Distributed pressure sensor array is a promising approach for the estimation of flight parameters for small unmanned aerial vehicles.Current flexible pressure sensor arrays are conventionally subjected to limited sens...Distributed pressure sensor array is a promising approach for the estimation of flight parameters for small unmanned aerial vehicles.Current flexible pressure sensor arrays are conventionally subjected to limited sensor resolution,poor bending flexibility,and inadequate packaging protection,resulting in insufficient precision for flight parameter estimation.Here we present a high-resolution differential pressure sensor array using a calorimetric measurement method and a multilayer polyimide bonding technique.The proposed differential pressure sensor array reaches a detection limit of 36.5 mPa over a range of 500 Pa and shows high repeatability when attached to varying curved surfaces.In addition,a superhydrophobic packaging is integrated into the sensor fabrication process,endowing it with waterproof capability.Utilizing a multilayer perceptron neural network,we demonstrated the function of the sensor array in estimating airspeeds and angle of attacks,achieving average solving errors of 0.15 m/s and 0.37°,respectively.展开更多
基金supported financially by National Natural Science Foundation of China(Nos.T2121003,U23A20638.)the National Key Research and Development Program of China(2023YFB3208000,2023YFB3208001).
文摘Distributed pressure sensor array is a promising approach for the estimation of flight parameters for small unmanned aerial vehicles.Current flexible pressure sensor arrays are conventionally subjected to limited sensor resolution,poor bending flexibility,and inadequate packaging protection,resulting in insufficient precision for flight parameter estimation.Here we present a high-resolution differential pressure sensor array using a calorimetric measurement method and a multilayer polyimide bonding technique.The proposed differential pressure sensor array reaches a detection limit of 36.5 mPa over a range of 500 Pa and shows high repeatability when attached to varying curved surfaces.In addition,a superhydrophobic packaging is integrated into the sensor fabrication process,endowing it with waterproof capability.Utilizing a multilayer perceptron neural network,we demonstrated the function of the sensor array in estimating airspeeds and angle of attacks,achieving average solving errors of 0.15 m/s and 0.37°,respectively.