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High-order multilayer-coated blazed grating for a high-transmission and high-resolution tender X-ray monochromator/spectrometer
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作者 YEQI ZHUANG QIUSHI HUANG +9 位作者 ANDREY SOKOLOV STEPHANIE LEMKE ZHENGKUN LIU YUE YU IGOR V.KOZHEVNIKOV RUNZE QI ZHE ZHANG ZHONG ZHANG JENS VIEFHAUS ZHANSHAN WANG 《Photonics Research》 2025年第2期340-350,共11页
Grating optics lie in the heart of X-ray spectroscopy instruments.The low efficiency and angular dispersion of conventional single-layer-coated gratings significantly limit the transmission and energy resolution of mo... Grating optics lie in the heart of X-ray spectroscopy instruments.The low efficiency and angular dispersion of conventional single-layer-coated gratings significantly limit the transmission and energy resolution of monochromators and spectrometers,particularly in the tender X-ray region(E=1-5 keV).Multilayer-coated blazed gratings(MLBGs)operating at high diffraction orders offer the advantage of achieving both high efficiency and high dispersion simultaneously.Tender X-ray monochromators and spectrometers using different high-order MLBGs have been designed,all demonstrating one to two orders of magnitude higher transmission compared to conventional systems.By employing a 2400 l/mm MLBG at the-4th or-8th diffraction order,the theoretical energy resolution of the instrument is improved by two to three times at 2.5 keV.Two MLBGs operating at the-2nd and-4th orders have been fabricated,showcasing remarkable efficiencies of 34%-12%at 2.5 keV,surpassing that of single-layer-coated gratings by an order of magnitude.Further optimization of manufacturing accuracy can yield even higher efficiencies.The measured angular dispersion agrees well with theoretical predictions,supporting the potential for high resolution.High-order MLBG optics pave the way for a new generation of tender X-ray monochromators/spectrometers that offer both high transmission and high resolution. 展开更多
关键词 SPECTROMETERS tender x ray monochromators multilayer coated blazed gratings grating optics high order multilayer coated blazed gratings angular dispersion high diffraction orders TRANSMISSION
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