The two-dimensional grating serves as a critical component in plane grating interferometers for achieving high-precision multidimensional displacement measurements.The calibration of grating groove density and orthogo...The two-dimensional grating serves as a critical component in plane grating interferometers for achieving high-precision multidimensional displacement measurements.The calibration of grating groove density and orthogonality error of grating grooves not only improves the positioning accuracy of grating interferometers but also provides essential feedback for optimizing two-dimensional grating fabrication.This study proposes a method for simultaneous calibration of these parameters using orthogonal heterodyne laser interferometry.A two-dimensional grating interferometer is built with the grating to be measured,and a biaxial laser interferometer provides a displacement reference for it.The phase mapping relationship between grating interference and laser interference is established.The interference phase information obtained by any two displacements can simultaneously solve the above three parameters and obtain the grating installation error.The feasibility of the proposed method is verified by using a 1200 gr/mm two-dimensional grating.The standard deviation of the grating groove density in the X and Y directions is 0.012 gr/mm and 0.014 gr/mm,respectively.The standard deviation of the orthogonality error of grating grooves is 0.004°,and the standard deviation of the installation error is 0.002°.Compared with the atomic force microscope method,the consistency of the grating groove density in the X and Y directions is better than 0.03 gr/mm and 0.06 gr/mm,and the orthogonality error of grating grooves is better than 0.008°.The experimental results show that the proposed method can be simply and efficiently applied to the calibration of the grating line parameters of the two-dimensional grating.展开更多
文摘The two-dimensional grating serves as a critical component in plane grating interferometers for achieving high-precision multidimensional displacement measurements.The calibration of grating groove density and orthogonality error of grating grooves not only improves the positioning accuracy of grating interferometers but also provides essential feedback for optimizing two-dimensional grating fabrication.This study proposes a method for simultaneous calibration of these parameters using orthogonal heterodyne laser interferometry.A two-dimensional grating interferometer is built with the grating to be measured,and a biaxial laser interferometer provides a displacement reference for it.The phase mapping relationship between grating interference and laser interference is established.The interference phase information obtained by any two displacements can simultaneously solve the above three parameters and obtain the grating installation error.The feasibility of the proposed method is verified by using a 1200 gr/mm two-dimensional grating.The standard deviation of the grating groove density in the X and Y directions is 0.012 gr/mm and 0.014 gr/mm,respectively.The standard deviation of the orthogonality error of grating grooves is 0.004°,and the standard deviation of the installation error is 0.002°.Compared with the atomic force microscope method,the consistency of the grating groove density in the X and Y directions is better than 0.03 gr/mm and 0.06 gr/mm,and the orthogonality error of grating grooves is better than 0.008°.The experimental results show that the proposed method can be simply and efficiently applied to the calibration of the grating line parameters of the two-dimensional grating.
