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RF CMOS、BiCMOS的新进展(五)——移相器、RF开关、集成无源元件和相控阵
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作者 李永 赵正平 《半导体技术》 北大核心 2026年第1期1-12,共12页
当今信息社会已进入通用人工智能时代,大数据呈指数规律增长,不但要求数据处理速度高速增长,同时也要求数据的传输带宽更宽,推动数据载波的频率向射频(RF)的高端发展。Si基RF CMOS和RF BiCMOS集成电路(IC)具有体积小、功耗低、易于集成... 当今信息社会已进入通用人工智能时代,大数据呈指数规律增长,不但要求数据处理速度高速增长,同时也要求数据的传输带宽更宽,推动数据载波的频率向射频(RF)的高端发展。Si基RF CMOS和RF BiCMOS集成电路(IC)具有体积小、功耗低、易于集成等优点,相应呈现高速发展的态势。综述了Si基RF CMOS和RF BiCMOS的最新进展和发展态势,主要包括低噪声放大器与接收前端,射频-直流整流器与射频能量收集器,功率放大器、RF信号放大器与发射机,振荡器、混频器与频率综合器,移相器、开关、集成无源元件和相控阵,RF专用集成电路(ASIC)和微系统集成等七个RF IC发展的主要方面,凝练了各类RF IC的发展趋势和关键技术创新点。 展开更多
关键词 射频(rf)CMOS rf BiCMOS 放大器 收/发机 rf能量收集器 压控振荡器 频率综合器 移相器 相控阵 微系统集成`
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Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure 被引量:1
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作者 Tagra Samir 刘悦 +1 位作者 赵璐璐 周艳文 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第11期329-337,共9页
A one-dimensional(1D) fluid model on capacitively coupled radio frequency(RF) argon glow discharge between parallel-plates electrodes at low pressure is established to test the effect of the driving frequency on e... A one-dimensional(1D) fluid model on capacitively coupled radio frequency(RF) argon glow discharge between parallel-plates electrodes at low pressure is established to test the effect of the driving frequency on electron heating. The model is solved numerically by a finite difference method. The numerical results show that the discharge process may be divided into three stages: the growing rapidly stage, the growing slowly stage, and the steady stage. In the steady stage,the maximal electron density increases as the driving frequency increases. The results show that the discharge region has three parts: the powered electrode sheath region, the bulk plasma region and the grounded electrode sheath region. In the growing rapidly stage(at 18 μs), the results of the cycle-averaged electric field, electron temperature, electron density, and electric potentials for the driving frequencies of 3.39, 6.78, 13.56, and 27.12 MHz are compared, respectively. Furthermore,the results of cycle-averaged electron pressure cooling, electron ohmic heating, electron heating, and electron energy loss for the driving frequencies of 3.39, 6.78, 13.56, and 27.12 MHz are discussed, respectively. It is also found that the effect of the cycle-averaged electron pressure cooling on the electrons is to "cool" the electrons; the effect of the electron ohmic heating on the electrons is always to "heat" the electrons; the effect of the cycle-averaged electron ohmic heating on the electrons is stronger than the effect of the cycle-averaged electron pressure cooling on the electrons in the discharge region except in the regions near the electrodes. Therefore, the effect of the cycle-averaged electron heating on the electrons is to "heat" the electrons in the discharge region except in the regions near the electrodes. However, in the regions near the electrodes, the effect of the cycle-averaged electron heating on the electron is to "cool" the electrons. Finally, the space distributions of the electron pressure cooling the electron ohmic heating and the electron heating at 1/4 T, 2/4 T, 3/4 T, and 4/4 T in one RF-cycle are presented and compared. 展开更多
关键词 capacitively coupled plasmas electron heating radio frequencyrf glow discharges driving frequency
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Surface modification of silicone rubber by CF4 radio frequency capacitively coupled plasma for improvement of flashover 被引量:1
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作者 Chenxu WANG Bo ZHANG +5 位作者 Sile CHEN Yuhao SUN Xiong YANG Yanan PENG Xingyu CHEN Guanjun ZHANG 《Plasma Science and Technology》 SCIE EI CAS CSCD 2022年第2期107-116,共10页
The flashover performance of insulating materials plays an important role in the development of high-voltage insulation systems.In this paper,silicone rubber(SIR)is modified by CF4 radio frequency capacitively coupled... The flashover performance of insulating materials plays an important role in the development of high-voltage insulation systems.In this paper,silicone rubber(SIR)is modified by CF4 radio frequency capacitively coupled plasma(CCP)for the improvement of surface insulation performance.The discharge mode and active particles of CCP are diagnosed by the digital single-lens reflex and the spectrometer.Scanning electron microscopy and x-ray photoelectron spectroscopy are used for the surface physicochemical properties of samples,while the surface charge dissipation,charge accumulation measurement,and flashover test are applied for the surface electrical characteristics.Experimental results show that the fluorocarbon groups can be grafted and the surface roughness increases after plasma treatment.Besides,the surface charge dissipation is decelerated and the positive charge accumulation is inhibited obviously for the treated samples.Furthermore,the surface flashover voltage can be increased by 26.67%after 10 min of treatment.It is considered that strong electron affinity of C–F and increased surface roughness can contribute to deepening surface traps,which not only inhibits the development of secondary electron emission avalanche but also alleviates the surface charge accumulation and finally improves the surface flashover voltage of SIR. 展开更多
关键词 silicon rubber CF4 radio frequency capacitively coupled plasma surface modification FLASHOVER
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Improvement of surface hydrophobicity on silicone rubber modified by CF_4 radio frequency capacitively coupled plasma
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作者 高松华 周克省 闻立时 《Journal of Central South University》 SCIE EI CAS 2009年第3期365-370,共6页
In order to improve the surface hydrophobicity, silicone rubber (SIR) samples were exposed to CF4 radio frequency (RF) capacitively coupled plasma (CCP). Attenuated total reflection Fourier transform infrared (... In order to improve the surface hydrophobicity, silicone rubber (SIR) samples were exposed to CF4 radio frequency (RF) capacitively coupled plasma (CCP). Attenuated total reflection Fourier transform infrared (ATR-FTIR) spectrum and X-ray photoelectron spectroscopy (XPS) were used to observe the variation of the functional groups of the modified SIR. Static contact angle (SCA) was employed to estimate the change of hydrophobicity of the modified SIR. The surface energy of SIR is reduced largely from 27.37 mJ/m^2 of original SIR sample to 2.94 mJ/m^2 of SIR sample treated by CF4 CCP modification at RF power of 200 W for a treatment time of 5 rnin. According to the XPS, ATR-FTIR and surface energy analysis, it is suggested that the improvement of hydrophobicity on the modified SIR surface is mainly ascribed to the decrease of surface energy, which is caused by the cooperation of the fluosilicic structure of Si--F or Si--F2 and the fluoric groups of C--CFn induced by the methyl replacement reaction and residual methyl groups of SIR surface. 展开更多
关键词 surface hydrophobicity silicone rubber radio frequency capacitively coupled plasma static contact angle
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Impedance of RF shield on ceramic chamber in the rapid cycling synchrotron of China Spallation Neutron Source
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作者 Liang‑Sheng Huang Bin Wu +6 位作者 Ming‑Yang Huang Ren‑Hong Liu Biao Tan Peng‑Cheng Wang Yong‑Chuan Xiao Li‑Rui Zeng Xiao Li 《Nuclear Science and Techniques》 2026年第1期130-140,共11页
In a rapid cycling synchrotron(RCS),the magnetic field is synchronized with the beam energy,creating a highly dynamic magnetic environment.A ceramic chamber with a shielding layer(RF shield),composed of a series of co... In a rapid cycling synchrotron(RCS),the magnetic field is synchronized with the beam energy,creating a highly dynamic magnetic environment.A ceramic chamber with a shielding layer(RF shield),composed of a series of copper strips connected to a capacitor at either end,is typically employed as a vacuum chamber to mitigate eddy current effects and beam coupling impedance.Consequently,the ceramic chamber exhibits a thin-walled multilayered complex structure.Previous theoretical studies have suggested that the impedance of such a structure has a negligible impact on the beam.However,recent impedance measurements of the ceramic chamber in the China Spallation Neutron Source(CSNS)RCS revealed a resonance in the low-frequency range,which was confirmed by further theoretical analysis as a source of beam instability in the RCS.Currently,the magnitude of this impedance cannot be accurately assessed using theoretical calculations.In this study,we used the CST Microwave Studio to confirm the impedance of the ceramic chamber.Further simulations covering six different types of ceramic chambers were conducted to develop an impedance model in the RCS.Additionally,this study investigates the resonant characteristics of the ceramic chamber impedance,finding that the resonant frequency is closely related to the capacitance of the capacitors.This finding provides clear directions for further impedance optimization and is crucial for achieving a beam power of 500 kW for the CSNS Phase-Ⅱ project(CSNS-Ⅱ).However,careful attention must be paid to the voltage across the capacitors. 展开更多
关键词 Beam coupling impedance Ceramic chamber rf shield RESONANCE High dynamic magnetic environment
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RF CMOS、BiCMOS的新进展(一)——低噪声放大器与接收前端 被引量:1
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作者 李永 赵正平 《半导体技术》 北大核心 2025年第8期757-772,共16页
当今信息社会已进入通用人工智能时代,大数据呈指数规律增长,不但要求数据处理速度高速增长,同时也要求数据的传输带宽更宽,推动数据载波的频率向射频(RF)的高端发展。Si基RF CMOS和RF BiCMOS集成电路(IC)具有体积小、功耗低、易于集成... 当今信息社会已进入通用人工智能时代,大数据呈指数规律增长,不但要求数据处理速度高速增长,同时也要求数据的传输带宽更宽,推动数据载波的频率向射频(RF)的高端发展。Si基RF CMOS和RF BiCMOS集成电路(IC)具有体积小、功耗低、易于集成等优点,相应呈现高速发展的态势。综述了Si基RF CMOS和RF BiCMOS的最新进展和发展态势,主要包括低噪声放大器与接收前端,射频-直流整流器与射频能量收集器,功率放大器、RF信号放大器与发射机,振荡器、混频器与频率综合器,移相器、开关、集成无源元件和相控阵,RF专用集成电路(ASIC)和微系统集成等七个RF IC发展的主要方面,凝练了各类RF IC的发展趋势和关键技术创新点。 展开更多
关键词 射频(rf)CMOS rf BiCMOS 放大器 收/发机 rf能量收集器 压控振荡器 频率综合器 移相器 相控阵 微系统集成
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RFCMOS、BiCMOS的新进展(四)——振荡器、混频器与频率综合器
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作者 李永 赵正平 《半导体技术》 北大核心 2025年第11期1093-1106,共14页
当今信息社会已进入通用人工智能时代,大数据呈指数规律增长,不但要求数据处理速度高速增长,同时也要求数据的传输带宽更宽,推动数据载波的频率向射频(RF)的高端发展。Si基RFCMOS和RFBiCMOS集成电路(IC)具有体积小、功耗低、易于集成等... 当今信息社会已进入通用人工智能时代,大数据呈指数规律增长,不但要求数据处理速度高速增长,同时也要求数据的传输带宽更宽,推动数据载波的频率向射频(RF)的高端发展。Si基RFCMOS和RFBiCMOS集成电路(IC)具有体积小、功耗低、易于集成等优点,相应呈现高速发展的态势。综述了Si基RFCMOS和RFBiCMOS的最新进展和发展态势,主要包括低噪声放大器与接收前端,射频-直流整流器与射频能量收集器,功率放大器、RF信号放大器与发射机,振荡器、混频器与频率综合器,移相器、开关、集成无源元件和相控阵,RF专用集成电路(ASIC)和微系统集成等七个RFIC发展的主要方面,凝练了各类RFIC的发展趋势和关键技术创新点。 展开更多
关键词 射频(rf)CMOS rf BiCMOS 放大器 收/发机 rf能量收集器 压控振荡器 频率综合器 移相器 相控阵 微系统集成
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RF CMOS、BiCMOS的新进展(三)——功率放大器、RF信号放大器与发射机
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作者 李永 赵正平 《半导体技术》 北大核心 2025年第10期981-994,共14页
当今信息社会已进入通用人工智能时代,大数据呈指数规律增长,不但要求数据处理速度高速增长,同时也要求数据的传输带宽更宽,推动数据载波的频率向射频(RF)的高端发展。Si基RF CMOS和RF BiCMOS集成电路(IC)具有体积小、功耗低、易于集成... 当今信息社会已进入通用人工智能时代,大数据呈指数规律增长,不但要求数据处理速度高速增长,同时也要求数据的传输带宽更宽,推动数据载波的频率向射频(RF)的高端发展。Si基RF CMOS和RF BiCMOS集成电路(IC)具有体积小、功耗低、易于集成等优点,相应呈现高速发展的态势。综述了Si基RF CMOS和RF BiCMOS的最新进展和发展态势,主要包括低噪声放大器与接收前端,射频-直流整流器与射频能量收集器,功率放大器、RF信号放大器与发射机,振荡器、混频器与频率综合器,移相器、开关、集成无源元件和相控阵,RF专用集成电路(ASIC)和微系统集成等七个RF IC发展的主要方面,凝练了各类RF IC的发展趋势和关键技术创新点。 展开更多
关键词 射频(rf)CMOS rf BiCMOS 放大器 收/发机 rf能量收集器 压控振荡器 频率综合器 移相器 相控阵 微系统集成
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RF CMOS、BiCMOS的新进展(二)——射频-直流整流器与射频能量收集器
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作者 李永 赵正平 《半导体技术》 北大核心 2025年第9期885-892,共8页
当今信息社会已进入通用人工智能时代,大数据呈指数规律增长,不但要求数据处理速度高速增长,同时也要求数据的传输带宽更宽,推动数据载波的频率向射频(RF)的高端发展。Si基RF CMOS和RF BiCMOS集成电路(IC)具有体积小、功耗低、易于集成... 当今信息社会已进入通用人工智能时代,大数据呈指数规律增长,不但要求数据处理速度高速增长,同时也要求数据的传输带宽更宽,推动数据载波的频率向射频(RF)的高端发展。Si基RF CMOS和RF BiCMOS集成电路(IC)具有体积小、功耗低、易于集成等优点,相应呈现高速发展的态势。综述了Si基RF CMOS和RF BiCMOS的最新进展和发展态势,主要包括低噪声放大器与接收前端,射频-直流整流器与射频能量收集器,功率放大器、RF信号放大器与发射机,振荡器、混频器与频率综合器,移相器、开关、集成无源元件和相控阵,RF专用集成电路(ASIC)和微系统集成等七个RF IC发展的主要方面,凝练了各类RF IC的发展趋势和关键技术创新点。 展开更多
关键词 射频(rf)CMOS rf BiCMOS 放大器 收/发机 rf能量收集器 压控振荡器 频率综合器 移相器 相控阵 微系统集成
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RF-PECVD生长参数对石墨烯薄膜品质的影响
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作者 袁强华 任江枫 殷桂琴 《真空科学与技术学报》 北大核心 2025年第2期98-105,共8页
对比不同工艺参数条件下生长的石墨烯薄膜的形貌和品质,分别研究了高频功率、放电气压、气体流量比、生长时间、生长温度以及基底种类对双频放电的RF-PECVD制备的石墨烯薄膜品质影响。实验结果表明,石墨烯的缺陷程度随着高频功率的增加... 对比不同工艺参数条件下生长的石墨烯薄膜的形貌和品质,分别研究了高频功率、放电气压、气体流量比、生长时间、生长温度以及基底种类对双频放电的RF-PECVD制备的石墨烯薄膜品质影响。实验结果表明,石墨烯的缺陷程度随着高频功率的增加而降低,但是薄膜的厚度随着高频功率的增加而减小。在3 Torr及5 Torr的条件下,石墨烯薄膜存在着较多的边界状缺陷。甲烷/氩气流量比为10:30、生长时间为40 min时,能够生长出品质较好的石墨烯薄膜。生长温度对石墨烯薄膜的生长影响较大,在300℃时,镍基底表面无法生长出石墨烯薄膜,并且生长温度低于600℃时,都无法生长出品质较好的石墨烯薄膜。最后发现,相同的生长条件,在镍基底上生长的石墨烯薄膜厚度更小,但是铜基底生长的石墨烯薄膜缺陷更少,品质更好,这与薄膜在两种基底上不同的生长方式有关。 展开更多
关键词 射频等离子体增强化学气相沉积 双频放电 石墨烯薄膜
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Velocity compensation methods for LPRF modulated frequency stepped-frequency(MFSF) radar 被引量:5
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作者 Guifen Xia Hongyan Su Peikang Huang 《Journal of Systems Engineering and Electronics》 SCIE EI CSCD 2010年第5期746-751,共6页
In the high speed target environment,there exists serious Doppler effect in the low pulse repetition frequency(LPRF) modulated frequency stepped frequency(MFSF) radar signal.The velocity range of the target is lar... In the high speed target environment,there exists serious Doppler effect in the low pulse repetition frequency(LPRF) modulated frequency stepped frequency(MFSF) radar signal.The velocity range of the target is large and the velocity is high ambiguous,so the single method is difficult to satisfy the velocity measurement requirement.For this problem,a novel method is presented,it is a combination of cross-correlation inner frame velocity measurement and range-Doppler coupling velocity measurement.The cross-correlation inner frame method,overcoming the low Doppler tolerance of the cross-correlation between frames,can obtain the coarse velocity of the high speed target,and then the precision velocity can be obtained with the range-Doppler coupling method.The simulation results confirm the method is effective,and also it is well real-time and easy to the project application. 展开更多
关键词 modulated frequency stepped-frequency(MFSF) radar low pulse repetition frequency(LPrf cross-correlation inner frame range-Doppler coupling.
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Multi-frequency point supported LLRF front-end for CiADS wide-bandwidth application 被引量:3
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作者 Qi Chen Zheng Gao +3 位作者 Zheng-Long Zhu Zong-Heng Xue Yuan He Xian-Wu Wang 《Nuclear Science and Techniques》 SCIE CAS CSCD 2020年第3期66-73,共8页
The China initiative Accelerator Driven System,CiADS,physics design adopts 162.5 MHz,325 MHz,and 650 MHz cavities,which are driven by the corresponding radio frequency(RF)power system,requiring frequency translation f... The China initiative Accelerator Driven System,CiADS,physics design adopts 162.5 MHz,325 MHz,and 650 MHz cavities,which are driven by the corresponding radio frequency(RF)power system,requiring frequency translation front-end for the RF station.For that application,a general-purpose design front-end prototype has been developed to evaluate the multi-frequency point supported design feasibility.The difficult parts to achieve the requirements of the general-purpose design are reasonable device selection and balanced design.With a carefully selected low-noise wide-band RF mixer and amplifier to balance the performance of multi-frequency supported down-conversion,specially designed LO distribution net to increase isolation between adjacent channels,and external band-pass filter to realize expected up-conversion frequencies,high maintenance and modular front-end generalpurpose design has been implemented.Results of standard parameters show an R2 value of at least 99.991%in the range of-60-10 dBm for linearity,up to 18 dBm for P1dB,and up to 89 dBc for cross talk between adjacent channels.The phase noise spectrum is lower than 80 dBc in the range of 0-1 MHz;cumulative phase noise is 0.006°;and amplitude and phase stability are 0.022%and 0.034°,respectively. 展开更多
关键词 frequency jump rf Front-end LLrf CiADS
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Frequency Matching Effects on Characteristics of Bulk Plasmas and Sheaths for Dual-Frequency Capacitively Coupled Argon Discharges: One-Dimensional Fluid Simulation 被引量:2
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作者 王帅 徐翔 +1 位作者 宋远红 王友年 《Plasma Science and Technology》 SCIE EI CAS CSCD 2008年第1期57-60,共4页
A one-dimensional fluid model is proposed to simulate the dual-frequency capacitively coupled plasma for Ar discharges. The influences of the low frequency on the plasma density, electron temperature, sheath voltage d... A one-dimensional fluid model is proposed to simulate the dual-frequency capacitively coupled plasma for Ar discharges. The influences of the low frequency on the plasma density, electron temperature, sheath voltage drop, and ion energy distribution at the powered electrode are investigated. The decoupling effect of the two radio-frequency sources on the plasma parameters, especially in the sheath region, is discussed in detail. 展开更多
关键词 capacitively coupled plasmas dual frequency HYDRODYNAMICS SHEATH
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Frequency dependence of plasma characteristics at different pressures in cylindrical inductively coupled plasma source 被引量:2
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作者 Zeyu HAO Jian SONG +3 位作者 Yue HUA Gailing ZHANG Xiaodong BAI Chunsheng REN 《Plasma Science and Technology》 SCIE EI CAS CSCD 2019年第7期114-122,共9页
The effects of driving frequency on plasma parameters and electron heating efficiency are studied in cylindrical inductively coupled plasma(ICP) source. Measurements are made in an Ar discharge for driving frequency a... The effects of driving frequency on plasma parameters and electron heating efficiency are studied in cylindrical inductively coupled plasma(ICP) source. Measurements are made in an Ar discharge for driving frequency at 13.56/2 MHz, and pressures of 0.4-1.2 Pa. In 13.56 MHz discharge, higher electron density(n_e) and higher electron temperature(T_e) are observed in comparison with 2 MHz discharge at 0.6-1.2 Pa. However, slightly higher n_e and T_e are observed in 2 MHz discharge at 0.4 Pa. This observation is explained by enhanced electron heating efficiency due to the resonance between the oscillation of 2 MHz electromagnetic field and electron-neutral collision process at 0.4 Pa. It is also found that the variation of T_edistribution is different in 13.56 and 2 MHz discharge.For ICP at 13.56 MHz, T_eshows an edge-high profile at 0.4-1.2 Pa. For 2 MHz discharge, T_e remains an edge-high distribution at 0.4-0.8 Pa. However, the distribution pattern involves into a center-high profile at 0.9-1.2 Pa. The spatial profiles of n_e remain a center-high shape in both 13.56 and 2 MHz discharges, which indicates the nonlocal kinetics at low pressures. Better uniformity could be achieved by using 2 MHz discharge. The effects of gas pressure on plasma parameters are also examined. An increase in gas pressure necessitates the rise of n_e in both 13.56 and 2 MHz discharges. Meanwhile, T_e drops when gas pressure increases and shows a flatter distribution at higher pressure. 展开更多
关键词 inductively coupled PLASMA driving frequency ELECTRON HEATING efficiency ELECTRON temperature ELECTRON DENSITY
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Plasma Uniformity in a Dual Frequency Capacitively Coupled Plasma Reactor Measured by Optical Emission Spectroscopy 被引量:2
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作者 赵国利 徐勇 +3 位作者 尚建平 刘文耀 朱爱民 王友年 《Plasma Science and Technology》 SCIE EI CAS CSCD 2011年第1期61-67,共7页
Local measurement of plasma radial uniformity was performed in a dual frequency capacitively coupled argon plasma (DF-CCP) reactor using an optical probe. The optical probe collects the light emission from a small s... Local measurement of plasma radial uniformity was performed in a dual frequency capacitively coupled argon plasma (DF-CCP) reactor using an optical probe. The optical probe collects the light emission from a small separate volume in plasma, thus enabling to diagnose the plasma uniformity for different experimental parameters. Both the gas pressure and the low- frequency (LF) power have apparent effects on the radial uniformity of argon plasma. With the increase in either pressure or LF power, the emission profiles changed from a bell-shaped to a double-peak distribution. The influence of a fused-silica ring around the electrodes on the plasma uniformity was also studied using the optical probe. Possible reasons that result in nonuniform plasmas in our experiments are discussed. 展开更多
关键词 dual frequency capacitively coupled plasma optical probe plasma uniformity
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Characteristics of dual-frequency capacitively coupled SF_6/O_2 plasma and plasma texturing of multi-crystalline silicon 被引量:2
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作者 徐东升 邹帅 +2 位作者 辛煜 苏晓东 王栩生 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第6期361-369,共9页
Due to it being environmentally friendly, much attention has been paid to the dry plasma texturing technique serving as an alternative candidate for multicrystalline silicon (mc-Si) surface texturing. In this paper,... Due to it being environmentally friendly, much attention has been paid to the dry plasma texturing technique serving as an alternative candidate for multicrystalline silicon (mc-Si) surface texturing. In this paper, capacitively coupled plasma (CCP) driven by a dual frequency (DF) of 40.68 MHz and 13.56 MHz is first used for plasma texturing of mc-Si with SF6/O2 gas mixture. Using a hairpin resonant probe and optical emission techniques, DF-CCP characteristics and their influence on mc-silicon surface plasma texturing are investigated at different flow rate ratios, pressures, and radio-frequency (RF) input powers. Experimental results show that suitable plasma texturing of mc-silicon occurs only in a narrow range of plasma parameters, where electron density ne must be larger than 6.3 x 109 cm-3 and the spectral intensity ratio of the F atom to that of the O atom ([F]/[O]) in the plasma must be between 0.8 and 0.3. Out of this range, no cone-like structure is formed on the mc-silicon surface. In our experiments, the lowest reflectance of about 7.3% for mc-silicon surface texturing is obtained at an [F]/[O] of 0.5 and ne of 6.9 × 109 cm-3. 展开更多
关键词 dual frequency capacitively coupled plasma plasma texturing multi-crystalline silicon electrondensity
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ZERO MODE NATURAL FREQUENCY AND NONLINEAR VIBRATION OF COUPLED LATERAL AND TORSION OF A LARGE TURBINE GENERATOR 被引量:2
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作者 TaNa QiuJiajun CaiGanhua 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2005年第2期302-306,共5页
Zero mode natural frequency (ZMNF) is found during experiments. The ZMNF andvibrations resulted by it are studied. First, calculating method of the ZMNF excited byelectromagnetic in vibrational system of coupled mecha... Zero mode natural frequency (ZMNF) is found during experiments. The ZMNF andvibrations resulted by it are studied. First, calculating method of the ZMNF excited byelectromagnetic in vibrational system of coupled mechanics and electrics are given from the view ofmagnetic energy. Laws that the ZMNF varies with active power and exciting current are obtained andare verified by experiments. Then, coupled lateral and torsional vibration of rotor shaft system isstudied by considering rest eccentricity, rotating eccentricity and swing eccentricity. UsingLargrange-Maxwell equation when three phases are asymmetric derives differential equation of thecoupled vibration. With energy method of nonlinear vibration, amplitude-frequency characteristics ofresonance are studied when rotating speed of rotor equals to ZMNF. The results show that ZMNF willoccur in turbine generators by the action of electromagnetic. Because ZMNF varies withelectromagnetic parameters, resonance can occur when exciting frequency of the rotor speed is fixedwhereas exciting current change. And also find that a generator is in the state of large amplitudein rated exciting current. 展开更多
关键词 Zero mode natural frequency coupled vibration of lateral and torsionEccentricity Rotor shaft Hydro turbine generator
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线性阵列分布RFID系统性能建模方法研究
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作者 佐磊 张一卓 +2 位作者 孔维业 雷碧航 丁雨晴 《电子测量与仪器学报》 北大核心 2025年第1期176-186,共11页
标签间互耦效应对不同位置标签的作用效果不同,使得线性阵列分布RFID系统的整体性能随标签间距与数量的改变呈现非线性变化。鉴于此,基于RFID工作原理与电磁波传播理论,推导了多标签RFID系统中标签互阻抗及功率传输系数的表达式;利用功... 标签间互耦效应对不同位置标签的作用效果不同,使得线性阵列分布RFID系统的整体性能随标签间距与数量的改变呈现非线性变化。鉴于此,基于RFID工作原理与电磁波传播理论,推导了多标签RFID系统中标签互阻抗及功率传输系数的表达式;利用功率传输系数,分析了标签线性等距分布情形下,互耦效应对不同位置标签及系统整体性能的影响,并建立了系统最小功率传输系数随标签间距与标签数量变化的数学模型;在开阔室内环境中,测试了标签间距和数量变化时的应答信号功率。理论分析与实验结果表明,线性等距分布时,标签的功率传输系数与间距呈非线性关系;互耦效应对标签的影响程度以工作波长为周期逐步减小,在间距为波长倍数时取得极大值;最小功率传输系数出现的位置随着间距的增大在中心与外侧之间以波长为周期波动;系统性能测试结果与所建立模型的变化规律保持一致。 展开更多
关键词 射频识别 互耦效应 互阻抗 多标签rfID系统 线性阵列分布
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Stochastic resonance of coupled time-delayed system with fluctuation of mass and frequency and its application in bearing fault diagnosis 被引量:3
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作者 ZHANG Gang WANG Hui ZHANG Tian-qi 《Journal of Central South University》 SCIE EI CAS CSCD 2021年第9期2931-2946,共16页
The stochastic resonance behavior of coupled stochastic resonance(SR)system with time-delay under mass and frequency fluctuations was studied.Firstly,the approximate system model of the time-delay system was obtained ... The stochastic resonance behavior of coupled stochastic resonance(SR)system with time-delay under mass and frequency fluctuations was studied.Firstly,the approximate system model of the time-delay system was obtained by the theory of small time-delay approximation.Then,the random average method and Shapiro-Loginov algorithm were used to calculate the output amplitude ratio of the two subsystems.The simulation analysis shows that increasing the time-delay and the input signal amplitude appropriately can improve the output response of the system.Finally,the system is applied to bearing fault diagnosis and compared with the stochastic resonance system with random mass and random frequency.The experimental results show that the coupled SR system taking into account the actual effect of time-delay and couple can more effectively extract the frequency of the fault signal,and thus realizing the diagnosis of the fault signal,which has important engineering application value. 展开更多
关键词 stochastic resonance bearing fault diagnosis the fluctuation of mass and frequency coupled time-delayed system
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Anti-noise performance of the pulse coupled neural network applied in discrimination of neutron and gamma-ray 被引量:4
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作者 Hao-Ran Liu Zhuo Zuo +3 位作者 Peng Li Bing-Qi Liu Lan Chang Yu-Cheng Yan 《Nuclear Science and Techniques》 SCIE EI CAS CSCD 2022年第6期89-101,共13页
In this study,the anti-noise performance of a pulse-coupled neural network(PCNN)was investigated in the neutron and gamma-ray(n-γ)discrimination field.The experiments were conducted in two groups.In the first group,r... In this study,the anti-noise performance of a pulse-coupled neural network(PCNN)was investigated in the neutron and gamma-ray(n-γ)discrimination field.The experiments were conducted in two groups.In the first group,radiation pulse signals were pre-processed using a Fourier filter to reduce the original noise in the signals,whereas in the second group,the original noise was left untouched to simulate an extremely high-noise scenario.For each part,artificial Gaussian noise with different intensity levels was added to the signals prior to the discrimination process.In the aforementioned conditions,the performance of the PCNN was evaluated and compared with five other commonly used methods of n-γdiscrimination:(1)zero crossing,(2)charge comparison,(3)vector projection,(4)falling edge percentage slope,and(5)frequency gradient analysis.The experimental results showed that the PCNN method significantly outperforms other methods with outstanding FoM-value at all noise levels.Furthermore,the fluctuations in FoM-value of PCNN were significantly better than those obtained via other methods at most noise levels and only slightly worse than those obtained via the charge comparison and zerocrossing methods under extreme noise conditions.Additionally,the changing patterns and fluctuations of the FoMvalue were evaluated under different noise conditions.Hence,based on the results,the parameter selection strategy of the PCNN was presented.In conclusion,the PCNN method is suitable for use in high-noise application scenarios for n-γdiscrimination because of its stability and remarkable discrimination performance.It does not rely on strict parameter settings and can realize satisfactory performance over a wide parameter range. 展开更多
关键词 Pulse coupled neural network Zero crossing frequency gradient analysis Vector projection Charge comparison Neutron and gamma-ray discrimination Pulse shape discrimination
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