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Sawing Performance Comparison of Brazed and Sintered Diamond Wires 被引量:4
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作者 HUANG Guoqin XU Xipeng 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2013年第2期393-399,共7页
Great attention has been paid on fabricating diamond wire by using the brazing diamond because of its strong chemical bonding strength and controllability of grits distribution. Although several serving performances o... Great attention has been paid on fabricating diamond wire by using the brazing diamond because of its strong chemical bonding strength and controllability of grits distribution. Although several serving performances of brazed diamond wire have been reported, seldom do these studies refer to its process characteristics. Sawing performances of a brazed diamond wire are investigated and compared with those of a sintered diamond wire on a wire saw machine. The surface topographies of beads selected from the two wires are micro observed before sawing. The sawing tests are carried out in constant feed rate feeding(CFF) and constant normal force feeding(CNFF). In CFF test, sawing force, power, and the cut depths of positions on contact curve are measured. Then, coupled with the observations of beads topographies, sawing force and its ratio, relations of power against material removal rate, and contact curve linearity are compared and discussed. In CNFF test, the sawing rates of the two wires are investigated. The results indicate that the brazed wire performs with lower sawing force(less 16% of tangential force and 28% of normal force), more energy efficiency(nearly one-fifth of sawing power is saved), at a higher sawing rate (the rate is doubled) and with better contact curve linearity as compared with the sintered wire. This proposed research experimentally evaluates the sawing performances of brazed diamond wire from the aspect of process parameters, which can provide a basis for popularizing the brazed diamond wire. 展开更多
关键词 diamond wire BRAZE SINTER sawing force power contact curve
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Research on Cutting Force of Ultrasonic Diamond Wire Saw 被引量:5
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作者 张辽远 李鑫 《Defence Technology(防务技术)》 SCIE EI CAS 2010年第2期114-118,共5页
Based on impulse and vibration machining theories,a mathematical model of cutting force for the electroplated diamond ultrasonic wire saw was established using superposition principle.The differences between the cutti... Based on impulse and vibration machining theories,a mathematical model of cutting force for the electroplated diamond ultrasonic wire saw was established using superposition principle.The differences between the cutting forces with and without ultrasonic effect were analyzed theoretically and experimentally.The results indicate that the cutting force of diamond wire increases along with the spindle speed decrease and the lateral pressure increase.The force in ultrasonic vibration cutting is about 20% to 30% less than that in conventional cutting.Also,the cutting trajectory of single diamond grit in sawing process is simulated,and the reason that the ultrasonic vibration can reduce the cutting force is explained further. 展开更多
关键词 machinofature technique and equipment mechanics manufacturing process hard and brittle material electroplated diamond wire saw ultrasonic machining
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Research on Cutting Trajectory of Electroplated Diamond Wire Saw
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作者 张辽远 王超 +1 位作者 王建光 杨勇 《Defence Technology(防务技术)》 CAS 2012年第2期124-128,共5页
The cutting process of electroplated diamond wire saw was researched on the basis of impulse and vibration machining theories. The different contact states in the cutting process were analyzed by using the finite elem... The cutting process of electroplated diamond wire saw was researched on the basis of impulse and vibration machining theories. The different contact states in the cutting process were analyzed by using the finite element method. It shows that the cutting stress is uniformly distributed along the direction of the workpiece width in the steady state. A mathematical equation of sawing trajectory was established by using the superposition principle and the cutting experiment of wire saw to calculate the cutting trajectory. The comparison of the theoretical trajectory with the calculated one indicates that the error is less than 15%. The research results provide a theoretic basis for optimization of the saw's cutting process parameters. 展开更多
关键词 manufacturing technique and equipment electroplated diamond wire saw sawing trajectory stress analysis trajectory equation
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Cutting Characteristics of CFRP Boards Using Electroplated Diamond Wire Tools
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作者 Yu Zhang Yasuhiro Tani 《Journal of Mechanics Engineering and Automation》 2017年第7期335-340,共6页
CFRP (carbon fiber reinforced plastic), which is composed of carbon fibers in a resin matrix, is an extremely strong and light composite material that has found use in the aerospace and automotive industries. CFRP b... CFRP (carbon fiber reinforced plastic), which is composed of carbon fibers in a resin matrix, is an extremely strong and light composite material that has found use in the aerospace and automotive industries. CFRP boards are very difficult to machine using common machining processes. Various machining artifacts, such as burrs and delamination, occur frequently when machining CFRP. Adequate techniques for machining CFRP have not yet been established. Recently, electroplated diamond wire machining technology has found use in cutting hard, brittle materials such as silicon and sapphire. In this study, we used an electroplated diamond wire saw to cut a CFRP workpiece. We quantified the cutting forces imposed on the workpiece and observed the surface state of the workpiece after cutting. We demonstrated that an electroplated diamond wire tool is suitable for the high-quality machining of CFRP boards. 展开更多
关键词 CFRP diamond wire DEFLECTION cutting force cutting depth.
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Study on swarf when sawing granite with diamond wire 被引量:1
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作者 WU Hairong GUO Hua +1 位作者 ZHAO Ruyi HUANG Hui 《金刚石与磨料磨具工程》 CAS 北大核心 2018年第2期71-77,共7页
The diamond wire-sawing process was developed to cut granite in both quarries and block processing plants.In this paper,swarf was collected from different areas along the sawing arc when sawing three granites.The part... The diamond wire-sawing process was developed to cut granite in both quarries and block processing plants.In this paper,swarf was collected from different areas along the sawing arc when sawing three granites.The particle size distribution and the morphology of the swarf were investigated systematically,along with the swarf formation mechanism in sawing.Granite swarf formation was dominated by transgranular fractures based on the morphology of sawn granite chips and the analysis of sawn chip size.A long cutting arc increased the movement among the swarf,tool,and workpiece,thereby inducing a secondary fracture in the sawn chip. 展开更多
关键词 diamond wire SAWING GRANITE swarf
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Challenges in Processing Diamond Wire Cut and Black Silicon Wafers in Large-Scale Manufacturing of High Efficiency Solar Cells 被引量:2
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作者 Kishan Shetty Yudhbir Kaushal +2 位作者 Nagesh Chikkan D. S. Murthy Chandra Mauli Kumar 《Journal of Power and Energy Engineering》 2020年第2期65-77,共13页
Texturing of diamond wire cut wafers using a standard wafer etch process chemistry has always been a challenge in solar cell manufacturing industry. This is due to the change in surface morphology of diamond wire cut ... Texturing of diamond wire cut wafers using a standard wafer etch process chemistry has always been a challenge in solar cell manufacturing industry. This is due to the change in surface morphology of diamond wire cut wafers and the abundant presence of amorphous silicon content, which are introduced from wafer manufacturing industry during sawing of multi-crystalline wafers using ultra-thin diamond wires. The industry standard texturing process for multi-crystalline wafers cannot deliver a homogeneous etched silicon surface, thereby requiring an additive compound, which acts like a surfactant in the acidic etch bath to enhance the texturing quality on diamond wire cut wafers. Black silicon wafers on the other hand require completely a different process chemistry and are normally textured using a metal catalyst assisted etching technique or by plasma reactive ion etching technique. In this paper, various challenges associated with cell processing steps using diamond wire cut and black silicon wafers along with cell electrical results using each of these wafer types are discussed. 展开更多
关键词 diamond wire CUT BLACK SILICON Slurry Wafers Amorphous SILICON Additives Etching and TEXTURIZATION
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Experimental Study on the Machining Technology of ZrO_2 Ceramics Using Diamond Wire Saw with Ultrasonic Vibration 被引量:1
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作者 张辽远 吕玉山 +2 位作者 李红 张莹 李玉潮 《Defence Technology(防务技术)》 SCIE EI CAS 2007年第2期151-155,共5页
The influence of different technological parameter on material remove rate and surface quality of ZrO2 ceramics is studied using the cutting machining method of electroplate diamond wire saw with ultrasonic vibration.... The influence of different technological parameter on material remove rate and surface quality of ZrO2 ceramics is studied using the cutting machining method of electroplate diamond wire saw with ultrasonic vibration.Experimental results show that,compared with the same experiment condition without ultrasonic vibration,this cutting method has the advantages of high material remove rate,good surface quality,little brokenness and so on. 展开更多
关键词 制造工程 硬度 脆性 机械加工 超声波
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高强钢丝编织菱形网的静压试验和理论分析
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作者 黄祺临 汪敏 +1 位作者 蒋伟 周帅 《工程力学》 北大核心 2026年第2期248-259,共12页
为了解高强钢丝编织的菱形网在垂直面内荷载作用下的力学性能,充分发挥其在锚杆支护金属网系统中的作用,设计了四周约束条件下菱形网垂直面内静压试验的加载方案,开展了不同厚度和内切圆直径的菱形网静压试验,结果表明:菱形网在静压荷... 为了解高强钢丝编织的菱形网在垂直面内荷载作用下的力学性能,充分发挥其在锚杆支护金属网系统中的作用,设计了四周约束条件下菱形网垂直面内静压试验的加载方案,开展了不同厚度和内切圆直径的菱形网静压试验,结果表明:菱形网在静压荷载作用下面内两个方向的变形均较为均匀;菱形网厚度对其竖向承载力、刚度等有影响,厚度越小,竖向极限荷载越大,近似线性段刚度越大;菱形网内切圆直径减小,菱形网的竖向极限荷载和近似线性段刚度均增大。结合试验现象和菱形网侧限面内拉伸力学性能的均质化简化方法,推导了菱形网静压荷载的理论计算公式,依据理论计算公式和计算流程图可以较好的预测菱形网在不同区域静压荷载作用下竖向荷载-位移之间的关系,给锚杆支护金属网系统中高强钢丝编织菱形网的工程应用提供参考依据。 展开更多
关键词 高强钢丝 锚杆支护 菱形网 静压试验 理论分析
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Polycrystalline diamond mini-cubes for sawing applications 被引量:1
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作者 Sung James C. Chang Kuen-liang +2 位作者 Tso Pei-lum Hsu Kai-hung Sung Michael 《金刚石与磨料磨具工程》 CAS 北大核心 2008年第S1期83-87,共5页
Diamond grits are indispensable for sawing granite or concrete.Each year about 1 000 tons of diamond grits are consumed for such purposes.In all cases,mono crystalline diamond is used.However, polycrystalline grits(po... Diamond grits are indispensable for sawing granite or concrete.Each year about 1 000 tons of diamond grits are consumed for such purposes.In all cases,mono crystalline diamond is used.However, polycrystalline grits(polygrits) are generally better performed than mono grits as abrasives.For example,poly grits of cubic boron nitride(e.g.Borazon(?) CBN-550 of Diamond Innovations) can cut faster and they last longer than mono grits(e.g.Borazon(?) CBN-500). Polygrits of alumina(e.g.Cubitron(?) of 3M) also out perform by far glassy grits(e.g.white alumina).For diamond superabrasives,micron polygrits formed by shock waves may polish as fast as mono grits of the same size,but without causing as much scratches due to the presence of smaller sintered grains.The improved performance of poly grits is attributed to their ability to micro chipping that renews the sharp cutting corners from time to time.By contrast,mono grits tend to round off at low cutting force or macro fracture at high cutting force,so they may lose the cutting ability rapidly. For sawing granite with mesh sizes 40/50 or coarser,poly grits of diamond have not been available until recently.In this research,we have made polygrits in mini cube with sizes of 18/20,20/25,and 30/40.Turbo grinders and wire saws were made by brazing both mono grits and polygrits on steel substrates.Cutting performance on granite demonstrated that grinding speed was faster with turbo grinder,and the surface finish was smoother with wire saw for poly grits than mono ones. Polygrits and mono grits of diamond were mixed for comparison(upper left).Polygrits of mini cubes were brazed on the pearl of a wire saw(upper right).Mono diamond grits were brazed on a turbo grinder(bottom diagrams ). 展开更多
关键词 GRANITE SAWING diamond grits polygrits TURBO GRINDER wire saw
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反应烧结碳化硅超声线锯切割试验研究
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作者 宋洪侠 曾国伟 +3 位作者 晁胜豪 郭晓光 董志刚 王毅丹 《机械强度》 北大核心 2025年第9期164-173,共10页
反应烧结碳化硅(Reaction Bonded Silicon Carbide, RB-SiC)因其优异的热稳定性、耐辐射性以及化学惰性,被广泛应用于核能和光学领域核心构件的制造。但是,RB-SiC材料具有硬度高、脆性大等特点,传统加工方法难以保证其加工质量和效率。... 反应烧结碳化硅(Reaction Bonded Silicon Carbide, RB-SiC)因其优异的热稳定性、耐辐射性以及化学惰性,被广泛应用于核能和光学领域核心构件的制造。但是,RB-SiC材料具有硬度高、脆性大等特点,传统加工方法难以保证其加工质量和效率。超声金刚石线锯切割(锯切)技术作为硬脆材料的高效加工方法,已在单晶Si、单晶SiC等硬脆材料的加工中成功应用。然而,该技术在RB-SiC材料的切削试验和工艺的研究还有待开展。为此,首次开展了RB-SiC的超声锯切试验研究,搭建了超声锯切RB-SiC平台,对比分析了平行与垂直超声振动方向的加工表面质量,研究了超声振幅、线速度、进给速度参数对表面粗糙度及表面微观形貌的影响规律。试验结果表明,超声锯切在提高表面质量等方面具有显著优势。随着振幅由3μm提高到7μm,表面粗糙度值降低了17.4%,表面划痕和凹坑数量随之减少;相较于垂直进给方向,平行进给方向的超声锯切更能有效提高RB-SiC材料的表面质量。本研究可为RB-SiC材料超声锯切工艺研究提供指导。 展开更多
关键词 超声锯切 反应烧结碳化硅 金刚石线锯 超声振动 表面质量
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金刚石线切割单晶硅制绒研究进展 被引量:1
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作者 黄虎一雄 李杰 +1 位作者 章金兵 王旭生 《电源技术》 北大核心 2025年第1期92-98,共7页
对常用的几种单晶硅片制绒技术,如添加剂辅助碱液刻蚀制绒工艺、酸液刻蚀制绒工艺、金属离子催化的化学制绒以及表面预处理(热处理、机械抛光和电化学预处理)叠加碱液刻蚀制绒工艺等进行了介绍。并对不同工艺的制绒原理、技术特点和应... 对常用的几种单晶硅片制绒技术,如添加剂辅助碱液刻蚀制绒工艺、酸液刻蚀制绒工艺、金属离子催化的化学制绒以及表面预处理(热处理、机械抛光和电化学预处理)叠加碱液刻蚀制绒工艺等进行了介绍。并对不同工艺的制绒原理、技术特点和应用情况等进行了对比分析,认为添加剂辅助碱液刻蚀制绒工艺应用较多;热处理叠加碱液刻蚀制绒工艺相较于其他制绒工艺,可减少溶液消耗、硅料消耗和简化工艺处理步骤等,可实现降低晶体硅太阳电池制造成本及硅片薄片化的目的。 展开更多
关键词 金刚石线切割 单晶硅片 制绒工艺 热处理
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电镀金刚石线锯用螺旋镀液流和旋转磁场装置的设计与分析 被引量:1
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作者 黄炜 贺艳明 +4 位作者 徐金宝 宋振亚 黄翔 孙昱蒙 余锡孟 《金刚石与磨料磨具工程》 北大核心 2025年第2期224-235,共12页
电镀金刚石线锯表面易存在金刚石磨粒团聚和分布密度波动大等缺陷,在探讨其成因及后果的基础上,设计螺旋镀液流和旋转磁场组合装置,制备电镀金刚石线锯。结果表明:螺旋镀液流和旋转磁场组合装置可显著减少金刚石磨粒的团聚现象,同时控... 电镀金刚石线锯表面易存在金刚石磨粒团聚和分布密度波动大等缺陷,在探讨其成因及后果的基础上,设计螺旋镀液流和旋转磁场组合装置,制备电镀金刚石线锯。结果表明:螺旋镀液流和旋转磁场组合装置可显著减少金刚石磨粒的团聚现象,同时控制金刚石磨粒的分布密度波动范围在11颗/mm以内,使金刚石磨粒沿基线分布得更均匀。结合组合装置的基本参数,其制取电镀金刚石线锯的最佳工艺参数是螺旋叶片数为5片,螺旋角为60°,混合液流量为4.8 L/min,固持架数量为16件,永磁体交错布置角度为60°,磁场旋转速度为60 r/min,永磁体及其磁场特性代号为N38M,且在最佳参数下生产的电镀金刚石线锯适合用于硅晶片等高硬脆材料的切割。 展开更多
关键词 电镀金刚石线锯 磨粒团聚 磨粒分布密度 螺旋镀液流 旋转磁场
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回收利用光伏产业中金刚线切割废料的研究进展
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作者 胡玉龙 孙玥 +3 位作者 赵蕾 方喆禹 金星 冉松林 《材料科学与工艺》 北大核心 2025年第4期81-96,共16页
在“双碳”大背景下,光伏产业成为了国家重点发展行业。但是在利用金刚线切割技术生产太阳能电池的核心原料--晶硅片时,会产生大量的切割废料,即金刚线切割废料。金刚线切割废料是一种富含纯硅的亚微米级薄片状物质,如果不加以利用,会... 在“双碳”大背景下,光伏产业成为了国家重点发展行业。但是在利用金刚线切割技术生产太阳能电池的核心原料--晶硅片时,会产生大量的切割废料,即金刚线切割废料。金刚线切割废料是一种富含纯硅的亚微米级薄片状物质,如果不加以利用,会造成环境污染和资源浪费,因此该废料的回收利用成为当下研究的热点。目前,金刚线切割废料的回收利用方式主要为制备纯硅、陶瓷材料、电极材料和硅基合金。除此之外,还有利用金刚线切割废料制备析氢产氢材料、吸附剂材料、金属捕收剂等回收方式。本综述首先阐述了金刚线切割废料的物化特性,然后对其回收利用的研究展开了详细介绍,最后对其回收利用的技术做出了总结和展望,为光伏产业中金刚线切割废料的回收利用提供了一定的参考和启示。 展开更多
关键词 金刚线切割废料 纯硅 陶瓷 电极材料 硅基合金
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硅片切割废料再生制备高纯硅研究进展
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作者 韩士锋 杨时聪 +1 位作者 魏奎先 马文会 《中南大学学报(自然科学版)》 北大核心 2025年第8期3422-3439,共18页
在金刚石线切割工艺生产硅片的过程中,约30%的6N级高纯硅以硅片切割废料的形式损失,导致出现高纯硅资源浪费、成本升高、经济损失以及环境污染问题。硅片切割废料具有高纯硅含量高和金属杂质含量低的特点,因此,再生制备高纯硅具有经济... 在金刚石线切割工艺生产硅片的过程中,约30%的6N级高纯硅以硅片切割废料的形式损失,导致出现高纯硅资源浪费、成本升高、经济损失以及环境污染问题。硅片切割废料具有高纯硅含量高和金属杂质含量低的特点,因此,再生制备高纯硅具有经济和技术优势,如何使硅片切割废料再生已成为研究热点。本文系统综述了硅片切割废料的形成机制与物理化学特性,总结了硅片切割废料用于再生制备高纯硅的研究进展,阐述了湿法浸出、火法精炼及联合工艺的优缺点,并对硅片切割废料提纯未来发展趋势进行了展望。 展开更多
关键词 硅片切割废料 高纯硅 硅资源利用 硅提纯
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基于金刚石绳锯切割技术在老旧桥梁拆除工程中应用的研究 被引量:4
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作者 王宇 《科学技术创新》 2025年第4期115-118,共4页
随着城市化进程的加快和交通需求的日益增长,老旧桥梁的拆除与重建成为提升道路通行能力和安全性的重要举措。金刚石绳锯切割技术因其施工快速、便捷、经济、环保且无需爆破等特点,在老旧桥梁拆除工程中得到了广泛应用。本文基于石家庄... 随着城市化进程的加快和交通需求的日益增长,老旧桥梁的拆除与重建成为提升道路通行能力和安全性的重要举措。金刚石绳锯切割技术因其施工快速、便捷、经济、环保且无需爆破等特点,在老旧桥梁拆除工程中得到了广泛应用。本文基于石家庄市北三环老旧桥梁拆除及重建项目,重点探讨了金刚石绳锯切割技术在该领域的应用及其优势,通过案例分析展示了其施工流程、技术要点及安全控制措施,为类似工程提供了参考。 展开更多
关键词 金刚石绳锯 切割技术 老旧桥梁拆除 地基承载力
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微整形磨粒电镀金刚石线锯切片表面质量分析
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作者 赵桂丽 葛梦然 +3 位作者 刘尧 姜鹏程 刘志东 吕志杰 《机电工程技术》 2025年第4期90-94,176,共6页
为探究微整形磨粒电镀金刚石线锯在加工单晶硅时对切片表面质量的影响,研究走丝速度与进给速度对切片表面质量的影响规律。采用往复式金刚石线切割机对单晶硅进行了锯切试验,切片完成后,使用表面粗糙度仪对切片表面进行粗糙度测量,利用... 为探究微整形磨粒电镀金刚石线锯在加工单晶硅时对切片表面质量的影响,研究走丝速度与进给速度对切片表面质量的影响规律。采用往复式金刚石线切割机对单晶硅进行了锯切试验,切片完成后,使用表面粗糙度仪对切片表面进行粗糙度测量,利用扫描电镜观测切片表面的形貌及线锯的磨损情况。试验结果表明:采用微整形磨粒电镀金刚石线锯加工获得的切片表面沿走丝方向的粗糙度低于沿进给方向的粗糙度。走丝速度与进给速度的变化对硅片沿进给方向的表面粗糙度影响显著,而沿走丝方向的粗糙度变化较小。当走丝速度从6 m/s提高至8 m/s和13 m/s时,沿进给方向的表面粗糙度分别下降30.4%和30.5%;当进给速度从2μm/s减小至1μm/s和0.6μm/s时,沿进给方向的表面粗糙度分别下降18.4%和45.5%。随着走丝速度的增加与进给速度的减小,硅片表面的脆性破碎凹坑减少,而塑性剪切沟槽增多,表面形貌得到改善。微整形磨粒电镀金刚石线锯加工过程中,材料去除方式为塑性去除和脆性去除两种模式共存。线锯的磨损主要表现为磨粒磨损,磨粒变平变钝,少量磨粒出现脱落和破碎现象。 展开更多
关键词 微整形磨粒 电镀金刚石线锯 单晶硅 表面质量
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超长超细钨丝基线电镀金刚石线锯制备工艺的研究 被引量:1
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作者 敖国峰 黄翔 +2 位作者 童珈珈 陈睿 徐金宝 《世界有色金属》 2025年第16期52-55,共4页
高硬脆、高价值材料常用金刚石电镀线锯锯切,现有产品以高碳钢为基线,极限线径φ42~60μm,受材料和工艺限制存在损耗大等问题。钨丝可拉拔至φ22μm超细线径,适合作基线。针对传统埋砂法电镀线锯的镍瘤、金刚石分布波动及团聚缺陷,本文... 高硬脆、高价值材料常用金刚石电镀线锯锯切,现有产品以高碳钢为基线,极限线径φ42~60μm,受材料和工艺限制存在损耗大等问题。钨丝可拉拔至φ22μm超细线径,适合作基线。针对传统埋砂法电镀线锯的镍瘤、金刚石分布波动及团聚缺陷,本文改进工艺消除前两类缺陷,并研究发现N38M永磁体搭配70~80r·min-1旋转磁场可改善团聚,提升磨粒结合与出刃效果。对比显示,新工艺锯切材料损耗仅为常规的40.9%,出片率提升12.7%以上,效率更优。 展开更多
关键词 金刚石线锯 超长超细钨丝基线 存在缺陷 分析与工艺改进
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镍及镍合金基电镀金刚石线用镀液的研究进展
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作者 张蓉 朱董傲 +7 位作者 樊鹏鹏 徐丽仙 陈佳露 吴纪清 王艺澄 蒋伟 李华明 许晖 《电镀与涂饰》 北大核心 2025年第11期27-33,共7页
[目的]电镀金刚石线是硅片切割等精密加工领域的重要工具,其性能与电镀液组分对金刚石附着力和镀层均匀性的影响密切关联。[方法]综述了氯化物、硫酸盐及氨基磺酸盐三类电镀液体系在镍及镍合金基电镀金刚石线中的研究进展。[结果]优化... [目的]电镀金刚石线是硅片切割等精密加工领域的重要工具,其性能与电镀液组分对金刚石附着力和镀层均匀性的影响密切关联。[方法]综述了氯化物、硫酸盐及氨基磺酸盐三类电镀液体系在镍及镍合金基电镀金刚石线中的研究进展。[结果]优化电镀液组分可促进金刚石颗粒的定向附着,提高镀层均匀性和致密性,从而显著提升金刚石线的切割效率与精度。[结论]未来研究应聚焦环保型镀液开发、成本降低及电镀效率提升,以满足高效精密加工的需求。 展开更多
关键词 电镀金刚石线 电镀液 镍及镍合金 氯化物 硫酸盐 氨基磺酸盐 综述
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基于半导体硅片加工的金刚线切片机技术研究
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作者 刘秀坤 《电子工业专用设备》 2025年第1期7-12,54,共7页
论述了半导体硅片加工机床的现状与发展趋势,研究了金刚线切割半导体的必要性。通过金刚线切割硅片的原理以及切割技术参数,分析了金刚线切片机的关键技术和难点技术,设计出了适用于半导体硅片加工的金刚线切片机。实践证明,采用金刚线... 论述了半导体硅片加工机床的现状与发展趋势,研究了金刚线切割半导体的必要性。通过金刚线切割硅片的原理以及切割技术参数,分析了金刚线切片机的关键技术和难点技术,设计出了适用于半导体硅片加工的金刚线切片机。实践证明,采用金刚线切片机加工半导体硅片满足精度需要,提高了加工效率,降低了使用成本。 展开更多
关键词 金刚线 切片机 张力控制 切割辊 同步控制
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