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System-Level Modeling and Simulation of Force-Balance MEMS Accelerometers 被引量:1
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作者 张宇峰 刘晓为 陈伟平 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第5期917-922,共6页
This paper presents two approaches for system-level simulation of force-balance accelerometers. The derivation of the system-level model is elaborated and simulation results are obtained from the implementation of tho... This paper presents two approaches for system-level simulation of force-balance accelerometers. The derivation of the system-level model is elaborated and simulation results are obtained from the implementation of those strategies on the fabricated silicon force-balance MEMS accelerometer. The mathematical model presented is implemented in VHDL- AMS and SIMULINK TM,respectively. The simulation results from the two approaches are compared and show a slight difference. Using VHDL-AMS is flexible,reusable,and more accurate. But there is not a mature solver developed for the language and this approach takes more time, while the simulation model can be easily built and quickly evaluated using SIMULINK. 展开更多
关键词 MEMS force-balance accelerometers system-level simulation mathematical model
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Measurement of six degree-of-freedom ground motion by using eight accelerometers 被引量:1
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作者 杨振宇 沈毅 刘志言 《Earthquake Engineering and Engineering Vibration》 SCIE EI CSCD 2005年第2期229-232,共4页
A new integrated measuring system with eight force-balance accelerometers is proposed to obtain a direct measurement of six degree-of freedom (DOF) ground motions, including three rotational and three actual transla... A new integrated measuring system with eight force-balance accelerometers is proposed to obtain a direct measurement of six degree-of freedom (DOF) ground motions, including three rotational and three actual translational acceleration components without gyroscopes. In the proposed measuring system, the relationship between the output from eight force-balance accelerometer and the six DOF motion of the measuring system under an earthquake are described by differential equations. These equations are derived from the positions and directions of the eight force-balance accelerometers in the measuring system. The third-order Runge-Kutta algorithm is used to guarantee the accuracy of the numerical calculation. All the algorithms used to compute the six DOF components of the ground motion are implemented in a real-time in Digital Signal Processor (DSP). The distortion of the measured results caused by position and direction errors of the accelerometers in the measuring system are reduced by multiplying a compensation coefficient C to the output and subtracting static zero drift from the measured results, respectively. 展开更多
关键词 six degree-of-freedom ground motion force-balance accelerometer translational acceleration rotational acceleration
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