期刊文献+
共找到1,457篇文章
< 1 2 73 >
每页显示 20 50 100
Investigating the effects of geothermally active temperature conditions on fully grouted rock bolts with distributed fiber optic sensors
1
作者 Chuyue(Chelsey)Guo Kieran Moore Nicholas Vlachopoulos 《Journal of Rock Mechanics and Geotechnical Engineering》 2025年第11期6805-6820,共16页
A series of laboratory pull-out tests was conducted to study the effects of temperature on the performance and behaviours of fully grouted rock bolt specimens cured within a specific temperature range,as well as for d... A series of laboratory pull-out tests was conducted to study the effects of temperature on the performance and behaviours of fully grouted rock bolt specimens cured within a specific temperature range,as well as for different durations.Each specimen consisted of a 20M rebar bolt at 1300 mm embedment length grouted inside a Schedule 80 steel pipe using Portland cement grout at a 0.4 water-to-cement ratio.Two temperatures(20℃and 45℃)were explored to investigate the effects of geothermally active temperature conditions on fully grouted rock bolts.Distributed fiber optic sensors were employed to provide continuous strain profiles along the entire embedment length to observe micro-mechanisms and monitor internal specimen temperature change during testing.The specimens cured at 45℃generally resulted in higher grout UCS(in certain cases 25%e50%higher)compared to those at 20℃;the ultimate capacity was not significantly impacted as the specimens'embedment length allowed full development of the rock bolt's capacity.The resulting strain profile trends showed generally higher strains experienced by the shorter(i.e.3-d)curing duration specimens under both curing temperatures compared to long-term curing.The 45℃specimens generally experienced lower strains and faster strain profile attenuation compared to specimens cured at 20℃.Understanding these effects and further analysis of FGRB specimen behaviours over time provide insights for mobilized and critical embedment lengths,capacity development,and support system stabilization.This paper highlights the results of this study and aims to bridge selected gaps in existing literature with a view to aid practitioners. 展开更多
关键词 Fully grouted rock bolt fiber optic technology Geothermally active temperature Hot temperature effects Stress distribution Pull-out test
在线阅读 下载PDF
Achieving 30-cm spatial resolution over 6.0 km in Raman distributed optical fiber sensing using chaotic pulse cluster demodulation
2
作者 Jian Li Zijia Cheng +2 位作者 Bowen Fan Xin Huang Mingjiang Zhang 《Advanced Photonics Nexus》 2025年第4期106-112,共7页
The principle of optical time-domain reflection localization limits the sensing spatial resolution of Raman distributed optical fiber sensing.We provide a solution for a Raman distributed optical fiber sensing system ... The principle of optical time-domain reflection localization limits the sensing spatial resolution of Raman distributed optical fiber sensing.We provide a solution for a Raman distributed optical fiber sensing system with kilometer-level sensing distance and submeter spatial resolution.Based on this,we propose a Raman distributed optical fiber sensing scheme based on chaotic pulse cluster demodulation.Chaotic pulse clusters are used as the probe signal,in preference to conventional pulsed or chaotic single-pulse lasers.Furthermore,the accurate positioning of the temperature variety region along the sensing fiber can be realized using chaotic pulse clusters.The proposed demodulation scheme can enhance the signal-to-noise ratio by improving the correlation between the chaotic reference and the chaotic Raman anti-Stokes scattering signals.The experiment achieved a sensing spatial resolution of 30 cm at a distributed temperature-sensing distance of∼6.0 km.Furthermore,we explored the influence of chaotic pulse width and detector bandwidth on the sensing spatial resolution.In addition,the theoretical experiments proved that the sensing spatial resolution in the proposed scheme was independent of the pulse width and sensing distance. 展开更多
关键词 chaotic pulse cluster Raman scattering distributed fiber optic sensing temperature demodulation
在线阅读 下载PDF
Network Integration of Distributed Optical Fiber Temperature Sensor
3
作者 Gui-Yan Li Hong-Lin Liu Zai-Xuan Zhang 《Journal of Electronic Science and Technology of China》 2008年第4期399-401,共3页
The integration of distributed optical fiber temperature sensor with supervisory control and data acquisition (SCADA) system is proposed and implemented. In the implementation of the integration, both the compatibil... The integration of distributed optical fiber temperature sensor with supervisory control and data acquisition (SCADA) system is proposed and implemented. In the implementation of the integration, both the compatibility with traditional system and the characteristics of distributed optical fiber temperature sensor is considered before Modbus TCP/IP protocol is chosen. The protocol is implemented with open source component Indy. The Modbus TCP/IP protocol used in the system is proved to be fast and robust. 展开更多
关键词 distributed optical fiber temperature sensor Modbus TCP/IP supervisory control and dataacquisition (SCADA).
在线阅读 下载PDF
Performance evaluation of two types of heated cables for distributedtemperature sensing-based measurement of soil moisture content 被引量:13
4
作者 Dingfeng Cao Bin Shi +3 位作者 Honghu Zhu Kun Zhu Guangqing Wei Kai Gu 《Journal of Rock Mechanics and Geotechnical Engineering》 SCIE CSCD 2016年第2期212-217,共6页
Distributed temperature sensing(DTS)using heated cables has been recently developed for distributed monitoring of in-situ soil moisture content.In this method,the thermal and electrical properties of heated cables hav... Distributed temperature sensing(DTS)using heated cables has been recently developed for distributed monitoring of in-situ soil moisture content.In this method,the thermal and electrical properties of heated cables have a significant influence on the measurement accuracy of soil moisture content.In this paper,the performances of two heated cables,i.e.the carbon-fiber heated cable(CFHC)and the metalnet heated cable(MNHC),are studied in the laboratory.Their structures,uniformity in the axial direction,measurement accuracy and suitability are evaluated.The test results indicate that the MNHC has a better uniformity in the axial direction than CFHC.Both CFHC and MNHC have high measurement accuracy.The CFHC is more suitable for short-distance measurement(500 m),while the MNHC can be used for longdistance measurement(>500 m). 展开更多
关键词 Soil moisture content Carbon-fiber heated cable(CFHC) Metal-net heated cable(MNHC) distributed measurement optical fiber
在线阅读 下载PDF
Optical fiber sensor by cascading long period fiber grating with FBG for double parameters measurement 被引量:4
5
作者 张雯 娄小平 +1 位作者 董明利 祝连庆 《Optoelectronics Letters》 EI 2017年第5期372-375,共4页
An optical fiber sensor for strain and temperature measurement based on long period fiber grating(LPFG) cascaded with fiber Bragg grating(FBG) structure has been proposed and realized both theoretically and experiment... An optical fiber sensor for strain and temperature measurement based on long period fiber grating(LPFG) cascaded with fiber Bragg grating(FBG) structure has been proposed and realized both theoretically and experimentally. Theoretical analysis shows that two microstructures with similar sensitivities cannot be used for double parameters measurement. The LPFG is micromachined by the CO_2 laser, and the FBG is micromachined by the excimer laser. For the validation and comparison, two FBGs and one LPFG are cascaded with three transmission valleys, namely FBG1 valley at 1 536.3 nm, LPFG valley at 1 551.2 nm, and FBG2 valley at 1 577.3 nm. The temperature and strain characteristics of the proposed sensor are measured at 45—70 °C and 250—500 με, respectively. The sensitivity matrix is determined by analyzing wavelength shifts and parameter response characterization of three different dips. The proposed optical fiber sensor based on LPFG cascaded with FBG structure can be efficiently used for double parameters measurement with promising application prospect and great research reference value. 展开更多
关键词 Carbon dioxide lasers Diffraction gratings Excimer lasers fibers LANDFORMS optical fibers Parameter estimation temperature measurement
原文传递
Temperature and acoustic impedance simultaneous sensor based on forward stimulated Brillouin scattering in highly nonlinear fiber 被引量:1
6
作者 Shilong Liu Yang Li +2 位作者 Hongbin Hu Bing Sun Zuxing Zhang 《Chinese Physics B》 2025年第7期394-400,共7页
A temperature and acoustic impedance simultaneous sensor based on forward stimulated Brillouin scattering(FSBS)in highly nonlinear fiber(HNLF)with high sensitivity and high accuracy is proposed and demonstrated in thi... A temperature and acoustic impedance simultaneous sensor based on forward stimulated Brillouin scattering(FSBS)in highly nonlinear fiber(HNLF)with high sensitivity and high accuracy is proposed and demonstrated in this paper.High-order acoustic modes(HOAMs)are used to achieve individual or simultaneous measurement of the two parameters.Transverse acoustic waves(TAWs)involved in the FSBS process can efficiently sense the mechanical or environmental changes outside the fiber cladding,which will be reflected in a linear shift of the acoustic resonance frequency.By analyzing the frequencies of specific scattering peaks,the temperature and acoustic impedance outside the fiber cladding can be obtained simultaneously.The highest measured temperature and acoustic impedance sensitivities are 184.93 k Hz/℃and444.56 k Hz/MRayl,and the measurement accuracies are 0.09℃and 0.009 MRayl,respectively,which are both at desirable levels.We believe this work can provide potential application solutions for sensing fields involving temperature or acoustic impedance measurements. 展开更多
关键词 forward stimulated Brillouin scattering(FSBS) fiber optic sensor temperature sensor acoustic impedance sensor simultaneous measurement
原文传递
A distributed measurement method for in-situ soil moisture content by using carbon-fiber heated cable 被引量:15
7
作者 Dingfeng Cao Bin Shi +3 位作者 Honghu Zhu Guangqing Wei Shen-En Chen Junfan Yan 《Journal of Rock Mechanics and Geotechnical Engineering》 SCIE CSCD 2015年第6期700-707,共8页
Moisture content is a fundamental physical index that quantifies soil property and is closely associatedwith the hydrological, ecological and engineering behaviors of soil. To measure in-situ soil moisturecontents, a ... Moisture content is a fundamental physical index that quantifies soil property and is closely associatedwith the hydrological, ecological and engineering behaviors of soil. To measure in-situ soil moisturecontents, a distributed measurement system for in-situ soil moisture content (SM-DTS) is introduced.The system is based on carbon-fiber heated cable (CFHC) technology that has been developed to enhancethe measuring accuracy of in-situ soil moisture content. Using CFHC technique, a temperature characteristicvalue (Tt) can be defined from temperatureetime curves. A relationship among Tt, soil thermalimpedance coefficient and soil moisture content is then established in laboratory. The feasibility of theSM-DTS technology to provide distributed measurements of in-situ soil moisture content is verifiedthrough field tests. The research reported herein indicates that the proposed SM-DTS is capable ofmeasuring in-situ soil moisture content over long distances and large areas. 展开更多
关键词 In-situ soil moisture content distributed measurement Carbon-fiber heated cable (CFHC) fiber-optic sensing
在线阅读 下载PDF
The Design of Fiber Bragg Grating Temperature Measurement System Based on Labview 被引量:1
8
作者 Peng Gao Shengpeng Wan +3 位作者 Yuhua Xiong Fangyu Hu Haiming Wen Yuanding Ma 《Journal of Computer and Communications》 2013年第7期27-31,共5页
The paper made a research on the fiber Bragg grating sensor demodulation system, which was based on virtual instrument labview and it developed a friendly upper monitor software. Based on the LM algorithm, the softwar... The paper made a research on the fiber Bragg grating sensor demodulation system, which was based on virtual instrument labview and it developed a friendly upper monitor software. Based on the LM algorithm, the software realized rapid and accurate spectral data fitting, improving dynamic characteristics and measuring precision of the system. Depending on different fiber Bragg grating sensors, it can realize flexible calibration. It has the functions of collection, display and data storage, which can flexibly design alarm threshold according to the practical application. The fiber Bragg grating sensors can be identified by the software so that the distributed network, with large capacity optical fiber sensing, can be achieved. 展开更多
关键词 optical fiber SENSING LABVIEW temperature measurement UPPER MONITOR
在线阅读 下载PDF
Simulation of distributed optical fiber disturbance detection system based on Sagnac/Mach-Zehnder interferometer and cross-correlation location 被引量:2
9
作者 方捻 李杰 +2 位作者 王陆唐 黄肇明 杨烨 《Journal of Shanghai University(English Edition)》 CAS 2011年第2期115-118,共4页
A distributed optical fiber disturbance detection system consisted of a Sagnac interferometer and a Mach-Zehnder interferometer is demonstrated. Two interferometers outputs are connected to an electric band-pass filte... A distributed optical fiber disturbance detection system consisted of a Sagnac interferometer and a Mach-Zehnder interferometer is demonstrated. Two interferometers outputs are connected to an electric band-pass filter via a detector respectively. The central frequencies of the two filters are selected adaptively according to the disturbance frequency. The disturbance frequency is obtained by either frequency spectrum of the two interferometers outputs. An alarm is given out only when the Sagnac interferometer output is changed. A disturbance position is determined by calculating a time difference with a cross-correlation method between the filter output connected to the Sagnac interferometer and derivative of the filter output connected to the Mach-Zehnder interferometer. The frequency spectrum, derivative and cross-correlation are obtained by a signal processing system. Theory analysis and simulation results are presented. They show that the system structure and location method are effective, accurate, and immune to environmental variations. 展开更多
关键词 Sagnac interferometer Mach-Zehnder interferometer distributed optical fiber disturbance detection system cross-correlation LOCATION
在线阅读 下载PDF
Highly sensitive optical fiber temperature sensor based on resonance in sidewall of liquid-filled silica capillary tube
10
作者 Min Li Biao Feng Jiwen Yin 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第11期156-160,共5页
A highly sensitive optical fiber temperature sensor based on a section of liquid-filled silica capillary tube(SCT)between single mode fibers is proposed. Two micro-holes are drilled on two sides of SCT directly by usi... A highly sensitive optical fiber temperature sensor based on a section of liquid-filled silica capillary tube(SCT)between single mode fibers is proposed. Two micro-holes are drilled on two sides of SCT directly by using femtosecond laser micromachining, and liquid polymer is filled into the SCT through the micro-holes without any air bubbles and then sealed by using ultra-violet(UV) cure adhesive. The sidewall of the SCT forms a Fabry–Perot resonator, and loss peaks are achieved in the transmission spectrum of the SCT at the resonant wavelength. The resonance condition can be influenced by the refractive index variation of the liquid polymer filled in SCT, which is sensitive to temperature due to its high thermooptical coefficient(-2.98 × 10^-4℃^-1). The experimental result shows that the temperature sensitivity of the proposed fiber structure reaches 5.09 nm/℃ with a perfect linearity of 99.8%. In addition, it exhibits good repeatability and reliability in temperature sensing application. 展开更多
关键词 optical fiber sensors LIQUID FILLING temperature measurement
原文传递
Novel Fiber Optic Temperature Sensor with Full Compensation Based on Optical Absorption
11
作者 WANGJue WANGWei-min 《Semiconductor Photonics and Technology》 CAS 2000年第4期236-241,共6页
A novel system configuration of fiber optic sensor based on optical abso rption is proposed. Several compensation measures are discussed. A simulated exp eriment is designed and the output curve of system is given. Th... A novel system configuration of fiber optic sensor based on optical abso rption is proposed. Several compensation measures are discussed. A simulated exp eriment is designed and the output curve of system is given. The experiment al result shows that these compensation measures are effective on dynamic distu rbances which are caused by background light and optical fiber bend. In addition , the drifts in the light source intensity, fiber losses, and photodetector effi ciency are also compensated. 展开更多
关键词 GaAs semiconductor temperature measurement fiber optic sensor REFLECTION COMPENSATION
在线阅读 下载PDF
DISTRIBUTED MICROBEND FIBER-OPTIC STRAIN SENSOR
12
作者 孟爱东 骆飞 袁慎芳 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI 2000年第2期224-227,共4页
The distributed strain sensor has significant application in real time measurement of strain status for large and important engineering structures such as aircraft, bridge and dam. In this paper, a quasi distributed... The distributed strain sensor has significant application in real time measurement of strain status for large and important engineering structures such as aircraft, bridge and dam. In this paper, a quasi distributed optical fiber strain sensor system is set up using optical time domain reflect technique. The local strain sensors based on a novel microbend configuration are designed and applied to measure local strains along the optical fiber. As the result of the experimental research, the microbend sensors show high sensitivity, good linearity and repeatability in certain operation range. 展开更多
关键词 strain measurement strain sensor optical fiber sensor distributed micro bend
在线阅读 下载PDF
Temperature measurement based on radialization power for micro-hotplate 被引量:1
13
作者 张彤 漆奇 +3 位作者 刘奎学 刘丽 张蕾 徐宝琨 《中国有色金属学会会刊:英文版》 CSCD 2006年第B02期780-784,共5页
A novel method to measure the temperature on the surface of micro-hotplate was presented. The tiny fiber probe and the optical power meter were employed to measure the sample radialization power. By means of comparing... A novel method to measure the temperature on the surface of micro-hotplate was presented. The tiny fiber probe and the optical power meter were employed to measure the sample radialization power. By means of comparing the relationship between the radialization power and the temperature, sample surface temperature can be discerned accurately. Such an approach has provided more accuracy than traditional temperature measurements. The experimental result based on this method is quite similar to that of simulation by the finite element analysis (FEA) software of Ansys in theory. This measurement is very useful for measuring temperature for these micro samples prone to be untouchable. 展开更多
关键词 气体传感器 微型热盘 辐射功率 温度测量 热分布
在线阅读 下载PDF
Technology of fiber-optic temperature sensing and its application in & temperature measuring of gob area
14
作者 LIU Jing-wen HUANG Li-ming 《Journal of Coal Science & Engineering(China)》 2011年第2期171-175,共5页
Based on advantages of technology of distributive fiber-optic temperature sensing and specific to its applications in monitoring mine conflagration, the corresponding Processes such as connection arrangement, signal t... Based on advantages of technology of distributive fiber-optic temperature sensing and specific to its applications in monitoring mine conflagration, the corresponding Processes such as connection arrangement, signal transmission and monitoring were illustrated. As applied in Sitai Coal Mine of Datong Coal Mine Group Co., this method is effective and accurate and could provide reliable gist for monitoring spontaneous combustion in gob area of mines. 展开更多
关键词 distributive optical fiber gob area temperature sensing fire source detection
在线阅读 下载PDF
New Measuring Temperature Setup with Optical Probe
15
作者 HOU Peiguo, LIU Jianming(Yanshan University, Qinbuangdao 066004, CHN ) 《Semiconductor Photonics and Technology》 CAS 1997年第1期71-73,共3页
Abstract: A new setup of measuring temperature is developed, which the probe is a micro- power consumptive one with CMOS circuit and is driven by optical power. For transmitting the measured signal and optical power s... Abstract: A new setup of measuring temperature is developed, which the probe is a micro- power consumptive one with CMOS circuit and is driven by optical power. For transmitting the measured signal and optical power signal in a long distance, the fiber technology is applied in this setup. 展开更多
关键词 Micro - power Consumptive Probe optical fiber Transmission Sen-sors temperature measurement
在线阅读 下载PDF
Development and Construction of 345 kV Power-Optical Fiber Composite XLPE 2,500 mm2 with Prefabricated Joint
16
作者 Hyunghee Yoon Namyeol Paik +3 位作者 Koanseong Lee Soohwan Kim Jongok Oh Seunghyun Lee 《Journal of Energy and Power Engineering》 2012年第7期1138-1145,共8页
Due to the increasing demand of replacing large capacity overhead lines with underground cables in Korea, KEPCO (Korea Electric Power Corporation) and LS Cable (LS Cable & System) have developed 345 kV optical fi... Due to the increasing demand of replacing large capacity overhead lines with underground cables in Korea, KEPCO (Korea Electric Power Corporation) and LS Cable (LS Cable & System) have developed 345 kV optical fiber composite XLPE (cross-linked polyethylene) 2,500 mm2 cable system. This system has been installed in Cheongna district of Incheon city. KEPCO and LS Cable are also planning to build the cooling system in a tunnel in order to reduce the ambient temperature caused by currents. In this paper, the process of development, field installation, and final inspection test of the complete system will be described. 展开更多
关键词 Power cable UNDERGROUND TUNNEL large capacity cooling system distributed temperature prefabricated joint optical fiber.
在线阅读 下载PDF
Landslide Monitoring Based on High-Resolution Distributed Fiber Optic Stress Sensor
17
作者 Zhi-Yong Dai Yong Liu +3 位作者 Li-Xun Zhang Zhong-Hua Ou Ce Zhou Yong-Zhi Liu 《Journal of Electronic Science and Technology of China》 2008年第4期416-419,共4页
A landslide monitoring application is presented by using a high-resolution distributed fiber optic stress sensor. The sensor is used to monitor the intra-stress distribution and variations in landslide bodies, and can... A landslide monitoring application is presented by using a high-resolution distributed fiber optic stress sensor. The sensor is used to monitor the intra-stress distribution and variations in landslide bodies, and can be used for the early warning of the occurrence of the landslides. The principle of distributed fiber optic stress sensing and the intra-stress monitoring method for landslides are described in detail. By measuring the distributed polarization mode coupling in the polarization-maintaining fiber, the distributed fiber stress sensor with stress measuring range 0 to 15 MPa, spatial resolution 10 cm and measuring range 0.5 km, is designed. The warning system is also investigated experimentally in the field trial. 展开更多
关键词 distributed fiber optic stress sensor landslides warning monitoring system.
在线阅读 下载PDF
High-Precision Flow Rate Measurement Based on Distributed Optical Fiber Acoustic Sensing
18
作者 Keqing ZHANG Baoqiang YAN +4 位作者 Hao LI Junliang LIN Jie WU Zhijun YAN Qizhen SUN 《Photonic Sensors》 2025年第3期66-76,共11页
We have numerically and experimentally investigated the flow rate measurement of the pipeline based on the optical fiber.Employing the large eddy simulation(LES)model,we have quantitatively analyzed the pressure fluct... We have numerically and experimentally investigated the flow rate measurement of the pipeline based on the optical fiber.Employing the large eddy simulation(LES)model,we have quantitatively analyzed the pressure fluctuation of the pipe wall caused by the turbulent flow in the pipeline.The simulation results have shown that the standard deviation of pressure fluctuation was quadratic with the flow rate.We have verified the theoretical model by using a distributed optical fiber acoustic sensing(DAS)system in the flow rate range from 0.61 m/s to 2.42 m/s.The experimental results were consistent with the simulation results very well.Furthermore,to improve the measuring error at the low flow rate,we have employed the composite adaptive denoising algorithm to eliminate the background noise and system noise.The final results have shown that the minimum goodness of fit was improved from 0.962 to 0.997,and the variation of the quadratic coefficient significantly decreased by 93.25%.The measured flow rate difference was only 0.84%between different sensing points in repeated experiments. 展开更多
关键词 distributed optic fiber sensing flow rate measurement large eddy simulation adaptive denoising algorithm
原文传递
面向地下管廊温度监测的分布式光纤传感技术
19
作者 王洪辉 刘仝 +1 位作者 王翔 吴维 《城市道桥与防洪》 2026年第1期39-43,共5页
为了实现对城市地下综合管廊全域温度精准、高效、低成本的在线监测,解决分布式光纤温度传感(RDTS,raman distributed temperature sensor)面临的信噪比低、空间分辨率有限、小尺度异常不敏感、数据存储成本高及无法二维监测等技术瓶颈... 为了实现对城市地下综合管廊全域温度精准、高效、低成本的在线监测,解决分布式光纤温度传感(RDTS,raman distributed temperature sensor)面临的信噪比低、空间分辨率有限、小尺度异常不敏感、数据存储成本高及无法二维监测等技术瓶颈。本文提出一套RDTS性能提升方法:包括采用GraphSAGE图神经网络的信号降噪方法;结合全变差反卷积与全连接神经网络的空间分辨率提升方法;利用注意力机制与K-Means聚类检测的小尺度异常检测方法;通过隐式神经表示的数据压缩方法;最终基于处理后的一维温度信号,通过特殊布线策略的二维温度场构建方法。该套方法能有效提升RDTS在测量精度、异常检测灵敏度和覆盖维度上的性能,为管廊全域温度监测提供了高准确度、小尺度、低成本的解决方案。 展开更多
关键词 城市地下综合管廊 分布式光纤测温 信号降噪 空间分辨率 异常检测 数据压缩 二维温度场
在线阅读 下载PDF
基于多种诊断方法的氮与氩氮混合等离子体中性气体温度
20
作者 安彦霖 赵明亮 +2 位作者 罗倩 高飞 王友年 《物理学报》 北大核心 2026年第1期303-315,共13页
低温感应耦合射频等离子体作为半导体制造中的关键等离子体源,其中性气体温度通过调控化学反应动力学、活性自由基分布以及等离子体-表面相互作用,对高质量芯片制造工艺具有重要影响.本文通过光谱法、布拉格光栅和光纤传感测温等3种测... 低温感应耦合射频等离子体作为半导体制造中的关键等离子体源,其中性气体温度通过调控化学反应动力学、活性自由基分布以及等离子体-表面相互作用,对高质量芯片制造工艺具有重要影响.本文通过光谱法、布拉格光栅和光纤传感测温等3种测温手段,系统研究了氮气以及氮氩混合等离子体在不同射频功率、气体压力和气体组分条件下中性气体温度(T_(g))的变化规律.另外,还结合朗缪尔探针测量的电子密度、电子温度、电子能量概率函数以及整体模型模拟,分析了中性气体加热的物理机制.结果表明,当射频功率增大时,耦合到等离子体的能量增大,电离反应增强,电子-中性粒子之间的碰撞过程和能量传递增大,使T_(g)呈单调递增趋势.而当气压升高初期,电子密度和背景气体密度增大共同提升了加热效率, T_(g)快速上升,但在气压超过3 Pa后,电子平均自由程缩短,电子密度下降,而背景气体密度持续增大,因而导致T_(g)增大变缓.在氮/氩混合体系放电中,氩气比例增大显著提高了T_(g)的上升速率,这是由于随着氩气比例增大,高能电子比例和电子密度上升,增强了电离和中性气体加热,同时氩亚稳态原子通过彭宁电离提高了氮激发态粒子密度,并促使氮分子向高能级激发,进一步加热气体.此外,研究发现纯氮等离子体的径向温度分布在轴向高度增大时呈现由抛物线形向马鞍形的转变,这是因为离线圈越近,受到电磁场的影响电子碰撞激发反应越强.研究还发现了径向边缘处的T_(g)随气压的升高几乎不发生变化,这是由于当气压不断升高时,线圈下方的电子很难运动到径向边缘处与中性粒子发生碰撞,从而限制了边缘中性粒子的加热. 展开更多
关键词 中性气体温度 感应耦合等离子体 光纤传感测温 径向分布
在线阅读 下载PDF
上一页 1 2 73 下一页 到第
使用帮助 返回顶部