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Experimental Measurements of the Sensitivity of Fiber-optic Bragg Grating Sensors with a Soft Polymeric Coating under Mechanical Loading,Thermal and Magnetic under Cryogenic Conditions 被引量:2
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作者 关明智 王省哲 +2 位作者 辛灿杰 周又和 马力祯 《Chinese Physics Letters》 SCIE CAS CSCD 2015年第1期140-144,共5页
The strain and temperature sensing performance of fiber-optic Bragg gratings (FBGs) with soft polymeric coating, which can be used to sense internal strain in superconducting coils, are evaluated under variable cryo... The strain and temperature sensing performance of fiber-optic Bragg gratings (FBGs) with soft polymeric coating, which can be used to sense internal strain in superconducting coils, are evaluated under variable cryogenic field and magnetic field. The response to a temperature and strain change of coated-soft polymeric FBGs is tested by comparing with those of coated-metal FBGs. The results indicate that the coated-soft polymeric FBGs can freely detect temperature and thermal strain, their At variable magnetic field, the tested results indicate accuracy and repeatability are also discussed in detail. that the cross-coupling effects of FBGs with different matrixes are not negligible to measure electromagnetic strain during fast excitation. The present results are expected to be able to provide basis measurements on the strain of pulsed superconducting magnet/cable (cable- around-conduit conductors, cable-in-conduit conductors), independently or utilized together with other strain measurement methods. 展开更多
关键词 FBG net Experimental Measurements of the Sensitivity of fiber-optic Bragg Grating sensors with a Soft Polymeric Coating under Mechanical Loading Thermal and Magnetic under Cryogenic Conditions
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Dual-channel fiber-optic surface plasmon resonance sensor with cascaded coaxial dual-waveguide D-type structure and microsphere structure 被引量:1
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作者 李玲玲 魏勇 +4 位作者 刘春兰 任卓 周爱 刘志海 张羽 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第2期201-208,共8页
To address the restriction of fiber-optic surface plasmon resonance(SPR) sensors in the field of multi-sample detection, a novel dual-channel fiber-optic SPR sensor based on the cascade of coaxial dual-waveguide D-typ... To address the restriction of fiber-optic surface plasmon resonance(SPR) sensors in the field of multi-sample detection, a novel dual-channel fiber-optic SPR sensor based on the cascade of coaxial dual-waveguide D-type structure and microsphere structure is proposed in this paper. The fiber sidepolishing technique converts the coaxial dual-waveguide fiber into a D-type one, and the evanescent wave in the ring core leaks, generating a D-type sensing region;the fiber optic fused ball push technology converts the coaxial dual waveguides into microspheres, and the stimulated cladding mode evanescent wave leaks, producing the microsphere sensing region. By injecting light into the coaxial dual-waveguide middle core alone, the sensor can realize single-stage sensing in the microsphere sensing area;it can also realize dual-channel sensing in the D-type sensing area and microsphere sensing area by injecting light into the ring core. The refractive index measurement ranges for the two channels are 1.333–1.365 and 1.375–1.405, respectively, with detection sensitivities of 981.56 nm/RIU and 4138 nm/RIU. The sensor combines wavelength division multiplexing and space division multiplexing technologies, presenting a novel research concept for multi-channel fiber SPR sensors. 展开更多
关键词 coaxial dual-waveguide optical fiber D structure optical fiber microsphere structure dual-channel fiber-optic surface plasmon resonance(SPR)sensor
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可调谐激光稳定光纤FP传感器Q点的解调方法
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作者 吴鹏 李群 +7 位作者 梁家碧 邵剑 陆云才 林元棣 王同磊 李晓涵 马远航 邓传鲁 《应用声学》 北大核心 2026年第1期81-88,共8页
针对传统光纤法布里-珀罗(FP)传感器强度解调系统中存在的正交工作点(Q点)受外界环境干扰发生偏移问题,该文提出一种基于可调谐激光器的Q点稳定方法。该方法通过监测FP传感器实时信号的直流分量以判断当前工作点是否位于线性工作区内,... 针对传统光纤法布里-珀罗(FP)传感器强度解调系统中存在的正交工作点(Q点)受外界环境干扰发生偏移问题,该文提出一种基于可调谐激光器的Q点稳定方法。该方法通过监测FP传感器实时信号的直流分量以判断当前工作点是否位于线性工作区内,进而改变激光器的工作波长,以实现Q点的稳定。仿真结果表明,该方法可以使解调灵敏度保持在最大值的92.3%以上。实验结果表明,在30℃~70℃的温度范围内,基于可调谐激光器的Q点稳定方法获得的传感器灵敏度最大偏差为12.56%、10.39%、11.37%,优于传统强度解调的57.21%、46.62%、27.07%。该文研究的Q点稳定方法适用于不同腔长的FP传感器,能够保持较高的解调灵敏度,可广泛应用于复杂环境下的超声检测。 展开更多
关键词 光纤fp传感器 Q点稳定 可调谐激光器 超声检测
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Multi-resonance enhanced photothermal synergistic fiber-optic Tamm plasmon polariton tip for high-sensitivity and rapid hydrogen detection
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作者 Xinran Wei Yuzhang Liang +7 位作者 Xuhui Zhang Rui Li Haonan Wei Yijin He Lanlan Shen Yurui Fang Ting Xu Wei Peng 《Opto-Electronic Science》 2025年第7期13-25,共13页
Accurate and real-time detection of hydrogen(H_(2))is essential for ensuring energy security.Fiber-optic H_(2) sensors are gaining attention for their integration and remote sensing capabilities.However,they face chal... Accurate and real-time detection of hydrogen(H_(2))is essential for ensuring energy security.Fiber-optic H_(2) sensors are gaining attention for their integration and remote sensing capabilities.However,they face challenges,including complex fabrication processes and limited response times.Here,we propose a fiber-optic H_(2) sensing tip based on Tamm plasmon polariton(TPP)resonance,consisting of a multilayer metal/dielectric Bragg reflector deposited directly on the fiber end facet,simplifying the fabrication process.The fiber-optic TPP(FOTPP)tip exhibits both TPP and multiple Fabry-Perot(FP)resonances simultaneously,with the TPP employed for highly sensitive H_(2) detection.Compared to FP resonance,TPP exhibits more than twice the sensitivity under the same structural dimension without cavity geometry deformation.The excellent performance is attributed to alterations in phase-matching conditions,driven by changes in penetration depth of TPP.Furthermore,the FP mode is utilized to achieve an efficient photothermal effect to catalyze the reaction between H_(2) and the FOTPP structure.Consequently,the response and recovery speeds of the FOTPP tip under resonance-enhanced photothermal assistance are improved by 6.5 and 2.1 times,respectively.Our work offers a novel strategy for developing TPP-integrated fiber-optic tips,refines the theoretical framework of photothermal-assisted detection systems,and provides clear experimental evidence. 展开更多
关键词 fiber-optic hydrogen sensor Tamm plasmon polariton photothermal synergistic effect dynamic response enhancement cost-effective production
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Inspection of Complex Internal Surface Shape with Fiber-optic Sensor II: for Specular Tilted Surface Measurement
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作者 赵勇 Li +2 位作者 Pengsheng PU Zhaobang 《High Technology Letters》 EI CAS 2001年第2期27-30,共4页
Complex surface shape measurement has been a focus topic in the CAD/CAM field. A popular method for measuring dimensional information is using a 3D coordinate measuring machine (CMM)with a touch trigger probe. The mea... Complex surface shape measurement has been a focus topic in the CAD/CAM field. A popular method for measuring dimensional information is using a 3D coordinate measuring machine (CMM)with a touch trigger probe. The measurement set up with CMM, however, is a time consuming task and the accuracy of the measurement deteriorates as the speed of measurement increase. Non-contact measurement is favored since high speed measurement can be achieved and problems with vibration and friction can be eliminated. Although much research has been conducted in non-contact measurement using image capturing and processing schemes, accuracy is poor and measurement is limited. Some optical technologies developed provide a good accuracy but the dynamic range and versatility is very limited. A novel fiber-optic sensor used for the inspection of complex internal contours is presented in this paper, which is able to measure a surface shape in a non-contact manner with high accuracy and high speed, and is compact and flexible to be incorporated into a CMM. Modulation functions for tilted surface shape measurement, based on the Gaussian distribution of the emitting beam from single-mode fiber (SMF), were derived for specular reflection. The feasibility of the proposed measurement principle was verified by simulations. 展开更多
关键词 fiber-optic sensor Shape inspection Internal contour Non-contact measurement Gaussian statistics
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Highly Sensitive Fiber-Optic Faraday-Effect Magnetic Field Sensor Based on Yttrium Iron Garnet
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作者 Wenbo FEI (Department of Physics, Northeastern Universitys Shenyang 110006, China) 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2000年第2期205-206,共2页
The principle and performance of a fiber-optic Faraday-effect magnetic-field sensor based on an yttrium iron garnet (YIG) and two flux concentrations are described. A single polarization-maintaining optical fiber link... The principle and performance of a fiber-optic Faraday-effect magnetic-field sensor based on an yttrium iron garnet (YIG) and two flux concentrations are described. A single polarization-maintaining optical fiber links the sensor head to the source and detection system, in which the technique of phase shift cancellation is used to cancel the phase shift that accumulatein the optical fiber. Flux concentrators were exploited to enhance the YIG crystal magneto-optic sensitivity .The sensor system exhibited a noise-equivalent field of 8 pT/√Hz and a 3 dB bandwidth of ~10 MHz. 展开更多
关键词 YIG Highly Sensitive fiber-optic Faraday-Effect Magnetic Field sensor Based on Yttrium Iron Garnet
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Measurement of Gamma-Rays Induced Luminescence Generated in a Sapphire Based Fiber-Optic Radiation Sensor
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作者 Young Beom Song Kyoung Won Jang +5 位作者 Hye Jin Kim Dong Eun Lee Mingeon Kim Sang Hun Shin Wook Jae Yoo Bongsoo Lee 《Journal of Applied Mathematics and Physics》 2016年第8期1503-1506,共5页
In this study, we fabricated a sapphire based fiber-optic radiation sensor. To evaluate the fiber- optic radiation sensor, we measured the spectrum and intensity of the luminescence generated from the fiber-optic radi... In this study, we fabricated a sapphire based fiber-optic radiation sensor. To evaluate the fiber- optic radiation sensor, we measured the spectrum and intensity of the luminescence generated from the fiber-optic radiation sensor according to the thickness of the PMMA block by irradiation of gamma rays emitted from a Co-60 source. And the result was compared with the value calculated from the formula of Lambert-Beer. 展开更多
关键词 fiber-optic Radiation sensor Optical Glass SAPPHIRE LUMINESCENCE Gamma Ray Source Spent Fuel
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Temperature-insensitive fiber-optic refractive index sensor based on cascaded in-line interferometer and microwave photonics interrogation system
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作者 Xun Cai Yi Zhuang +2 位作者 Tongtong Xie Shichen Zheng Hongyan Fu 《Advanced Photonics Nexus》 2024年第4期118-125,共8页
A compact and high-resolution fiber-optic refractive index(RI)sensor based on a microwave photonic filter(MPF)is proposed and experimentally validated.The sensing head utilizes a cascaded in-line interferometer fabric... A compact and high-resolution fiber-optic refractive index(RI)sensor based on a microwave photonic filter(MPF)is proposed and experimentally validated.The sensing head utilizes a cascaded in-line interferometer fabricated by an input single-mode fiber(SMF)tapered fusion with no-core fiber-thin-core fiber(TCF)-SMF.The surrounding RI(SRI)can be demodulated by tracing the passband’s central frequency of the MPF,which is constructed by the cascaded in-line interferometer,electro-optic modulator,and a section of dispersion compensation fiber.The sensitivity of the sensor is tailorable through the use of different lengths of TCF.Experimental results reveal that with a 30 mm length of TCF,the sensor achieves a maximum theoretical sensitivity and resolution of-1.403 GHz∕refractive index unit eRIUT and 1.425×10^(-7) RIU,respectively,which is at least 6.3 times higher than what has been reported previously.Furthermore,the sensor exhibits temperature-insensitive characteristics within the range of 25℃-75℃,with a temperatureinduced frequency change of only±1.5 MHz.This value is significantly lower than the frequency change induced by changes in the SRI.The proposed MPF-based cascaded in-line interferometer RI sensor possesses benefits such as easy manufacture,low cost,high resolution,and temperature insensitivity. 展开更多
关键词 fiber-optic sensor microwave photonics frequency demodulation Mach-Zehnder interferometer
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Fiber-Optic Sensors and Their Practical Research in the Internet of Things
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作者 Hanqing Liu 《Journal of Electronic Research and Application》 2024年第5期1-5,共5页
With the rapid development of the Internet of Things(IoT)technology,fiber-optic sensors,as a kind of high-precision and high-sensitivity measurement tool,are increasingly widely used in the field of IoT.This paper out... With the rapid development of the Internet of Things(IoT)technology,fiber-optic sensors,as a kind of high-precision and high-sensitivity measurement tool,are increasingly widely used in the field of IoT.This paper outlines the advantages of fiber-optic sensors over traditional sensors,such as high precision,strong resistance to electromagnetic interference,and long transmission distance.On this basis,the paper discusses the application scenarios of fiber-optic sensors in the Internet of Things,including environmental monitoring,intelligent industry,medical and health care,intelligent transportation,and other fields.It is hoped that this study can provide theoretical support and practical guidance for the further development of fiber-optic sensors in the field of the Internet of Things,as well as promote the innovation and application of IoT. 展开更多
关键词 fiber-optic sensor Internet of Things Practical application
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Ultrasonic sensitivity-improved fiber-optic Fabry-Perot interferometer using a beam collimator and its application for ultrasonic imaging of seismic physical models 被引量:3
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作者 Zhi-Hua Shao Xue-Guang Qiao +1 位作者 Feng-Yi Chen and Qiang-Zhou Rongt 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第9期128-136,共9页
An ultrasonic sensitivity-improved fiber-optic Fabry-Perot interferometer (FPI) is proposed and employed for ultra- sonic imaging of seismic physical models (SPMs). The FPI comprises a flexible ultra-thin gold fil... An ultrasonic sensitivity-improved fiber-optic Fabry-Perot interferometer (FPI) is proposed and employed for ultra- sonic imaging of seismic physical models (SPMs). The FPI comprises a flexible ultra-thin gold film and the end face of a graded-index multimode fiber (MMF), both of which are enclosed in a ceramic tube. The MMF in a specified length can collimate the diverged light beam and compensate for the light loss inside the air cavity, leading to an increased spectral fringe visibility and thus a steeper spectral slope. By using the spectral sideband filtering technique, the collimated FP1 shows an improved ultrasonic response. Moreover, two-dimensional images of two SPMs are achieved in air by recon- structing the pulse-echo signals through using the time-of-flight approach. The proposed sensor with easy fabrication and compact size can be a good candidate for high-sensitivity and high-precision nondestructive testing of SPMs. 展开更多
关键词 fiber-optic sensor Fabry-Perot interferometer seismic physical model
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Using Brillouin fiber-optic ring laser to provide base station with uplink optical carrier in a 10 GHz radio over fiber system 被引量:1
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作者 陈昊硕 林如俭 叶家骏 《Journal of Shanghai University(English Edition)》 CAS 2009年第6期450-453,共4页
In this paper, a 10 GHz radio over fiber system is analyzed. The Brillouin fiber-optic ring laser is used in the center station (CS) to suppress the optical carrier for the modulation depth enhancement. Simultaneous... In this paper, a 10 GHz radio over fiber system is analyzed. The Brillouin fiber-optic ring laser is used in the center station (CS) to suppress the optical carrier for the modulation depth enhancement. Simultaneously, the Stockes wave induced by the Brillouin amplification injects and locks the Fabry-Perot (FP) laser to output a signal-mode optical source, which works as the uplink optical carrier. 展开更多
关键词 radio over fiber (RoF) Brillouin fiber-optic ring laser Fabry-Perot fp laser
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Review of Fiber-optic Distributed Acoustic Sensing Technology 被引量:4
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作者 Zhicheng ZHONG Kuiyuan LIU +1 位作者 Xue HAN Jun LIN 《Instrumentation》 2019年第4期47-58,共12页
A distributed optical-fiber acoustic sensor is an acoustic sensor that uses the optical fiber itself as a photosensitive medium,and is based on Rayleigh backscattering in an optical fiber.The sensor is widely used in ... A distributed optical-fiber acoustic sensor is an acoustic sensor that uses the optical fiber itself as a photosensitive medium,and is based on Rayleigh backscattering in an optical fiber.The sensor is widely used in the safety monitoring of oil and gas pipelines,the classification of weak acoustic signals,defense,seismic prospecting,and other fields.In the field of seismic prospecting,distributed optical-fiber acoustic sensing(DAS)will gradually replace the use of the traditional geophone.The present paper mainly expounds the recent application of DAS,and summarizes recent research achievements of DAS in resource exploration,intrusion monitoring,pattern recognition,and other fields and various DAS system structures.It is found that the high-sensitivity and long-distance sensing capabilities of DAS play a role in the extensive monitoring applications of DAS in engineering.The future application and development of DAS technology are examined,with the hope of promoting the wider application of the DAS technology,which benefits engineering and society. 展开更多
关键词 fiber-optic Distributed Acoustic sensor Rayleigh Backscatter GEOPHONE Φ-optical Time-domain Reflectometry
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Laboratory investigations of the thermal strain of frozen soils,using fiber-optic strain gauges based on Bragg gratings
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作者 Aleksey Marchenko Nicolai Vasiliev +2 位作者 Artem Nesterov Yuri Kondrashov Nikolay Belyaev 《Research in Cold and Arid Regions》 CSCD 2017年第3期192-196,共5页
Measurements of the thermal deformations of frozen soil samples were performed in the cold laboratory in temperature range from 0°C to-12°C.Fiber Bragg Gratings strain and temperature sensors were used to me... Measurements of the thermal deformations of frozen soil samples were performed in the cold laboratory in temperature range from 0°C to-12°C.Fiber Bragg Gratings strain and temperature sensors were used to measure the deformation and temperature inside the samples.A number of tests with the samples prepared from Kaolin and Cambrian clay saturated with fresh water,and prepared from fine and silt sand saturated with fresh or saline water,are performed.Thermal deformations of the samples are analyzed depending on the cyclic changes of their temperature. 展开更多
关键词 thermal EXPANSION FROZEN SOIL SAND CLAY fiber-optic sensors HYSTERESIS
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Reflective Ladder Topology Network Based on White Light Fiber-Optic Mach-Zehnder Interferometer
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作者 Song Li Ferhati Mokhtar Li-Bo Yuan 《Journal of Harbin Institute of Technology(New Series)》 EI CAS 2013年第3期63-66,共4页
In order to improve the multiplexing capability of the optical sensors based on the lower interferential optic fiber sensing technology and the white light fiber-optic Mach-Zehnder interferometer,reflective ladder top... In order to improve the multiplexing capability of the optical sensors based on the lower interferential optic fiber sensing technology and the white light fiber-optic Mach-Zehnder interferometer,reflective ladder topology network ( RLT) with tailored formula was proposed. The topology network consists of 6 rungs sensing elements linked by 5 couplers. Two cases with different choices of couplers were contrasted: one is equal coupling ratio,and the other is tailored coupling ratio. Through the simulation of these two cases,the detailed multiplexing capability was analyzed,and accordingly the experiments were also carried out. The simulation results showed that,the tailored formula enhances the multiplexing capability of the structure. In the first case, the maximum number of sensors which can be multiplexed is 8,and in the other case is 12 fiber optic sensors. The experimental results have a good agreement with numerical simulation results. Thus,it is considered expedient to incorporate RLT into large-scale building,grounds,bridges,dams,tunnels,highways and perimeter security. 展开更多
关键词 fiber-optic sensor white light interferometer MULTIPLEXING technique REFLECTIVE LADDER topology network TAILORED FORMULA
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Miniature optical fiber Fabry-Perot sensor based on PDMS end-cap structure
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作者 ZHAO Zihong LI Ruirui 《Journal of Measurement Science and Instrumentation》 2025年第3期334-340,共7页
This paper presents a method for fabricating a low-cost,highly reproducible miniature optical fiber Fabry-Perot(FP)sensor based on a polydimethylsiloxane(PDMS)end-cap structure.The FP cavity end-cap is formed by the o... This paper presents a method for fabricating a low-cost,highly reproducible miniature optical fiber Fabry-Perot(FP)sensor based on a polydimethylsiloxane(PDMS)end-cap structure.The FP cavity end-cap is formed by the optical fiber end-face and a PDMS droplet deposited onto it.The PDMS deposition is achieved by immersing the fiber end into pre-cured PDMS at a fixed speed,a process requiring careful control of PDMS viscosity and surface tension.By leveraging PDMS’s excellent thermal expansion coefficient,Poisson’s ratio,and other parameters,this method achieves high reproducibility via viscosity-optimized pre-curing,enhanced sensitivity for temperature measurements,and significant cost reduction versus commercial counterparts.Fiber FP sensors are increasingly widely used in biomedical and precision detection fields owing to their significant advantages,including small size,light weight,high sensitivity,and immunity to electromagnetic interference.In the fabrication of fiber FP sensors,using polymer materials is an effective technical approach.These polymers can be applied as coatings on the optical fiber end-face or as interlayer materials embedded between fibers to form the FP cavity structure,which not only significantly improves the overall sensor performance,but also enhances its sensitivity to changes in temperature,pressure,and refractive index.In the final part of this study,we successfully validated the exceptional performance of the PDMS end-cap based fiber FP sensor in detecting different temperatures conditions.Experimental results demonstrate a temperature sensitivity of 0.752 nm/℃for sensors with a 60-μm PDMS end-cap,further confirming the sensor’s reliability and efficiency in practical applications. 展开更多
关键词 fiber Fabry-Perot(fp)sensor polydimethylsiloxane(PDMS) carbon nanopartides(CNPs)
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基于FPS传感器的润滑油品质车载监测系统 被引量:2
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作者 付礼程 王宪成 +1 位作者 张更云 和穆 《润滑与密封》 CAS CSCD 北大核心 2012年第11期91-93,共3页
使用FPS油品传感器测量柴油机润滑油的黏度和介电常数,并将其标准化后建立润滑油的实车监测模型。使用该模型对某重型柴油机润滑油进行监测,所测量结果与使用石油产品运动黏度测定仪测量的结果一致。因此,采用该模型可监测柴油机润滑系... 使用FPS油品传感器测量柴油机润滑油的黏度和介电常数,并将其标准化后建立润滑油的实车监测模型。使用该模型对某重型柴油机润滑油进行监测,所测量结果与使用石油产品运动黏度测定仪测量的结果一致。因此,采用该模型可监测柴油机润滑系统的技术状况,为实车机油的在线监测和按质换油提供了一种新方法。 展开更多
关键词 fpS传感器 润滑油 介电常数 黏度
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FP型传感器局放声测系统的仿真研究 被引量:1
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作者 李敏 赵洪 徐明忠 《高电压技术》 EI CAS CSCD 北大核心 2008年第5期1027-1031,共5页
为在线测量变压器油中局部放电产生的超声波,建立了非本征型光纤法珀(FP)传感系统,传感器的传感单元FP腔由石英膜和尾纤端面组成,声波作用于石英膜上产生振动调制入射光波,通过解调含有局放信息的输出信号,可对变压器运行状态进行在线... 为在线测量变压器油中局部放电产生的超声波,建立了非本征型光纤法珀(FP)传感系统,传感器的传感单元FP腔由石英膜和尾纤端面组成,声波作用于石英膜上产生振动调制入射光波,通过解调含有局放信息的输出信号,可对变压器运行状态进行在线检测。针对FP传感器加工工艺要求高且工业上难以实现的问题,建立了光纤光栅解调系统,该系统具有全介质结构和抗电磁干扰特性。系统仿真和计算结果表明,增加石英膜半径和FP腔的端面反射率,可提高系统灵敏度;通过选择合适的FBG,可得到理想的系统传递函数。 展开更多
关键词 fp型传感器 光纤光栅 介质结构 声发射 局部放电 变压器
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用于高压测量的MEMS硅-玻光纤FP压力传感器 被引量:2
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作者 付雨薇 王睿楠 +3 位作者 唐文婷 杜喜昭 王伟 陈海滨 《中国光学(中英文)》 EI CAS CSCD 北大核心 2024年第4期771-779,共9页
研究了一种基于微机电系统(MEMS)技术用于高压测量的硅-玻光纤法布里-珀罗(FP)压力传感器。该传感器以硅材料作为敏感元件,将电感耦合等离子体(ICP)干法刻蚀后的单晶硅膜片和高硼硅玻璃阳极键合构成FP腔。传感头使用MEMS技术批量制造,... 研究了一种基于微机电系统(MEMS)技术用于高压测量的硅-玻光纤法布里-珀罗(FP)压力传感器。该传感器以硅材料作为敏感元件,将电感耦合等离子体(ICP)干法刻蚀后的单晶硅膜片和高硼硅玻璃阳极键合构成FP腔。传感头使用MEMS技术批量制造,结构稳定、抗过载能力强、在高压环境下不容易失效。实验结果表明,该传感器能够实现30 MPa的高压压力测量,灵敏度为46.94 nm/MPa,线性拟合度为0.99897,测量结果具有较好的一致性和可靠性,所设计的压力传感器在高压检测方面有很强的应用前景。 展开更多
关键词 MEMS 光纤传感器 压力测量 fp干涉
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Analysis of signal-obtaining error factor of sensor in gyro 被引量:5
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作者 LIU Jian-feng YUAN Gan-nan ZHAO Shi-jun 《Journal of Marine Science and Application》 2005年第2期28-33,共6页
The digital signal-obtaining for gyroscope is given. The single optic-fiber sensor via modulating intensity of light is used as measuring eonlponent . The influence on static transmission properties resulting from the... The digital signal-obtaining for gyroscope is given. The single optic-fiber sensor via modulating intensity of light is used as measuring eonlponent . The influence on static transmission properties resulting from the special working environnlent (e. g. cryogenic and vacuum) ,the measure error because of tile reflector shape of rotor,the abnormity of facula from sensor caused by the existence of engraving error,and tile fixing error of sensor and the error of machine tool's initial lignnlent are investigated. The mathematic model in every condition is founded, the simulation and relative experiments ale done and the outeome is analyzed. The mathematic model and method of compensating technology are studied and some relative experiments are made. The result of study is usefid to improvement of the signal-obtaining system. 展开更多
关键词 fiber-optic sensor signal-obtaining for gyrn cryogenic and vacuum measure error
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非本征型FP干涉光纤传感器的膜片性能研究 被引量:2
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作者 林一城 王文华 《传感器与微系统》 CSCD 北大核心 2023年第3期73-75,83,共4页
针对膜片材料参数对膜片形变式非本征型法布里—珀罗(FP)干涉光纤传感器性能的影响,研究了石英玻璃和单晶硅(100)膜片非本征FP干涉光纤传感器,用于中低压环境的测量。选定膜片材料有效半径425~500μm,厚度10~30μm,通过MATLAB对不同材... 针对膜片材料参数对膜片形变式非本征型法布里—珀罗(FP)干涉光纤传感器性能的影响,研究了石英玻璃和单晶硅(100)膜片非本征FP干涉光纤传感器,用于中低压环境的测量。选定膜片材料有效半径425~500μm,厚度10~30μm,通过MATLAB对不同材料的膜片进行仿真分析,研究了石英玻璃和单晶硅(100)膜片的主要参数有效半径、厚度对灵敏度与动态压力信号频率响应的影响。仿真结果表明:石英玻璃和单晶硅(100)都有比较适中的灵敏度和响应频率,在膜片有效半径和厚度相同的情况下,石英玻璃的灵敏度要高于单晶硅(100)的,而单晶硅(100)的频率响应高于石英玻璃。通过激光焊接石英玻璃膜片的FP干涉传感器,有效半径为500μm,厚度为30μm时,压力灵敏度的实测结果为5.77 nm/kPa,与仿真结果基本吻合。 展开更多
关键词 光纤传感器 法布里—珀罗干涉 膜片 灵敏度 频率响应
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