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Tunable energy transfer in coupled nonlinear MEMS resonators under parametric modulation for enhanced sensor performance
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作者 Guijie Wang Shenglin Hou +3 位作者 Najib Kacem Lifang Ran Xiaolong Wen Ashwin Seshia 《Microsystems & Nanoengineering》 2025年第6期217-227,共11页
Coherent control of coupled microelectromechanical resonators within the framework of classical nonlinear dynamicsis of relevance in fundamental studies and the development of high-performance sensors. Coherent contro... Coherent control of coupled microelectromechanical resonators within the framework of classical nonlinear dynamicsis of relevance in fundamental studies and the development of high-performance sensors. Coherent control can beachieved through the parametric modulation of one of the two coupled resonators. However, microelectromechanicalresonators are commonly operated in the nonlinear regime, and a thorough description of key phenomena involvingparametric modulation of coupled resonators, such as sideband generation and mode splitting, remains limited in thisregime. We use a weakly coupled double-ended tuning fork (DETF) resonator under strong parametric modulation todemonstrate tunable energy transfer and mode interactions governed by classical analogs of well-establishedquantum phenomena. The method uses a red-sideband parametric signal to manipulate the coupling between twoadjacent modes dynamically. This approach is theoretically assessed thanks to a nonlinear reduced-order model thattakes into account the modal interactions and virtual coupling induced by the parametric modulation. Furthermore,the proof of concept of the proposed tuning mechanism is validated on a DC electric field sensor with enhancedsensitivity. The nonlinear parametrically driven sensor exhibits two orders of magnitude sensitivity boost whilemaintaining a broad measurement range. While our investigation focuses on coupled microresonator systemsmodeled within a classical framework, the observed dynamics and the simulation extend to the advancements ofother cognate fields, such as optomechanics and two-level systems. 展开更多
关键词 coupled resonators coherent control classical nonlinear dynamicsis parametric modulation coupled nonlinear MEMS resonators microelectromechanical resonators sideband gene parametric modulation one two
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