This paper reports on the fabrication and sensing characteristics of Polyimide-based humidity sensor,based on that,a new integrated circuit of humidity measurement has been designed.It is a novel capacitive-type syste...This paper reports on the fabrication and sensing characteristics of Polyimide-based humidity sensor,based on that,a new integrated circuit of humidity measurement has been designed.It is a novel capacitive-type systems on a chip structure using the MEMS process.The results show that the new sensor presents sensing characteristics over a humidity range from 10%～70% RH at 20℃,and the sensor is able to fabricated together with ICs technology.The result shows that integration of humidity sensor with integrated circuit of humidity measurement is considerably easier when they are built in sensing groove.The appeal of a new structure like this brings the possibility of applications that would require the flexibility of simple screen printing.展开更多
基金This work was supported by National Natural Science Foundation of China, Under Grant No.（60676044）
文摘This paper reports on the fabrication and sensing characteristics of Polyimide-based humidity sensor,based on that,a new integrated circuit of humidity measurement has been designed.It is a novel capacitive-type systems on a chip structure using the MEMS process.The results show that the new sensor presents sensing characteristics over a humidity range from 10%～70% RH at 20℃,and the sensor is able to fabricated together with ICs technology.The result shows that integration of humidity sensor with integrated circuit of humidity measurement is considerably easier when they are built in sensing groove.The appeal of a new structure like this brings the possibility of applications that would require the flexibility of simple screen printing.
