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Inverse design of 3D integrated high-efficiency grating couplers using deep learning
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作者 Yu Wang Yue Wang +4 位作者 Guohui Yang Kuang Zhang Xing Yang Chunhui Wang Yu Zhang 《Chinese Physics B》 2026年第2期363-373,共11页
In recent years,the use of deep learning to replace traditional numerical methods for electromagnetic propagation has shown tremendous potential in the rapid design of photonic devices.However,most research on deep le... In recent years,the use of deep learning to replace traditional numerical methods for electromagnetic propagation has shown tremendous potential in the rapid design of photonic devices.However,most research on deep learning has focused on single-layer grating couplers,and the accuracy of multi-layer grating couplers has not yet reached a high level.This paper proposes and demonstrates a novel deep learning network-assisted strategy for inverse design.The network model is based on a multi-layer perceptron(MLP)and incorporates convolutional neural networks(CNNs)and transformers.Through the stacking of multiple layers,it achieves a high-precision design for both multi-layer and single-layer raster couplers with various functionalities.The deep learning network exhibits exceptionally high predictive accuracy,with an average absolute error across the full wavelength range of 1300–1700 nm being only 0.17%,and an even lower predictive absolute error below 0.09%at the specific wavelength of 1550 nm.By combining the deep learning network with the genetic algorithm,we can efficiently design grating couplers that perform different functions.Simulation results indicate that the designed single-wavelength grating couplers achieve coupling efficiencies exceeding 80%at central wavelengths of 1550 nm and 1310 nm.The performance of designed dual-wavelength and broadband grating couplers also reaches high industry standards.Furthermore,the network structure and inverse design method are highly scalable and can be applied not only to multi-layer grating couplers but also directly to the prediction and design of single-layer grating couplers,providing a new perspective for the innovative development of photonic devices. 展开更多
关键词 deep learning inverse design grating couplers photonic devices
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High efficiency and broad bandwidth grating coupler between nanophotonic waveguide and fibre 被引量:2
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作者 朱宇 徐学俊 +5 位作者 李智勇 周亮 韩伟华 樊中朝 俞育德 余金中 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第1期393-397,共5页
A high efficiency and broad bandwidth grating coupler between a silicon-on-insulator (SOI) nanophotonic waveguide and fibre is designed and fabricated. Coupling efficiencies of 46% and 25% at a wavelength of 1.55um ... A high efficiency and broad bandwidth grating coupler between a silicon-on-insulator (SOI) nanophotonic waveguide and fibre is designed and fabricated. Coupling efficiencies of 46% and 25% at a wavelength of 1.55um are achieved by simulation and experiment, respectively. An optical 3 dB bandwidth of 45 mn from 1530 nm to 1575 nm is also obtained in experin, ent. Numerical calculation shows that a tolerance to fabrication error of 10 nm in etch depth is achievable. The measurement results indicate that the alignment error of 112 um results in less than 1 dB additional coupling loss. 展开更多
关键词 grating coupler SILICON-ON-INSULATOR coupling efficiency BANDWIDTH
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CMOS compatible highly efficient grating couplers with a stair-step blaze profile 被引量:2
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作者 周亮 李智勇 +5 位作者 胡应涛 熊康 樊中朝 韩伟华 俞育德 余金中 《Chinese Physics B》 SCIE EI CAS CSCD 2011年第7期238-242,共5页
A novel grating coupler with a stair-step blaze profile is proposed. The coupler is a CMOS process compatible device and can be used for light coupling in optical communication. The blaze profile can be optimized to o... A novel grating coupler with a stair-step blaze profile is proposed. The coupler is a CMOS process compatible device and can be used for light coupling in optical communication. The blaze profile can be optimized to obtain a high efficiency of 66.7% for the out-of-plane coupling at the centre wavelength of 1595 nm with a 1 dB bandwidth of 41 nm. Five key parameters of the stair-step blaze grating and their effects on the coupling are discussed for the application in L band telecommunication. 展开更多
关键词 grating coupler blaze profile integrated optics SILICON-ON-INSULATOR
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Analysis on Mode Field Distribution of Waveguide Grating Coupler by the Scalar FDTD 被引量:2
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作者 HUANGChong-qing LIUJing +3 位作者 LUOWen-hua ANWei-ke YUANXiu-hua HUANGDe-xiu 《Semiconductor Photonics and Technology》 CAS 2003年第3期166-169,177,共5页
The scalar two-dimensional finite difference time domain (FDTD) method is applied to simulate the mode field distribution of TE 0 of the waveguide grating coupler. Computer simulation shows that the same stable mode f... The scalar two-dimensional finite difference time domain (FDTD) method is applied to simulate the mode field distribution of TE 0 of the waveguide grating coupler. Computer simulation shows that the same stable mode field distribution pattern is obtained through the different kinds of driving sources. It is found that the optical field mode is determined by waveguide structure and optical wavelength other than the driving source.According to the mode field distribution, the optimum coupling efficiency can be predicted. Compared with another numerical methods,the CPU-time and memory elements of computer used by FDTD are much less. 展开更多
关键词 Waveguide grating couplers Light fields Coupling efficiency FDTD
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High-efficiency focusing grating coupler with optimized ultra-short taper 被引量:1
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作者 杨彪 李智勇 +1 位作者 俞育德 余金中 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第11期344-347,共4页
A novel high-efficiency focusing non-uniform grating coupler is proposed to couple light into or off silicon photonic chips for large-scale silicon photonic integration. This kind of grating coupler decreases the tran... A novel high-efficiency focusing non-uniform grating coupler is proposed to couple light into or off silicon photonic chips for large-scale silicon photonic integration. This kind of grating coupler decreases the transition length of the linking taper between the grating and the single-mode waveguide by at least 80%. The radian of the grating lines and the size of the taper are optimized to improve the coupling efficiency. An experimental coupling efficiency of ~ 68% at 1556.24 nm is obtained after optimization and the whole size of the grating is 12 μm × 30 μm, with a very short taper transition of ~15 μm long. 展开更多
关键词 grating coupler silicon photonics photonic integrated circuits SILICON-ON-INSULATOR
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High efficiency grating couplers based on shared process with CMOS MOSFETs
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作者 仇超 盛振 +5 位作者 李乐 彭树根 武爱民 王曦 邹世昌 甘甫烷 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第2期298-301,共4页
Grating couplers are widely investigated as coupling interfaces between silicon-on-insulator waveguides and optical fibers.In this work,a high-efficiency and complementary metal-oxide-semiconductor(CMOS) process com... Grating couplers are widely investigated as coupling interfaces between silicon-on-insulator waveguides and optical fibers.In this work,a high-efficiency and complementary metal-oxide-semiconductor(CMOS) process compatible grating coupler is proposed.The poly-Si layer used as a gate in the CMOS metal-oxide-semiconductor field effect transistor(MOSFET) is combined with a normal fully etched grating coupler,which greatly enhances its coupling efficiency.With optimal structure parameters,a coupling efficiency can reach as high as ~ 70% at a wavelength of 1550 nm as indicated by simulation.From the angle of fabrication,all masks and etching steps are shared between MOSFETs and grating couplers,thereby making the high performance grating couplers easily integrated with CMOS circuits.Fabrication errors such as alignment shift are also simulated,showing that the device is quite tolerant in fabrication. 展开更多
关键词 grating coupler optical waveguide SILICON-ON-INSULATOR poly-silicon
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Apodized grating coupler using fully-etched nanostructures
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作者 武华 李冲 +1 位作者 李智勇 郭霞 《Chinese Physics B》 SCIE EI CAS CSCD 2016年第8期211-215,共5页
A two-dimensional apodized grating coupler for interfacing between single-mode fiber and photonic circuit is demonstrated in order to bridge the mode gap between the grating coupler and optical fiber. The grating groo... A two-dimensional apodized grating coupler for interfacing between single-mode fiber and photonic circuit is demonstrated in order to bridge the mode gap between the grating coupler and optical fiber. The grating grooves of the grating couplers are realized by columns of fully etched nanostructures, which are utilized to digitally tailor the effective refractive index of each groove in order to obtain the Gaussian-like output diffractive mode and then enhance the coupling efficiency.Compared with that of the uniform grating coupler, the coupling efficiency of the apodized grating coupler is increased by 4.3% and 5.7%, respectively, for the nanoholes and nanorectangles as refractive index tunes layer. 展开更多
关键词 grating couplers equivalent refractive index mode matching coupling efficiency
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A novel highly efficient grating coupler with large filling factor used for optoelectronic integration
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作者 周亮 李智勇 +5 位作者 朱宇 李运涛 樊中朝 韩伟华 俞育德 余金中 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第12期323-327,共5页
A novel highly efficient grating coupler with large filling factor and deep etching is proposed in silicon-on-insulator for near vertical coupling between the rib waveguide and optical fibre. The deep slots acting as ... A novel highly efficient grating coupler with large filling factor and deep etching is proposed in silicon-on-insulator for near vertical coupling between the rib waveguide and optical fibre. The deep slots acting as high efficient scattering centres are analysed and optimized. As high as 60% coupling efficiency at telecom wavelength of 1550-nm and 3-dB bandwidth of 61 nm are predicted by simulation. A peak coupling efficiency of 42.1% at wavelength 1546-nm and 3-dB bandwidth of 37.6 nm are obtained experimentally. 展开更多
关键词 silicon photonics SILICON-ON-INSULATOR grating coupler
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Polarization-independent silicon photonic grating coupler for large spatial light spots
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作者 Lijun Yang Xiaoyan Hu +1 位作者 Bin Li Jing Cao 《Chinese Physics B》 SCIE EI CAS CSCD 2021年第2期308-312,共5页
We design and demonstrate a one-dimensional grating coupler with a low polarization-dependent loss(PDL)for large spatial light spots.Based on current fabrication conditions,we first utilize genetic algorithms to find ... We design and demonstrate a one-dimensional grating coupler with a low polarization-dependent loss(PDL)for large spatial light spots.Based on current fabrication conditions,we first utilize genetic algorithms to find the optimal grating structure including the distributions of duty and periods,making the effective refractive index of transverse electric mode the same as that of transverse magnetic mode.The designed grating coupler is fabricated on the common silicon-on-insulator platform and the PDL is measured to be within 0.41 d B covering the C-band. 展开更多
关键词 silicon photonics grating coupler polarization-dependent loss
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Mid-infrared suspended silicon nanomembrane microring resonators with grating couplers
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作者 Qiyue Lang Changguang Zou +5 位作者 Zunyue Zhang Jiaqi Wang Kun Liu Junfeng Jiang Tiegen Liu Zhenzhou Cheng 《Chinese Optics Letters》 2025年第10期160-163,共4页
Mid-infrared(mid-IR)silicon photonic integrated circuits have drawn considerable interest to date.However,previous devices are typically designed on silicon waveguide configurations with hundreds of nanometers in thic... Mid-infrared(mid-IR)silicon photonic integrated circuits have drawn considerable interest to date.However,previous devices are typically designed on silicon waveguide configurations with hundreds of nanometers in thickness,hindering their application in sensing.Here,we demonstrated a suspended nanomembrane silicon(SNS)microring resonator(MRR)at 3.27μm wavelengths with a subwavelength grating coupler.Our experimental results show that the SNS MRR showcases a quality factor of~3500 with a giant confinement factor of 0.89 and reduced thermal sensitivity of 0.07 nm/℃.To our knowledge,the study opens a new avenue to developing mid-IR silicon devices for sensing applications. 展开更多
关键词 microring resonator grating coupler SUBWAVELENGTH mid-infrared region
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Polarization diversity two-dimensional grating coupler on x-cut lithium niobate on insulator 被引量:3
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作者 Renyou Ge Hao Li +6 位作者 Ya Han Lifeng Chen Jian Xu Meiyan Wu Yongqing Li Yannong Luo Xinlun Cai 《Chinese Optics Letters》 SCIE EI CAS CSCD 2021年第6期23-27,共5页
We propose and demonstrate a polarization diversity two-dimensional grating coupler based on the lithium niobate on insulator platform, for the first time, to the best of our knowledge. The optimization design, perfor... We propose and demonstrate a polarization diversity two-dimensional grating coupler based on the lithium niobate on insulator platform, for the first time, to the best of our knowledge. The optimization design, performance characteristics,and fabrication tolerance of the two-dimensional grating coupler are thoroughly analyzed utilizing the three-dimensional finite-difference time-domain method. Experimentally,-7.2 d B of coupling efficiency is achieved with 1 d B bandwidth of64 nm. The polarization-dependent loss is about 0.4 d B around 1550 nm. Our work provides new polarization multiplexing approaches for the lithium niobate on insulator platform, paving the way for critical applications such as high-speed polarization multiplexed electro-optical modulators. 展开更多
关键词 lithium niobate on insulator polarization diversity two-dimensional grating coupler
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A high-efficiency grating coupler between single-mode fiber and silicon-on-insulator waveguide 被引量:1
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作者 Rongrui Liu Yubing Wang +3 位作者 Dongdong Yin Han Ye Xiaohong Yang Qin Han 《Journal of Semiconductors》 EI CAS CSCD 2017年第5期78-81,共4页
We present the design of a diffractive grating structure and get the optimal parameters which can achieve more than 75%coupling efficiency(CE) between single-mode fiber and silicon-on-insulator(SOI) waveguide thro... We present the design of a diffractive grating structure and get the optimal parameters which can achieve more than 75%coupling efficiency(CE) between single-mode fiber and silicon-on-insulator(SOI) waveguide through 2D finite-different time-domain(FDTD) simulation.The proposed architecture has a uniform structure with no bottom reflection element or silicon overlay.The structure,including grating couplers,adiabatic tapers and interconnection waveguides can be fabricated on the SOI waveguide with only a single electron-beam lithography(ICP) step,which is CMOS-compatible.A relatively high coupling efficiency of 47.2%was obtained at a wavelength of 1562 nm. 展开更多
关键词 grating coupler coupling efficiency silicon-on-insulator waveguide single-mode fiber integrated optics
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Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line 被引量:1
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作者 Galina Georgieva Christian Mai +2 位作者 Pascal M.Seiler Anna Peczek Lars Zimmermann 《Frontiers of Optoelectronics》 EI CSCD 2022年第1期143-155,共13页
In this paper,we report on polarization combining two-dimensional grating couplers(2D GCs)on amorphous Si:H,fabricated in the backend of line of a photonic BiCMOS platform.The 2D GCs can be used as an interface of a h... In this paper,we report on polarization combining two-dimensional grating couplers(2D GCs)on amorphous Si:H,fabricated in the backend of line of a photonic BiCMOS platform.The 2D GCs can be used as an interface of a hybrid silicon photonic coherent transmitter,which can be implemented on bulk Si wafers.The fabricated 2D GCs operate in the telecom C-band and show an experimental coupling efficiency of−5 dB with a wafer variation of±1.2 dB.Possibilities for efficiency enhancement and improved performance stability in future design generations are outlined and extension toward O-band devices is also investigated. 展开更多
关键词 Hybrid integration Photonic BiCMOS Amorphous silicon Two-dimensional grating coupler(2D GC) Dual-polarization coherent communication Silicon photonics
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Fabrication-constrained inverse design and demonstration of high-performance grating couplers 被引量:1
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作者 Xin Jin Jinbin Xu +7 位作者 Yaqian Li Cuiwei Xue Rujun Liao Liucheng Fu Min Liu Yunliang Shen Xueling Quan Xiulan Cheng 《Chinese Optics Letters》 CSCD 2024年第11期123-130,共8页
A high-performance grating coupler(GC) operating at a wavelength of 1550 nm is proposed by utilizing the adjoint-based inverse design algorithm on a 220 nm silicon-on-insulator(SOI) substrate. The grating scheme offer... A high-performance grating coupler(GC) operating at a wavelength of 1550 nm is proposed by utilizing the adjoint-based inverse design algorithm on a 220 nm silicon-on-insulator(SOI) substrate. The grating scheme offers several advantages,including simple structure, large minimum feature size(MFS), manufacturing friendliness, support for large-scale production and multi-project wafer (MPW) runs, etc., while simultaneously maintaining exceptional coupling performance and fabrication tolerance. The design process incorporates various fabrication constraints to satisfy the specifications of different foundry processes. The optimized GC demonstrates excellent coupling performance and 3 d B bandwidth within the MFS range of 60 to 180 nm. The simulated coupling efficiency(CE) of the GC with 130 nm MFS is-1.69 dB, whereas the experimentally measured CE of the fabricated GC using electron beam lithography(EBL) is-2.83 dB. Notably, the experimental CE of the GC with 180 nm MFS fabricated using 248 nm deep ultraviolet(DUV) lithography is-2.77 dB, representing the highest experimental CE ever reported for a single-layer etching C-Band GC supported by MPW runs fabricated on 220 nm SOI without utilizing any back reflector, multi-etch layer, or overlay. The manufacturing outcomes of the same GC structure employing different manufacturing processes are discussed and analyzed, providing valuable insights for the fabrication of silicon photonics devices. 展开更多
关键词 grating coupler inverse design minimum feature size fabrication process.
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High-Q micro-ring resonators and grating couplers for silicon-on-insulator integrated photonic circuits 被引量:1
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作者 仝晓刚 刘俊 薛晨阳 《Journal of Semiconductors》 EI CAS CSCD 2013年第8期106-109,共4页
An ultra-small integrated photonic circuit has been proposed,which incorporates a high-quality-factor passive micro-ring resonator(MR) linked to a vertical grating coupler on a standard silicon-on-insulator(SOI) s... An ultra-small integrated photonic circuit has been proposed,which incorporates a high-quality-factor passive micro-ring resonator(MR) linked to a vertical grating coupler on a standard silicon-on-insulator(SOI) substrate.The experimental results demonstrate that the MR propagation loss is 0.532 dB/cm with a 10μm radius ring resonator,the intrinsic quality factor is as high as 202.000,the waveguide grating wavelength response curve is a 1 dB bandwidth of 40 nm at 1540 nm telecommunication wavelengths,and the measured fiber-to-fiber coupling loss is 10 dB.Furthermore,the resonator wavelength temperature dependence of the 450 nm wide micro-ring resonator is 54.1 pm/℃.Such vertical grating coupler and low loss MR-integrated components greatly promote a key element in biosensors and high-speed interconnect communication applications. 展开更多
关键词 high-quality-factor passive micro-ring resonators waveguide grating couplers integrated photonic circuit
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Laser Trimming for Adjustment of Grating Offset in Phase-Shifted Fiber Grating Coupler for All-Optical Switching Application
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作者 Hirohisa Yokota Yutaka Sasaki 《光学学报》 EI CAS CSCD 北大核心 2003年第S1期231-232,共2页
We theoretically investigated laser trimming to adjust grating offset in phase-shifted fiber grating coupler (FGC) for all-optical switching application. It was clarified that the trimming made the extinction ratio hi... We theoretically investigated laser trimming to adjust grating offset in phase-shifted fiber grating coupler (FGC) for all-optical switching application. It was clarified that the trimming made the extinction ratio higher in all-optical FGC switch. 展开更多
关键词 for AS ET in Laser Trimming for Adjustment of grating Offset in Phase-Shifted Fiber grating coupler for All-Optical Switching Application of
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Advances in waveguide to waveguide couplers for 3D integrated photonic packaging
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作者 Drew Weninger Samuel Serna +2 位作者 Luigi Ranno Lionel Kimerling Anuradha Agarwal 《Light: Science & Applications》 2026年第1期70-118,共49页
In this paper,we provide an overview and comparison of devices used for optical waveguide-to-waveguide coupling including inter-chip edge couplers,grating couplers,free form couplers,evanescent couplers,cantilever cou... In this paper,we provide an overview and comparison of devices used for optical waveguide-to-waveguide coupling including inter-chip edge couplers,grating couplers,free form couplers,evanescent couplers,cantilever couplers,and optical wirebonds.In addition,technology for efficient transmission of light through chips is discussed including guided mode and free form photonic vias for substrates including silicon,glass,and organics.The results are discussed in the context of potential applications including co-packaged optics switch packages,replaceable biochemical sensors,optically connected memory,optical computing,integrated quantum photonics,and integrated LiDAR systems to show possible improvements in energy efficiency,performance,and cost. 展开更多
关键词 guided mode free form photonic vias free form couplers couplersfree form couplersevanescent couplerscantilever couplersand evanescent couplers grating couplers inter chip edge couplers optical wirebondsin
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A tension insensitive PbS fiber temperature sensor based on Sagnac interferometer
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作者 付兴虎 张江鹏 +4 位作者 杨凯丽 董艳华 文建湘 付广伟 毕卫红 《Optoelectronics Letters》 EI 2017年第2期135-137,共3页
In this paper, a tension insensitive Pb S fiber temperature sensor based on Sagnac interferometer is proposed and demonstrated. The sensing mechanism of tension and temperature is analyzed. The relationships between t... In this paper, a tension insensitive Pb S fiber temperature sensor based on Sagnac interferometer is proposed and demonstrated. The sensing mechanism of tension and temperature is analyzed. The relationships between the interference spectrum, temperature and tension are analyzed, respectively. The experimental temperature range is 36—70 °C. The experimental results show that the interference spectrum is red shifted, and its sensitivity is 53.89 pm/°C. In tension experiment, the tension range is 0—1 400 με. The experimental results show that there is no wavelength shift in the interference spectrum. The sensor is immune to tension cross-sensitivity compared with other sensors. It can be used for temperature testing in aerospace, chemistry and pharmacy. 展开更多
关键词 interferometer insensitive pharmacy aerospace shifted temper schematic Bragg grating coupler
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An efficient continuous-wave YVO_4/Nd:YVO_4/YVO_4 self-Raman laser pumped by a wavelength-locked 878.9 nm laser diode 被引量:2
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作者 樊莉 赵伟倩 +4 位作者 乔鑫 夏长权 汪丽春 范会博 沈明亚 《Chinese Physics B》 SCIE EI CAS CSCD 2016年第11期275-278,共4页
We report an efficient continuous-wave self-Raman laser at 1176 nm based on a 20-mm-long composite YVO4/Nd:YVO4/YVO4 crystal and pumped by a wavelength-locked 878.9 nm diode laser.A maximum output power of 5.3 W is a... We report an efficient continuous-wave self-Raman laser at 1176 nm based on a 20-mm-long composite YVO4/Nd:YVO4/YVO4 crystal and pumped by a wavelength-locked 878.9 nm diode laser.A maximum output power of 5.3 W is achieved at a pump power of 26 W,corresponding to an optical conversion efficiency of 20%and a slope efficiency of 21%.The Raman threshold for the diode pump power was only 0.92 W.The results reveal that in-band pumping by a wavelength-locked diode laser significantly enhances output power and efficiency of self-Raman lasers by virtue of improved pump absorption and relieved thermal loading. 展开更多
关键词 pumped locked pumping resonator incident mirror virtue coupler powers grating
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Switchable dual-wavelength erbium-doped fiber laser with tunable wavelength 被引量:1
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作者 童峥嵘 刘梦颖 +2 位作者 曹晔 张卫华 郝霞 《Optoelectronics Letters》 EI 2015年第5期325-328,共4页
A switchable dual-wavelength erbium-doped fiber laser(EDFL) with tunable wavelength is demonstrated. The ring cavity consists of two branches with a fiber Bragg grating(FBG) and a spherical-shape structure as fiber fi... A switchable dual-wavelength erbium-doped fiber laser(EDFL) with tunable wavelength is demonstrated. The ring cavity consists of two branches with a fiber Bragg grating(FBG) and a spherical-shape structure as fiber filters, respectively. By adjusting the variable optical attenuator(VOA), the laser can be switched between the single-wavelength mode and the dual-wavelength mode. The spherical-shape structure has good sensitivity to the temperature. When the temperature changes from 30 °C to 190 °C, the central wavelength of the EDFL generated by the branch of spherical-shape structure varies from 1 551.6 nm to 1 561.8 nm, which means that the wavelength interval is tunable. 展开更多
关键词 tunable spherical branches Bragg grating switched lasing adjusting cascaded coupler
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