation
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Heat Transfer During Radio Frequency Inductively Coupled Plasma Deposition of Tungsten
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作者 蒋显亮 M.I.BOULOS 《Plasma Science and Technology》 SCIE EI CAS CSCD 2007年第4期427-430,共4页
Particle melting and substrate temperature are important in controlling deposited density and residual stress in thermal plasma deposition of refractory materials. In this paper, both the heating and cooling behaviour... Particle melting and substrate temperature are important in controlling deposited density and residual stress in thermal plasma deposition of refractory materials. In this paper, both the heating and cooling behaviours of tungsten particles inside a radio frequency inductively coupled plasma (ICP) and the plasma heat flux to the substrate were investigated. The distribution of the plasma-generated heat on device, powder injection probe, deposition chamber, and substrate was determined by measuring the water flow rate and the flow-in and flow-out water temperatures in the four parts. Substrate temperature was measured by a two-colour pyrometer during the ICP deposition of tungsten. Experimental results show that the heat flux to the substrate accounts for about 20% of the total plasma energy, the substrate temperature can reach as high as 2100 K, and the heat loss by radiation is significant in the plasma deposition of tungsten. 展开更多
关键词 induction plasma thermal spray deposition TUNGSTEN substrate temperature heat radiation
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Analysis of magnetic elements in otoliths of the macula lagena in homing pigeons with inductively coupled plasma mass spectrometry
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作者 赵颖 黄伊娜 +1 位作者 史律 陈林 《Neuroscience Bulletin》 SCIE CAS CSCD 2009年第3期101-108,共8页
Objective The macula lagena in birds is located at the apical end of the cochlea and contains many tiny otoliths. The macula lagena is innervated and has neural projections to the brainstem, but its physiological func... Objective The macula lagena in birds is located at the apical end of the cochlea and contains many tiny otoliths. The macula lagena is innervated and has neural projections to the brainstem, but its physiological function is still unclear. It remains disputable that it is because otoliths in the lagena are rich in elements Fe and Zn that birds can obtain geomagnetic information for homing. To clarify this issue, we carried out a study to determine whether or not otoliths in the lagena of homing pigeons are richer in magnetic elements than those in the saccule and the utricle. Methods The contents of ferromagnetic elements (Fe, Co, Ni) and other metal elements in lagenal otoliths of adult homing pigeons were precisely analyzed with inductively coupled plasma mass spectrometry (ICP-MS) of high sensitivity, and then they were compared with those in saccular and utricular otoliths (all the contents were normalized to Ca). Results In adult homing pigeons, the contents of ferromagnetic elements (Fe, Co, Ni) in lagenal otoliths were less than 0.7% (normalized to Ca element) and were the same order in magnitude as those in saccular and utricular otoliths. The content of Fe in lagenal otoliths was not significantly different from that in utricular otoliths and was even lower than that in saccular otoliths. The content of Co in lagenal otoliths was lower than that in saccular otoliths and higher than that in utricular otoliths. The content of Ni in lagenal otoliths was not significantly different from that in saccular otoliths and was higher than that in utricular otoliths. The contents of other metal elements Na, Mg, K, Al, Mn and Pb in lagenal otoliths were not significantly different from those in utricular and saccular otoliths. The contents of metal elements Zn, Ba and Cu in lagenal otoliths were lower than those in saccular otoliths. Conclusion The contents of magnetic elements in lagenal otoliths of homing pigeons are not much higher than those in utricular and saccular otoliths, which does not support the hypothesis that birds depend on high contents of Fe and Zn in lagenal otoliths for sensation of geomagnetic information. Similarities in morphology, element ingredient and element content between lagenal otoliths and utricular otoliths suggest that the two types of otolithic organs may play similar roles in sensing gravitational and acceleration signals. 展开更多
关键词 homing pigeons lagena OTOLITH magnetic element SACCULE UTRICLE inductively coupled plasma mass spectrometry
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Determination of trace elements in high purity nickel by high resolution inductively coupled plasma mass spectrometry 被引量:11
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作者 聂西度 梁逸曾 +1 位作者 唐有根 谢华林 《Journal of Central South University》 SCIE EI CAS 2012年第9期2416-2420,共5页
The contents ofMg, Al, Si, Ti, Cr, Mn, Fe, Co, Cu, Ga, As, Se, Cd, Sb, Pb and Bi in high purity nickel were determined by high resolution inductively coupled plasma mass spectrometry (HR-ICP-MS). The sample was diss... The contents ofMg, Al, Si, Ti, Cr, Mn, Fe, Co, Cu, Ga, As, Se, Cd, Sb, Pb and Bi in high purity nickel were determined by high resolution inductively coupled plasma mass spectrometry (HR-ICP-MS). The sample was dissolved in HNO3 and HCI by microwave digestion. Most of the spectral interferences could be avoided by measuring in the high resolution mode. The matrix effects because of the presence of excess HC1 and nickel were evaluated. Correction for matrix effects was made using Sc, Rh and T1 as internal standards. The optimum conditions for the determination were tested and discussed. The detection limits range from 0.012 to 1.76 ~tg/g depending on the type of elements. The applicability of the proposed method is also validated by the analysis of high purity nickel reference material (NIST SRM 671). The relative standard deviation (RSD) is less than 3.3%. Results for determination of trace elements in high purity nickel were presented. 展开更多
关键词 high resolution inductively coupled plasma mass spectrometry high purity nickel trace element matrix effect internal standard
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Quantification of trace amounts of impurities in high purity cobalt by high resolution inductively coupled plasma mass spectrometry 被引量:10
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作者 XIE Hualin HUANG Kelong +1 位作者 NIE Xidu TANG Yougen 《Rare Metals》 SCIE EI CAS CSCD 2007年第3期286-291,共6页
A An analytical method using high resolution inductively coupled plasma mass spectrometry (HR-ICP-MS) for rapid simultaneous determination of 24 elements (Be, Mg, A1, Ti, V, Cr, Mn, Fe, Ni, Cu, Zn, Ga, Ge, As, Se, ... A An analytical method using high resolution inductively coupled plasma mass spectrometry (HR-ICP-MS) for rapid simultaneous determination of 24 elements (Be, Mg, A1, Ti, V, Cr, Mn, Fe, Ni, Cu, Zn, Ga, Ge, As, Se, Mo, Ag, Cd, Sn Sb, Ba, Pt, Au, and Pb) in high purity cobalt was described. Sample digestions were performed in closed microwave vessels using HNO3 and HCI. The matrix effects because of the presence of excess HCI and Co were evaluated. The usefulness of high mass resolution for overcoming some spectral interference was demonstrated. The optimum conditions for the determination were tested and discussed. The standard addition method was employed for quantitative analysis. The detection limits were 0.016-1.50 ].tg·g^-1, the recovery ratios were 92.2%-111.2%, and the RSD was less than 3.6%. The method was accurate, quick, and convenient. It was applied to the determination of trace impurities in high purity cobalt with satisfactory results. 展开更多
关键词 high resolution inductively coupled plasma mass spectrometry high purity cobalt trace impurities matrix effect standard addition method
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Experimental Study of the Influence of Process Pressure and Gas Composition on GaAs Etching Characteristics in Cl_2/BCl_3-Based Inductively Coupled Plasma 被引量:5
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作者 D.S.RAWAL B.K.SEHGAL +1 位作者 R.MURALIDHARAN H.K.MALIK 《Plasma Science and Technology》 SCIE EI CAS CSCD 2011年第2期223-229,共7页
A study of Cl2/BCl3-based inductively coupled plasma (ICP) was conducted using thick photoresist mask for anisotropic etching of 50μm diameter holes in a GaAs wafer at a relatively high average etching rate for etc... A study of Cl2/BCl3-based inductively coupled plasma (ICP) was conducted using thick photoresist mask for anisotropic etching of 50μm diameter holes in a GaAs wafer at a relatively high average etching rate for etching depths of more than 150μm. Plasma etch characteristics with ICP process pressure and the percentage of BCI3 were studied in greater detail at a constant ICP coil/bias power. The measured peak-to-peak voltage as a function of pressure was used to estimate the minimum energy of the ions bombarding the substrate. The process pressure was found to have a substantial influence on the energy of heavy ions. Various ion species in plasma showed minimum energy variation from 1.85 eV to 7.5 eV in the pressure range of 20 mTorr to 50 mTorr. The effect of pressure and the percentage of BCl3 on the etching rate and surface smoothness of the bottom surface of the etched hole were studied for a fixed total flow rate. The etching rate was found to decrease with the percentage of BCl3, whereas the addition of BCl3 resulted in anisotropic holes with a smooth veil free bottom surface at a pressure of 30 mTorr and 42% BC13. In addition, variation of the etching yield with pressure and etching depth were also investigated. 展开更多
关键词 GAAS inductively coupled plasma ETCHING ion energy etch yield
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Spheroidization of silica powders by radio frequency inductively coupled plasma with Ar–H2 and Ar–N2 as the sheath gases at atmospheric pressure 被引量:4
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作者 Lin Li Guo-hua Ni +3 位作者 Qi-jia Guo Qi-fu Lin Peng Zhao Jun-li Cheng 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 2017年第9期1067-1074,共8页
Amorphous spherical silica powders were prepared by inductively coupled thermal plasma treatment at a radio frequency of 36.2 MHz. The effects of the added content of hydrogen and nitrogen into argon(serving as the sh... Amorphous spherical silica powders were prepared by inductively coupled thermal plasma treatment at a radio frequency of 36.2 MHz. The effects of the added content of hydrogen and nitrogen into argon(serving as the sheath gas), as well as the carrier gas flow rate, on the spheroidization rate of silica powders, were investigated. The prepared silica powders before and after plasma treatment were examined by scanning electron microscopy, X-ray diffraction, and laser granulometric analysis. Results indicated that the average size of the silica particles increased, and the transformation of crystals into the amorphous state occurred after plasma treatment. Discharge image processing was employed to analyze the effect of the plasma temperature field on the spheroidization rate. The spheroidization rate of the silica powder increased with the increase of the hydrogen content in the sheath gas. On the other hand, the spheroidization rate of the silica power first increased and then decreased with the increase of the nitrogen content in the sheath gas. Moreover, the amorphous content increased with the increase of the spheroidization rate of the silica powder. 展开更多
关键词 silica powders SPHEROIDIZATION inductively coupled plasma mixed gas
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An atmosphere-breathing propulsion system using inductively coupled plasma source 被引量:5
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作者 Peng ZHENG Jianjun WU +2 位作者 Yu ZHANG Bixuan CHE Yuanzheng ZHAO 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2023年第5期223-238,共16页
CubeSats have attracted more research interest recently due to their lower cost and shorter production time.A promising technology for CubeSat application is atmosphere-breathing electric propulsion,which can capture ... CubeSats have attracted more research interest recently due to their lower cost and shorter production time.A promising technology for CubeSat application is atmosphere-breathing electric propulsion,which can capture the atmospheric particles as propulsion propellant to maintain longterm mission at very low Earth orbit.This paper designs an atmosphere-breathing electric propulsion system for a 3 U CubeSat,which consists of an intake device and an electric thruster based on the inductively coupled plasma.The capture performance of intake device is optimized considering both particles capture efficiency and compression ratio.The plasma source is also analyzed by experiment and simulation.Then,the thrust performance is also estimated when taking into account the intake performance.The results show that it is feasible to use atmosphere-breathing electric propulsion technology for CubeSats to compensate for aerodynamic drag at lower Earth orbit. 展开更多
关键词 Atmosphere-Breathing Electric Propulsion(ABEP) CUBESAT Inductively coupled plasma Intake device Very Low Earth Orbit(VLEO)
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Microstructure, Hardness and Corrosion Resistance of ZrN Films Prepared by Inductively Coupled Plasma Enhanced RF Magnetron Sputtering 被引量:4
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作者 文峰 孟月东 +1 位作者 任兆杏 舒兴胜 《Plasma Science and Technology》 SCIE EI CAS CSCD 2008年第2期170-175,共6页
ZrN fihns were deposited on Si(111) and M2 steel by inductively coupled plasma (ICP)-enhanced RF magnetron sputtering. The effect of ICP power on the microstructure, mechanical properties and corrosion resistance ... ZrN fihns were deposited on Si(111) and M2 steel by inductively coupled plasma (ICP)-enhanced RF magnetron sputtering. The effect of ICP power on the microstructure, mechanical properties and corrosion resistance of ZrN films was investigated. When the ICP power is below 300 W, the ZrN films show a columnar structure. With the increase of ICP power, the texture coefficient (To) of the (111) plane, the nanohardness and elastic modulus of the films increase and reach the maximum at a power of 300 W. As the ICP Power exceeds 300 W, the films exhibit a ZrN and ZrNx mixed crystal structure without columnar grain while the nanohardness and elastic modulus of the films decrease. All the ZrN coated samples show a higher corrosion resistance than that of the bare M2 steel substrate in 3.5% NaCl electrolyte. The nanohardness and elastic modulus mostly depend on the crystalline structure and Tc of ZrN(111). 展开更多
关键词 inductively coupled plasma (ICP) magnetron sputtering zirconium nitride nficrostructure nano-hardness corrosion resistance
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Determination of trace multi-elements in coal fly ash by inductively coupled plasma mass spectrometry 被引量:5
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作者 谢华林 唐有根 +1 位作者 李玉杰 李立波 《Journal of Central South University of Technology》 EI 2007年第1期68-72,共5页
The contents of Cr, Cu, Ni, As, Cd and Pb in coal fly ash were determined by a high resolution inductively coupled plasma mass spectrometry method. The sample digestions were performed in closed microwave vessels with... The contents of Cr, Cu, Ni, As, Cd and Pb in coal fly ash were determined by a high resolution inductively coupled plasma mass spectrometry method. The sample digestions were performed in closed microwave vessels with HNO3, HClO4 and FIE The optimum conditions for the determination were obtained. The applicability of the proposed method was validated by the analysis of coal fly ash reference material (NIST SRM 1633a). The results show that most of the spectral interferences can be avoided by measuring in the high resolution mode (maximum mass resolution R=9 000). The detection limit is from 0.05 to 0.21 μg/g, and the precision is fine with relative standard deviation less than 4.3%. 展开更多
关键词 coal fly ash microwave digestion inductively coupled plasma mass spectrometry DETERMINATION
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Ion Density Distribution in an Inductively Coupled Plasma Chamber 被引量:4
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作者 陈俊芳 赵文锋 +2 位作者 吴先球 樊双莉 符斯列 《Plasma Science and Technology》 SCIE EI CAS CSCD 2004年第2期2233-2236,共4页
The ion density distribution in the reaction chamber was diagnosed by a Langmuir probe. The rules of the ion density distribution were obtained under the pressures of 9 Pa, 13 Pa, 27 Pa and 53 Pa in the reaction chamb... The ion density distribution in the reaction chamber was diagnosed by a Langmuir probe. The rules of the ion density distribution were obtained under the pressures of 9 Pa, 13 Pa, 27 Pa and 53 Pa in the reaction chamber, different radio-frequency powers and different positions. The result indicates that the ion density decreases as the pressure increases, and increases as the power decreases. The ion density of axial position z =0 achieves 5.8×1010 on the center of coil under the power of 200 w and pressure of 9 Pa in the reaction chamber. 展开更多
关键词 inductively coupled plasma ion density distribution angmuir probe
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Modeling Approach and Analysis of the Structural Parameters of an Inductively Coupled Plasma Etcher Based on a Regression Orthogonal Design 被引量:3
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作者 程嘉 朱煜 季林红 《Plasma Science and Technology》 SCIE EI CAS CSCD 2012年第12期1059-1068,共10页
The geometry of an inductively coupled plasma (ICP) etcher is usually considered to be an important factor for determining both plasma and process uniformity over a large wafer. During the past few decades, these pa... The geometry of an inductively coupled plasma (ICP) etcher is usually considered to be an important factor for determining both plasma and process uniformity over a large wafer. During the past few decades, these parameters were determined by the "trial and error" method, resulting in wastes of time and funds. In this paper, a new approach of regression orthogonal design with plasma simulation experiments is proposed to investigate the sensitivity of the structural parameters on the uniformity of plasma characteristics. The tool for simulating plasma is CFD-ACE+, which is commercial multi-physical modeling software that has been proven to be accurate for plasma simulation. The simulated experimental results are analyzed to get a regression equation on three structural parameters. Through this equation, engineers can compute the uniformity of the electron number density rapidly without modeling by CFD-ACE+. An optimization performed at the end produces good results. 展开更多
关键词 fluid model inductively coupled plasma regression orthogonal structural parameters design of experiment
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