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Robust ferroelectricity in ultrathin BaTiO_(3)films deposited at room temperature
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作者 Cong-Meng Li Hui Li +2 位作者 Jian Chen Ming-Kai Li Hong-Wei Gu 《Rare Metals》 2025年第7期5106-5111,共6页
Ferroelectric materials are widely applied in the ferroelectronic devices,photovoltaics,and so on.Ultrathin ferroelectric thin films are highly desired for their applications,which still remain a challenge.In this wor... Ferroelectric materials are widely applied in the ferroelectronic devices,photovoltaics,and so on.Ultrathin ferroelectric thin films are highly desired for their applications,which still remain a challenge.In this work,the ultrathin barium titanate(BaTiO_(3),BTO)films are deposited directly on the fluorine-doped tin oxide glass(SnO_(2):F,FTO)substrates by radio frequency magnetron sputtering method at different temperatures.All BTO ultrathin films exhibit strong ferroelectric properties.Interestingly,BTO thin films deposited at room temperature(RT)also exhibit robust ferroelectricity.The polar domains are switched reversibly with a phase degree of~180°by piezoelectric force microscopy for the BTO thin films deposited at room temperature,attributing to the strain and ion migration. 展开更多
关键词 radio frequency magnetron sputtering method barium titanate batio bto films ferroelectronic devicesphotovoltaicsand ferroelectric propertiesinterestinglybto ferroelectric materials ultrathin films ferroelectric thin films barium titanate
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