This paper presents and analyzes a notch observed in MEMS （micro electric mechanical system） filter characterization using the difference method. The difference method takes advantage of the cancellation of parasiti...This paper presents and analyzes a notch observed in MEMS （micro electric mechanical system） filter characterization using the difference method. The difference method takes advantage of the cancellation of parasitic feed-through, which could potentially obscure the relatively small motional signal and lead to failure in character- ization of the MEMS components. In this paper, typical clamped-clamped beam MEMS filters are fabricated and characterized with the difference method. Using the difference method a better performance is obtained but a notch is induced as a potential problem. Analysis is performed and reveals the mismatch of the two differential excitation signals in measurement circuit contributes to the notch. The relevant circuit design rule is also proposed to avoid the notch in the difference method.展开更多
Nonlinearity caused by the clock feed-through of a bootstrapped switch and its compensation techniques are analyzed. All kinds of clock feed-through compensation configurations and their drawbacks are also investigate...Nonlinearity caused by the clock feed-through of a bootstrapped switch and its compensation techniques are analyzed. All kinds of clock feed-through compensation configurations and their drawbacks are also investigated. It is pointed out that the delay path match of the clock boosting circuit is the critical factor that affects the effectiveness of clock feed-through compensation. Based on that, a new clock feed-through compensation configuration and corresponding bootstrapped switch are presented and designed optimally with the UMC mixed-mode/RF 0.18 μm 1P6M P-sub twin-well CMOS process by orientating and elaborately designing the switch MOSFETs that influence the delay path match of the clock boosting circuit. HSPICE simulation results show that the proposed clock feedthrough compensation configuration can not only enhance the sampling accuracy under variations of process, power supply voltage, temperature and capacitors but also decrease the even harmonic, high-order odd harmonic and THD on the whole effectively.展开更多
由于硅微陀螺仪材料和加工工艺以及电路上的非理想因素,驱动信号会对敏感检测端产生串扰。为抑制此种串扰,降低驱动激励幅度,采用了基于参数激励法的陀螺驱动模态激励系统。在锁相环控制中新增一个压控振荡器模块,用于输出稳幅的二倍谐...由于硅微陀螺仪材料和加工工艺以及电路上的非理想因素,驱动信号会对敏感检测端产生串扰。为抑制此种串扰,降低驱动激励幅度,采用了基于参数激励法的陀螺驱动模态激励系统。在锁相环控制中新增一个压控振荡器模块,用于输出稳幅的二倍谐振频率激励信号,即参数激励信号。将此信号与驱动激励信号一同对驱动激励电极进行激励,达到了降低刚度系数来减小驱动对敏感电馈通干扰的目的。实验结果表明,参数激励法对陀螺仪进行激励,将陀螺仪敏感输出信号幅度从141.25 m V降至38.75 m V,Allan方差零偏不稳定性从6.864 (°)/h降至4.316 (°)/h。表明了参数激励法对陀螺仪性能具有一定的提升作用。展开更多
基金Project supported by the National Natural Science Foundation of China(Nos.61274001,61006073,61234007)the National Hi-Tech Research and Development Program of China(No.2006AA04Z339)
文摘This paper presents and analyzes a notch observed in MEMS （micro electric mechanical system） filter characterization using the difference method. The difference method takes advantage of the cancellation of parasitic feed-through, which could potentially obscure the relatively small motional signal and lead to failure in character- ization of the MEMS components. In this paper, typical clamped-clamped beam MEMS filters are fabricated and characterized with the difference method. Using the difference method a better performance is obtained but a notch is induced as a potential problem. Analysis is performed and reveals the mismatch of the two differential excitation signals in measurement circuit contributes to the notch. The relevant circuit design rule is also proposed to avoid the notch in the difference method.
基金supported by the National Natural Science Foundation of China(No.60206006)the New Century Excellent Talents of Ministry of Education of China(No.NCET-05-0851)+1 种基金the Cultivation Fund of the Key Scientific and Technical Innovation Project,Ministry of Education of China Program(No.708083)the Applied Materials Innovation Fund(No.XA-AM-200701)
文摘Nonlinearity caused by the clock feed-through of a bootstrapped switch and its compensation techniques are analyzed. All kinds of clock feed-through compensation configurations and their drawbacks are also investigated. It is pointed out that the delay path match of the clock boosting circuit is the critical factor that affects the effectiveness of clock feed-through compensation. Based on that, a new clock feed-through compensation configuration and corresponding bootstrapped switch are presented and designed optimally with the UMC mixed-mode/RF 0.18 μm 1P6M P-sub twin-well CMOS process by orientating and elaborately designing the switch MOSFETs that influence the delay path match of the clock boosting circuit. HSPICE simulation results show that the proposed clock feedthrough compensation configuration can not only enhance the sampling accuracy under variations of process, power supply voltage, temperature and capacitors but also decrease the even harmonic, high-order odd harmonic and THD on the whole effectively.
文摘由于硅微陀螺仪材料和加工工艺以及电路上的非理想因素,驱动信号会对敏感检测端产生串扰。为抑制此种串扰,降低驱动激励幅度,采用了基于参数激励法的陀螺驱动模态激励系统。在锁相环控制中新增一个压控振荡器模块,用于输出稳幅的二倍谐振频率激励信号,即参数激励信号。将此信号与驱动激励信号一同对驱动激励电极进行激励,达到了降低刚度系数来减小驱动对敏感电馈通干扰的目的。实验结果表明,参数激励法对陀螺仪进行激励,将陀螺仪敏感输出信号幅度从141.25 m V降至38.75 m V,Allan方差零偏不稳定性从6.864 (°)/h降至4.316 (°)/h。表明了参数激励法对陀螺仪性能具有一定的提升作用。
