A new three-layer hot-wall horizontal flow metal-organic chemical vapor deposition （MOCVD） reactor is proposed. When the susceptor is heated, the temperature of the wall over the susceptor also increases to the same...A new three-layer hot-wall horizontal flow metal-organic chemical vapor deposition （MOCVD） reactor is proposed. When the susceptor is heated, the temperature of the wall over the susceptor also increases to the same temperature. Furthermore, the flowing speed of the top layer is also increased by up to four times that of the bottom layer. Both methods effectively decrease the convection and make most of the metal organic （MO） gas and the reactive gas distribute at the bottom surface of the reactor. By selecting appropriate shapes, sizes, nozzles array, and heating area of the walls, the source gases are kept in a laminar flow state. Results of the numeric simulation indicate that the nitrogen is a good carrier to reduce the diffusion among the precursors before arriving at the substrate, which leads to the reduction ofpre-reaction. To get a good comparison with the conventional MOCVD horizontal reactor, the two-layer horizontal MOCVD reactor is also investigated. The results indicate that a two- layer reactor cannot control the gas flow effectively when its size and shape are the same as that of the three-layer reactor, so that the concentration distributions of the source gases in the susceptor surface are much more uniform in the new design than those in the conventional one.展开更多
Evaluation of the hydrodynamics of opaque multi-phase flows remains a challenging task,with implications for various industrial processes such as chemical processing,pharmaceutical,and mineral processing.Understanding...Evaluation of the hydrodynamics of opaque multi-phase flows remains a challenging task,with implications for various industrial processes such as chemical processing,pharmaceutical,and mineral processing.Understanding how design and operational variables affect the complex behavior of multi-phase flow systems is essential for optimizing processing conditions and improving efficiency.Radioactive particle tracking(RPT)has been a proven measurement technique to evaluate hydrodynamics in multi-phase flow systems.However,a limitation of the classical RPT technique exists in the assumptions made in the simulation of the count rate received by the detectors in correcting for varying flow-induced fluctuations in the volume fraction of the dispersed phase,often encountered in industrial multi-phase flow systems.In this paper,we introduce a fundamentally novel experimental RPT method that directly uses detected incident photon hit locations for the reconstruction of the three-dimensional radioactive tracer particle position.We argue that this approach is inherently more robust as varying attenuation does not affect the reconstruction.The RPT setup consists of three identicalγ-radiation slit collimator detectors that are placed equidistantly at 120°intervals.A subsequent calibration-experimentation procedure is established that allows reconstruction of the tracer particle position with spatial accuracy and precision in the order of 1 mm.We demonstrate the applications of this technique in evaluating hydrodynamics in multi-phase systems by characterizing the flow field of industrial-grade polypropylene reactor powder in a laboratory-scale horizontal stirred bed reactor.展开更多
基金supposed by the National Natural Science Foundation of China(Nos.60976008,61006004,61076001,10979507)the Special Funds for Major State Basic Research Project of China(No.A000091109-05)the High Technology R&D Program of China(No. 2011AA03A101)
文摘A new three-layer hot-wall horizontal flow metal-organic chemical vapor deposition （MOCVD） reactor is proposed. When the susceptor is heated, the temperature of the wall over the susceptor also increases to the same temperature. Furthermore, the flowing speed of the top layer is also increased by up to four times that of the bottom layer. Both methods effectively decrease the convection and make most of the metal organic （MO） gas and the reactive gas distribute at the bottom surface of the reactor. By selecting appropriate shapes, sizes, nozzles array, and heating area of the walls, the source gases are kept in a laminar flow state. Results of the numeric simulation indicate that the nitrogen is a good carrier to reduce the diffusion among the precursors before arriving at the substrate, which leads to the reduction ofpre-reaction. To get a good comparison with the conventional MOCVD horizontal reactor, the two-layer horizontal MOCVD reactor is also investigated. The results indicate that a two- layer reactor cannot control the gas flow effectively when its size and shape are the same as that of the three-layer reactor, so that the concentration distributions of the source gases in the susceptor surface are much more uniform in the new design than those in the conventional one.
文摘Evaluation of the hydrodynamics of opaque multi-phase flows remains a challenging task,with implications for various industrial processes such as chemical processing,pharmaceutical,and mineral processing.Understanding how design and operational variables affect the complex behavior of multi-phase flow systems is essential for optimizing processing conditions and improving efficiency.Radioactive particle tracking(RPT)has been a proven measurement technique to evaluate hydrodynamics in multi-phase flow systems.However,a limitation of the classical RPT technique exists in the assumptions made in the simulation of the count rate received by the detectors in correcting for varying flow-induced fluctuations in the volume fraction of the dispersed phase,often encountered in industrial multi-phase flow systems.In this paper,we introduce a fundamentally novel experimental RPT method that directly uses detected incident photon hit locations for the reconstruction of the three-dimensional radioactive tracer particle position.We argue that this approach is inherently more robust as varying attenuation does not affect the reconstruction.The RPT setup consists of three identicalγ-radiation slit collimator detectors that are placed equidistantly at 120°intervals.A subsequent calibration-experimentation procedure is established that allows reconstruction of the tracer particle position with spatial accuracy and precision in the order of 1 mm.We demonstrate the applications of this technique in evaluating hydrodynamics in multi-phase systems by characterizing the flow field of industrial-grade polypropylene reactor powder in a laboratory-scale horizontal stirred bed reactor.
