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A simulation analysis of performance of both implanted doping and in situ doping ETSOI PMOSFETs
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作者 冯帅 赵利川 +4 位作者 张青竹 杨鹏鹏 唐兆云 吴次南 闫江 《Journal of Semiconductors》 EI CAS CSCD 2015年第4期180-184,共5页
Extremely thin silicon on insulator p-channel metal oxide-semiconductor field-effect transistors (PMOSFETs) with implanted doping and in situ doping are analyzed by TCAD simulation. The critical characteris- tic par... Extremely thin silicon on insulator p-channel metal oxide-semiconductor field-effect transistors (PMOSFETs) with implanted doping and in situ doping are analyzed by TCAD simulation. The critical characteris- tic parameters acquired by TCAD simulation are compared with each other to analyze their electrical perfbrmance. The saturated driven currents of implanted doping devices with a 25 nm gate length (Lg) are about 200 ×μA/μm bigger than the in situ doping devices at the same saturated threshold voltage (Vtsat). Meanwhile the drain-induced barrier lowering (DIBL) and saturated subthreshold swings for implanted doping devices are also 30 50 mV/V and 6.3-9.1 mV/dec smaller than those of in situ doping devices at 25 nm Lg and a 9-11 nm thickness of SOl (Tsi), respectively. The shift of Vtsat with Tsi for in situ doping devices with 15 nm Lg is -31.8 mV/nm, whereas that for in situ doping devices is only -6.8 mV/nm. These outcomes indicate that the devices with implanted doping can produce a more advanced and stable electrical performance. 展开更多
关键词 implanted doping in situ doping TCAD simulation PMOSFETS
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Electrochemical properties of niobium and phosphate doped spherical Li-rich spinel LiMn2O4 synthesized by ion implantation method 被引量:2
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作者 Wei Li Gao-Wa Siqin +2 位作者 Zhi Zhu Lu Qi Wen-Huai Tian 《Chinese Chemical Letters》 SCIE CAS CSCD 2017年第7期1438-1446,共9页
Spherical Li-rich lithium manganese oxide(LMO) spinel material was synthesized by an ion implanted method assisted by polyalcohol doped with Niobium and Phosphate simultaneously.The material was characterized by sca... Spherical Li-rich lithium manganese oxide(LMO) spinel material was synthesized by an ion implanted method assisted by polyalcohol doped with Niobium and Phosphate simultaneously.The material was characterized by scanning electron microscopy,X-ray diffraction and BET specific surface area analysis.The electrochemical performances were investigated with galvanostatic techniques and cyclic voltammetry.The synthesis process was investigated with TG/DSC.The results show that the lithium ion can be immersed into the pore of manganese dioxide at a low temperature with the ion implanted method.The prepared materials have a higher discharge capacity and better crystallization than those prepared by solid phase method.The doped Nb can improve the capacity of the Li-rich LMO spinel and reinforce the crystal growth along(111) and(400) planes.The crystal grains show circular and smooth morphology,which makes the specific surface area greatly decreased.Phosphate-doped LMO spinel exhibits good high-rate capacity and structure stability.The prepared Li(1.09)Mn(1.87)Nb(0.031)O(3.99)(PO4)(0.021)delivers a discharge capacity of 119mAhg^-1 at 0.2C(1C=148mAg^-1) and 112.8 mAhg^-1 at 10 C,the discharge capacity retention reaches 98% at 1 ℃ after 50 cycles at 25 ℃ and 94% at 55 ℃. 展开更多
关键词 Spinels Ion implantation Li-ion batteries LiMn2O4 doping
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