Measurements of dust plasma parameters were carried out in the discharges of （SiH4/C2H4/Ar） mixtures. Dust particles were formed in the capacitively coupled radio-frequency discharge of these reactive mixtures in a ...Measurements of dust plasma parameters were carried out in the discharges of （SiH4/C2H4/Ar） mixtures. Dust particles were formed in the capacitively coupled radio-frequency discharge of these reactive mixtures in a cylindrical chamber. Langmuir probe was employed for diagnosing and measuring the important plasma parameters such as electron density and electron temperature. The results showed that the electron density dropped, and in contrast the electron temperature rose when the dust particles formed. The curves of the electron density and temperature versus the RF power and pressure were presented and analysed. Further, it was found that the wriations of electron temperature and the size of dust void with the RF power followed the similar trends. These trends might be useful for understanding more about the characteristics of dusty voids.展开更多
Voids and complex cloud patterns have been observed in a radio frequency (rf) discharge dusty plasma system. The structures and behaviors of these patterns were investigated in two- and three-dimensions by shifting an...Voids and complex cloud patterns have been observed in a radio frequency (rf) discharge dusty plasma system. The structures and behaviors of these patterns were investigated in two- and three-dimensions by shifting an il- lumination laser sheet beam up and down. Two-dimensional (2D) circular voids, thin ring voids, and their coexistent voids were observed at the early stage of particle growth. The cor- responding three-dimensional (3D) structures were dome, shell, and their coexistent voids, respectively. The complex fluid-like cloud patterns occurred above the 3D dome voids. The origin and evolution process of the complex dust cloud patterns need a further theoretical explanation.展开更多
基金supported by the National Natural Science Foundation of China (Grant Nos 10505005 and 10775026)
文摘Measurements of dust plasma parameters were carried out in the discharges of （SiH4/C2H4/Ar） mixtures. Dust particles were formed in the capacitively coupled radio-frequency discharge of these reactive mixtures in a cylindrical chamber. Langmuir probe was employed for diagnosing and measuring the important plasma parameters such as electron density and electron temperature. The results showed that the electron density dropped, and in contrast the electron temperature rose when the dust particles formed. The curves of the electron density and temperature versus the RF power and pressure were presented and analysed. Further, it was found that the wriations of electron temperature and the size of dust void with the RF power followed the similar trends. These trends might be useful for understanding more about the characteristics of dusty voids.
文摘Voids and complex cloud patterns have been observed in a radio frequency (rf) discharge dusty plasma system. The structures and behaviors of these patterns were investigated in two- and three-dimensions by shifting an il- lumination laser sheet beam up and down. Two-dimensional (2D) circular voids, thin ring voids, and their coexistent voids were observed at the early stage of particle growth. The cor- responding three-dimensional (3D) structures were dome, shell, and their coexistent voids, respectively. The complex fluid-like cloud patterns occurred above the 3D dome voids. The origin and evolution process of the complex dust cloud patterns need a further theoretical explanation.
