This paper reports on the fabrication and sensing characteristics of Polyimide-based humidity sensor,based on that,a new integrated circuit of humidity measurement has been designed.It is a novel capacitive-type syste...This paper reports on the fabrication and sensing characteristics of Polyimide-based humidity sensor,based on that,a new integrated circuit of humidity measurement has been designed.It is a novel capacitive-type systems on a chip structure using the MEMS process.The results show that the new sensor presents sensing characteristics over a humidity range from 10%～70% RH at 20℃,and the sensor is able to fabricated together with ICs technology.The result shows that integration of humidity sensor with integrated circuit of humidity measurement is considerably easier when they are built in sensing groove.The appeal of a new structure like this brings the possibility of applications that would require the flexibility of simple screen printing.展开更多
For the purpose of improving the precision of the inertial guidance system,it is necessary to enhance the accuracy of the accelerometer.Combining the micro-fabrication processes with resonant sensor technology,a high-...For the purpose of improving the precision of the inertial guidance system,it is necessary to enhance the accuracy of the accelerometer.Combining the micro-fabrication processes with resonant sensor technology,a high-resolution inertial-grade novel micro resonant accelerometer is studied.Based on the detecting theory of the resonant sensors,the accelerometer is designed,fabricated,and tested.The accelerometer consists of one proofmass,two micro leverages and two double-ended-tuning-fork （DETF） resonators.The sensing principle of this accelerometer is based on that the natural frequency of the DETF resonator shifts with its axial load which is caused by inertial force.The push-pull configuration of the DETF is for temperature compensation.The two-stage micro leverage mechanisms are employed to amplify the force and increase the sensitivity of the accelerometer.The micro leverage and the resonator are modeled for static analysis and nonlinear modal analysis via theory method and finite element method （FEM）,respectively.The geometrical parameters of them are optimized.The amplification factor of the leverage is 102,and the sensitivity of the resonator on theory is about 62 Hz/g.The samples of the accelerometer are fabricated with deep reactive ion etching （DRIE） technology which can get a high-aspect ratio structure for contributing a greater sensing-capacitance.The measuring results of the samples by scanning electron microscopy （SEM） show that the process is feasible,because of the complete structure,the sound combs and micro leverages,and the acceptable errors.The frequency of the resonator and the sensitivity of the accelerometer are tested via printed circuit board （PCB）,respectively.The result of the test shows that the frequency of the push-resonator is about 54 530 Hz and the sensitivity of the accelerometer is about 55 Hz/g.The amplification factor of the leverage is calculated more accurately because the coupling of the two stages leverage is considered during derivation of the analysis formula.In addition,the novel differential structure of the accelerometer can greatly improve the sensitivity of the accelerometers.展开更多
We present an all polymer asymmetric Mach-Zehnder interferometer （AMZI） waveguide sensor based on imprinting bonding and laser polishing method. The fabrication methods are compatible with high accuracy waveguide se...We present an all polymer asymmetric Mach-Zehnder interferometer （AMZI） waveguide sensor based on imprinting bonding and laser polishing method. The fabrication methods are compatible with high accuracy waveguide sensing structure. The rectangle waveguide structure of this sensor has three sensing surfaces contacting the test media, and its sensing accuracy can be increased 5 times compared with that of one surface sensing structure. An AMZI device structure is designed. The single mode condition, the length of the sensing arm, and the length deviation between the sensing arm and the reference arm are optimized. The length deviation is optimized to be 19.8 μm in a refractive index range between 1.470 and 1.545. We fabricate the AMZI waveguide by lithography and wet etching method. The imprinting bonding and laser polishing method is proposed and investigated. The insertion loss is between-80.36 dB and-10.63 dB. The average and linear sensitivity are 768.1 dB/RIU and 548.95 dB/RIU, respectively. And the average and linear detection resolution of the sensor are 1.3010-6 RIU （RIU：refractive index unit） and 1.8210-5 RIU, respectively. This sensor has a fast and cost-effective fabrication process which can be used in the cases of requiring portability and disposability.展开更多
In this paper,the relations between the parameters of stitch structure and the needle penetra-tion force,and the method by using the needle penetration force detected to evaluate the looplength and evenness of knitted...In this paper,the relations between the parameters of stitch structure and the needle penetra-tion force,and the method by using the needle penetration force detected to evaluate the looplength and evenness of knitted fabric indirectly are analysed and discussed.A microcomputer system with a needle sensor and author’s program are used as a pick up setcombined with a data analysis system,for sampling and analysing the needle penetration forcedata.A lot of experimental research work has been done for knitted fabric of some kinds of knittedstitch and loop length.As a summary of this study,some conclusions can be drawn from the linearregression between the needle penetration force and the loop length.Then,the size and evenness ofthe loop length of knitted fabric can be indicated indirectly by detecting the value and variance ofneedle penetration force.It offers an effective method to detect and evaluate the evenness of knit-ted fabric with an efficiently high speed.展开更多
基金This work was supported by National Natural Science Foundation of China, Under Grant No.（60676044）
文摘This paper reports on the fabrication and sensing characteristics of Polyimide-based humidity sensor,based on that,a new integrated circuit of humidity measurement has been designed.It is a novel capacitive-type systems on a chip structure using the MEMS process.The results show that the new sensor presents sensing characteristics over a humidity range from 10%～70% RH at 20℃,and the sensor is able to fabricated together with ICs technology.The result shows that integration of humidity sensor with integrated circuit of humidity measurement is considerably easier when they are built in sensing groove.The appeal of a new structure like this brings the possibility of applications that would require the flexibility of simple screen printing.
文摘For the purpose of improving the precision of the inertial guidance system,it is necessary to enhance the accuracy of the accelerometer.Combining the micro-fabrication processes with resonant sensor technology,a high-resolution inertial-grade novel micro resonant accelerometer is studied.Based on the detecting theory of the resonant sensors,the accelerometer is designed,fabricated,and tested.The accelerometer consists of one proofmass,two micro leverages and two double-ended-tuning-fork （DETF） resonators.The sensing principle of this accelerometer is based on that the natural frequency of the DETF resonator shifts with its axial load which is caused by inertial force.The push-pull configuration of the DETF is for temperature compensation.The two-stage micro leverage mechanisms are employed to amplify the force and increase the sensitivity of the accelerometer.The micro leverage and the resonator are modeled for static analysis and nonlinear modal analysis via theory method and finite element method （FEM）,respectively.The geometrical parameters of them are optimized.The amplification factor of the leverage is 102,and the sensitivity of the resonator on theory is about 62 Hz/g.The samples of the accelerometer are fabricated with deep reactive ion etching （DRIE） technology which can get a high-aspect ratio structure for contributing a greater sensing-capacitance.The measuring results of the samples by scanning electron microscopy （SEM） show that the process is feasible,because of the complete structure,the sound combs and micro leverages,and the acceptable errors.The frequency of the resonator and the sensitivity of the accelerometer are tested via printed circuit board （PCB）,respectively.The result of the test shows that the frequency of the push-resonator is about 54 530 Hz and the sensitivity of the accelerometer is about 55 Hz/g.The amplification factor of the leverage is calculated more accurately because the coupling of the two stages leverage is considered during derivation of the analysis formula.In addition,the novel differential structure of the accelerometer can greatly improve the sensitivity of the accelerometers.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.61605057,61475061,and 61575076)the Science and Technology Development Plan of Jilin Province,China(Grant No.20140519006JH)the Excellent Youth Foundation of Jilin Province,China(Grant No.20170520158JH)
文摘We present an all polymer asymmetric Mach-Zehnder interferometer （AMZI） waveguide sensor based on imprinting bonding and laser polishing method. The fabrication methods are compatible with high accuracy waveguide sensing structure. The rectangle waveguide structure of this sensor has three sensing surfaces contacting the test media, and its sensing accuracy can be increased 5 times compared with that of one surface sensing structure. An AMZI device structure is designed. The single mode condition, the length of the sensing arm, and the length deviation between the sensing arm and the reference arm are optimized. The length deviation is optimized to be 19.8 μm in a refractive index range between 1.470 and 1.545. We fabricate the AMZI waveguide by lithography and wet etching method. The imprinting bonding and laser polishing method is proposed and investigated. The insertion loss is between-80.36 dB and-10.63 dB. The average and linear sensitivity are 768.1 dB/RIU and 548.95 dB/RIU, respectively. And the average and linear detection resolution of the sensor are 1.3010-6 RIU （RIU：refractive index unit） and 1.8210-5 RIU, respectively. This sensor has a fast and cost-effective fabrication process which can be used in the cases of requiring portability and disposability.
文摘In this paper,the relations between the parameters of stitch structure and the needle penetra-tion force,and the method by using the needle penetration force detected to evaluate the looplength and evenness of knitted fabric indirectly are analysed and discussed.A microcomputer system with a needle sensor and author’s program are used as a pick up setcombined with a data analysis system,for sampling and analysing the needle penetration forcedata.A lot of experimental research work has been done for knitted fabric of some kinds of knittedstitch and loop length.As a summary of this study,some conclusions can be drawn from the linearregression between the needle penetration force and the loop length.Then,the size and evenness ofthe loop length of knitted fabric can be indicated indirectly by detecting the value and variance ofneedle penetration force.It offers an effective method to detect and evaluate the evenness of knit-ted fabric with an efficiently high speed.
