In this paper,a novel four-prong quartz tuning fork(QTF)was designed with enlarged deformation area,large prong gap,and low resonant frequency to improve its performance in laser spectroscopy sensing.A theoretical sim...In this paper,a novel four-prong quartz tuning fork(QTF)was designed with enlarged deformation area,large prong gap,and low resonant frequency to improve its performance in laser spectroscopy sensing.A theoretical simulation model was established to optimize the design of the QTF structure.In the simulation of quartz-enhanced photoacoustic spectroscopy(QEPAS)technology,the maximum stress and the surface charge density of the four-prong QTF demonstrated increases of 11.1-fold and 15.9-fold,respectively,compared to that of the standard two-prong QTF.In the simulation of light-induced thermoelastic spectroscopy(LITES)technology,the surface temperature difference of the four-prong QTF was found to be 11.4 times greater than that of the standard QTF.Experimental results indicated that the C_(2)H_(2)-QEPAS system based on this innovative design improved the signal-to-noise-ratio(SNR)by 4.67 times compared with the standard QTF-based system,and the SNR could increase up to 147.72 times when the four-prong QTF was equipped with its optimal acoustic micro-resonator(AmR).When the average time of the system reached 370 s,the system achieved a MDL as low as 21 ppb.The four-prong QTF-based C_(2)H_(2)-LITES system exhibited a SNR improvement by a factor of 4.52,and a MDL of 96 ppb was obtained when the average time of the system reached 100 s.The theoretical and experimental results effectively demonstrated the superiority of the four-prong QTF in the field of laser spectroscopy sensing.展开更多
Grooved tuning forks with hierarchical structures have become some of the most widely used piezoelectric quartz microelectromechanical system devices;however,fabricating these devices requires multi-step processes due...Grooved tuning forks with hierarchical structures have become some of the most widely used piezoelectric quartz microelectromechanical system devices;however,fabricating these devices requires multi-step processes due to the complexity of etching of quartz,particularly in specific orientations of the crystal lattice.This paper proposes a one-step fabrication strategy that can form a complete hierarchical structure with only a single etching process using novel lithography patterns.The core principle of this strategy is based on the effect of the size of the groove patterns on quartz etching,whereby trenches of varying depths can be created in a fixed etching time by adjusting the width of the hard mask.Specifically,the device outline and grooved structure can be completed using a seamlessly designed etching pattern and optimized time.Furthermore,the etching structure itself influences the etching results.It was found that dividing a wide trench by including a wall to separate it into two narrow trenches significantly reduces the etching rate,allowing for predictable tuning of the etching rate for wider grooves.This effectively increases the usability and flexibility of the one-step strategy.This was applied to the manufacture of an ultra-small quartz grooved tuning fork resonator with a frequency of 32.768 kHz in a single step,increasing production efficiency by almost 45%and reducing costs by almost 30%compared to current methods.This has great potential for improving the productivity of grooved tuning fork devices.It can also be extended to the fabrication of other quartz crystal devices requiring hierarchical structures.展开更多
基金supports from the National Natural Science Foundation of China(Grant Nos.62335006,62022032,62275065,and 62405078)Key Laboratory of Opto-Electronic Information Acquisition and Manipulation(Anhui University),Ministry of Education(Grant No.OEIAM202202)+2 种基金Fundamental Research Funds for the Central Universities(Grant No.HIT.OCEF.2023011)China Postdoctoral Science Foundation(Grant No.2024M764172)Heilongjiang Postdoctoral Fund(Grant No.LBH-Z23144).
文摘In this paper,a novel four-prong quartz tuning fork(QTF)was designed with enlarged deformation area,large prong gap,and low resonant frequency to improve its performance in laser spectroscopy sensing.A theoretical simulation model was established to optimize the design of the QTF structure.In the simulation of quartz-enhanced photoacoustic spectroscopy(QEPAS)technology,the maximum stress and the surface charge density of the four-prong QTF demonstrated increases of 11.1-fold and 15.9-fold,respectively,compared to that of the standard two-prong QTF.In the simulation of light-induced thermoelastic spectroscopy(LITES)technology,the surface temperature difference of the four-prong QTF was found to be 11.4 times greater than that of the standard QTF.Experimental results indicated that the C_(2)H_(2)-QEPAS system based on this innovative design improved the signal-to-noise-ratio(SNR)by 4.67 times compared with the standard QTF-based system,and the SNR could increase up to 147.72 times when the four-prong QTF was equipped with its optimal acoustic micro-resonator(AmR).When the average time of the system reached 370 s,the system achieved a MDL as low as 21 ppb.The four-prong QTF-based C_(2)H_(2)-LITES system exhibited a SNR improvement by a factor of 4.52,and a MDL of 96 ppb was obtained when the average time of the system reached 100 s.The theoretical and experimental results effectively demonstrated the superiority of the four-prong QTF in the field of laser spectroscopy sensing.
文摘Grooved tuning forks with hierarchical structures have become some of the most widely used piezoelectric quartz microelectromechanical system devices;however,fabricating these devices requires multi-step processes due to the complexity of etching of quartz,particularly in specific orientations of the crystal lattice.This paper proposes a one-step fabrication strategy that can form a complete hierarchical structure with only a single etching process using novel lithography patterns.The core principle of this strategy is based on the effect of the size of the groove patterns on quartz etching,whereby trenches of varying depths can be created in a fixed etching time by adjusting the width of the hard mask.Specifically,the device outline and grooved structure can be completed using a seamlessly designed etching pattern and optimized time.Furthermore,the etching structure itself influences the etching results.It was found that dividing a wide trench by including a wall to separate it into two narrow trenches significantly reduces the etching rate,allowing for predictable tuning of the etching rate for wider grooves.This effectively increases the usability and flexibility of the one-step strategy.This was applied to the manufacture of an ultra-small quartz grooved tuning fork resonator with a frequency of 32.768 kHz in a single step,increasing production efficiency by almost 45%and reducing costs by almost 30%compared to current methods.This has great potential for improving the productivity of grooved tuning fork devices.It can also be extended to the fabrication of other quartz crystal devices requiring hierarchical structures.
