Grating optics lie in the heart of X-ray spectroscopy instruments.The low efficiency and angular dispersion of conventional single-layer-coated gratings significantly limit the transmission and energy resolution of mo...Grating optics lie in the heart of X-ray spectroscopy instruments.The low efficiency and angular dispersion of conventional single-layer-coated gratings significantly limit the transmission and energy resolution of monochromators and spectrometers,particularly in the tender X-ray region(E=1-5 keV).Multilayer-coated blazed gratings(MLBGs)operating at high diffraction orders offer the advantage of achieving both high efficiency and high dispersion simultaneously.Tender X-ray monochromators and spectrometers using different high-order MLBGs have been designed,all demonstrating one to two orders of magnitude higher transmission compared to conventional systems.By employing a 2400 l/mm MLBG at the-4th or-8th diffraction order,the theoretical energy resolution of the instrument is improved by two to three times at 2.5 keV.Two MLBGs operating at the-2nd and-4th orders have been fabricated,showcasing remarkable efficiencies of 34%-12%at 2.5 keV,surpassing that of single-layer-coated gratings by an order of magnitude.Further optimization of manufacturing accuracy can yield even higher efficiencies.The measured angular dispersion agrees well with theoretical predictions,supporting the potential for high resolution.High-order MLBG optics pave the way for a new generation of tender X-ray monochromators/spectrometers that offer both high transmission and high resolution.展开更多
基金National Key Research and Development Program of China(2022YFA1603503)National Natural Science Foundation of China(12075170)。
文摘Grating optics lie in the heart of X-ray spectroscopy instruments.The low efficiency and angular dispersion of conventional single-layer-coated gratings significantly limit the transmission and energy resolution of monochromators and spectrometers,particularly in the tender X-ray region(E=1-5 keV).Multilayer-coated blazed gratings(MLBGs)operating at high diffraction orders offer the advantage of achieving both high efficiency and high dispersion simultaneously.Tender X-ray monochromators and spectrometers using different high-order MLBGs have been designed,all demonstrating one to two orders of magnitude higher transmission compared to conventional systems.By employing a 2400 l/mm MLBG at the-4th or-8th diffraction order,the theoretical energy resolution of the instrument is improved by two to three times at 2.5 keV.Two MLBGs operating at the-2nd and-4th orders have been fabricated,showcasing remarkable efficiencies of 34%-12%at 2.5 keV,surpassing that of single-layer-coated gratings by an order of magnitude.Further optimization of manufacturing accuracy can yield even higher efficiencies.The measured angular dispersion agrees well with theoretical predictions,supporting the potential for high resolution.High-order MLBG optics pave the way for a new generation of tender X-ray monochromators/spectrometers that offer both high transmission and high resolution.